TW201811452A - Internal purge diffuser with offset manifold - Google Patents

Abstract

A purge tower assembly for a substrate container. The assembly may include a purge interface body, including a base portion and a top portion, for mounting to a bottom plate of a substrate container. The base portion may include a substantially tubular base sidewall and the top portion may have a top sidewall positioned on the top edge of the base portion. The top portion may include an inlet nozzle for mounting through a rearward inlet in the bottom plate. The inlet nozzle may have a substantially tubular sidewall extending upwardly from the top sidewall and defining an interior of the inlet nozzle. The base portion and the top sidewall may define an offset conduit portion disposed connected to the base portion and the inlet nozzle, the base portion and the inlet nozzle in fluid communication via the offset conduit portion.

Description

Internal cleaning sprayer with offset manifold

The present invention relates generally to cleaning systems for use in microenvironments, and more particularly to sprinkler towers for substrate containers.

During the insertion or removal of the substrate from a substrate container, dust marks, gaseous impurities or increased humidity can be introduced into the substrate container, adversely affecting the yield of the resident wafer. Accordingly, there is an increased demand during the handling of the substrate to control one of the environments within such containers to achieve or maintain a high level of cleanliness. In some embodiments, a microenvironment within the container is cleaned by injecting an interior of a substrate container through an inlet port to cause air within the container to exit an inert gas through an outlet port. Systems and methods for delivering a cleaning gas into the container have been designed to provide an improved environment within the container. Since the front opening wafer transfer cassette (FOUP) was developed, the bottom cleaning port was introduced by the carrier manufacturer to clean the internal environment using clean dry air (CDA) or inert cleaning. These cleaning modules are introduced below the inner bottom surface of the FOUP housing. When introducing a cleaning sprinkler, we will understand that if the sprinkler is axially assembled to the cleaning interface, the sprinkler will not only interfere with the wafer disposal exclusion volume but also interfere with the wafers stored inside the FOUP. In contrast, the sprinkler tube is designed to be axially offset toward the interior without any modifications to the existing shell design. U.S. Patent No. 9,054,144, the disclosure of which is incorporated herein by reference to the entire entire entire entire entire entire entire entire entire entire entire entire entire entire entire portion The offset conduit enables the tower portion to be offset toward the back of the container, thereby enabling the interior space to be better used for substrate storage and disposal and to provide a more compact design. The disclosure of Burns is hereby incorporated by reference in its entirety, in its entirety, in its entirety, in its entirety in its entirety.

