TW201634938A - Electronic component transport device and electronic component inspection device - Google Patents

Abstract

Provided are an electronic component transport device and an electronic component inspection device for which inflow of outside air can be suppressed as much as possible when work is performed on the inside of the devices. The electronic component transport device is provided with a first opening/closing part 4 that can open and close; a first turning support part that turnably supports the first opening/closing part 4; a second opening/closing part 5 that is openably/closably provided to the first opening/closing part 4; and a second turning support part 52 that turnably supports the second opening/closing part 5. A detection unit 77 that can sense the opening and closing of the second opening/closing part 5 is disposed on the electronic component transport device.

Description

Electronic component conveying device and electronic component inspection device

The present invention relates to an electronic component conveying device and an electronic component inspection device.

Since the prior art, an electronic component inspection apparatus for inspecting electrical characteristics of an electronic component such as an IC (integrated circuit) component has been known, and in the electronic component inspection apparatus, assembly is performed to transport an IC component. The electronic component transport device to the holding portion of the inspection unit. When the IC device is inspected, the IC device is placed in the holding portion, and a plurality of probe pins provided in the holding portion are brought into contact with the respective terminals of the IC device.

At the time of inspection of such an IC element, there is a case where the IC element is cooled to a specific temperature. In this case, it is necessary to cover the inspection area of the inspection IC component with a cover to seal it.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2000-35458

However, in Patent Document 1, when the IC device in the inspection region after the sealing is released, for example, when the barrier is released, the cover may be opened to a required degree or more, and condensation may occur in the IC device or the like. The problem of high sex.

An object of the present invention is to provide an electronic component conveying apparatus and an electronic body capable of suppressing the inflow of external air into the apparatus as much as possible when performing work inside the apparatus. Parts inspection device.

This object is achieved by the following application examples of the present invention.

[Application Example 1] The electronic component conveying apparatus according to the application example of the present invention includes: a first opening and closing portion that is openable and closable; and a second opening and closing portion that is openable and closable in the first opening and closing portion; and the electronic component conveyance The device is provided with a sensor capable of sensing opening and closing of the second opening and closing unit.

Thereby, when performing work on the inside of the apparatus, the worker can obtain information (the opening and closing of the second opening and closing unit) sensed by the sensor. In this case, the operator can attempt to set the second opening and closing portion in the open state as close as possible to the closed state, thereby suppressing the inflow of the outside air into the device as much as possible.

[Application Example 2] In the electronic component conveying device of the application example, it is preferable that the electronic component conveying device includes a support portion that supports the second opening and closing portion to be opened and closed, and the support portion is configured by a hinge.

Thereby, the smooth opening and closing of the second opening and closing unit can be performed.

[Application Example 3] In the electronic component conveying device of the application example, it is preferable that the first opening and closing portion is provided with an intrusion sensor that senses intrusion.

In this way, when an operator who performs work on the inside of the apparatus invades the second opening/closing unit in an open state, for example, the movement of the apparatus can be stopped.

[Application Example 4] In the electronic component conveying apparatus of the application example, it is preferable that the first opening/closing section or the second opening/closing section is provided to lock the second opening/closing section with respect to the first opening and closing section. Locking mechanism.

Thereby, it is possible to prevent an operator who performs work for the inside of the apparatus from erroneously turning the second opening/closing unit into an open state.

[Application Example 5] In the electronic component conveying apparatus of the application example, it is preferable that the first opening/closing unit has a first opening that is covered when the second opening/closing unit is closed, and the second opening/closing unit is configured to be capable of forming A convex structure that is inserted into the convex portion of the first opening.

Thereby, the airtightness between the first opening and closing portion and the second opening and closing portion in the closed state can be preferably maintained.

[Application Example 6] In the electronic component conveying apparatus of the application example, it is preferable that the second opening and closing portion is formed by joining two plate members having different sizes, and the smaller one of the two plate members The convex portion is formed.

Thereby, the airtightness between the first opening and closing portion and the second opening and closing portion in the closed state can be preferably maintained.

[Application Example 7] In the electronic component conveying apparatus of the application example, it is preferable that the first opening/closing unit has a first opening that is covered when the second opening/closing unit is closed, and the second opening/closing unit has a closing. The portion overlapping the first opening and closing portion.

Thereby, the airtightness between the first opening and closing portion and the second opening and closing portion in the closed state can be preferably maintained.

[Application Example 8] In the electronic component conveying device of the application example, it is preferable that an elastic film is disposed in the second opening and closing portion.

In this case, even if the device vibrates due to the operation of the device, the first opening/closing portion and the second opening/closing portion in the closed state are slightly separated from each other, and the gas between the first opening and closing portion and the second opening and closing portion can be maintained. The denseness makes it possible to suppress the inflow of the outside air into the apparatus.

[Application Example 9] In the electronic component conveying apparatus of the application example, it is preferable that the second opening/closing section has a plurality of different sizes, and any one of the plurality of second opening and closing sections can be selected.

Thereby, the second opening/closing portion can be selected based on the work content inside the device, thereby improving work efficiency.

[Application Example 10] In the electronic component conveying device of the application example, it is preferable that the second opening/closing portion casing is detachably provided around the second opening/closing portion.

Thereby, the degree of airtightness between the second opening and closing portion and the first opening and closing portion in the closed state can be increased as compared with the case where the casing for the second opening and closing portion is not used.

[Application Example 11] In the electronic component conveying apparatus of the application example, it is preferable that the second opening/closing part housing has a plurality of different sizes, and the plurality of second opening/closing parts can be selected from the plurality of second opening/closing parts. Any one.

Thereby, the degree of airtightness between the second opening and closing portion and the first opening and closing portion in the closed state can be adjusted.

[Application Example 12] In the electronic component conveying apparatus of the application example, the first opening/closing unit preferably has a first opening that is covered when the second opening/closing unit is closed, and the first opening has a first opening. A housing for the first opening for loading and unloading.

Thereby, the substantial size of the first opening can be made smaller than in the case where the first opening casing is not used, whereby the inflow of the outside air can be further suppressed as much as possible.

[Application Example 13] In the electronic component conveying apparatus of the application example, it is preferable that the first opening portion case has a plurality of sizes, and the plurality of first opening portions can be selected from the plurality of first opening portions. Any one.

Thereby, the degree of inflow of the outside air can be adjusted.

[Application Example 14] In the electronic component conveying apparatus of the application example, the first opening/closing unit preferably has a first opening that is covered when the second opening/closing unit is closed, and the first opening is circular. .

Thereby, the first opening is, for example, a shape that allows the operator's front arm to enter, thereby improving the workability in the work inside the apparatus.

[Application Example 15] In the electronic component conveying apparatus of the application example, it is preferable that a plurality of the second opening and closing portions are provided, and the plurality of second opening and closing portions are arranged in the horizontal direction.

By this means, for example, the worker can open the left hand with one of the second opening and closing portions, and open the right hand with the other of the second opening and closing portions, and insert the right hand, thereby improving the workability.

[Application Example 16] In the electronic component conveying device of the application example, it is preferable that the second opening/closing portion is opened toward the inside of the electronic component conveying device or opened toward the outside.

Thereby, for example, a tool for an operation inside the apparatus can be temporarily placed on the second opening/closing unit.

[Application Example 17] The electronic component inspection device according to the application example of the present invention includes: a first opening and closing portion that is openable and closable; a second opening and closing portion that is openable and closable in the first opening and closing portion; and an inspection portion that inspects An electronic component; and the electronic component inspection device is provided with a sensor capable of sensing opening and closing of the second opening and closing portion.

Thereby, when performing work on the inside of the apparatus, the worker can obtain information (the opening and closing of the second opening and closing unit) sensed by the sensor. In this case, the operator can attempt to set the second opening and closing portion in the open state as close as possible to the closed state, thereby suppressing the inflow of the outside air into the device as much as possible.

