TW201726323A - Fixed abrasive grain wire saw and method for dressing fixed abrasive grain wire that comprise a fixed abrasive grain wire, a workpiece supply table having a workpiece fixing section for fixing a workpiece, and a dressing stone - Google Patents
Fixed abrasive grain wire saw and method for dressing fixed abrasive grain wire that comprise a fixed abrasive grain wire, a workpiece supply table having a workpiece fixing section for fixing a workpiece, and a dressing stone Download PDFInfo
- Publication number
- TW201726323A TW201726323A TW105132579A TW105132579A TW201726323A TW 201726323 A TW201726323 A TW 201726323A TW 105132579 A TW105132579 A TW 105132579A TW 105132579 A TW105132579 A TW 105132579A TW 201726323 A TW201726323 A TW 201726323A
- Authority
- TW
- Taiwan
- Prior art keywords
- workpiece
- wire
- fixed abrasive
- dressing
- fixed
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0633—Grinders for cutting-off using a cutting wire
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
- B28D1/08—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with saw-blades of endless cutter-type, e.g. chain saws, i.e. saw chains, strap saws
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/042—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with blades or wires mounted in a reciprocating frame
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
Description
本發明是有關切削由矽、玻璃、陶瓷等硬脆性材料所構成之工件的固定磨粒線鋸及固定磨粒鋼絲的修整方法。 The present invention relates to a method for dressing a fixed abrasive wire saw and a fixed abrasive grain steel for cutting a workpiece composed of a hard and brittle material such as enamel, glass, ceramics or the like.
自以往,裁斷由硬脆性材料所構成的工件(即鑄錠)製造複數片的薄板(晶圓)的裝置的其中之一已知有線鋸(即,利用鋼絲的切削裝置)。上述線鋸是構成在複數有槽滑輪間並排張設鋼琴線等的芯線形成螺旋狀的鋼絲列,並將鑄錠推壓於該鋼絲列高速行走的鋼絲進行切削,藉此將鑄錠裁斷成多數片的晶圓。上述線鋸的裁斷方式有藉著將含游離磨粒的加工液(即泥漿)一邊朝上述鋼絲列噴射並切削的游離磨粒方式,及如專利文獻1表示,使用在上述芯線的表面固定磨粒的固定磨粒鋼絲切削的固定磨粒方式。游離磨粒方式有泥漿的廢棄處理的問題等,因此近年來,以不使用上述泥漿的必要,且與上述游 離磨粒方式比較切削效率優異的固定磨粒方式已逐漸普及。並且,上述固定磨粒方式的線鋸(即,固定磨粒線鋸)中使用的固定磨粒鋼絲已知有以金屬電鍍將磨粒固定於芯線的鋼絲(參閱專利文獻2)。 Conventionally, a wire saw (i.e., a cutting device using a wire) has been known as one of the devices for cutting a plurality of sheets (wafers) from a workpiece composed of a hard and brittle material (i.e., an ingot). The wire saw is formed by forming a spiral wire line in which a core wire such as a piano wire is arranged side by side between a plurality of grooved pulleys, and the ingot is pressed against the wire which is traveling at a high speed in the wire row, and the ingot is cut into Most wafers. The wire saw is cut by a free abrasive method in which a machining liquid containing free abrasive grains (that is, a slurry) is sprayed toward the steel wire row, and is fixed on the surface of the core wire as shown in Patent Document 1. Fixed abrasive grain method for granule fixed abrasive wire cutting. The free abrasive grain method has a problem of disposal of the slurry, etc., and therefore, in recent years, it is necessary to use the above mud without using the above-mentioned mud. A fixed abrasive grain method in which the cutting efficiency is superior to the abrasive grain method has been gradually spread. Further, a fixed abrasive wire used in the above-described fixed abrasive grain type wire saw (that is, a fixed abrasive wire saw) is known as a steel wire in which abrasive grains are fixed to a core wire by metal plating (see Patent Document 2).
但是,使用以金屬電鍍在芯線固定磨粒的固定磨粒鋼絲的場合,為了確保更優異的切削效率與切削精度,以使得磨粒的前端,即尖端經常露出不致因切屑導致堵塞為佳,但是通常如上述專利文獻2所揭示,在使用開始前的新品狀態中,磨粒的尖端會因金屬電鍍所包覆,並且在使用開始後避免堵塞也極為困難。 However, in the case of using a fixed abrasive wire which is plated with a core wire to fix the abrasive grains by metal plating, in order to ensure more excellent cutting efficiency and cutting accuracy, it is preferable that the tip end of the abrasive grain, that is, the tip end is often exposed, so that clogging is not caused by chips, but Generally, as disclosed in the above-mentioned Patent Document 2, in the new state before the start of use, the tip end of the abrasive grains is coated by metal plating, and it is extremely difficult to avoid clogging after the start of use.
為此,引用文獻1記載的線鋸是將修整用磨石按壓於鋼絲列,藉此修整固定磨粒鋼絲。但是,該線鋸從維護性等運用面的觀點來看,對於保持鑄錠的工作台與修整用磨石的配置關係仍有未能獲得充分考量之處,而殘留有設計上改良的餘地。 For this reason, the wire saw described in the above-mentioned document 1 is obtained by pressing the dressing grindstone against the wire row, thereby trimming the fixed abrasive wire. However, from the viewpoint of the maintenance surface such as maintenance, the wire saw still has insufficient consideration for the arrangement relationship between the table for holding the ingot and the grinding stone for dressing, and there is room for improvement in design.
[專利文獻1]日本特開平11-28654號公報 [Patent Document 1] Japanese Patent Laid-Open No. 11-28654
[專利文獻2]日本特開2006-181698號公報 [Patent Document 2] Japanese Laid-Open Patent Publication No. 2006-181698
因此,本發明的技術課題為提供一種針對保持工件的工作台與進行固定磨粒鋼絲之修整用的修整用磨石的配置關係,除考慮維護性等的運用面之外,施以更合理的設計的固定磨粒線鋸及如此固定磨粒線鋸之固定磨粒鋼絲的修整方法。 Therefore, the technical problem of the present invention is to provide an arrangement relationship between a table for holding a workpiece and a dressing stone for dressing a fixed abrasive wire, and it is more reasonable to consider the use surface such as maintainability. A fixed abrasive wire saw designed and a method of dressing a fixed abrasive wire for fixing the abrasive wire saw.