Conventional cleaning towers utilizing an offset conduit are configured such that the offset conduit is located inside the substrate container and projects upwardly from the floor of the substrate container such that the offset conduit portion is not flush with the floor. Although the catheter can be sized to pass the bottommost wafer over the catheter, it has been found that the protruding conduit can interfere with the operation of the robotic end effector during insertion or removal of the bottommost wafer. Interference can cause collisions between the end effector and the conduit, thereby creating particles and can also cause improper handling of the wafer. Another problem associated with conventional offset cleaning towers is that conventional offset cleaning towers must be mounted to the interior of the substrate container. For configurations in which the offset cleaning tower has a total length greater than the floor-to-ceiling gap of the substrate container, problems can arise when attempting to erect the cleaning tower during assembly. The upper end of the sprinkler portion can collide with the ceiling of the substrate container, which can damage one or both of the sprinkler portion and the substrate container. In some instances, it may be desirable to compromise the desired length of the sprinkler portion. Various embodiments of the present invention are directed to a cleaning sprinkler assembly that releases additional space within a wafer container for wafer storage and manipulation while allowing gas flow of cleaning gas. Accordingly, various embodiments of the present invention present a lower probability of contaminating one of the inner surfaces of the substrate container due to a collision between the end effector and the cleaning tower assembly. Moreover, in various embodiments of the invention, the effective length of the sprinkler portion of the cleaning tower assembly is increased such that the cleaning gas outlet is located closer to the floor of the substrate container than with conventional cleaning tower assemblies. By positioning the cleaning outlet closer to the floor, the flow of cleaning gas below the bottommost wafer of the substrate container can be increased to improve cleaning performance. Various embodiments of the present invention provide an offset conduit located outside of the substrate container rather than inside the container, the conduit being routed under the floor of the substrate container. The additional space provided by positioning the offset conduit outside of the substrate container enables the robotic end effector to be manipulated under one of the bottommost wafers without colliding with the offset conduit. Additionally, some embodiments are configured such that the sprinkler portion of the cleaning tower can function at the floor level of the substrate container. That is, the effective length of the sprinkler portion begins at a height on the portion of the sprinkler that corresponds to the floor of the substrate container. This allows the cleaning gas to enter the substrate container at the floor level such that the clean gas stream below the bottommost substrate increases relative to conventional cleaning towers. In one embodiment, the effective portion of the sprinkler portion is reduced by up to 4.5 mm relative to conventional sprinklers. Some embodiments of the present invention present an externally offset cleaning tower assembly that is assembled externally and that can be mounted and removed from the exterior of the substrate container. Some embodiments of the invention include a sprinkler portion detachable and reattachable to one of the cleaning interface bodies of the external offset cleaning tower assembly such that the sprinkler portion is mounted to the substrate container after the cleaning interface body Attached to the cleaning interface body. The problem of excessive length of the cleaning tower assembly is eliminated by both of these embodiments. Embodiments for reducing the profile of the conduit by providing a recess in the floor of the container through which the internal conduit is routed are also contemplated. The offset conduit and recess can be sized such that the uppermost end of the offset conduit is at or below the inner plane of the floor of the substrate container. In this embodiment, the reduced profile of the offset conduit (although located internally) provides the same effect as an externally offset conduit relative to the end effector gap and enhances cleaning of the bottommost substrate. Various embodiments of the present invention are directed to a cleaning tower assembly for a substrate container that includes a cleaning interface body for attachment to a bottom plate of a substrate container. The cleaning interface body can include a base portion and a top portion. The base portion can have a substantially tubular base sidewall extending upwardly from a bottom edge to a top edge. The bottom edge can define a first aperture for accessing to one of the interior portions of the base portion, the first aperture being concentric about a first axis. In one or more embodiments, the top portion is coupled to the top edge of the base portion. The top portion can have a top edge positioned on the top edge of the base portion to cover upwardly one of the bottom apertures. The top portion can include an inlet nozzle for mounting one of the inlets through the substrate container. The inlet nozzle can have a substantially tubular nozzle sidewall extending upwardly from the top sidewall to a nozzle edge. The nozzle edge can define a second aperture for accessing one of the interior of the inlet nozzle, the second aperture being concentric about a second axis. In a particular embodiment, the second axis is substantially parallel to the first axis and is positioned on a rear side of the first axis. In one or more embodiments, the cleaning interface body includes an offset conduit portion disposed between the base portion and the inlet nozzle. The base portion and the inlet nozzle are fluidly connectable via the offset conduit portion. The cleaning tower assembly includes a sprinkler portion. In one or more embodiments, the sprinkler portion includes a sprinkler portion that includes a perforated sprinker sidewall and defines a sprinkler passage that extends along a sprinkler axis to the sprinkler portion. The sprinkler sidewall may define an opening at one of the bottom portions of the sprinkler portion operatively coupled to the inlet nozzle for fluid communication between the base portion and the spout portion. Additionally or alternatively, the sprinkler portion can include a housing having a plurality of through apertures formed therein. The above [invention] is not intended to describe the illustrated embodiments or each embodiment of the present invention.