[Application Example 18] The electronic component transport apparatus according to the application example of the present invention includes: a first opening and closing portion that is openable and closable; and a second opening and closing portion that is openable and closable in the first opening and closing portion; At least one of the opening and closing portion and the second opening and closing portion is provided with a sealing portion that maintains airtightness in a closed state.

Thereby, the airtightness between the first opening and closing portion and the second opening and closing portion can be ensured by the sealing portion, whereby the inflow of the outside air into the device can be suppressed as much as possible.

[Application Example 19] The electronic component transport apparatus according to the application example of the present invention preferably includes a support portion that supports the second opening and closing portion to be opened and closed, and the support portion is configured by a hinge.

Thereby, the smooth opening and closing of the second opening and closing unit can be performed.

[Application Example 20] In the electronic component conveying apparatus of the application example, it is preferable that the first opening/closing section is provided with an intrusion sensor that senses intrusion.

In this way, when an operator who performs work on the inside of the apparatus invades the second opening/closing unit in an open state, for example, the movement of the apparatus can be stopped.

[Application Example 21] In the electronic component conveying apparatus of the application example, it is preferable that the first opening/closing section or the second opening/closing section is provided to lock the second opening and closing section with respect to the first opening and closing section. Locking mechanism.

Thereby, it is possible to prevent an operator who performs work for the inside of the apparatus from erroneously turning the second opening/closing unit into an open state.

[Application Example 22] In the electronic component conveying apparatus of the application example, the first opening/closing unit preferably has a first opening that is covered when the second opening/closing unit is closed, and the second opening/closing unit is configured to be capable of forming A convex structure that is inserted into the convex portion of the first opening.

Thereby, the airtightness between the first opening and closing portion and the second opening and closing portion in the closed state can be preferably maintained.

[Application Example 23] In the electronic component conveying apparatus of the application example, it is preferable that the second opening and closing portion is formed by joining two plate members having different sizes, and the smaller one of the two plate members The convex portion is formed.

Thereby, the airtightness between the first opening and closing portion and the second opening and closing portion in the closed state can be preferably maintained.

[Application Example 24] In the electronic component conveying device of the application example, the first opening/closing portion preferably has a first opening that is covered when the second opening/closing portion is closed, and the second opening and closing portion is closed. The portion overlapping the first opening and closing portion.

Thereby, the airtightness between the first opening and closing portion and the second opening and closing portion in the closed state can be preferably maintained.

[Application Example 25] In the electronic component conveying apparatus of the application example, it is preferable that an elastic film is disposed in the second opening and closing portion.

In this case, even if the device vibrates due to the operation of the device, the first opening and closing portion is slightly separated from the second opening and closing portion in the closed state, and the gas between the first opening and closing portion and the second opening and closing portion can be maintained. The denseness makes it possible to suppress the inflow of the outside air into the apparatus.

[Application Example 26] In the electronic component conveying apparatus of the application example, it is preferable that the second opening/closing section has a plurality of different sizes, and any one of the plurality of second opening and closing sections can be selected.

Thereby, the second opening and closing unit can be selected based on the work content for the inside of the device. This improves work efficiency.

[Application Example 27] In the electronic component conveying apparatus of the application example, it is preferable that the second opening/closing part housing is detachably provided around the second opening/closing section.

Thereby, the degree of airtightness between the second opening and closing portion and the first opening and closing portion in the closed state can be increased as compared with the case where the casing for the second opening and closing portion is not used.

[Application Example 28] In the electronic component conveying apparatus of the application example, it is preferable that the second opening/closing part housing has a plurality of different sizes, and the plurality of second opening/closing parts can be selected from the plurality of second opening/closing parts. Any one.

Thereby, the degree of airtightness between the second opening and closing portion and the first opening and closing portion in the closed state can be adjusted.

[Application Example 29] In the electronic component conveying apparatus of the application example, the first opening/closing unit preferably has a first opening that is covered when the second opening/closing unit is closed, and has a first opening in the first opening. A housing for the first opening for loading and unloading.

Thereby, the substantial size of the first opening can be made smaller than in the case where the first opening casing is not used, whereby the inflow of the outside air can be further suppressed as much as possible.

[Application Example 30] In the electronic component conveying apparatus of the application example, it is preferable that the first opening portion case has a plurality of sizes, and the plurality of first opening portions can be selected from the plurality of first opening portions. Any one.

Thereby, the degree of inflow of the outside air can be adjusted.

[Application Example 31] In the electronic component conveying apparatus of the application example, the first opening/closing unit preferably has a first opening that is covered when the second opening/closing unit is closed, and the first opening is circular. .

Thereby, the first opening is, for example, a shape that allows the operator's front arm to enter, thereby improving the workability in the work inside the apparatus.

[Application Example 32] In the electronic component conveying apparatus of the application example, it is preferable that a plurality of the second opening and closing portions are provided, and the plurality of second opening and closing portions are arranged in the horizontal direction.

By this means, for example, the worker can open the left hand with one of the second opening and closing portions, and open the right hand with the other of the second opening and closing portions, and insert the right hand, thereby improving the workability.

[Application Example 33] In the electronic component conveying device of the application example, it is preferable that the second opening/closing portion is opened toward the inside of the electronic component conveying device or opened toward the outside.

Thereby, for example, a tool for an operation inside the apparatus can be temporarily placed on the second opening/closing unit.

[Application Example 34] The electronic component inspection device according to the application example of the present invention includes: a first opening and closing portion that is openable and closable; a second opening and closing portion that is openable and closable in the first opening and closing portion; and an inspection portion that inspects In the electronic component, at least one of the first opening and closing portion and the second opening and closing portion is provided with a sealing portion that maintains airtightness in a closed state.

Thereby, the airtightness between the first opening and closing portion and the second opening and closing portion can be ensured by the sealing portion, thereby suppressing the inflow of the outside air into the device as much as possible.

[Application Example 35] The electronic component conveying apparatus according to the application example of the present invention includes: a first opening and closing portion that is openable and closable; and a second opening and closing portion that is openable and closable in the first opening and closing portion; and the second opening and closing portion The portion can be maintained in an open state with respect to the first opening and closing portion.

In this way, when the operation of the inside of the apparatus is performed, the open state of the second opening and closing unit can be maintained as small as possible, and the work can be performed as much as possible, whereby the inflow of the outside air can be suppressed as much as possible.

[Application Example 36] In the electronic component conveying apparatus of the application example, it is preferable that the second opening/closing unit can maintain the standing state rising with respect to the first opening and closing unit in the open state.

Thereby, for example, a tool for work or the like can be temporarily placed on the second opening and closing portion in the standing state.

[Application Example 37] In the electronic component conveying apparatus of the application example, it is preferable that the electronic component conveying apparatus includes a support portion that supports the second opening and closing portion to be opened and closed, and the support portion is configured by a hinge.

Thereby, the smooth opening and closing of the second opening and closing unit can be performed.

[Application Example 38] In the electronic component conveying apparatus of the application example, it is preferable that the first opening/closing section is provided with an intrusion sensor that senses intrusion.

In this way, when an operator who performs work on the inside of the apparatus invades the second opening/closing unit in an open state, for example, the movement of the apparatus can be stopped.

[Application Example 39] In the electronic component conveying apparatus of the application example, it is preferable that the first opening/closing section or the second opening/closing section is provided to lock the second opening and closing section with respect to the first opening and closing section. Locking mechanism.

Thereby, it is possible to prevent an operator who performs work for the inside of the apparatus from erroneously turning the second opening/closing unit into an open state.

[Application Example 40] In the electronic component conveying apparatus of the application example, it is preferable that the first opening/closing unit has a first opening that is covered when the second opening/closing unit is closed, and the second opening/closing unit is configured to be capable of forming A convex structure that is inserted into the convex portion of the first opening.

Thereby, the airtightness between the first opening and closing portion and the second opening and closing portion in the closed state can be preferably maintained.

[Application Example 41] In the electronic component conveying apparatus of the application example, it is preferable that the second opening and closing portion is formed by joining two plate members having different sizes, and the smaller one of the two plate members The convex portion is formed.