為解決上述課題,根據本發明,提供一種固定磨粒線鋸,具有:以金屬電鍍將磨粒固定於芯線表面的固定磨粒鋼絲;轉軸彼此平行配置的複數有槽滑輪;固定工件的工件供應台;及修整上述固定磨粒鋼絲的修整用磨石,上述固定磨粒鋼絲是螺旋狀繞掛於上述有槽滑輪間,在與上述轉軸成平行的傳動方向形成以預定的間距間隔排列的鋼絲列,使得該固定磨粒鋼絲在其芯線方向一邊高速行走,並將固定在上述鋼絲列與上述工件供應台的工件彼此推壓,藉此切削該工件用的固定磨粒線鋸,其特徵為:在上述工件供應台設有固定工件用的工件固定部,且上述修整用磨石是在上述傳動方向之該工件固定部的至少上游側,與該工件固定部鄰接固定。 In order to solve the above problems, according to the present invention, there is provided a fixed abrasive wire saw having: a fixed abrasive wire which is fixed to a surface of a core wire by metal plating; a plurality of grooved pulleys arranged in parallel with each other; and a workpiece supply for fixing the workpiece And a dressing grindstone for trimming the fixed abrasive grain steel wire, wherein the fixed abrasive grain steel wire is spirally wound between the grooved pulleys, and wires are arranged at a predetermined interval in a transmission direction parallel to the rotating shaft The fixed abrasive wire is driven at a high speed in the direction of the core line, and the workpiece fixed to the wire row and the workpiece supply table is pressed against each other, thereby cutting the fixed abrasive wire saw for the workpiece, which is characterized by The workpiece supply table is provided with a workpiece fixing portion for fixing the workpiece, and the dressing grindstone is at least upstream of the workpiece fixing portion in the transmission direction, and is fixed adjacent to the workpiece fixing portion.
此時,較佳為上述修整用磨石是由第1及第2修整用磨石所構成,在上述工件供應台,上述第1修整用磨石是在上述傳動方向之工件固定部的上游側,與該工件固定部鄰接配置,並且第2修整用磨石是在該工件固定部 的下游側,與該工件固定部鄰接並固定。 In this case, it is preferable that the dressing grindstone is composed of the first and second dressing grindstones, and the first dressing grindstone is on the upstream side of the workpiece fixing portion in the transmission direction. And disposed adjacent to the workpiece fixing portion, and the second dressing grindstone is at the workpiece fixing portion The downstream side is adjacent to and fixed to the workpiece fixing portion.
並且,更理想是使得與上述第1修整用磨石的上述鋼絲列相對的前端面較與上述第2修整用磨石的該鋼絲列相對的前端面更朝向該鋼絲列側突出。 Furthermore, it is preferable that the front end surface facing the steel wire row of the first dressing grindstone protrudes toward the steel wire row side from the front end surface facing the steel wire row of the second dressing grindstone.
並且,根據本發明,提供一種固定磨粒線鋸,具有:將磨粒以金屬電鍍固定在芯線表面的固定磨粒鋼絲;轉軸彼此平行配置的複數有槽滑輪;及固定工件的工件供應台,上述固定磨粒鋼絲是螺旋狀繞掛於上述有槽滑輪間,在與上述轉軸成平行的傳動方向形成以預定的間距間隔排列的鋼絲列,使得該固定磨粒鋼絲在其芯線方向一邊高速行走,並將固定在上述鋼絲列與上述工件供應台的工件彼此推壓,藉此切削該工件用的固定磨粒線鋸,其特徵為:在上述工件供應台,設有:固定工件用的工件固定部,及修整上述固定磨粒鋼絲之磨石固定用的磨石固定部,該磨石固定部是在上述傳動方向之該工件固定部的至少上游側,與該工件固定部鄰接配置。 Moreover, according to the present invention, there is provided a fixed abrasive wire saw having: a fixed abrasive wire which is fixed to a surface of a core wire by metal plating; a plurality of grooved pulleys arranged in parallel with each other; and a workpiece supply table for fixing the workpiece, The fixed abrasive wire is spirally wound between the grooved pulleys, and a steel wire row arranged at a predetermined pitch is formed in a transmission direction parallel to the rotating shaft, so that the fixed abrasive wire is driven at a high speed in the direction of the core. And a fixed abrasive wire saw for cutting the workpiece, wherein the workpiece is fixed to the workpiece and the workpiece is fixed to the workpiece supply station, and the workpiece supply station is provided with: a workpiece for fixing the workpiece And a fixed portion, and a grindstone fixing portion for fixing the grindstone for fixing the fixed abrasive wire, wherein the grindstone fixing portion is disposed at least upstream of the workpiece fixing portion in the transmission direction, and is disposed adjacent to the workpiece fixing portion.
此時,較佳為上述磨石固定部是由第1及第2磨石固定部所構成,在上述工件供應台,上述第1磨石固定部是在上述傳動方向之工件固定部的上游側,與該工件固定部鄰接配置,並且第2磨石固定部是在該工件固定部的下游側,與該工件固定部鄰接配置。 In this case, it is preferable that the grindstone fixing portion is constituted by the first and second grindstone fixing portions, and the first grindstone fixing portion is on the upstream side of the workpiece fixing portion in the transmission direction. The second grindstone fixing portion is disposed adjacent to the workpiece fixing portion, and the second grindstone fixing portion is disposed adjacent to the workpiece fixing portion on the downstream side of the workpiece fixing portion.
另外,根據本發明,提供一種固定磨粒鋼絲的修整方法,其特徵為,具有:將磨粒以金屬電鍍固定在芯線表面的固定磨粒鋼絲呈螺旋狀繞掛於轉軸彼此平行配 置的複數有槽滑輪間,藉此形成以預定的間距間隔排列在與上述轉軸成平行之傳動方向的鋼絲列的步驟;將工件固定在工件供應台,並在比該工件供應台之該工件更接近上述傳動方向的至少上游側的位置,使修整用磨石與該工件鄰接並固定的步驟;及使上述固定磨粒鋼絲在其芯線方向一邊高速行走,並使得上述工件供應台與上述鋼絲列朝著彼此接近的方向移動,藉此以上述修整用磨石修整比上述工件更位在上述傳動方向之上游側的固定磨粒鋼絲,並以其修整後的固定磨粒鋼絲所形成的鋼絲列切削上述工件的步驟。 In addition, according to the present invention, there is provided a method for dressing a fixed abrasive wire, characterized in that: the fixed abrasive wire which is fixed to the surface of the core wire by metal plating is spirally wound around the rotating shaft and arranged in parallel with each other. a plurality of grooved pulleys, thereby forming a step of arranging the wire rows in a transmission direction parallel to the rotating shaft at a predetermined interval; fixing the workpiece to the workpiece supply table and at the workpiece supply table a step closer to at least the upstream side of the transmission direction, a step of abutting and fixing the dressing grindstone to the workpiece; and a high-speed walking of the fixed abrasive wire in the direction of the core thereof, and the workpiece supply table and the wire The columns are moved toward each other, whereby the fixed abrasive wire which is positioned on the upstream side of the above-mentioned transmission direction is trimmed with the above-mentioned dressing grindstone, and the wire formed by the fixed fixed abrasive wire is trimmed The step of cutting the above workpiece.
本發明有關的上述修整方法中,較理想是使得與固定在上述工件供應台的修整用磨石的上述鋼絲列相對的前端面,較與固定在該工件供應台之工件的上述鋼絲列相對的前端面,更朝向鋼絲列側突出。 In the above trimming method according to the present invention, it is preferable that a front end surface opposite to the steel wire row of the dressing grindstone fixed to the workpiece supply table is opposed to the steel wire row of the workpiece fixed to the workpiece supply table. The front end face protrudes further toward the side of the steel wire.
