TW201822941A - Device for thermal drift precision measurement correction and compensation having a three-axis translation stage and capable of avoid reducing the processing precision due to the thermal expansion effect - Google Patents
Device for thermal drift precision measurement correction and compensation having a three-axis translation stage and capable of avoid reducing the processing precision due to the thermal expansion effect Download PDFInfo
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Abstract
Description
本發明係關於一種精密加工之裝置，特別是關於一種具有熱漂移精密量測校正及補償機制的裝置。 The invention relates to a device for precise processing, and more particularly to a device with a precise measurement and correction and compensation mechanism for thermal drift.
現今產業在產能極大化的目標下，工廠內的設備都必須在長時間作業的情況下，設備機台本身產生的熱能或環境溫度的變化，將導致設備機台因熱效應而使機台產生微量的熱變形，將造成高精密加工機具的刀具及工件的相對位置發生變化，進而引起加工尺寸或形狀的偏差，最後造成加工精度的降低，無法達到高精密度的要求；另根據誤差分析，高精密度工具機加工時的誤差約有40%至70%是由熱變形所造成，因此，高精密度工具機熱行為表現的優劣程度，可視為衡量精度與穩定度的重要指標之一，若熱行為表現具有重現性與穩定性，表示工具機可長時間維持良好加工品質，反之，若工具機的熱行為模式變異過大，則加工品質便難以確保。 Under the goal of maximizing the capacity of the industry today, the equipment in the factory must be operated for a long time. The thermal energy produced by the equipment itself or the change in the ambient temperature will cause the equipment equipment to generate a small amount of equipment due to the thermal effect. The thermal deformation will cause the relative positions of the tools and workpieces of high-precision machining tools to change, which will cause deviations in the size or shape of the machining. Finally, it will reduce the machining accuracy and fail to meet the requirements of high precision. About 40% to 70% of the error during machining of precision tools is caused by thermal deformation. Therefore, the thermal performance of high-precision tool machines can be regarded as one of the important indicators for measuring accuracy and stability. The thermal behavior performance is reproducible and stable, which means that the machine tool can maintain good processing quality for a long time. On the contrary, if the thermal behavior pattern of the machine tool is too large, it is difficult to ensure the processing quality.
有鑒於此，許多國家及國際大廠便將解決熱誤差的技術，視為達到高加工精度與高穩定度的技術象徵，並代表國家高精密度加工製程的能力，像國際大廠Okuma公司的 熱親合技術與Makino公司的熱源冷卻抑制技術等，就是目前國內尚無法達到的技術；目前國外大廠用來降低機台熱變形量的方法，包括有：1.設計熱對稱及熱平衡的機體結構，使工具機熱變形誤差的產生具備對稱特性與可掌握性、2.採用熱親合機體，有效降低工具機機體的熱變形量、3.採用多通道零熱源冷卻技術，有效降低熱源溫度之變化量、4.機體熱點量測及熱變形補償，但上述技術每一項都需具由強大的基礎工業能力，且必須全部執行才可達到充分的熱效應誤差控制，其複雜度、困難度及製作成本都很高，為目前國內業者無法達到的技術。 In view of this, many national and international manufacturers regard the technology of solving thermal errors as a technical symbol to achieve high processing accuracy and high stability, and represent the national high-precision processing capability, like the international major factory Okuma's Thermal affinity technology and Makino's heat source cooling suppression technology are currently unavailable in China. At present, the methods used by major foreign manufacturers to reduce the thermal deformation of the machine include: 1. Design of thermal symmetry and thermal balance The structure of the machine body makes the thermal deformation error of the machine tool have symmetrical characteristics and graspability. 2. The use of thermal affinity machine body can effectively reduce the thermal deformation of the machine tool body. 3. The use of multi-channel zero heat source cooling technology can effectively reduce the heat source. Temperature change, 4. Hotspot measurement and thermal deformation compensation, but each of the above technologies must have strong basic industrial capabilities, and must be fully implemented to achieve adequate thermal effect error control, its complexity and difficulty The cost and production cost are very high, which is a technology that cannot be reached by domestic operators at present.