Thereby, the airtightness between the first opening and closing portion and the second opening and closing portion in the closed state can be preferably maintained.

[Application Example 42] In the electronic component conveying apparatus of the application example, it is preferable that the first opening/closing unit has a first opening that is covered when the second opening/closing unit is closed, and the second opening/closing unit has a closing. The portion overlapping the first opening and closing portion.

Thereby, the airtightness between the first opening and closing portion and the second opening and closing portion in the closed state can be preferably maintained.

[Application Example 43] In the electronic component conveying apparatus of this application example, it is preferable that the above 2 The elastic film is disposed in the opening and closing portion.

In this case, even if the device vibrates due to the operation of the device, the first opening and closing portion is slightly separated from the second opening and closing portion in the closed state, and the gas between the first opening and closing portion and the second opening and closing portion can be maintained. The denseness makes it possible to suppress the inflow of the outside air into the apparatus.

[Application Example 44] In the electronic component conveying apparatus of the application example, it is preferable that the second opening/closing section has a plurality of different sizes, and any one of the plurality of second opening and closing sections can be selected.

Thereby, the second opening/closing portion can be selected based on the work content inside the device, thereby improving work efficiency.

[Application Example 45] In the electronic component conveying apparatus of the application example, it is preferable that the second opening/closing part housing is detachably provided around the second opening/closing section.

Thereby, the degree of airtightness between the second opening and closing portion and the first opening and closing portion in the closed state can be increased as compared with the case where the casing for the second opening and closing portion is not used.

[Application Example 46] In the electronic component conveying apparatus of the application example, it is preferable that the second opening/closing part housing has a plurality of different sizes, and the plurality of second opening/closing parts can be selected from the plurality of housings. One.

Thereby, the degree of airtightness between the second opening and closing portion and the first opening and closing portion in the closed state can be adjusted.

[Application Example 47] In the electronic component conveying apparatus of the application example, the first opening/closing unit preferably has a first opening that is covered when the second opening/closing unit is closed, and has a first opening in the first opening. A housing for the first opening for loading and unloading.

Thereby, the substantial size of the first opening can be made smaller than in the case where the first opening casing is not used, whereby the inflow of the outside air can be further suppressed as much as possible.

[Application Example 48] In the electronic component conveying apparatus of the application example, it is preferable that the first opening portion case has a plurality of sizes, and the plurality of first opening portions can be selected from the plurality of first opening portions. Any one.

Thereby, the degree of inflow of the outside air can be adjusted.

[Application Example 49] In the electronic component conveying apparatus of the application example, the first opening/closing unit preferably has a first opening that is covered when the second opening/closing unit is closed, and the first opening is circular. .

Thereby, the first opening is, for example, a shape that allows the operator's front arm to enter, thereby improving the workability in the work inside the apparatus.

[Application Example 50] In the electronic component conveying apparatus of the application example, it is preferable that a plurality of the second opening and closing portions are provided, and the plurality of second opening and closing portions are arranged in the horizontal direction.

In this way, for example, the operator can open the left hand with one of the second opening and closing portions, and open the right hand with the other of the second opening and closing portions, and insert the right hand, thereby improving the workability.

[Application Example 51] In the electronic component conveying device of the application example, it is preferable that the second opening/closing portion is opened toward the inside of the electronic component conveying device or opened to the outside.

Thereby, for example, a tool for an operation inside the apparatus can be temporarily placed on the second opening/closing unit.

[Application Example 52] The electronic component inspection device according to the application example includes: a first opening and closing portion that can be opened and closed, and a second opening and closing portion that is openable and closable in the first opening and closing portion; and an inspection portion that inspects The electronic component; and the second opening and closing unit can be maintained in an open state with respect to the first opening and closing unit.

Thereby, when the work for the inside of the apparatus is performed, the inflow of the outside air can be suppressed as much as possible.

1‧‧‧Inspection device (electronic parts inspection device)

4‧‧‧1st opening and closing department

5‧‧‧2nd opening and closing department

11A‧‧‧Tray transport mechanism

11B‧‧‧Tray transport mechanism

12‧‧‧ Temperature adjustment section (soaking plate)

13‧‧‧Component transport head

14‧‧‧Component supply unit (supply shuttle)

15‧‧‧Tray transport mechanism (first transport device)

16‧‧‧Inspection Department

17‧‧‧Component head

18‧‧‧Component Recycling Department (Recycling Shuttle)

19‧‧‧Recycling tray

20‧‧‧Component head

21‧‧‧Tray transport mechanism (second transport device)

22A‧‧‧Tray transport mechanism

22B‧‧‧Tray transport mechanism

41a, 41b, 41c, 41d‧‧‧ side (edge)

42‧‧‧1st rotation support

43‧‧‧Locking members

44‧‧‧ Opening (first opening)

45‧‧‧First opening housing

45A‧‧‧First opening housing

45B‧‧‧First opening housing

45C‧‧‧First opening housing

52‧‧‧2nd rotation support

53‧‧‧1st plate member

54‧‧‧2nd plate member

55‧‧‧screws (hex socket head screws)

56‧‧‧ Sealing member (seal part)

57‧‧‧Locking members

58‧‧‧Second opening and closing part housing

58A‧‧‧Second opening and closing part housing

58B‧‧‧Second opening and closing part housing

58C‧‧‧Second opening and closing part housing

59‧‧‧Connecting Department

61‧‧‧1st next door

62‧‧‧2nd next door

63‧‧‧3rd next door

64‧‧‧4th next door

65‧‧‧5th next door

66‧‧‧Inside wall

70‧‧‧ front cover

71‧‧‧ side cover

72‧‧‧ side cover

73‧‧‧ Rear cover

75‧‧‧4th door

76‧‧‧Detection Department

77‧‧‧Detection Department

78‧‧‧Intrusion sensor

80‧‧‧Control Department

90‧‧‧IC components

200‧‧‧Tray (configuration component)

531‧‧‧鍃孔

532‧‧ ‧ overlap

541‧‧‧Threaded hole (female thread)

571‧‧‧Snap hole

711‧‧‧1st door

712‧‧‧2nd door

713‧‧‧ openings

721‧‧‧1st door

722‧‧‧2nd door

731‧‧‧1st door

732‧‧‧2nd door

733‧‧‧3rd door

740‧‧‧ cylinder

740a‧‧‧Cylinder rod

741‧‧‧ cylinder

742‧‧‧ cylinder

743‧‧‧ cylinder

744‧‧‧ cylinder

745‧‧‧ cylinder

746‧‧‧ cylinder

746a‧‧‧Cylinder rod

761‧‧‧Magnetic sensor

762‧‧‧ magnet

771‧‧‧Magnetic sensor

772‧‧‧ magnet

781‧‧‧Lighting Department

782‧‧‧Receiving Department

A1‧‧‧Tray supply area

A2‧‧‧Component supply area (supply area)

A3‧‧‧ inspection area

A4‧‧‧Component recycling area (recycling area)

A5‧‧‧Tray removal area

Room R1‧‧‧

Room R2‧‧‧

Room R3‧‧‧3

X‧‧‧ axis

Y‧‧‧ axis

Z‧‧‧ axis

Fig. 1 is a schematic plan view showing a first embodiment of an electronic component inspection device according to the present invention.

2 is a view showing a first opening and closing portion in a closed state and a second opening and closing portion in a closed state of the electronic component inspection device shown in FIG. 1 .

3 is a longitudinal cross-sectional view (cross-sectional view taken along line A-A in FIG. 2) showing a first opening and closing portion in a closed state and a second opening and closing portion in a closed state of the electronic component inspection device shown in FIG. 1 .

4 is a longitudinal cross-sectional view showing a first opening and closing portion in a closed state and a second opening and closing portion in an open state of the electronic component inspection device shown in FIG. 1 .