並且,較理想為上述修整用磨石是由第1及第2修整用磨石所構成,在上述工件供應台,上述第1修整用磨石是在上述傳動方向之工件的上游側,與該工件鄰接並固定,並且第2修整用磨石是在該工件的下游側,與該工件鄰接並固定。 Further, it is preferable that the dressing grindstone is composed of the first and second dressing grindstones, and the first dressing grindstone is on the upstream side of the workpiece in the transmission direction, and The workpiece is adjacent and fixed, and the second dressing grindstone is on the downstream side of the workpiece, adjacent to and fixed to the workpiece.
此時,更理想是使得與上述第1修整用磨石的上述鋼絲列相對的前端面較與上述第2修整用磨石的鋼絲列相對的前端面更朝向該鋼絲列側突出,並且,第2修整用磨石的該前端面與工件的該前端面是從該鋼絲列配置在大致相同的距離。 In this case, it is preferable that the front end surface facing the steel wire row of the first dressing grindstone protrudes toward the steel wire row side from the front end surface facing the steel wire row of the second dressing grindstone, and 2 The front end surface of the dressing grindstone and the front end surface of the workpiece are disposed at substantially the same distance from the steel wire row.
根據以上記載的本發明,構成在藉固定磨粒鋼絲的鋼絲列進行工件的切削之前,以修整用磨石修整該固定磨粒鋼絲。因此,可將包覆該固定磨粒鋼絲之磨粒表面的金屬電鍍層除去使得磨粒的刀間露出後進行工件切削,可提升工件的切削效率。並且,構成將上述工件與修整用磨石固定於相同的工件供應台,不僅可避免構造的複雜化,並可與工件的更換同時進行修整用磨石的更換等,在維護等的運用面也可實現優異的效果。 According to the invention described above, the fixed abrasive wire is trimmed with the dressing grindstone before the workpiece is cut by the wire row of the fixed abrasive wire. Therefore, the metal plating layer covering the surface of the abrasive grain of the fixed abrasive wire can be removed, and the workpiece can be cut after the blade of the abrasive grain is exposed, thereby improving the cutting efficiency of the workpiece. In addition, the above-described workpiece and the dressing grindstone are fixed to the same workpiece supply table, which not only avoids complication of the structure, but also replaces the dressing grindstone with the replacement of the workpiece, and the maintenance surface is also used. Excellent results can be achieved.
1‧‧‧固定磨粒線鋸 1‧‧‧Fixed wire saw
2‧‧‧固定磨粒鋼絲 2‧‧‧Fixed abrasive wire
3-5‧‧‧有槽滑輪 3-5‧‧‧Slotted pulley
6‧‧‧工件供應台 6‧‧‧Workpiece supply station
15‧‧‧工件固定部 15‧‧‧Working part fixing
16‧‧‧第1磨石固定部 16‧‧‧1st Grindstone Fixing Department
17‧‧‧第2磨石固定部 17‧‧‧2nd Grindstone Fixing Department
30‧‧‧鋼絲列 30‧‧‧Steel line
41‧‧‧第1修整用磨石 41‧‧‧1st trimming millstone
41a‧‧‧前端面 41a‧‧‧ front face
42‧‧‧第2修整用磨石 42‧‧‧2nd trimming millstone
42a‧‧‧前端面 42a‧‧‧ front face
W‧‧‧工件 W‧‧‧Workpiece
W1‧‧‧前端面 W1‧‧‧ front face
第1圖是表示本發明相關固定磨粒線鋸之一實施形態的模式圖。 Fig. 1 is a schematic view showing an embodiment of a fixed abrasive wire saw according to the present invention.
第2圖是表示第1圖的固定磨粒線鋸之切削部的概略透視圖。 Fig. 2 is a schematic perspective view showing a cutting portion of the fixed abrasive wire saw of Fig. 1.
第3圖為模式表示上述切削部的工件之切削前的狀態的概略部份放大圖。 Fig. 3 is a schematic partial enlarged view showing a state before cutting of the workpiece of the cutting portion.
第4圖為模式表示上述切削部中,在上述工件的切削開始前進行之固定磨粒鋼絲的修整狀態的概略部份放大圖。 Fig. 4 is a schematic partial enlarged view showing a state in which the fixed abrasive wire is trimmed before the start of cutting of the workpiece in the cutting portion.
第5圖為模式表示上述切削部之工件切削開始時的狀態的概略部份放大圖。 Fig. 5 is a schematic partial enlarged view showing a state at the start of cutting of the workpiece in the cutting portion.
第6圖為模式表示上述切削部之工件切削中途的狀態的概略部份放大圖。 Fig. 6 is a schematic partial enlarged view showing a state in the middle of cutting of the workpiece in the cutting portion.
第1圖-第6圖表示本發明相關固定磨粒線鋸的一實施形態。本實施形態的固定磨粒線鋸1是如第1圖及第2圖表示,具有:將磨粒以金屬電鍍固定在芯線表面的固定磨粒鋼絲2;轉軸彼此平行配置的複數有槽滑輪3-5;固定工件W的工件供應台6;及與上述固定磨粒鋼絲2接觸以修整該固定磨粒鋼絲2的修整用磨石41、42,朝著將固定磨粒鋼絲2捲繞於有槽滑輪3-5間所形成的鋼絲列30推壓上述工件W,構成可裁切多數薄片的晶圓。再者,本實施形態是使用在一方向形成長四角柱形的矽鑄錠作為上述工件W。 Fig. 1 through Fig. 6 show an embodiment of the fixed abrasive wire saw of the present invention. The fixed abrasive wire saw 1 of the present embodiment is a fixed abrasive wire 2 in which abrasive grains are fixed to the surface of a core wire by metal plating, and a plurality of grooved pulleys 3 arranged in parallel with each other with the rotating shafts as shown in Fig. 1 and Fig. 2; -5; a workpiece supply table 6 for fixing the workpiece W; and a dressing grindstone 41, 42 which is in contact with the fixed abrasive wire 2 to trim the fixed abrasive wire 2, and is wound around the fixed abrasive wire 2 The wire row 30 formed between the groove pulleys 3-5 presses the workpiece W to form a wafer that can cut a plurality of sheets. Further, in the present embodiment, a tantalum ingot having a long square column shape formed in one direction is used as the workpiece W.
上述固定磨粒鋼絲2是在鋼琴線等所成的芯線,例如以鎳等的金屬電鍍固定鑽石或立方晶體氮化硼(cBN)等所成的硬質微細的磨粒,以鎳等的金屬電鍍固定,在修整前新品狀態的固定磨粒鋼絲2中,磨粒的表面整體是以被金屬電鍍層包覆的狀態。並且,本實施形態是使用鋼絲徑0.1mm左右作為上述固定磨粒鋼絲2,提升切削硬度並可抑制切削費用。 The fixed abrasive wire 2 is a core wire formed by a piano wire or the like, and is, for example, a hard fine abrasive grain formed by plating a diamond or a cubic boron nitride (cBN) with a metal such as nickel, and is plated with a metal such as nickel. In the fixed abrasive wire 2 in a new state before the dressing, the entire surface of the abrasive grain is covered with a metal plating layer. Further, in the present embodiment, the fixed abrasive wire 2 is used as the above-described fixed abrasive wire 2 by using a wire diameter of about 0.1 mm, and the cutting hardness can be increased and the cutting cost can be suppressed.