RELATED APPLICATIONS This application claims the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of the benefit of The entire contents of these patent applications are incorporated herein by reference. Referring to Figure 1, a substrate container 30 for storing a plurality of substrates in accordance with an embodiment of the present invention is depicted. As used herein, the plurality of substrates comprise substrates for use in the manufacture of semiconductors, printed circuit boards, flat panel displays, and/or the like. To illustrate, a single substrate 32a is presented. In a particular embodiment, substrate container 30 includes two opposing side portions 34, a top portion 36, a bottom plate 38, and a back portion 42. The bottom plate 38 defines an inner surface of the substrate container 30 or the floor 40. One of the front portions 44 of the substrate container 30 includes a door frame 46 that defines a door opening 48 for insertion and removal of the substrate 32. A door 52 is adapted to seal and cover the door opening 48. The door opening 48 of the substrate container 30 lies in a plane substantially parallel to a vertical direction 54. In various embodiments, substrate container 30 is characterized by a microenvironment 64. In one or more embodiments, a pair of slotted sidewalls 66 are disposed within the substrate container 30, each adjacent a respective sidewall portion of the sidewall portion 34. The slotted sidewalls 66 are aligned such that the slots face each other to define a plurality of slot locations 68 and are spaced such that the substrate(s) 32 are supported between them. For the purposes of the present invention, one of the plurality of slot positions 68, the bottommost slot position 68a (i.e., the slot closest to the bottom plate 38) is identified as a "first" slot, wherein the number of slots increases in the upward direction. . To illustrate, such as in Figures 6-8 and 15-16, described below, a substrate 32b is presented and depicted as occupying the bottommost slot 68a. In various embodiments, the substrate container 30 further includes at least one cleaning tower assembly 70 disposed within the substrate container 30. In various embodiments, the cleaning tower assembly 70 is operatively coupled to a source of gas (not depicted) located outside of the substrate container 30 for introducing a gaseous working fluid into the substrate container 30. In a particular embodiment, one or more of the cleaning tower assemblies 70 are oriented to direct the gaseous working fluid toward the door opening 48 to clean the substrate container 30. In a particular embodiment, the substrate container 30 further includes a transport plate 71 positioned below the bottom plate 38. In various embodiments, the transport plate 71 is mounted to the bottom of the substrate container 30 for machine-based positioning and alignment of the substrate container 30 during various substrate processing steps. Referring to Figures 2 through 5, a cleaning tower assembly 70 is depicted in accordance with one embodiment of the present invention. In the depicted embodiment, the cleaning tower assembly 70 includes a cleaning interface body 90 that includes a base portion 94 and a top portion 98. In one or more embodiments, the cleaning interface body 90 is appropriately sized and shaped for external mounting on a substrate container 30. For example, the cleaning interface body can be mounted to one of the transport plates 71 of a substrate container 30. In some embodiments, the cleaning interface body can be mounted to the bottom plate 38. In some embodiments, the cleaning interface body 90 can be mounted between the bottom plate 38 and a transport plate 71. In various embodiments, such as in FIG. 3, base portion 94 has a tubular shape defined by a sidewall 100 extending from a bottom edge 102 to a top edge 106. The tubular shape of the side wall 100 defines an inner portion 110 and defines a bottom aperture 114 at the bottom edge 102 for access to one of the inner portions 110. In various embodiments, base portion 94 includes an assembly for coupling to an external fluid source. For example, in some embodiments, the base portion includes one of the bottom aperture 114 and the inner portion 110, a grommet 118, a filter 122, and a valve 126 (Fig. 4). In a particular embodiment, the bottom aperture 114 is concentric with an axis 130. In one or more embodiments, such as in FIG. 5, sidewall 100 defines a plurality of apertures 119 in base portion 94. In a particular embodiment, each of the apertures 119 is circumferentially spaced about the sidewall 100 and the axis 130. In various embodiments, the apertures 119 are projections projecting from the side of the grommet 118 for fitting and placing the grommet 118 within the interior 110 of the base portion 94. For example, in some embodiments, the grommet 118 is a flexible component and the projections can be elastically compressed during insertion into the interior 110 of the base portion and then flared outwardly to the apertures 119 to lock the grommet in place. . In some embodiments, the base portion 94 includes a support portion 120. The support portion 120 can be an outwardly extending material portion that is integrated with the sidewall 100. In a particular embodiment, the support portion 120 acts as a handle or handle for cleaning the manipulation of the interface body 90. In some embodiments, the support portion 