5 is a longitudinal cross-sectional view showing a second opening and closing portion of the electronic component inspection device (second embodiment) of the present invention and a second opening and closing portion housing that is detachably attached to the second opening and closing portion.

6(a) to 6(c) are vertical cross-sectional views showing the types of the second opening and closing portion housing shown in Fig. 5.

7 is a longitudinal cross-sectional view showing a first opening and closing portion of the electronic component inspection device (third embodiment), and a first opening portion housing that is detachably attached to the first opening portion of the first opening and closing portion. .

8(a) to 8(c) are vertical cross-sectional views showing the types of the first opening housing shown in Fig. 7.

FIG. 9 is a view showing a first opening and closing portion in a closed state and a second opening and closing portion in a closed state, which are provided in the electronic component inspection device (fourth embodiment) of the present invention.

Hereinafter, the electronic component conveying apparatus and the electronic component inspection apparatus of the present invention will be described in detail based on preferred embodiments shown in the drawings.

<First embodiment>

Fig. 1 is a schematic plan view showing a first embodiment of an electronic component inspection device according to the present invention. 2 is a view showing a first opening and closing portion in a closed state and a second opening and closing portion in a closed state of the electronic component inspection device shown in FIG. 1 . 3 is a longitudinal cross-sectional view (cross-sectional view taken along line A-A in FIG. 2) showing a first opening and closing portion in a closed state and a second opening and closing portion in a closed state of the electronic component inspection device shown in FIG. 1 . 4 is a longitudinal cross-sectional view showing a first opening and closing portion in a closed state and an opening and closing portion in an open state of the electronic component inspection device shown in FIG. 1; Figure.

In the following, for convenience of explanation, as shown in FIG. 1, the three axes orthogonal to each other are defined as an X-axis, a Y-axis, and a Z-axis. Further, the XY plane including the X-axis and the Y-axis is horizontal, and the Z-axis is vertical. Further, the direction parallel to the X-axis is also referred to as "X-direction", the direction parallel to the Y-axis is also referred to as "Y-direction", and the direction parallel to the Z-axis is also referred to as "Z-direction". Further, the upstream side of the transport direction of the electronic component is also simply referred to as "upstream side", and the downstream side is also simply referred to as "downstream side". Further, the "horizontal" as used in the specification of the present invention is not limited to a complete level, and includes a state in which it is slightly inclined (for example, less than about 5 degrees) with respect to the horizontal level as long as it does not hinder the conveyance of the electronic component.

The inspection device (electronic component inspection device) 1 shown in FIG. 1 is used, for example, for an IC component such as a BGA (Ball Grid Array) package or an LGA (Land Grid Array) package, or an LCD. A device for inspecting and testing (hereinafter referred to as "inspection") for electrical characteristics of electronic components such as (Liquid Crystal Display) and CIS (CMOS Image Sensor). In the following, for the sake of convenience of explanation, the case where the IC component is used as the electronic component to be inspected will be described as a representative, and this will be referred to as "IC component 90".

As shown in FIG. 1, the inspection apparatus 1 is divided into a tray supply area A1, a component supply area (hereinafter simply referred to as "supply area") A2, an inspection area A3, a component collection area (hereinafter simply referred to as "recovery area") A4, and The tray removes the area A5. Further, the IC element 90 is sequentially inspected from the tray supply area A1 to the tray removal area A5 through the above-described respective areas and in the inspection area A3 in the middle. In this way, the inspection device 1 is an electronic component transport device that transports the IC device 90 in each region, an inspection unit 16 that performs inspection in the inspection region A3, and a control unit 80. In the inspection apparatus 1, the supply area A2 to the collection area A4 of the self-transporting IC element 90 in the tray supply area A1 to the tray removal area A5 can also be referred to as a "transport area (transport area)".

Furthermore, the inspection device 1 is provided with a tray supply area A1 and a tray removal area A5. The side (the lower side in FIG. 1) is the front side, and the opposite side, that is, the side (the upper side in FIG. 1) on which the inspection area A3 is disposed is used as the back side.

The tray supply area A1 supplies a supply unit of a tray (arrangement member) 200 in which a plurality of IC elements 90 in an unchecked state are arranged. In the tray supply area A1, a plurality of trays 200 can be stacked.

The supply area A2 supplies a plurality of IC elements 90 disposed on the tray 200 from the tray supply area A1 to the area of the inspection area A3. Further, the tray transport mechanisms 11A and 11B of the sheet-by-sheet transport tray 200 are provided so as to straddle the tray supply area A1 and the supply area A2.

A temperature adjustment unit (soak plate) 12, a component transfer head 13, and a tray conveyance mechanism (first conveyance device) 15 are provided in the supply area A2.

The temperature adjustment unit 12 is provided with a mounting portion on which a plurality of IC elements 90 are placed, and the plurality of IC elements 90 can be heated or cooled. Thereby, the IC element 90 can be adjusted to a temperature suitable for inspection. In the configuration shown in FIG. 1, the temperature adjustment unit 12 is disposed in two in the Y direction and fixed. Further, the IC component 90 on the tray 200 carried in (transferred) from the tray supply area A1 by the tray transport mechanism 11A is transported and placed on any of the temperature adjustment units 12.

The component transfer head 13 is movably supported in the supply area A2. Thereby, the component transfer head 13 can be responsible for the transfer of the IC component 90 between the tray 200 and the temperature adjustment unit 12 carried in from the tray supply area A1, and the IC component 90 between the temperature adjustment unit 12 and the component supply unit 14 described below. Transfer.

The tray transport mechanism 15 is a mechanism that transports the empty tray 200 in a state in which all the IC elements have been removed in the X direction in the supply region A2. Then, after the transfer, the empty tray 200 is returned from the supply area A2 to the tray supply area A1 by the tray transport mechanism 11B.

The inspection area A3 is an area where the IC element 90 is inspected. In the inspection area A3, a component supply unit (supply shuttle) 14, an inspection unit 16, a component transfer head 17, and a component collection unit (recycling shuttle) 18 are provided.

The component supply unit 14 is provided with a mounting portion of the IC element 90 on which the temperature is adjusted, and the IC device 90 can be transported to the vicinity of the inspection unit 16 . The component supply unit 14 is supported to be movable in the X direction between the supply region A2 and the inspection region A3. Further, in the configuration shown in FIG. 1, the component supply unit 14 is disposed in the Y direction, and the IC device 90 on the temperature adjustment unit 12 is transported and placed on any of the component supply units 14.

The inspection unit 16 is a unit that inspects and tests the electrical characteristics of the IC component 90. The inspection unit 16 is provided with a plurality of probe pins that are electrically connected to the terminals of the IC component 90 in a state in which the IC component 90 is held. Further, the terminal of the IC component 90 is electrically connected (contacted) to the probe pin, and the IC component 90 is inspected via the probe pin. The inspection of the IC component 90 is performed based on a program stored in the inspection control unit provided in the tester connected to the inspection unit 16. Further, in the inspection unit 16, the IC element 90 can be heated or cooled in the same manner as the temperature adjustment unit 12, and the IC element 90 can be adjusted to a temperature suitable for inspection.

The component transfer head 17 is movably supported in the inspection area A3. Thereby, the element transfer head 17 can transport and mount the IC element 90 on the component supply unit 14 carried in from the supply area A2 to the inspection unit 16.

The component recovery unit 18 is configured to mount the IC component 90 placed on the mounting portion 16 after the inspection of the inspection unit 16 is completed, and the IC component 90 can be transported to the recovery area A4. The component recovery unit 18 is supported to be movable in the X direction between the inspection region A3 and the recovery region A4. Further, in the configuration shown in FIG. 1, the component collection unit 18 is disposed in the Y direction in the same manner as the component supply unit 14, and the IC component 90 on the inspection unit 16 is transported and placed on any of the components. Recovery unit 18. This transfer is performed by the component transfer head 17.