如第1圖表示,上述固定磨粒鋼絲2,其兩端側被分別捲繞於一對的鋼絲捲軸7、8,在該等鋼絲捲軸7、8間,形成有將上述工件W裁切成薄片的切削部20。 又,在一對鋼絲捲軸7、8間,設有:切削部20介於其間之一方鋼絲捲軸7側的鋼絲行走道9,及另一方鋼絲捲軸8側的鋼絲行走道10。並且,在該等鋼絲行走道9、10中,分別配設有:使該固定磨粒鋼絲2橫向動作用的橫向運動裝置11;對行走的鋼絲2賦予一定張力用的調節輥12;及在該調節輥12的前後引導上述固定磨粒鋼絲2用的導輥13,以使得固定磨粒鋼絲2從鋼絲捲軸7、8適當地送出,並適當捲繞於該等。 As shown in Fig. 1, the fixed abrasive wire 2 is wound around a pair of wire reels 7, 8 at both end sides, and between the wire reels 7, 8 is formed to cut the workpiece W into The cutting portion 20 of the sheet. Further, between the pair of wire reels 7, 8, a wire travel path 9 on the side of the one side wire reel 7 between the cutting portion 20 and a wire travel path 10 on the other side of the wire reel 8 are provided. Further, in the wire-traveling paths 9, 10, a lateral movement device 11 for laterally operating the fixed abrasive wire 2, and a regulating roller 12 for applying a constant tension to the traveling wire 2 are disposed; The guide roller 13 for fixing the abrasive wire 2 is guided forward and backward of the regulating roller 12 so that the fixed abrasive wire 2 is appropriately fed out from the wire reels 7, 8 and appropriately wound around.
在上述鋼絲捲軸7、8分別連結有未圖示的馬達。驅動該馬達,藉此將上述固定磨粒鋼絲2從一方的鋼絲捲軸7送出,並圍繞於配置在上述切削部20的有槽滑輪3-5之後,回收至另一方的鋼絲捲軸8,在該等鋼絲捲軸7、8間沿著其芯線方向高速行走。 A motor (not shown) is connected to each of the wire reels 7 and 8 described above. The motor is driven to thereby feed the fixed abrasive wire 2 from one of the wire reels 7 and surround the grooved pulley 3-5 disposed in the cutting portion 20, and collect it to the other wire reel 8, where The wire reels 7, 8 are moved at high speed along the direction of their cores.
又,上述固定磨粒鋼絲2,可沿著其芯線方向僅朝著單方向行走(從一方的鋼絲捲軸7朝著另一方的鋼絲捲軸8的方向),或者可以往返行走。本實施形態在切削工件W的場合中,固定磨粒鋼絲2是構成在鋼絲捲軸7、8間往返行走。並且,使得從一方的鋼絲捲軸7所供應固定磨粒鋼絲2的送出量比捲繞在該鋼絲捲軸7的捲繞量長,可以從該鋼絲捲軸7依序送出新的固定磨粒鋼絲而供應至上述鋼絲列30。並且,本實施形態中,設定上述送出量為約400m,回送量設定為397m,構成使供應上述鋼絲列30的固定磨粒鋼絲2在一往返以各3m更換新的固定磨粒鋼絲2。 Further, the fixed abrasive wire 2 can travel only in one direction (from one wire reel 7 toward the other wire reel 8) along the direction of the core, or can travel back and forth. In the case of the present embodiment, in the case of cutting the workpiece W, the fixed abrasive wire 2 is configured to reciprocate between the wire reels 7 and 8. Further, the amount of the fixed abrasive wire 2 supplied from one of the wire reels 7 is made longer than the winding amount wound around the wire reel 7, and a new fixed abrasive wire can be sequentially supplied from the wire reel 7 to be supplied. To the above-mentioned steel wire string 30. In the present embodiment, the feed amount is set to be about 400 m, and the return amount is set to 397 m, so that the fixed abrasive wire 2 to which the wire row 30 is supplied is replaced with a new fixed abrasive wire 2 at a distance of 3 m.
如第1圖或第2圖表示,在上述切削部20配置有由:位在一方鋼絲行走道9側的第1有槽滑輪3;位在另一方鋼絲行走道10側的第2有槽滑輪4;及位在該等第1及第2有槽滑輪3、4的下方的第3有槽滑輪5構成的三個滑輪。該等三個有槽滑輪3-5為轉軸彼此成平行,配置使各轉軸從其軸向顯示時分別位在三角形的頂點。 As shown in FIG. 1 or FIG. 2, the first grooved pulley 3 positioned on the side of one of the steel wire travel paths 9 and the second grooved pulley positioned on the other side of the other steel wire travel path 10 are disposed in the cutting portion 20. 4; and three pulleys formed by the third grooved pulley 5 located below the first and second grooved pulleys 3, 4. The three grooved pulleys 3-5 are parallel to each other in the rotation axis, and are arranged such that the respective rotation axes are respectively located at the vertices of the triangle when they are displayed from the axial direction thereof.
並且,在有槽滑輪3-5的外圍面分別以預定的間距形成有複數固定磨粒鋼絲2之定位用的環狀的鋼絲槽14,上述固定磨粒鋼絲2是一邊卡合於該等有槽滑輪3-5的鋼絲槽14並繞掛成螺旋狀。藉此,上述第1及第2有槽滑輪3、4之間,在與上述轉軸成平行的傳動方向形成以預定的間距間隔排列有固定磨粒鋼絲2的鋼絲列30。並且,本實施形態的鋼絲列30是將長度約800m左右的固定磨粒鋼絲2張設於有槽滑輪3-5間,朝上述傳動方向以0.3mm的間距並排設置該固定磨粒鋼絲2。 Further, on the outer peripheral surface of the grooved pulley 3-5, a ring-shaped wire groove 14 for positioning a plurality of fixed abrasive wires 2 is formed at a predetermined pitch, and the fixed abrasive wire 2 is engaged with one another. The wire groove 14 of the groove pulley 3-5 is wound in a spiral shape. Thereby, between the first and second grooved pulleys 3 and 4, a wire row 30 in which the fixed abrasive wire 2 is arranged at a predetermined pitch is formed in a direction parallel to the rotation axis. Further, in the wire array 30 of the present embodiment, the fixed abrasive wires 2 having a length of about 800 m are stretched between the grooved pulleys 3-5, and the fixed abrasive wires 2 are arranged side by side at a pitch of 0.3 mm in the transmission direction.