120 is snap-fitted to an undercut feature in the transport plate for mounting the body 90 to a flexible beam of a substrate container, as further described herein. In one or more embodiments, the top portion 98 includes a substantially planar plane and is coupled along the top edge 106 to one of the top sidewalls 134 of the base portion 94. In some embodiments, the top sidewall 134 is coupled to the top of the base portion 94. Base portion 94 and top portion 98 may be joined by techniques available to the skilled artisan (e.g., ultrasonic or thermal welding, snap fit, adhesive bonding) or by other suitable techniques. Additionally, for example, in FIG. 3, the top sidewall 134 can include an offset portion 138 that extends from the base portion 94 to one side. The offset portion 138 can include one of the inlet nozzles 142 offset from the base portion 94. In one or more embodiments, the inlet nozzle 142 has a tubular shape defined by one of the nozzle sidewalls 146 extending upwardly from the top sidewall 134 to a nozzle edge 150. In one or more embodiments, the nozzle sidewall 146 defines an inner portion 154 and a nozzle aperture 158 at the nozzle edge 150. In various embodiments, the nozzle aperture 158 provides access to the inner portion 154 of the inlet nozzle 142. In a particular embodiment, the nozzle aperture 158 is concentric about a second axis 162. In various embodiments, the second axis 162 is substantially parallel to the first axis 130. In one or more embodiments, an offset conduit portion 166 is disposed between the base portion 94 and the inlet nozzle 142 (Figs. 2 and 5). In one or more embodiments, the offset conduit portion 166 cooperates with the offset portion 138 of the top sidewall 134 to provide a passage between the base portion 94 and the inlet nozzle 142 for cleaning the components of the interface body 90. Fluid communication. In operation, fluid passes through check valve 126 and bottom aperture 114, through inner portions 110, 154, and through nozzle aperture 158 into cleaning tower assembly 70. Functionally, the offset conduit 166 diverts airflow from the first axis 130 to the second axis 162. In some embodiments, as shown in FIG. 5, the inlet nozzle 142 includes one of the nozzle sidewalls 146 having a barbed portion 170 and a tapered portion 174 having a barbed nozzle. In a particular embodiment, the barbed portion 170 defines an outer diameter of the inlet nozzle 142 and the tapered portion 174 defines a reduced outer diameter adjacent one of the barbed portions 170. In a particular embodiment, the nozzle sidewall 146 defines a side aperture 178 between the barbed portion 170 and the tapered portion 174. Further, side apertures 178 are used in nozzle side walls 146 for low gas spray to one of the holes or apertures of substrate container 30. In one or more embodiments, the cleaning tower assembly 70 includes a sprinkler portion 182 that is coupled to the inlet nozzle 142 of the cleaning interface body 90. In some embodiments, the sprinkler portion 182 includes a porous or perforated (void) sidewall 186. In some embodiments, the sidewall 186 defines a substantially tubular shape with a sprinkler channel extending from a top surface 190 of the sprinkler portion 182 to a bottom edge 194. In one or more embodiments, the bottom edge 194 of the sprinkler portion 182 defines an aperture 198 at one of the bottom portions 202 of the sprinkler portion 182. In various embodiments, the apertures 198 can be sized for insertion of the inlet nozzle 142 to be operatively coupled therebetween for fluid communication between the base portion 94, the inlet nozzle 142, and the sprinkler portion 182. . In a particular embodiment, the nozzle sidewall 146 includes external threads (not depicted) formed on one of the outer surfaces of the nozzle sidewall 146. The sprinkler portion 182 can include internal threads (not depicted) formed on an inner surface of one of the sprinkler portions. When implemented, the threads of the sprinkler portion 182 are compatible with the threads of the nozzle sidewall 146 to couple between them. In various embodiments, the sprinkler portion 182 includes a widened portion 206 at a bottom portion of the sprinkler portion 182. In a particular embodiment, the widened portion 206 is widened outwardly, having an inner diameter that is increased relative to one of the bodies of the sprinkler portion to be inserted into and coupled to the inlet nozzle 142. Referring to Figures 6-8, a cleaning tower assembly 70 assembled in a substrate container 30 is depicted in accordance with an embodiment of the present invention. In the depicted embodiment, substrate container 30 is identical or substantially similar to cleaning tower assembly 70, as described herein. Accordingly, the same elements are identified by the same reference numerals. In the assembly of, for example, FIG. 8, the cleaning interface body 90 can be assembled to the substrate container 30 by inserting the cleaning interface body 90 upwardly in the direction 210 and placing the inlet tube through one of the rear inlets 214 of the bottom plate 38. The mouth 142 and the cleaning interface body 90 are attached to an outer surface of one of the bottom plates 38 in a rear mounting region 218. In various embodiments, the rear mounting region 218 is interposed between the transport plate 71 and the bottom plate 38. The cleaning interface body 90 can be designed to be assembled to the substrate container 30 for various vertical heights 222 of the cleaning fixture relative to one of the load ports. In various embodiments, the vertical height 222 substantially matches the vertical height of the (several) substrate container. In one or more embodiments, the inlet nozzle 142 is sized such that when mounted to the transfer plate 71 of the substrate container 30, the nozzle edge 150 of the inlet nozzle 142 extends upwardly to approximately the first slot of the substrate container 30. 