The recovery area A4 is a region of a plurality of IC elements 90 after the end of the inspection. In the collection area A4, a collection tray 19, a component transfer head 20, and a tray conveyance mechanism (second conveyance means) 21 are provided. Further, an empty tray 200 is also prepared in the collection area A4.

The recovery tray 19 is provided with a mounting portion on which the IC element 90 is placed, and is fixed in the recovery area A4. In the configuration shown in FIG. 1, three are arranged in the X direction. Also, the empty tray 200 is also In order to mount the mounting portion of the IC device 90, three are arranged in the X direction. The IC device 90 on the component recovery unit 18 that has moved to the recovery area A4 is transported and placed on any of the recovery trays 19 and the empty trays 200. Thereby, the IC element 90 is recovered and classified for each detection result.

The component transfer head 20 is movably supported in the recovery area A4. Thereby, the element transfer head 20 can transport the IC element 90 from the element collection part 18 to the collection tray 19 or the empty tray 200.

The tray transport mechanism 21 is a mechanism that transports the empty tray 200 carried in from the tray removal area A5 in the X direction in the collection area A4. Further, after the transfer, the empty tray 200 is disposed at a position for collecting the IC element 90, that is, it may be one of the above three empty trays 200. As described above, in the inspection apparatus 1, the tray conveyance mechanism 21 is provided in the collection area A4, and the tray conveyance mechanism 15 is provided in the supply area A2. By this, it is possible to increase the throughput (the number of transports of the IC elements 90 per unit time) by, for example, performing the transport of the empty tray 200 in the X direction by one transport mechanism.

In addition, the configuration of the tray transport mechanisms 15 and 21 is not particularly limited. For example, an adsorption member having the adsorption tray 200 and a ball screw that supports the adsorption member so as to be movable in the X direction can be exemplified. Support institutions.

The tray removing area A5 collects and removes the removing portion of the tray 200 in which the plurality of IC elements 90 in the inspection state are arranged. In the tray removal area A5, a plurality of trays 200 can be stacked.

Moreover, the tray conveyance mechanisms 22A and 22B of the sheet-by-sheet transfer tray 200 are provided so as to span the collection area A4 and the tray removal area A5. The tray transport mechanism 22A is a mechanism that transports the tray 200 on which the inspected IC component 90 is placed from the collection area A4 to the tray removal area A5. The tray transport mechanism 22B is a mechanism that transports the empty tray 200 for collecting the IC component 90 from the tray removal area A5 to the collection area A4.

The control unit 80 has, for example, a drive control unit. The drive control unit controls, for example, the tray transport Mechanisms 11A and 11B, temperature adjustment unit 12, component transfer head 13, component supply unit 14, tray transport mechanism 15, inspection unit 16, component transfer head 17, component recovery unit 18, component transfer head 20, tray transport mechanism 21, and Driving of each of the tray transport mechanisms 22A, 22B.

In addition, the inspection control unit of the tester performs inspection of electrical characteristics of the IC component 90 disposed in the inspection unit 16 based on, for example, a program stored in a memory (not shown).

In the inspection apparatus 1 as described above, the component transfer head 13, the component supply section 14, and the component transfer head 17 are configured to be capable of heating or cooling the component 90 in addition to the temperature adjustment unit 12 or the inspection unit 16. Thereby, the temperature of the IC element 90 is maintained constant during the conveyance. In the following description, the case where the IC element 90 is cooled, for example, in a low temperature environment in the range of -60 ° C to -40 ° C will be described.

As shown in FIG. 1, in the inspection apparatus 1, the tray supply area A1 and the supply area A2 are separated (separated) by the first partition 61, and the supply area A2 and the inspection area A3 are separated by the second partition 62, and inspection is performed. The area A3 and the recovery area A4 are separated by a third partition wall 63, and the collection area A4 and the tray removal area A5 are separated by a fourth partition wall 64. Further, the supply region A2 and the recovery region A4 are also separated by the fifth partition wall 65. These partition walls have a function of maintaining the airtightness of each region. Further, the outermost package of the inspection apparatus 1 is covered with a cover body, for example, a front cover 70, side covers 71 and 72, and a rear cover 73.

Further, the supply region A2 is the first chamber R1 defined by the first partition wall 61, the second partition wall 62, the fifth partition wall 65, the side cover 71, and the rear cover 73. In the first chamber R1, a plurality of IC elements 90 in an unchecked state are carried in together with the tray 200.

The inspection area A3 is the second chamber R2 defined by the second partition wall 62, the third partition wall 63, and the rear cover 73. Further, in the second chamber R2, the inner partition wall 66 is disposed inside the rear cover 73.

The collection area A4 is a third chamber R3 defined by the third partition wall 63, the fourth partition wall 64, the fifth partition wall 65, the side cover 72, and the rear cover 73. The plurality of IC elements 90 after the inspection is completed are carried into the third chamber R3 from the second chamber R2.

As shown in FIG. 1, the side cover 71 is provided with a first door (left side first door) 711 and a second door (left side second door) 712. By opening the first door 711 or the second door 712, for example, maintenance in the first chamber R1 or release of the jam of the IC device 90 can be performed (hereinafter, these are collectively referred to as "jobs"). Further, the first door 711 and the second door 712 are so-called "left and right facing doors" that open and close in opposite directions. Further, during the operation in the first chamber R1, the movable portion such as the component transfer head 13 in the first chamber R1 is stopped.

Similarly, the side cover 72 is provided with a first door (right first door) 721 and a second door (right second door) 722. By opening the first door 721 or the second door 722, for example, the work in the third chamber R3 can be performed. Further, the first door 721 and the second door 722 are also so-called "left and right facing doors" that open and close in opposite directions. Further, during the operation in the third chamber R3, the movable portion such as the component transfer head 20 in the third chamber R3 is stopped.

Further, the rear cover 73 is also provided with a first door (back side first door) 731, a second door (back side second door) 732, and a third door (back side third door) 733. By opening the first door 731, for example, the work in the first chamber R1 can be performed. By opening the third door 733, for example, the work in the third chamber R3 can be performed. Further, a fourth door 75 is provided on the inner partition 66. Further, by opening the second door 732 and the fourth door 75, for example, the work in the second chamber R2 can be performed. Further, the first door 731, the second door 732, and the fourth door 75 are opened and closed in the same direction, and the third door 733 is opened and closed in a direction opposite to the doors. Further, during the operation in the second chamber R2, the movable portion such as the component transfer head 17 in the second chamber R2 is stopped.

Moreover, by closing each of the doors, it is possible to ensure airtightness or heat insulation in the respective chambers.

In the inspection apparatus 1, the first door 711 and the second door 712 on the side cover 71 side of the door, the first door 721 and the second door 722 on the side cover 72 side, and the rear cover 73 are provided. Each of the first door 731 and the third door 733 on the side is composed of the first opening and closing unit 4 and the second opening and closing unit 5 (see FIG. 2 ), and is an assembly obtained by assembling the same. Hereinafter, the first door 711 located on the side of the side cover 71 will be described as a representative.

As shown in FIG. 2, the first opening and closing portion 4 is a door that can be opened and closed with respect to the opening portion 713 formed in the side cover 71. Thereby, the first opening and closing portion 4 can cover one half of the opening portion 713 (the portion on the left side in the drawing) in the closed state, and the opening portion 713 can be opened in the open state.

The first opening and closing portion 4 is formed of a plate member having a substantially rectangular shape in plan view. Further, the size of the first opening and closing unit 4 depends on the size of the inspection apparatus 1. However, it is preferable that either the longitudinal length (the length in the Z direction) and the lateral length (the length in the Y direction) are 400 mm. Above, 600 mm or less, more preferably 450 mm or more and 550 mm or less.

Further, the first opening/closing portion 4 having a quadrangular shape and the side 41a extending in the vertical direction among the four sides (edge portions) 41a, 41b, 41c, and 41d are formed by the two first rotation support portions 42 and the side cover portion. 71 links. The two first rotation support portions 42 are arranged to be spaced apart in the Z direction. Further, each of the first rotation support portions 42 is configured by a hinge that supports the first opening and closing portion 4 so as to be rotatable. Thereby, the first opening and closing portion 4 can be supported so as to be rotatable about the axis parallel to the vertical direction, that is, the Z direction, and the opening and closing can be smoothly performed.