又,切削部20中,在上述鋼絲列30的張設方向的中央上方,沿著上述傳動方向配置有形成橫長的上述工件供應台6,藉著未圖示的台傳動裝置,相對於鋼絲列30自由升降地驅動。伴隨工件供應台6朝著鋼絲列30的下降,將固定在該工件供應台6下面的工件W朝著該鋼絲列30推壓進行切削,其結果,構成同時將該工件W裁切多數薄片的晶圓。並且,只要可相對於鋼絲列30相對地推壓工件W,例如,一邊保持著三個有槽滑輪3-5的 相對位置關係,並藉著使該等有槽滑輪3-5上升、下降的升降裝置,構成使鋼絲列30朝向固定在工件供應台6的工件W上升即可。或者,工件供應台6及鋼絲列30的其中一方,也可移動地構成彼此接近。 Further, in the cutting portion 20, a horizontally long workpiece supply table 6 is disposed along the transmission direction in the center of the extending direction of the wire row 30, and the wire is driven relative to the wire by a table transmission (not shown). Column 30 is driven freely up and down. As the workpiece supply table 6 descends toward the wire row 30, the workpiece W fixed under the workpiece supply table 6 is pressed against the wire row 30 to be cut, and as a result, the workpiece W is simultaneously cut into a plurality of sheets. Wafer. Further, as long as the workpiece W can be relatively pressed against the wire row 30, for example, three grooved pulleys 3-5 are held while In the relative positional relationship, the lifting device for raising and lowering the grooved pulleys 3-5 is configured to raise the wire row 30 toward the workpiece W fixed to the workpiece supply table 6. Alternatively, one of the workpiece supply table 6 and the wire row 30 may be movably configured to be close to each other.
如第3圖表示,在上述工件供應台6,設有:固定工件W用的工件固定部15,及固定修整用磨石41、42用的磨石固定部16、17。 As shown in Fig. 3, the workpiece supply table 6 is provided with a workpiece fixing portion 15 for fixing the workpiece W, and grindstone fixing portions 16 and 17 for fixing the dressing stones 41 and 42.
上述工件固定部15是設置在與鋼絲列30(第1圖的下方側)鄰接的工件供應台6之下面側的上述傳動方向的大致中央位置,沿著該傳動方向,安裝在沿著上述工件W的長方向的一側面。並且,在工件固定部15安裝有隔板材等的基底,將上述工件W藉黏著劑等透過該基底固定。 The workpiece fixing portion 15 is provided at a substantially central position of the driving direction on the lower surface side of the workpiece supply table 6 adjacent to the wire row 30 (the lower side of the first drawing), and is mounted along the workpiece along the driving direction. One side of the long direction of W. Further, a base plate or the like is attached to the workpiece fixing portion 15, and the workpiece W is fixed to the substrate by an adhesive or the like.
上述磨石固定部16、17是由第1磨石固定部16與第2磨石固定部17所構成,與上述工件固定部15同樣,分別設置在工件供應台6的下面側。具體而言,第1磨石固定部16是在上述傳動方向之工件固定部15的更上游側,與該工件固定部15鄰接配置,並且第2磨石固定部17是在上述傳動方向之工件固定部15的更下游側,與該工件固定部15鄰接配置。 The grindstone fixing portions 16 and 17 are composed of the first grindstone fixing portion 16 and the second grindstone fixing portion 17, and are provided on the lower surface side of the workpiece supply table 6, similarly to the above-described workpiece fixing portion 15. Specifically, the first grindstone fixing portion 16 is disposed on the upstream side of the workpiece fixing portion 15 in the transmission direction, and is disposed adjacent to the workpiece fixing portion 15, and the second grindstone fixing portion 17 is a workpiece in the above-described transmission direction. The downstream side of the fixing portion 15 is disposed adjacent to the workpiece fixing portion 15.
兩個修整用磨石41、42是以黏著劑等固定於磨石固定部16、17。如第3圖表示,第1修整用磨石41是安裝在上述第1磨石固定部16,並且第2修整用磨石42是安裝在上述第2磨石固定部17。藉此,如第2圖表 示,上述傳動方向中,在固定著工件W之工件固定部15的更上游側配置有第1修整用磨石41,第2修整用磨石42是配置在工件固定部15的更下游側所構成。該等修整用磨石41、42是分別形成大致矩形的平板狀(大致長方形體),在固定著工件W的狀態下,配置使該等的板厚方向之一方的側端面分別與工件W的長方向的各側端面相對。 The two dressing grindstones 41 and 42 are fixed to the grindstone fixing portions 16 and 17 with an adhesive or the like. As shown in FIG. 3, the first dressing grindstone 41 is attached to the first grindstone fixing portion 16, and the second dressing grindstone 42 is attached to the second grindstone fixing portion 17. Taking this as the second chart In the above-described transmission direction, the first dressing grindstone 41 is disposed on the upstream side of the workpiece fixing portion 15 to which the workpiece W is fixed, and the second dressing grindstone 42 is disposed on the downstream side of the workpiece fixing portion 15. Composition. The dressing stones 41 and 42 are formed into a substantially rectangular flat plate shape (a substantially rectangular shape), and the side end faces of one of the plate thickness directions are respectively placed on the workpiece W in a state in which the workpiece W is fixed. The end faces of the long sides are opposed to each other.
此時,與第1修整用磨石41之鋼絲列30相對的前端面41a是較與第2修整用磨石42之鋼絲列30相對的前端面42a更朝向該鋼絲列30側突出。並且,在工件固定部15固定著工件W的狀態,使得上述第1修整用磨石的前端面41a比和鋼絲列30相對的工件W的前端面W1,更朝向該鋼絲列30側突出。另一方面,上述第2修整用磨石42的前端面42a是在工件固定部15固定著工件W的狀態,僅從該工件W的前端面W1與鋼絲列30分開大致相同的距離,其結果,兩前端面42a、W1形成大致同一面。並且,針對該等修整用磨石41、42,也可透過隔板固定於上述磨石固定部16、17。 At this time, the distal end surface 41a opposed to the wire row 30 of the first dressing grindstone 41 protrudes toward the wire row 30 side from the distal end surface 42a opposed to the wire row 30 of the second dressing grindstone 42. In the state in which the workpiece W is fixed to the workpiece fixing portion 15, the front end surface 41a of the first dressing grindstone protrudes toward the side of the steel wire row 30 from the front end surface W1 of the workpiece W facing the steel wire row 30. On the other hand, the distal end surface 42a of the second dressing grindstone 42 is in a state in which the workpiece W is fixed to the workpiece fixing portion 15, and the distal end surface W1 of the workpiece W is separated from the steel wire array 30 by substantially the same distance. The front end faces 42a and W1 form substantially the same face. Further, the dressing stones 41 and 42 may be fixed to the grindstone fixing portions 16 and 17 through the partition plate.