68a. Once the cleaning interface body 90 is inserted through the inlet 214, the sprinkler portion 182 can be assembled by accessing the inlet nozzle 142 to the rear of the substrate container 30 via the door opening 48. Next, the sprinkler portion 182 is attached to the inlet nozzle 142. Referring to Figures 9-14, various stages of assembly of the cleaning tower assembly 70 within the substrate container 30 are depicted in accordance with one embodiment of the present invention. Substrate container 30 and cleaning tower assembly 70 can be the same or substantially similar, as described herein. Accordingly, the same elements are identified by the same reference numerals. Referring to Figure 9, a bottom perspective view of one of the substrate container 30 and the bottom plate 38 is depicted. In one or more embodiments, the bottom plate 38 includes a rear inlet 214 (Fig. 8) for insertion of an inlet nozzle 142 of a cleaning tower assembly 70. Additionally, in some embodiments, the bottom plate 38 includes a mounting inlet 250. In various embodiments, the mounting inlet 250 is an aperture in the bottom plate 38 for receiving one of the mounting members for mounting the transport plate 71 to the bottom plate 38 of the substrate container 30. For example, in FIG. 10, a transport plate 71 is placed against the bottom plate 38 of the substrate container 30. The transport plate 71 can include a mounting inlet 251 that is aligned with the mounting inlet 250. As depicted in FIG. 11, a mounting mechanism 254 is received in the mounting inlet 250 and secures the transport plate 71 to the bottom plate 38. In one or more embodiments, the mounting mechanism 254 is positioned in the bottom plate 38 to secure the transport plate 71 to a portion of the material of the bottom of the substrate container 30. 11 and 12, the mounting mechanism 254 is a partial ring having a downwardly extending sidewall 258 and including a plurality of generally L-shaped slots 262 circumferentially disposed in the sidewall 258. In one or more embodiments, the L-shaped slot 262 is angled with a vertical portion 263 and a horizontal or stop portion 264. In various embodiments, the transport plate 71 can include a plurality of outwardly extending members or cams 265 in the mounting inlet 251. Each of the cams 265 can correspond to the L-shaped slot 262 such that the transport plate 71 can be secured to the bottom plate 38 by inserting the mounting mechanism 254 downwardly into the mounting inlets 250 and 251, and receiving the cam 265 into the vertical portion 263 And twisting the mounting mechanism 254 to guide the cam 265 upward and into the stop portion 264 to secure the transport plate 71 to the bottom plate 38. In various embodiments, the sidewall 254 includes a rear opening 266 that corresponds to the offset conduit portion 166. As such, the offset conduit portion 166 extends rearwardly from the mounting mechanism 254 to the inlet nozzle 142 when secured to the bottom plate 38. In certain embodiments, various types of mounting mechanisms 254 can be used to secure the transport plate 71 to the bottom plate 38. For example, the mounting mechanism can use ultrasonic or thermal welding, snap fit, adhesive bonding, or other suitable technique. In some embodiments, the mounting mechanism 254 is integrated with the bottom plate 38 such that the bottom plate 38 and the mounting mechanism are a continuous piece. In one or more embodiments depicted in FIGS. 12-13, the transport plate 71 includes locking features for cleaning the interface body 90, including one or more exposures in the mounting inlet 251 to a support frame 268. Side opening 267. In various embodiments, the support frame 268 is defined by an undercut portion 269 in the transport plate 71. In various embodiments, the cleaning interface body 90 is secured to the substrate container 30 by inserting the cleaning interface body 90 up to the mounting inlet 251 and inserting the inlet nozzle 142 (FIGS. 2 through 4) into the rear inlet 214. When the cleaning interface body 90 is inserted upward, the support portion 120 can engage and flex with the angled or barbed undercut portion 269 until the cleaning interface body 90 has been fully inserted into the mounting inlet 251. Once inserted, the support portion 120 can be "snapped" onto the support frame 268 to lock the cleaning interface body in place. In Fig. 14, the inside of the substrate container 30 is depicted. In the interior, the rear inlet 214 and mounting mechanism 254 are depicted in the floor 40 of the substrate container 30. The cleaning interface body 90 is mounted to the substrate container 30 and the inlet nozzle 142 is depicted inserted through the rear inlet 214 and into the interior of the container 30. In Figure 15, a sprinkler tower 182 is depicted that fits into the inlet nozzle 142. Referring to Figures 16 and 17, a cross-sectional view of a portion of a substrate container 