Further, the cylinder 740 as the lock mechanism that maintains the state in which the first opening and closing portion 4 is closed is disposed and fixed to the vicinity of the upper portion of the opening portion 713 of the side cover 71. The cylinder 740 is a cylinder rod 740a that is free to enter and exit. Further, when the cylinder rod 740a protrudes downward, it can be engaged with the lock member 43 provided in the first opening and closing portion 4. Thereby, the closed state of the first opening and closing unit 4 can be maintained, and the operator (operator) can be prevented from opening the first opening/closing unit 4 by mistake, for example, during the conveyance of the IC element 90.

In the present embodiment, the cylinder 740 can maintain the closed state of the first opening/closing unit 4 of the first door 711 and the closed state of the first opening/closing unit 4 of the second door 712. In other words, the cylinder 740 can be engaged with the lock member 43 of the first opening and closing portion 4 of the first door 711 and the lock member 43 of the first opening and closing portion 4 of the second door 712 together, thereby being uniform The closed state of the first opening and closing unit 4 is maintained.

Similarly, on the side cover 72 side, the cylinder 745 can uniformly maintain the closed state of the first door 721 and the second door 722. Further, on the side of the rear cover 73, the cylinder 741 can maintain the closed state of the first door 731, and the cylinder 742 can maintain the closed state of the second door 732, and the cylinder 744 can be maintained. In the closed state of the third door 733, the cylinder 743 can maintain the closed state of the fourth door 75. Further, the operations of the respective cylinders 740 to 745 are independently performed using a specific switch.

As described above, among the doors including the first opening and closing unit 4 and the second opening and closing unit 5, the first door 711 and the second door 712 on the side of the side cover 71 and the first door 721 and the side on the side of the side cover 72 are provided. The second door 722 and the first door 731 and the third door 733 on the side of the rear cover 73. Therefore, the number of the first opening and closing units 4 is the same as the number of the doors (plural). As a result, when the first opening/closing unit 4 is opened as close as possible to the portion in which the work in the above-described transfer area is to be performed, the work can be easily performed.

Moreover, as shown in FIG. 2, the magnet sensor 761 and the magnet 762 which are the detection part 76 which detects the opening and closing of the 1st opening/closing part 4 are provided. The magnet sensor 761 is disposed and fixed to the vicinity of the upper portion of the opening portion 713 of the side cover 71, and is electrically connected to the control portion 80. The magnet 762 is fixed to the first opening/closing unit 4, and is disposed at a position close to the magnet sensor 761 when the first opening/closing unit 4 is in the closed state.

As shown in FIG. 2, the two second opening/closing sections 5 are rotatably supported by the second rotation support portion 52 in the one first opening/closing portion 4. Each of the second opening and closing portions 5 is a door that can be opened and closed with respect to the opening portion 44 formed in the first opening and closing portion 4 . Thereby, the second opening and closing portion 5 can cover the opening (first opening) 44 (see FIGS. 2 and 3) in the closed state, and the opening 44 can be opened in the open state (see FIG. 4). Further, for example, when the operation of the temperature adjustment unit 12 (inside the inspection device 1) in the supply region A2 is performed, the second opening and closing portion 4 is not in the open state, and the second opening and closing portion 5 is not in the open state. And carry out their work. Since the opening state of the second opening and closing portion 5 is smaller than the opening state of the first opening and closing portion 4, it is possible to suppress the inflow of the outside air into the supply region A2 as much as possible in the operation of the temperature adjusting portion 12. By this, the low temperature environment in the supply area A2 is maintained, whereby condensation or frost can be prevented from being generated in the IC element 90 and the like, and the inspection apparatus 1 can be quickly turned on after the second opening/closing unit 5 is again turned off. Actuate.

Further, the two second opening and closing portions 5 are arranged side by side in the Y direction, that is, in the horizontal direction. With this, For example, the operator can open the second opening/closing portion 5 on the left side in FIG. 2 and insert the left hand, and the second opening and closing portion 5 on the right side of the figure is opened and inserted into the right hand. In this case, both hands can be used, thereby improving workability.

Further, it is preferable that the arrangement portion of each of the second opening and closing portions 5 is disposed in the vicinity of the temperature adjustment portion 12 in the supply region A2 and is vertically above the temperature adjustment portion 12. With this configuration, when the second opening/closing unit 5 is in the open state, the temperature adjustment unit 12 can be placed in a position lower than the line of sight of the operator who performs the work, whereby the temperature adjustment unit 12 can be immediately performed. Homework. Further, by this rapid operation, the time during which the second opening and closing portion 5 is opened can be shortened as much as possible, whereby the inflow of outside air into the supply region A2 can be suppressed.

In the present embodiment, the opening portion 44 has a circular shape. Thereby, the opening 44 is, for example, a shape that allows the operator's front arm to enter, thereby improving workability.

Further, in accordance with the shape of the opening and closing portion 44, the second opening and closing portion 5 also has a substantially circular shape as a whole in a plan view. Further, of course, the area of the second opening and closing portion 5 in plan view is smaller than the area of the first opening and closing portion 4 in plan view.

As shown in FIGS. 3 and 4 , the second opening and closing unit 5 is formed by joining the first plate member 53 and the second plate member 54 . The first plate member 53 and the second plate member 54 are circular plate members having different sizes, that is, different diameters, and the second plate member 54 is smaller than the first plate member 53. In addition, the diameter of the first plate member 53 is not particularly limited, and is preferably 150 mm or more and 200 mm or less, and more preferably 180 mm or more and 200 mm or less. The diameter of the plate member 54 is not particularly limited, and is, for example, preferably 130 mm or more and 180 mm or less, and more preferably 160 mm or more and 180 mm or less. With such a size, it is possible to easily carry out the entry and exit of, for example, a normal adult front arm or a general-sized tray 200 via the second opening/closing portion 5 in the open state. Moreover, it is also possible to prevent the head of the worker from entering through the second opening and closing unit 5 in the open state. Further, although the first plate member 53 and the second plate member 54 have the same thickness in the present embodiment, the present invention is not limited thereto and may be different.

As shown in FIG. 3, in the closed state of the second opening and closing portion 5, the second plate member 54 is inserted into the opening portion 44. Therefore, the second opening and closing portion 5 is a "convex structure (maze structure)" in which the second plate member 54 is formed as a convex portion that can be inserted into the opening portion 44. In the closed state, the second opening and closing portion 5 is an overlapping portion 532 in which the inner edge portion of the first plate member 53 overlaps with the first opening and closing portion 4. The aspect of the overlapping portion 532 is complementary to the aspect in which the convex structure is formed, and the airtightness between the second opening and closing portion 5 and the first opening and closing portion 4 in the closed state can be preferably maintained. Thereby, the environment (temperature or humidity) in the supply area A2 can be maintained.

Moreover, the annular sealing member (sealing portion) 56 is fixed to the outer peripheral portion of the first plate member 53 by, for example, fitting. The sealing member 56 is an elastic film that can be pressed against the first opening and closing portion 4 while being slightly elastically deformed while the second opening and closing portion 5 is closed. In this case, for example, even when the inspection device 1 vibrates due to the operation of the inspection device 1, the first opening and closing portion 4 and the first plate member 53 of the second opening and closing portion 5 are slightly separated from each other, and the first opening and closing can be maintained. The airtightness between the portion 4 and the second opening and closing portion 5. Thereby, it is possible to suppress the inflow of the outside air and contribute to maintaining the environment in the supply region A2. Further, the constituent material of the sealing member 56 is not particularly limited, and for example, various rubber materials such as polyoxyethylene rubber or fluororubber can be used.