第1及第2修整用磨石41、42是配置在形成鋼絲列30的複數固定磨粒鋼絲2群之中,位於上述傳動方向的最上游側的固定磨粒鋼絲2與位在相同傳動方向最下游側的固定磨粒鋼絲2之間。藉此,以第1修整用磨石41修整比上述傳動方向的工件W位在上游側的新的(未使用的)固定磨粒鋼絲2除去磨粒前端的金屬電鍍,在進 行工件W切削之前可使得磨粒的前端(尖端)露出。並且,伴隨固定磨粒鋼絲2的往返行走,在固定磨粒鋼絲2切削工件W之後以該修整用磨石41再度進行修整,可藉此抑制起因於切削工件W而導致切削層的堵塞。另外,第2修整用磨石42也進行切削上述工件W之後的固定磨粒鋼絲的修整,可除去附著在固定磨粒鋼絲的切屑抑制上述的堵塞。 The first and second dressing grindstones 41 and 42 are disposed in a plurality of fixed abrasive grain steel wires 2 forming the steel wire row 30, and the fixed abrasive wire 2 located on the most upstream side in the above-described transmission direction is positioned in the same transmission direction. Between the fixed abrasive wires 2 on the most downstream side. Thereby, the first (grinding) grindstone 41 is used to trim the metal plating of the front end of the abrasive grain by the new (unused) fixed abrasive wire 2 on the upstream side of the workpiece W in the above-mentioned transmission direction. The leading end (tip) of the abrasive grain can be exposed before the workpiece W is cut. Further, with the reciprocating travel of the fixed abrasive wire 2, the workpiece W is cut after the fixed abrasive wire 2 is cut, and the dressing grindstone 41 is again trimmed, thereby suppressing clogging of the cutting layer due to the cutting of the workpiece W. In addition, the second dressing grindstone 42 also trims the fixed abrasive wire after the workpiece W is cut, and removes the chips adhering to the fixed abrasive wire to suppress the above-described clogging.
並且,該等修整用磨石41、42也可綜合地酌量固定在固定磨粒鋼絲2之芯材的磨粒的種類、粒徑、集中度或電鍍層的金屬材料等適當加以使用。如上述,第1修整用磨石41主要是在切削開始之前使得固定磨粒鋼絲2的磨粒突出,與第2修整用磨石42比較粗。又,對於修整用磨石的板厚,可配合固定磨粒鋼絲2的線徑或傳動量等適當選擇。例如,本實施形態中,第1修整用磨石41的板厚是使用約30mm左右,可在鋼絲列30接觸的狀態修整約100條左右的固定磨粒鋼絲2群。 Further, the dressing stones 41 and 42 may be appropriately used in combination with the type, particle diameter, concentration, or metal material of the plating layer fixed to the core material of the fixed abrasive wire 2, as appropriate. As described above, the first dressing grindstone 41 mainly causes the abrasive grains of the fixed abrasive wire 2 to protrude before the start of cutting, and is thicker than the second dressing grindstone 42. Moreover, the thickness of the dressing grindstone can be appropriately selected in accordance with the wire diameter or the amount of transmission of the fixed abrasive wire 2. For example, in the present embodiment, the thickness of the first dressing grindstone 41 is about 30 mm, and about 200 fixed abrasive wires can be trimmed in a state where the steel wire row 30 is in contact with each other.
切削上述工件W的場合,首先,如上述,將固定磨粒鋼絲2安裝在線鋸1上呈螺旋狀繞掛於上述有槽滑輪3-5間藉此形成鋼絲列30。並在上述工件供應台6的工件固定部15固定工件W,並同樣在設置於工件供應台6的第1磨石固定部16,固定上述第1修整用磨石41,在第2磨石固定部17固定上述第2修整用磨石42。再者,如第3圖表示。在固定著工件W與修整用磨石41、42的狀態,分別配置該等第1及第2修整用磨石41、42 使該等的上述一方的側端面與工件W的上述各側端面成為非接觸狀態,但是例如,也可配置使該等修整用磨石41、42之中的其中一方與工件W接觸,或配置使得兩修整用磨石41、42皆與工件W接觸。 When the workpiece W is cut, first, as described above, the fixed abrasive wire 2 is attached to the wire saw 1 and spirally wound around the grooved pulleys 3-5 to form the wire row 30. The workpiece W is fixed to the workpiece fixing portion 15 of the workpiece supply table 6, and the first dressing grindstone 41 is fixed to the first grindstone fixing portion 16 of the workpiece supply table 6, and the second grindstone is fixed to the second grindstone. The second trimming stone 42 is fixed to the portion 17. Furthermore, it is shown in Fig. 3. The first and second dressing stones 41 and 42 are disposed in a state in which the workpiece W and the dressing stones 41 and 42 are fixed. The one end surface of the one surface is brought into a non-contact state with each of the side end surfaces of the workpiece W. For example, one of the dressing stones 41 and 42 may be placed in contact with the workpiece W or may be disposed. The two dressing grindstones 41, 42 are brought into contact with the workpiece W.
隨後,驅動未圖示的馬達使得一對的鋼絲捲軸7、8旋轉時,上述固定磨粒鋼絲2在其芯線方向高速行走,並將上述鋼絲列30依序朝著上述傳動方向傳動。並且,使工件供應台6隨著朝向該鋼絲列30而依序下降,以兩個修整用磨石41、42一邊修整比上述工件W位於傳動方向之上游側及下游側的固定磨粒鋼絲2,並以鋼絲列30的間距間隔緩緩地切削固定在該工件供應台6的工件固定部15的工件W,最終可同時裁斷複數片的晶圓。 Subsequently, when a motor (not shown) is driven to rotate the pair of wire reels 7, 8, the fixed abrasive wire 2 travels at a high speed in the direction of the core, and the wire row 30 is sequentially driven in the above-described transmission direction. Further, the workpiece supply table 6 is sequentially lowered toward the wire row 30, and the fixed abrasive wires 2 which are located on the upstream side and the downstream side of the workpiece W in the transmission direction are trimmed by the two dressing stones 41 and 42. The workpiece W fixed to the workpiece fixing portion 15 of the workpiece supply table 6 is gradually cut at intervals of the pitch of the steel wire rows 30, and finally, the plurality of wafers can be simultaneously cut.
針對固定磨粒鋼絲2的修整方法進一步具體說明。首先,從上述工件供應台6之下降前的狀態(第3圖),使該工件供應台6朝向行走中的鋼絲列30下降一定距離。並且,如第4圖表示,將配置在比傳動方向的工件W上游側的鋼絲列30的複數條固定磨粒鋼絲2群,接觸於較工件W之前端面更向鋼絲列30側突出的第1修整用磨石41(前端面41a)。此時,上述鋼絲列30是位在與上述工件W非接觸狀態。一邊維持著此狀態並使工件供應台6緩緩下降,藉此,固定磨粒鋼絲2在第1修整用磨石41一邊形成切入槽18並在該修整用磨石41的槽18內修整,削除包覆磨粒表面的金屬電鍍使磨粒的尖端露 出。 The dressing method for the fixed abrasive wire 2 is further specifically described. First, from the state before the lowering of the workpiece supply table 6 (Fig. 3), the workpiece supply table 6 is lowered by a predetermined distance toward the traveling steel wire string 30. In addition, as shown in Fig. 4, the plurality of fixed abrasive wire 2 groups arranged in the wire row 30 on the upstream side of the workpiece W in the transmission direction are in contact with the first end of the workpiece W. The grinding stone 41 (front end surface 41a) is trimmed. At this time, the above-described wire row 30 is in a state of being non-contact with the workpiece W. While maintaining the state and gradually lowering the workpiece supply table 6, the fixed abrasive wire 2 is formed into the cut groove 18 in the first dressing grindstone 41 and trimmed in the groove 18 of the dressing grindstone 41. Metal plating that removes the surface of the coated abrasive grain to expose the tip of the abrasive grain Out.