30 and cleaning tower assembly 70 in accordance with an embodiment of the present invention is depicted. In Figure 15, the cleaning interface body 90 is externally mounted to the base plate 38 as described above. Mounting mechanism 254 is positioned in floor 40 and secures cleaning interface body 90 to container 30. The inlet nozzle 142 enters the interior of the container 30 through the rear inlet 214. A sprinkler portion 182 for spraying the cleaning gas entering the substrate container 30 through the cleaning interface body 90 is fitted to the inlet nozzle 142 such that a portion of the inlet nozzle 142 extends into the interior of the sprinkler portion 182. The substrate 32b positioned in the lowermost slot 68a extends rearwardly in the container 30 toward the cleaning tower assembly 70. Because the cleaning interface body 90 is mounted externally, a gap 290 is maintained between the bottommost substrate 32b and the floor 40 of the container and the mounting mechanism 254. As depicted in FIG. 16, in some embodiments, the substrate container 30 defines one of the rear recesses 300 in the floor 40. In these embodiments, the cleaning interface body 90 is internally mounted within the container 30. For example, the cleaning interface body 90 can be positioned in the recess 300 with the base portion 94 extending through an aperture 304 for connection to one of the external fluid sources. The recess 300 can be sized such that the uppermost end of the cleaning interface body 90 is located at or below the plane of the floor 40 of the substrate container 30. Functionally, the notch 300 of the embodiment of Figure 16 reduces the profile of the offset conduit 166. Due to this reduced profile, the offset conduit 166 (although located inside the container 30) provides the same operational advantages as the gap 290 of the externally offset conduit configuration of Figure 15 and relative to end effector handling and gas cleaning. Also depicted in Figures 15 and 16, in one or more embodiments, the inlet nozzle 142 includes a side aperture 178, as described above. In various embodiments, the inlet nozzle 142 and the side apertures 178 are configured such that the sprinkler portion 182 of the cleaning tower assembly 70 can function at or near the floor 40 of the substrate container. For example, in some embodiments, the side apertures 178 are positioned at a height on the inlet nozzle 142 that corresponds to the floor 40 of the substrate container 30. In operation, for both the embodiment of Figure 15 and the embodiment of Figure 16, the gap 290 provides for a small or non-interfering manipulation of the components from the cleaning interface body 90 beneath the substrate 32b of the robotic end effector (not depicted). space. Additionally, combining the base of the sprinkler portion 182 at the floor level with the gap 290 provided by the outer or reduced profile offset conduit 166 enables the cleaning gas to enter the substrate container 30 at the floor level such that the clean airflow 308 is directed to the most Below the bottom substrate 32b. Each of the additional features and methods disclosed herein can be used alone or in combination with other features and methods to provide improved devices and methods for making and using the improved devices. Therefore, the combination of the features and methods disclosed herein is not necessarily to be construed in a Various modifications to the embodiments will be apparent to those skilled in the art after reading this invention. For example, those of ordinary skill in the art will appreciate that the various features described for the various embodiments can be combined, separated and recombined with other features, either individually or in various combinations. Likewise, the various features described above are to be considered as illustrative and not restrictive. Those of ordinary skill in the art will recognize that various embodiments may include fewer features than those illustrated in any of the individual embodiments described above. The embodiments described herein are not meant to be an exhaustive representation of one of the ways in which various features can be combined. Accordingly, the embodiments are not mutually exclusive combinations of features; rather, the scope of the claims may include a combination of different individual features selected from different individual embodiments, as understood by those of ordinary skill in the art. Any incorporation by way of a singular reference to the above documents is not to be construed as being inferred. Further incorporation into any of the incorporations in the form of the above-mentioned documents is incorporated herein by reference. It is further limited that any incorporation in the form of a reference to the above documents makes any definitions provided in the documents not incorporated herein by reference, unless expressly incorporated herein. Reference is made to the "(several) embodiments", "disclosed content", "the invention", "the embodiment of the invention", "the disclosed (several) embodiments" and the like The specification (text, including patent application scope and drawings) of the prior art patent application is not permitted. To clarify the scope of the patent application, the explicit intent of this document is that the terms of 35 USC 112(f) are not quoted unless the specific term "method of" or "step of" is recited in the respective claims.