目前國內工具機相關製造廠商解決工具機熱變形方法，主要藉由開發CNC數控系統的熱變形控制技術，包括：1.利用溫度感測器安置於機體溫度變化較顯著位置(可利用紅外線熱像儀進行量測)，以擷取機台溫度變化、2.架設三維量測儀，來量測及記錄機台溫升變形量、3.利用溫度及熱變形量數據，來建立機台熱變形模型、4.建立機台熱變形量模型及溫升補正驗證設備；但利用CNC數控系統的熱變形控制技術，採用量測機台溫度變化量，再透過機台熱變形模組內建軟體來計算出機台即時熱變形量，做為加工主軸熱補償校正位移量，但此項技術由於其熱變形模組軟體開發時，機台熱源與環境溫度取樣範圍無法完全模擬實際狀況，取樣有限，且當機台工作時日增加後，機台內發熱特性將逐漸改變且其 工作環境溫度變化若太大等因素，都將會造成原先設定之校正軟體計算誤差，造成熱效應誤差補償機制的失效。 At present, domestic machine tool-related manufacturers solve the thermal deformation method of machine tools, mainly by developing the thermal deformation control technology of CNC system, including: 1. Use temperature sensors to place the machine with significant temperature changes (infrared thermal imaging can be used To measure the temperature change of the machine, 2. Set up a three-dimensional measuring instrument to measure and record the temperature rise and deformation of the machine, 3. Use the temperature and thermal deformation data to establish the machine's thermal deformation Model, 4. Establish machine thermal deformation model and temperature rise correction verification equipment ; but use the thermal deformation control technology of the CNC system, measure the temperature change of the machine, and then use the software built in the machine's thermal deformation module to The real-time thermal deformation of the machine is calculated as the thermal compensation correction displacement of the processing spindle. However, due to the development of its thermal deformation module software, the sampling range of the machine's heat source and ambient temperature cannot fully simulate the actual situation, and the sampling is limited. And when the working time of the machine increases, the heating characteristics in the machine will gradually change and if the working environment temperature changes too much, it will cause the originally set correction software. Volume calculation errors, causing the failure of the thermal effect error compensation mechanism.
因此目前業界極需發展出一種熱漂移精密量測校正及補償之裝置，具有低成本、簡單態樣的熱變形校正精度的方法，如此一來，方能同時兼具製程成本與效率，利用熱漂移精密量測校正及補償的機制來有效提升多軸加工機之加工精度。 Therefore, the current industry needs to develop a device for precise measurement and correction of thermal drift, which has a low-cost and simple method of thermal deformation correction accuracy. In this way, it can have both process cost and efficiency, and use heat Drift precise measurement correction and compensation mechanism to effectively improve the processing accuracy of multi-axis processing machines.
鑒於上述習知技術之缺點，本發明之主要目的在於提供一種熱漂移精密量測校正及補償之裝置，整合一三軸平移台、一定位基座單元、一物件單元、一加工單元等，以有效控制熱漂移產生的誤差，獲得高品質精密加工的裝置。 In view of the shortcomings of the above-mentioned conventional technology, the main object of the present invention is to provide a device for precise measurement and correction of thermal drift, integrating a three-axis translation stage, a positioning base unit, an object unit, a processing unit, etc. Effectively control the error caused by thermal drift, and obtain high-quality precision processing equipment.
為了達到上述目的，根據本發明所提出之一方案，提供一種熱漂移精密量測校正及補償之裝置，包括：一三軸平移台，其包含一X軸平移台、一Y軸平移台及一Z軸平移台，該X軸平移台、Y軸平移台及Z軸平移台相互垂直設置；一定位基座單元，係用來提供定位座標，其包含一X軸定位基座、一Y-Z軸定位基座，該X軸定位基座、Y-Z軸定位基座相互垂直設置；一物件單元，設置於該X軸平移台上，係用來固定物件，其包含有二個光斑影像讀取頭；一加工單元，設置於該Z軸平移台上，係用來加工物件，其包含有二個光斑影像讀取頭。 In order to achieve the above object, according to a solution provided by the present invention, a device for precise measurement and correction of thermal drift is provided, including: a three-axis translation stage including an X-axis translation stage, a Y-axis translation stage, and a Z-axis translation stage, the X-axis translation stage, Y-axis translation stage and Z-axis translation stage are arranged perpendicular to each other; a positioning base unit is used to provide positioning coordinates, which includes an X-axis positioning base and a YZ-axis positioning A base, the X-axis positioning base and the YZ-axis positioning base are arranged perpendicular to each other; an object unit, which is arranged on the X-axis translation stage, is used for fixing an object, and includes two light spot image reading heads; The processing unit is arranged on the Z-axis translation stage and is used for processing objects. The processing unit includes two light spot image reading heads.
上述中X軸定位基座台可以設計為平行該X軸平移台(但不以此為限)，Y-Z軸定位基座台可以設計為平行該Y軸平移台(但不以此為限)，其中，X軸平移台上的物件單元，可利用一個固定臂來作為與兩個光斑影像讀取頭的連結(但不以此為限)，讓物件單元與光斑影像讀取頭形成一體，固定住物件單元與光斑影像讀取頭間的距離，而物件單元主要的功能是固定住待加工的物品，用以承載待加工的物品；而Y-Z軸平移台上的加工單元，可利用兩個固定臂來作為與兩個光斑影像讀取頭的連結(但不以此為限)，讓加工單元與光斑影像讀取頭形成一體，固定住加工單元與光斑影像讀取頭間的距離，而加工單元主要的功能是提供加工的器具，例如一刀具，用以加工待加工的物品。 The above-mentioned X-axis positioning base table can be designed to be parallel to the X-axis translation table (but not limited to this), and the YZ-axis positioning base table can be designed to be parallel to the Y-axis translation table (but not limited to this), Among them, the object unit on the X-axis translation stage can use a fixed arm to connect with the two spot image reading heads (but not limited to this), so that the object unit and the spot image reading head can be integrated and fixed. The distance between the object unit and the light spot image reading head, and the main function of the object unit is to hold the object to be processed to carry the object to be processed; and the processing unit on the YZ axis translation stage can use two fixed The arm is used as a connection (but not limited to) with the two spot image reading heads, so that the processing unit is integrated with the spot image reading head, and the distance between the processing unit and the spot image reading head is fixed, and the processing is performed. The main function of the unit is to provide a processing tool, such as a cutter, for processing the item to be processed.