再者,該工件W切削開始之前進行的修整是將該鋼絲2,至少在切削時跨架設在與工件W抵接之範圍的長度左右(亦即,繞掛於第1及第2修整用磨石41、42間的長度左右)進行修整。如此一來,可以從最初磨粒的尖端即露出的固定磨粒鋼絲2開始進行工件W的切削。並且,該修整中,固定磨粒鋼絲2也可不往返行走而是朝一方側高速行走,藉此縮短修整耗費的時間。 Further, the trimming performed before the start of the cutting of the workpiece W is such that the steel wire 2 is spanned at least about the length of the range in contact with the workpiece W during the cutting (that is, wound around the first and second trimming mills). The length of the stone 41 and 42 is trimmed. In this way, the cutting of the workpiece W can be started from the tip of the initial abrasive grain, that is, the exposed fixed abrasive wire 2 . Further, in the trimming, the fixed abrasive wire 2 can be moved at a high speed on one side without going back and forth, thereby shortening the time required for trimming.
並且,藉第1修整用磨石41,在完成切削開始前的上述固定磨粒鋼絲2的修整之後,使得工件W的前端面W1與複數的固定磨粒鋼絲2群接觸開始進行該工件W的切削(第5圖)。此時,如上述,切削工件W的複數的固定磨粒鋼絲2群已被第1修整用磨石41所修整,露出磨粒的前端(尖端)。為此,防止切削初期之固定磨粒鋼絲2的鋒利度不足,抑制產生於工件W之切削面的切屑的產生,可穩定且高精度進行工件W的切削。又,構成上述鋼絲列30的固定磨粒鋼絲2也和第2修整用磨石42接觸,與第1修整用磨石41一起切入該第2修整用磨石42,藉此與上述工件W的上游側同樣也在工件W的下游側進行複數固定磨粒鋼絲2群的修整。並且,進一步使得工件供應台6下降,如第6圖表示,固定磨粒鋼絲2是在第1及第2修整用磨石41、42形成切入槽18、19一邊進行修整,並在上述工件W形成切入槽50緩緩進行切削。並且,最後完成工件W的裁斷,在進行新的工 件W的切削加工的場合,將載放於工件供應台6的裁斷加工後的工件W與修整用磨石41、42更換成新品,以上述的順序,一邊進行固定磨粒鋼絲2的修整並進行工件W的切削。 Further, by the first dressing grindstone 41, after finishing the fixing of the fixed abrasive wire 2 before the start of cutting, the front end face W1 of the workpiece W is brought into contact with a plurality of fixed abrasive wire 2 groups to start the workpiece W. Cutting (Fig. 5). At this time, as described above, the plurality of fixed abrasive wire 2 groups for cutting the workpiece W are trimmed by the first dressing grindstone 41 to expose the tip end (tip) of the abrasive grains. Therefore, the sharpness of the fixed abrasive wire 2 at the initial stage of cutting is prevented from being insufficient, and the generation of chips generated on the cutting surface of the workpiece W is suppressed, and the workpiece W can be cut stably and accurately. Further, the fixed abrasive wire 2 constituting the steel wire row 30 is also in contact with the second dressing grindstone 42 and cut into the second dressing grindstone 42 together with the first dressing grindstone 41, thereby the workpiece W On the upstream side, the plurality of fixed abrasive wire 2 groups are also trimmed on the downstream side of the workpiece W. Further, the workpiece supply table 6 is further lowered. As shown in Fig. 6, the fixed abrasive wire 2 is trimmed while the first and second dressing stones 41 and 42 are formed into the cut grooves 18 and 19, and the workpiece W is The cutting groove 50 is formed to gradually cut. And, finally, the cutting of the workpiece W is completed, and a new work is being carried out. In the case of the cutting of the workpiece W, the workpiece W placed on the workpiece supply table 6 and the dressing stones 41 and 42 are replaced with new ones, and the fixed abrasive wire 2 is trimmed in the above-described order. The cutting of the workpiece W is performed.
如上述,根據本實施形態的固定磨粒線鋸1,可相對於工件供應台6使得第1修整用磨石41,在比固定磨粒鋼絲2的上述傳動方向的工件W上游側的位置,以鄰接該工件W固定的簡單的構成,在該工件W的切削開始之前修整固定磨粒鋼絲2進行磨粒的露出。並且,將該修整用磨石41和工件W一起設置在相同的工件供應台6上,藉此例如可容易進行工件W及修整用磨石的更換等的維護作業等,運用面也可實現優異的效果。 As described above, according to the fixed abrasive wire saw 1 of the present embodiment, the first dressing grindstone 41 can be positioned on the upstream side of the workpiece W in the above-described transmission direction of the fixed abrasive wire 2 with respect to the workpiece supply table 6. In a simple configuration in which the workpiece W is fixed adjacent to the workpiece W, the fixed abrasive wire 2 is trimmed before the start of cutting of the workpiece W to expose the abrasive grains. In addition, the dressing grindstone 41 and the workpiece W are provided on the same workpiece supply table 6, and the maintenance work such as the replacement of the workpiece W and the dressing grindstone can be easily performed, and the operation surface can be excellent. Effect.
並且,本實施形態中,雖設有兩個修整用磨石41、42,但不限於此。例如,上述工件W為黏性低的鑄錠的場合等,鋼絲列30下游側的修整並非必需時,可不設置第2修整用磨石42,只需在第1磨石固定部16配置第1修整用磨石41即可。又,對於修整用磨石的形狀,例如與鋼絲列30鄰接的前端面也可以形成圓弧形,或朝鋼絲列30形成銳角狀的尖端細(或尖端寬)的形狀,可選擇適當的形狀。並且,如本實施形態,在上述固定磨粒鋼絲2往返行走的場合,該固定磨粒鋼絲2的往返行走長度(傳動量、回送量)可配合工件W的長度、原材料等適當設定。又,雖設上述工件W為四角柱形,但只要可固定於工件固定部15,例如也可使用圓柱形的鑄 錠。 Further, in the present embodiment, the two dressing stones 41 and 42 are provided, but the invention is not limited thereto. For example, when the workpiece W is an ingot having a low viscosity, and the trimming on the downstream side of the wire row 30 is not necessary, the second dressing grindstone 42 may not be provided, and the first grindstone fixing portion 16 may be disposed first. The grinding stone 41 can be used for dressing. Further, for the shape of the dressing grindstone, for example, the front end surface adjacent to the steel wire row 30 may be formed in a circular arc shape, or an acute-angled tip (or a wide tip end) shape may be formed toward the steel wire row 30, and an appropriate shape may be selected. . Further, in the present embodiment, when the fixed abrasive wire 2 is reciprocated, the reciprocating length (transmission amount, return amount) of the fixed abrasive wire 2 can be appropriately set in accordance with the length of the workpiece W, the material, and the like. Further, although the workpiece W is formed in a quadrangular prism shape, as long as it can be fixed to the workpiece fixing portion 15, for example, a cylindrical casting can be used. ingot.