7-7‧‧‧ line

30‧‧‧Substrate container

32a‧‧‧Substrate

32b‧‧‧Substrate

34‧‧‧ opposite side part / side wall part

36‧‧‧Top part

38‧‧‧floor

40‧‧‧floor

42‧‧‧ Back

44‧‧‧ front

46‧‧‧ door frame

48‧‧‧ door opening

52‧‧‧

54‧‧‧Vertical direction

64‧‧‧Micro environment

66‧‧‧Slotted side wall

68‧‧‧ slot position

68a‧‧‧ bottom slot

70‧‧‧Clean tower assembly

71‧‧‧Transportation board

90‧‧‧Clean interface body

94‧‧‧Base section

98‧‧‧Top part

100‧‧‧ side wall

102‧‧‧ bottom edge

106‧‧‧ top edge

110‧‧‧ internal part

114‧‧‧ bottom aperture

118‧‧‧The ring

119‧‧‧ pores

120‧‧‧Support section

122‧‧‧Filter

126‧‧‧ valve

130‧‧‧first axis

134‧‧‧ top side wall

138‧‧‧ offset part

142‧‧‧ inlet nozzle

146‧‧‧ nozzle side wall

150‧‧‧ nozzle edge

154‧‧‧ internal part

158‧‧‧ nozzle aperture

162‧‧‧second axis

166‧‧‧Offset conduit section

170‧‧‧ with barbed parts

174‧‧‧Conical section

178‧‧‧ side porosity

182‧‧‧Spray part

186‧‧‧ side wall

190‧‧‧ top surface

194‧‧‧ bottom edge

198‧‧‧ pores

202‧‧‧ bottom part

206‧‧‧ widened part

210‧‧‧ Direction

214‧‧‧ rear entrance

218‧‧‧ Rear installation area

222‧‧‧ vertical height

250‧‧‧Installation entrance

251‧‧‧Installation entrance

254‧‧‧Installation agency

258‧‧‧ extends down the side wall

263‧‧‧ vertical part

264‧‧‧Stop part

265‧‧‧ cam

266‧‧‧ rear opening

267‧‧‧ side opening

268‧‧‧Support frame

269‧‧‧ undercut

290‧‧‧ gap

300‧‧‧ rear notch

304‧‧‧ pores

308‧‧‧Clean airflow

The drawings included in the present application are incorporated in the specification and form part of the specification. The drawings illustrate embodiments of the invention and together with the embodiments, illustrate the principles of the invention. The drawings are only illustrative of specific embodiments and are not limiting of the invention. 1 is a perspective view of a substrate container in accordance with an embodiment of the present invention. 2 is a front elevational view of one of the cleaning tower assemblies in accordance with an embodiment of the present invention. 3 is a cross-sectional view of the cleaning tower assembly of FIG. 2 in accordance with an embodiment of the present invention. 4 is an exploded view of the cleaning tower assembly of FIG. 2 in accordance with an embodiment of the present invention. Figure 5 is an enlarged partial perspective view of one of the cleaning tower assemblies in accordance with one embodiment of the present invention. Figure 6 is a front elevational view of a cleaning tower assembly mounted in a substrate container in accordance with one embodiment of the present invention. Figure 7 is a cross-sectional view of the cleaning tower assembly and substrate container taken in accordance with line 7-7 of Figure 6. Figure 8 is a cross-sectional view of a substrate container and an exploded view of a cleaning tower assembly in accordance with an embodiment of the present invention. 9 is a bottom perspective view of a portion of a substrate container including an opening of a cleaning tower assembly in accordance with an embodiment of the present invention. Figure 10 is a bottom perspective view of a portion of a substrate container including a conveyor plate in accordance with an embodiment of the present invention. Figure 11 is a bottom perspective view of a portion of a substrate container including a transport plate mounted to a backplane in accordance with an embodiment of the present invention. Figure 12 is a partial cross-sectional view of a substrate container including a transport plate mounted to a base plate in accordance with an embodiment of the present invention. Figure 13 is a bottom perspective view of a portion of a substrate container including a cleaning tower assembly mounted externally, in accordance with an embodiment of the present invention. Figure 14 is a partial perspective view of the interior of one of the substrate containers including an exterior cleaning tower assembly in accordance with one embodiment of the present invention. Figure 15 is a partial perspective view of one of the interiors of one of the substrate containers including an exterior cleaning tower assembly in accordance with one embodiment of the present invention. Figure 16 is a cross-sectional view of a substrate container including a recess having an interior cleaning tower assembly in accordance with an embodiment of the present invention. Figure 17 is a close-up cross-sectional view of the cleaning tower assembly and substrate container taken in accordance with line 7-7 of Figure 6. While the embodiments of the present invention are susceptible to various modifications and alternatives, the specific details are shown in the drawings and will be described in detail. However, it is understood that the invention is not to be limited to the particular embodiments described. Rather, the invention is to cover all modifications, equivalents, and alternatives.

Claims (22)