In the present embodiment, a plurality of screws (hexagonal screws) 55 are used for joining the first plate member 53 and the second plate member 54. A bore 531 is formed in the first plate member 53, and a threaded hole (female thread) 541 is formed in the second plate member 54. Thereby, the screw 55 can be inserted from the side of the pupil 531, and the screw 55 can be screwed with the screw hole 541. The first plate member 53 and the second plate member 54 are joined by the screwing. Further, it is preferable that the plurality of screws 55 used for joining are disposed at equal angular intervals around the center of the first plate member 53 (second plate member 54).

As shown in FIG. 3, a connecting portion 59 that is coupled to the front side of the first opening and closing portion 4 via the second rotation support portion 52 is protruded from the lower portion of the first plate member 53 of the second opening and closing portion 5. The connecting portion 59 is formed integrally with the first plate member 53 and is bent in an "L" shape on the side opposite to the second plate member 54.

The second rotation support portion 52 is configured by a hinge that supports the second opening and closing portion 5 so as to be rotatable relative to the first opening and closing portion 4 . Thereby, the second opening and closing portion 5 can be supported so as to be rotatable about the axis parallel to the horizontal direction, that is, the Y direction, and the opening and closing can be smoothly performed.

As shown in FIG. 3 and FIG. 4, in the present embodiment, the second opening/closing unit 5 is opened toward the outside of the inspection device 1, that is, the so-called "outside opening" is performed. In the state in which the maximum opening is performed as shown in FIG. 4, the state in which the opening and closing is maximized is maintained, and the second opening and closing portion 5 is in a standing state that is perpendicular to the first opening and closing portion 4, that is, raised. At this time, the second rotation support portion 52, that is, the hinge is in a state of being closed to the maximum extent. Thereby, the standing state of the second opening and closing unit 5 is maintained. In this case, for example, the tool for work can be temporarily placed on the second opening/closing portion 5 in the standing state. Moreover, the inflow of the outside air at the time of performing the work can be suppressed as much as possible. Further, since the second opening/closing portion 5 in the standing state protrudes in a direction opposite to the direction in which the operator enters the supply region A2, it is possible to prevent, for example, the operator from trying to extend his or her own head. In the erected state, the connection portion 59 of the second opening and closing portion 5 is overlapped with the first opening and closing portion 4 via the second rotation support portion 52 (see FIG. 4).

The openable and closable angle of the second opening and closing portion 5, that is, the pivotable angle of the second opening/closing portion 5 around the second rotation support portion 52 is 0 degrees or more and 90 degrees or less. The second opening/closing unit 5 is in the "upright state" at 90 degrees, and becomes "falling state (state of maximum closure)" at 0 degrees.

The cylinder 746, which is a lock mechanism (locking mechanism) that maintains the state in which the second opening/closing portion 5 is closed, is disposed and fixed to the vicinity of the upper portion of the opening portion 44 of the first opening and closing portion 4. The cylinder 746 is a cylinder rod 746a that is free to enter and exit. Further, when the cylinder rod 746a protrudes, it can be engaged with the engagement hole 571 (see FIG. 3) of the lock member 57 provided in the second opening/closing portion 5. By this, it is possible to maintain the closed state of the second opening and closing unit 5, and prevent the operator from accidentally opening the second opening/closing unit 5 and moving the hand or the like during the conveyance of the IC element 90, for example. Furthermore, the operation of the cylinder 746 is performed using a specific switch. Further, the air cylinder 746 is disposed in the first opening and closing portion 4, but the present invention is not limited thereto, and may be disposed in the second opening and closing portion 5.

Further, the hinge constituting the second rotation support portion 52 is preferably a built-in torsion spring. The torsion spring functions as a spring pushing portion that pushes the second opening and closing portion 5 in a direction in which it is opened. As a result, when the locked state of the air cylinder 746 is released, the second opening and closing portion 5 is naturally opened by the elastic force of the torsion spring. Thus, for example, the operability is improved as compared with a case where the operator holds the second opening/closing unit 5 and opens it.

As shown in FIG. 3, a magnet sensor 771 and a magnet 772 as detection means 77 capable of sensing and detecting opening and closing of the second opening and closing portion 5 are provided. The magnet sensor 771 is disposed and fixed to the vicinity of the upper portion of the opening portion 44 of the first opening and closing portion 4, and is electrically connected to the control portion 80. The magnet 772 is fixed to the second opening and closing portion 5, and is disposed at a position close to the magnet sensor 771 when the second opening and closing portion 5 is in the closed state. Further, when the open state is detected, it can be displayed on a display (not shown).

By the detection unit 77, for example, when the second opening/closing unit 5 is unnecessarily opened, the operator can also set the second opening/closing unit 5 to the closed state, thereby enabling the operator to Inhibit the inflow of outside air as much as possible. Further, it is possible to prevent the second opening/closing portion 5 from being unnecessarily opened, and it is possible to prevent, for example, an operator from accidentally inserting a hand or the like into the supply region A2. In this way, the detecting unit 77 also functions as a safety sensor.

Further, the opening portion 44 of the first opening and closing portion 4 is provided with an intrusion sensor 78 that senses the intrusion of, for example, an operator's hand when the second opening and closing portion 5 is in an open state. The intrusion sensor 78 is a transmissive sensor having a light-emitting portion 781 and a light-receiving portion 782. When the light from the light-emitting portion 781 is shielded by the hand or the like, and the light-receiving portion 782 cannot receive light, the intrusion sensor 78 can sense the intrusion of the hand or the like. At this time, the inspection device 1 preferably issues a warning or stops the movement of the movable portion to prevent intrusion of a hand or the like.

Further, as the arrangement of the intrusion sensor 78, for example, one light-emitting portion 781 may be disposed on the left side of the leftmost opening portion 44 in FIG. 2, and one light-receiving portion 782 may be disposed on the right side of the rightmost opening portion 44. . In this case, the light from the light-emitting portion 781 can uniformly pass through the four openings 44 and reach the light-receiving portion 782. Thereby, the hand or the like invades into the four opening portions 44. Whichever one can sense the intrusion with one intrusion sensor 78.

<Second embodiment>

5 is a longitudinal cross-sectional view showing a second opening and closing portion of the electronic component inspection device (second embodiment) of the present invention and a second opening and closing portion housing that is detachably attached to the second opening and closing portion. Fig. 6 is a longitudinal sectional view showing the type of the second opening/closing portion housing shown in Fig. 5;

In the following, the second embodiment of the electronic component conveying apparatus and the electronic component inspection apparatus according to the present invention will be described with reference to the drawings. However, the differences from the above-described embodiments will be mainly described, and the description of the same matters will be omitted.

This embodiment is the same as the above-described first embodiment except that the casing for the second opening and closing portion is provided. As shown in FIG. 5, in the second embodiment, the second opening/closing portion 5 has a second opening/closing portion casing 58 that is detachably attached to the outer peripheral portion (around) of the first plate member 53. Further, an annular sealing member 56 is fixed to the outer peripheral portion of the second opening/closing portion casing 58 by, for example, fitting. In addition, when the second opening/closing portion case 58 is attached to the first plate member 53, the second opening and closing portion 5 and the closed state can be made smaller than when the second opening/closing portion case 58 is not used. 1 The degree of airtightness between the opening and closing portions 4 is increased.

In addition, as shown in FIG. 6, the second opening/closing part case 58 has a plurality of inner diameters but different outer diameters (sizes). (The second opening and closing part housing 58A and the second opening/closing part are used in the figure. The casing 58B and the second opening/closing portion casing 58C). Further, any one of the second opening/closing portion casings 58A to the second opening and closing portion casings 58C is selected and attached to the first plate member 53. With such selection, the degree of airtightness with the first opening and closing portion 4 can be adjusted.

In addition, the sealing member 56 is suitable for the size of the second opening/closing portion casing 58A to the second opening and closing portion casing 58C.