以上,針對本發明相關之固定磨粒線鋸及固定磨粒鋼絲的修整方法已作說明,但本發明不限於上述的實施形態,在不脫離申請專利範圍的主旨內當然可進行種種的設計變更。 As described above, the fixing method of the fixed abrasive wire saw and the fixed abrasive wire according to the present invention has been described. However, the present invention is not limited to the above-described embodiments, and various design changes can of course be made without departing from the scope of the patent application. .
2‧‧‧固定磨粒鋼絲 2‧‧‧Fixed abrasive wire
3‧‧‧有槽滑輪 3‧‧‧Slotted pulley
4‧‧‧有槽滑輪 4‧‧‧Slotted pulley
5‧‧‧有槽滑輪 5‧‧‧Slotted pulley
6‧‧‧工件供應台 6‧‧‧Workpiece supply station
14‧‧‧鋼絲槽 14‧‧‧ wire trough
20‧‧‧切削部 20‧‧‧cutting department
30‧‧‧鋼絲列 30‧‧‧Steel line
41‧‧‧第1修整用磨石 41‧‧‧1st trimming millstone
42‧‧‧第2修整用磨石 42‧‧‧2nd trimming millstone
W‧‧‧工件 W‧‧‧Workpiece
Claims (9)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-212079 | 2015-10-28 | ||
| JP2015212079A JP6270796B2 (en) | 2015-10-28 | 2015-10-28 | Fixed abrasive wire saw and fixed abrasive wire dressing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201726323A true TW201726323A (en) | 2017-08-01 |
| TWI729010B TWI729010B (en) | 2021-06-01 |
Family
ID=58710211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105132579A TWI729010B (en) | 2015-10-28 | 2016-10-07 | Fixed abrasive grain wire saw and method for dressing fixed abrasive grain wire |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6270796B2 (en) |
| KR (1) | KR20170049411A (en) |
| CN (1) | CN106626111B (en) |
| MY (1) | MY177757A (en) |
| TW (1) | TWI729010B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6693460B2 (en) * | 2017-04-04 | 2020-05-13 | 信越半導体株式会社 | Work cutting method |
| CN107457452A (en) * | 2017-09-28 | 2017-12-12 | 张家港天工机械制造有限公司 | One kind is put the first edge on a knife or a pair of scissors rewinding machine edging device |
| JP6819621B2 (en) * | 2018-01-25 | 2021-01-27 | 信越半導体株式会社 | Work cutting method and wire saw |
| CN110421213A (en) * | 2019-07-03 | 2019-11-08 | 苏州锦美川自动化科技有限公司 | Put the first edge on a knife or a pair of scissors at a high speed rewinding machine |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1128654A (en) * | 1997-07-04 | 1999-02-02 | Tokyo Seimitsu Co Ltd | Dressing method and device of fixed abrasive grain wire saw |
| EP2343155B1 (en) * | 2003-10-27 | 2014-08-20 | Mitsubishi Denki Kabushiki Kaisha | Multi-wire saw |
| JP4411062B2 (en) * | 2003-12-25 | 2010-02-10 | 株式会社アライドマテリアル | Super abrasive wire saw winding structure, super abrasive wire saw cutting device, and super abrasive wire saw winding method |
| JP2011031386A (en) * | 2009-07-10 | 2011-02-17 | Mitsubishi Chemicals Corp | Electro-deposition fixed abrasive grain wire and crystal slicing method using the same |
| WO2013172353A1 (en) * | 2012-05-15 | 2013-11-21 | 電気化学工業株式会社 | Processing apparatus and method for processing laminated article |
| KR20140090906A (en) * | 2013-01-10 | 2014-07-18 | 주식회사 엘지실트론 | Wire saw and method for slicing ingot using the same |
| JP2015009346A (en) * | 2013-07-02 | 2015-01-19 | パナソニック株式会社 | Electrolytic dressing method and electrolytic dressing device |
-
2015
- 2015-10-28 JP JP2015212079A patent/JP6270796B2/en active Active
-
2016
- 2016-10-07 TW TW105132579A patent/TWI729010B/en active
- 2016-10-21 MY MYPI2016703868A patent/MY177757A/en unknown
- 2016-10-25 KR KR1020160138958A patent/KR20170049411A/en not_active Withdrawn
- 2016-10-28 CN CN201610970750.0A patent/CN106626111B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN106626111B (en) | 2020-01-07 |
| KR20170049411A (en) | 2017-05-10 |
| MY177757A (en) | 2020-09-23 |
| JP2017080849A (en) | 2017-05-18 |
| TWI729010B (en) | 2021-06-01 |
| CN106626111A (en) | 2017-05-10 |
| JP6270796B2 (en) | 2018-01-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6079554B2 (en) | Manufacturing method of semiconductor wafer | |
| US20150099428A1 (en) | Dicing Device and Dicing Method | |
| JP2015066677A (en) | Method for simultaneously cutting a multiplicity of wafers from workpiece | |
| TW201726323A (en) | Fixed abrasive grain wire saw and method for dressing fixed abrasive grain wire that comprise a fixed abrasive grain wire, a workpiece supply table having a workpiece fixing section for fixing a workpiece, and a dressing stone | |
| JP2000158319A (en) | Diamond wire saw and cutting method | |
| CN102513899A (en) | Single-direction inclined-shaft profiling precision grinding method of array optical elements of micro circular troughs | |
| JP2009184023A (en) | Workpiece cutting method using wire saw and wire saw cutting device | |
| CN110461543B (en) | Workpiece cutting method | |
| JP2015020235A (en) | Cutting method for work piece and wire saw | |
| JPH1128654A (en) | Dressing method and device of fixed abrasive grain wire saw | |
| JP5876388B2 (en) | Workpiece cutting method | |
| JP6719637B2 (en) | Grooving device using wire saw and its method | |
| JP6270921B2 (en) | Cutting device with blade dressing mechanism | |
| JP2674207B2 (en) | Cutting method for brittle materials | |
| JP6705399B2 (en) | Wafer manufacturing method | |
| JPH07205141A (en) | Method and apparatus for cutting wafer by wire saw | |
| CN110545957B (en) | Workpiece cutting method and joining parts | |
| KR20230041784A (en) | Method and apparatus for simultaneously separating a plurality of disks from a workpiece | |
| CN223617977U (en) | Diamond wire dicer | |
| JP2002052455A5 (en) | ||
| JP5945967B2 (en) | Work cutting method and wire saw | |
| JP2002046067A5 (en) | ||
| JP2003025210A (en) | Wire saw device and simultaneous cutting method | |
| CN117962134A (en) | Quartz boat groove cutting device and composite processing method | |
| JP2013099796A (en) | Fixed abrasive grain wire, cutting device with the same, and wafer |