A cleaning tower assembly for a substrate container, the cleaning tower assembly comprising: a cleaning interface body for mounting to a bottom plate of a substrate container, the cleaning interface body comprising: a base portion having a a substantially tubular base sidewall extending upwardly from a bottom edge to a top edge, the bottom edge defining a first aperture for accessing one of the interior portions of the base portion, the first aperture system surrounding a first axis Concentric; and a top portion coupled to the base portion, the top portion including a top sidewall positioned on the top edge of the base portion, the top portion including the configured to pass through the substrate container One of the inlets of the bottom plate is mounted with an inlet nozzle having a substantially tubular nozzle side wall extending upwardly from the top side wall to a nozzle edge, the nozzle edge defining for access to the inlet tube a second aperture in one of the mouths, the second aperture being concentric about a second axis substantially parallel to the first axis and positioned on a rear side of the first axis, wherein the top sidewall The base portion cooperate to define an offset portion disposed in the conduit between the first aperture and the inlet nozzle, the base portion and the inlet nozzle in fluid communication with the conduit via the offset portion. The cleaning tower assembly of claim 1 further comprising: a sprinkler portion defining a sprinkler passage extending along a sprinkler axis to the sprinkler portion, the sprinkler passage defining operative coupling to the inlet tube A mouth is open for opening one of the base portion, one of the bottom portions of the sprinkler portion in fluid communication with the sprinkler portion. A cleaning tower assembly according to claim 2, wherein the nozzle side wall includes external threads formed on an outer surface of one of the nozzle side walls. The cleaning tower assembly of claim 3, wherein the sprinkler portion includes internal threads formed on an inner surface of the sprinkler portion, the internal threads being operatively compatible with the external threads of the inlet nozzle Coupled between the sprinkler portion and the inlet nozzle. A cleaning tower assembly according to claim 2, wherein the sprinkler portion comprises a widened portion at the bottom portion. The cleaning tower assembly of claim 2, wherein the sprinkler portion comprises a porous sprayer sidewall. A cleaning tower assembly according to claim 1 wherein the base portion includes a grommet and a valve mounted in the first aperture for fluid communication with an external fluid source. The cleaning tower assembly of claim 1, wherein the inlet nozzle comprises a barbed portion and a barbed nozzle of the tapered portion, the barbed portion defining the barbed nozzle An outer diameter, the tapered portion defining a reduced outer diameter adjacent one of the barbed portions. A cleaning tower assembly according to claim 8 wherein the nozzle side wall defines a side aperture between the barbed portion and the tapered portion. The cleaning tower assembly of claim 1, wherein the inlet nozzle is sized such that when mounted to the bottom plate of the substrate container, the inlet nozzle extends upwardly to approximately one of the first crystals contained within the substrate container One of the round positions. A cleaning tower assembly according to claim 1, wherein the top side wall is substantially planar. A substrate container for a substrate containing a substrate, the substrate container comprising: a container portion comprising two opposing side walls, a back side wall, a top side wall and a bottom plate, the container portion defining insertion and removal for the substrate One of the front portions of the substrate container is open, the container portion is mounted on a transport plate; a door configured to cover and seal the opening defined by the container portion; and a cleaning interface body connected To the bottom plate, the cleaning interface body includes: a base portion having a substantially tubular base sidewall extending upwardly from a bottom edge to a top edge, the bottom edge defining a portion for accessing the base portion An inner first aperture, the first aperture being concentric about a first axis; a top portion coupled to the base portion, the top portion having a substantial portion positioned on the top edge of the base portion An upper planar top side wall covers the bottom aperture upwardly, the top portion including an inlet nozzle for mounting one of the bottom plates through the substrate container, The nozzle has a substantially tubular nozzle sidewall extending upwardly from the top sidewall to a nozzle edge, the nozzle edge defining a second aperture for accessing one of the interior of the inlet nozzle, the second a pore system concentric about a second axis substantially parallel to the first axis and positioned at a rear side of the first axis; and an offset conduit portion disposed between the base portion and the inlet nozzle, the aperture being disposed between the base portion and the inlet nozzle The base portion and the inlet nozzle are in fluid communication via the offset conduit portion. The substrate container of claim 12, further comprising a sprinkler portion having a sprinkler channel extending along a sprinkler axis to the sprinkler portion, the sprinkler channel defining operative coupling to the inlet tube A mouth is open for opening one of the base portion, one of the bottom portions of the sprinkler portion in fluid communication with the sprinkler portion. The substrate container of claim 13, wherein the nozzle sidewall comprises external threads formed on an outer surface of one of the nozzle sidewalls. The substrate container of claim 14 wherein the sprinkler portion includes internal threads formed on an inner surface of the sprinkler portion, the internal threads being operatively coupled to the external threads of the inlet nozzle for operative coupling The inlet nozzle is between the sprinkler portion. The substrate container of claim 13, wherein the sprinkler portion comprises a widened portion at the bottom portion of the sprinkler portion. The substrate container of claim 12, wherein the base portion includes a grommet and a valve mounted in the first aperture to be in fluid communication with an external fluid source. The substrate container of claim 12, wherein the inlet nozzle comprises a barbed portion of one of the tubular nozzle sidewalls and a barbed nozzle of the tapered portion, the barbed portion defining the barbed portion One of the outer diameters of the nozzle, the tapered portion defining a reduced outer diameter adjacent one of the barbed portions. The substrate container of claim 18, wherein the nozzle sidewall defines a side aperture between the barbed portion and the tapered portion. The substrate container of claim 12, wherein the inlet nozzle is sized such that when connected to the substrate and the transport plate of the substrate container, the inlet nozzle extends upwardly to approximately one of the substrate containers One of the locations of a wafer. A method of assembling a cleaning tower assembly to a substrate container, the method comprising: inserting an inlet nozzle of a cleaning interface body upwardly into a rear inlet of a bottom plate of a substrate container, the cleaning interface body comprising a base portion having a substantially tubular base sidewall extending upwardly from a bottom edge to a top edge, the bottom edge defining a first aperture concentric about a first axis, the cleaning interface body including being positioned on the base a top portion of the top edge of the seat portion and the inlet nozzle having a substantially tubular nozzle sidewall extending upwardly from the top sidewall to a nozzle edge, the nozzle edge defining a substantially parallel to the first a second aperture that is axially located and concentric with one of the second axes of the first axis, the top sidewall and the base portion defining one of fluid communication between the first aperture and the inlet nozzle Offering the conduit portion; and securing the cleaning interface body to the bottom plate of the substrate container when the inlet nozzle is inserted into the rear inlet. A substrate container comprising: a container portion comprising two opposing side walls, a back side wall, a top side wall and a bottom plate, the container portion defining an interior for insertion and removal of the substrate, the interior having a floor comprising a rear recess in the floor; and a door configured to cover and seal the opening defined by the container portion; and a cleaning interface body mounted in the recess, the The cleaning interface body includes: a base portion having a substantially tubular base sidewall extending upwardly from a bottom edge to a top edge, the bottom edge defining one of the interiors for accessing one of the base portions An aperture, the first aperture is concentric about a first axis; a top portion coupled to the base portion, the top portion having a substantially planar top sidewall positioned on the top edge of the base portion Covering the bottom aperture upwardly, the top portion including an inlet nozzle for mounting one of the bottom plates through the substrate container, the inlet nozzle having a self The top side wall extends upwardly to one of the nozzle edges substantially a tubular nozzle side wall defining a second aperture for accessing one of the interior of the inlet nozzle, the second aperture surrounding a second axis parallel to the first axis and positioned on a rear side of the first axis; and an offset conduit portion disposed between the base portion and the inlet nozzle, the base portion and the The inlet nozzle is in fluid communication via the offset conduit portion; wherein the top sidewall is substantially flush with the floor.