<Third embodiment>

Fig. 7 is a view showing a first opening and closing portion provided in the electronic component inspection device (third embodiment) of the present invention, and a first opening portion housing that is detachably attached to the first opening portion of the first opening and closing portion. Longitudinal section view of the body. Fig. 8 is a longitudinal sectional view showing the type of the first opening portion housing shown in Fig. 7;

In the following, the third embodiment of the electronic component transport apparatus and the electronic component inspection apparatus according to the present invention will be described with reference to the drawings. However, the differences from the above-described embodiments will be mainly described, and the description of the same matters will be omitted.

This embodiment is the same as the above-described first embodiment except that the first opening portion casing is provided. As shown in FIG. 7, in the first embodiment, the first opening and closing portion 4 has a first opening portion casing 45 that is detachably attached to the inner peripheral portion of the opening portion 44, for example, by being fitted. Further, by attaching the first opening portion casing 45, the size of the opening portion 44 can be made substantially smaller than in the case where the first opening portion casing 45 is not used. Thereby, the inflow of the outside air can be further suppressed as much as possible.

In addition, as shown in FIG. 8, the first opening portion housing 45 has a plurality of outer diameters but different inner diameters (sizes). (The first opening portion housing 45A and the first opening portion are used in the drawing. The casing 45B and the first opening portion casing 45C). In addition, any one of the first opening portion housings 45A to 45b is selected from the first opening portion housing 45A to the first opening portion housing 45, and is attached to the opening portion 44. With this selection, the degree of external gas inflow can be adjusted.

In addition, the second opening/closing portion 5 is suitable for the first opening portion casing 45A to the first opening portion casing 45C.

<Fourth embodiment>

FIG. 9 is a view showing a first opening and closing portion in a closed state and a second opening and closing portion in a closed state, which are provided in the electronic component inspection device (fourth embodiment) of the present invention.

In the following, the fourth embodiment of the electronic component conveying apparatus and the electronic component inspection apparatus according to the present invention will be described with reference to the drawings. However, the differences from the above-described embodiments will be mainly described, and the description of the same matters will be omitted.

This embodiment is the same as the above-described first embodiment except that the size of the second opening and closing portion is different.

As shown in FIG. 9 , in the first embodiment, two second opening and closing units 5 having different sizes are disposed in one first opening and closing unit 4 . The second of the two second opening and closing units 5 is disposed on the first rotation support portion 42 side, and the second larger opening and closing portion 5 is disposed on the opposite side of the first rotation support portion 42. . Further, any one of the two second opening and closing units 5 can be selected. Thereby, the second opening and closing portion 5 corresponding to the type of the work in the supply region A2 can be opened, whereby the inflow of the outside air can be suppressed as much as possible.

In the electronic component transport apparatus and the electronic component inspection apparatus of the present invention, the embodiments have been described. However, the present invention is not limited thereto, and the components constituting the electronic component transport apparatus and the electronic component inspection apparatus can be configured. Any component that performs the same function is replaced. Further, any constituent may be added.

Moreover, the electronic component conveying apparatus and the electronic component inspection apparatus of the present invention may be formed by combining any two or more of the above-described configurations (features).

Further, the first opening and closing unit and the second opening and closing unit are so-called "outside opening" in each of the above embodiments, but the invention is not limited thereto, and may be a so-called "inside opening".

Further, the first opening and closing unit is rotatably supported by the supporter in each of the above embodiments, but the present invention is not limited thereto. For example, the first opening and closing unit may be slidably received by the supporter in the horizontal direction.

In addition, the number of the second opening and closing portions provided in one of the first opening and closing portions is two in each of the above embodiments, but the number is not limited thereto. For example, one or three or more may be used.

In addition, the sealing member that maintains the airtightness between the first opening and closing portion and the second opening and closing portion is disposed in the second opening and closing portion in each of the above embodiments. However, the present invention is not limited thereto, and may be disposed, for example, in the first opening and closing. The part may be disposed in both the first opening and closing unit and the second opening and closing unit.

4‧‧‧1st opening and closing department

5‧‧‧2nd opening and closing department

44‧‧‧ Opening (first opening)

52‧‧‧2nd rotation support

53‧‧‧1st plate member

54‧‧‧2nd plate member

55‧‧‧screws (hex socket head screws)

56‧‧‧ Sealing member (seal part)

57‧‧‧Locking members

59‧‧‧Connecting Department

77‧‧‧Detection Department

78‧‧‧Intrusion sensor

531‧‧‧鍃孔

532‧‧ ‧ overlap

541‧‧‧Threaded hole (female thread)

571‧‧‧Snap hole

746‧‧‧ cylinder

746a‧‧‧Cylinder rod

771‧‧‧Magnetic sensor

772‧‧‧ magnet

782‧‧‧Receiving Department

A2‧‧‧Component supply area (supply area)

Room R1‧‧‧

X‧‧‧ axis

Y‧‧‧ axis

Z‧‧‧ axis

Claims (17)

An electronic component transporting apparatus comprising: a first opening and closing portion that is openable and closable; and a second opening and closing portion that is openable and closable in the first opening and closing portion; and the electronic component conveying device is configured to be capable of sensing the A sensor that opens and closes the second opening and closing unit. The electronic component transport apparatus according to claim 1, further comprising: a support portion that supports the second opening and closing portion to be opened and closed; and the support portion is configured by a hinge. The electronic component transporting apparatus of claim 1, wherein the intrusion sensor that senses intrusion is provided in the first opening and closing section. The electronic component conveying apparatus according to any one of claims 1 to 3, wherein the first opening/closing portion or the second opening/closing portion is provided with a locking mechanism for locking the second opening and closing portion with respect to the first opening and closing portion . The electronic component conveying apparatus according to any one of claims 1 to 4, wherein the first opening and closing portion has a first opening that is covered when the second opening and closing portion is closed, and the second opening and closing portion is formed to be insertable to The convex structure of the convex portion of the first opening portion. The electronic component conveying apparatus according to claim 5, wherein the second opening and closing portion is formed by joining two plate members having different sizes; and the smaller one of the two plate members constitutes the convex portion. The electronic component conveying apparatus according to any one of claims 1 to 6, wherein the first opening and closing portion has a first opening that is covered when the second opening and closing portion is closed; and the second opening and closing portion has a closing time The portion where the first opening and closing unit overlaps. The electronic component transporting apparatus according to any one of claims 1 to 7, wherein the second opening is The closed part is provided with an elastic film. The electronic component conveying apparatus according to any one of claims 1 to 8, wherein the second opening/closing section has a plurality of different sizes, and any one of the plurality of second opening and closing sections can be selected. The electronic component conveying apparatus according to any one of claims 1 to 9, wherein the second opening/closing portion housing is detachably attached to the periphery of the second opening/closing portion. The electronic component transporting apparatus according to claim 10, wherein the second open/close portion housing has a plurality of different sizes, and any one of the plurality of second opening/closing portion housings can be selected. The electronic component conveying apparatus according to any one of claims 1 to 11, wherein the first opening and closing portion has a first opening that is covered when the second opening and closing portion is closed, and is detachable from the first opening. The housing for the first opening. The electronic component transporting apparatus according to claim 12, wherein the first opening portion housing has a plurality of different sizes, and any one of the plurality of first opening portions can be selected. The electronic component conveying apparatus according to any one of claims 1 to 13, wherein the first opening and closing portion has a first opening that is covered when the second opening and closing portion is closed, and the first opening has a circular shape. The electronic component transporting apparatus according to any one of claims 1 to 14, wherein the plurality of second opening and closing sections are provided in plurality, and the plurality of second opening and closing sections are arranged in a horizontal direction. The electronic component conveying apparatus according to any one of claims 1 to 15, wherein the second opening/closing section is opened toward the inside of the electronic component conveying device or opened to the outside. An electronic component inspection device comprising: a first opening and closing portion that is openable and closable; and a second opening and closing portion that is openable and closable in the first opening and closing portion; and An inspection unit that inspects an electronic component; and the electronic component inspection device is provided with a sensor that can sense opening and closing of the second opening and closing unit.