物件單元上的光斑影像讀取頭是用來讀取該X軸定位基座台表面的不變形光斑影像，且兩個光斑影像讀取頭分別用來讀取該X軸定位基座台不同面的不變形光斑影像，例如，其中一個光斑影像讀取頭讀取X軸定位基座台上的Z=Z1之X-Y平面的不變形光斑影像，另一個光斑影像讀取頭則讀取X軸定位基座台上的Y=0之X-Z平面的不變形光斑影像，如此一來，可將物件單元定義出在X軸定位基座台上的光斑影像定位座標；加工單元上的光斑影像讀取頭是用來讀取該Y-Z軸定位基座台表面的不變形光斑影像，且兩個光斑影像讀取頭分別用來讀取該Y-Z軸定位基座台不同面 的不變形光斑影像，例如，其中一個光斑影像讀取頭讀取Y-Z軸定位基座台上的Z=Z2之X-Y平面的不變形光斑影像，另一個光斑影像讀取頭則讀取Y-Z軸定位基座台上的X=0之Y-Z平面的不變形光斑影像，如此一來，可將加工單元定義出在Y-Z軸定位基座台上的光斑影像定位座標。 The spot image reading head on the object unit is used to read the undeformed spot image on the surface of the X-axis positioning base table, and the two spot image reading heads are used to read different faces of the X-axis positioning base table, respectively. Non-deformed light spot image, for example, one of the light spot image reading heads reads the non-deformed light spot image of the XY plane of Z = Z 1 on the X-axis positioning base table, and the other light spot image reading head reads the X axis Position the undistorted light spot image on the XZ plane of Y = 0 on the positioning base table. In this way, the object unit can be defined as the light spot image positioning coordinates on the X-axis positioning base table; the light spot image reading on the processing unit The head is used to read the non-deformed light spot images on the surface of the YZ axis positioning base table, and the two light spot image reading heads are respectively used to read the non-deformed light spot images of different sides of the YZ axis positioning base table, for example, One of the spot image reading heads reads the undistorted spot image on the XY plane of Z = Z 2 on the YZ axis positioning base stage, and the other spot image reading head reads X = on the YZ axis positioning base stage. An undistorted light spot image on the YZ plane of 0, so that the The unit defines the spot image positioning coordinates on the YZ axis positioning base table.
本發明中的X軸定位基座及Y-Z軸定位基座可以設計為一低熱膨脹係數材質建構而成，該低熱膨脹係數材質可選自零膨脹玻璃、不變鋼invar、花崗岩其中之一(但不以此為限)。 The X-axis positioning base and the YZ-axis positioning base in the present invention may be designed and constructed by a low thermal expansion coefficient material, and the low thermal expansion coefficient material may be selected from one of zero expansion glass, constant steel invar, and granite (but Not limited to this).
以上之概述與接下來的詳細說明及附圖，皆是為了能進一步說明本創作達到預定目的所採取的方式、手段及功效。而有關本創作的其他目的及優點，將在後續的說明及圖式中加以闡述。 The above summary and the following detailed description and drawings are to further explain the methods, means and effects adopted by this creation to achieve the intended purpose. The other purposes and advantages of this creation will be explained in the subsequent description and drawings.
110‧‧‧三軸平移台 110‧‧‧Three-axis translation stage
111‧‧‧X軸平移台 111‧‧‧X-Axis Translation Stage
112‧‧‧Y軸平移台 112‧‧‧Y-axis Translation Stage
113‧‧‧Z軸平移台 113‧‧‧Z-axis translation stage
120‧‧‧定位基座單元 120‧‧‧ Positioning base unit
121‧‧‧X軸定位基座 121‧‧‧X-axis positioning base
122‧‧‧Y-Z軸定位基座 122‧‧‧Y-Z axis positioning base
130‧‧‧物件單元 130‧‧‧ Object Unit
131、141‧‧‧光斑影像讀取頭 131, 141‧‧‧ Spot image reading head
132、142‧‧‧固定臂 132, 142‧‧‧ fixed arm
140‧‧‧加工單元(刀具單元) 140‧‧‧ Machining unit (tool unit)
第一圖係為本發明一種熱漂移精密量測校正及補償之裝置示意圖；第二圖係為本發明一種物件單元座標讀取示意圖；第三圖係為本發明一種加工單元座標讀取示意圖。 The first diagram is a schematic diagram of a thermal drift precision measurement correction and compensation device according to the present invention; the second diagram is a schematic diagram of an object unit coordinate reading according to the present invention; the third diagram is a schematic diagram of a machining unit coordinate reading according to the present invention.
以下係藉由特定的具體實例說明本創作之實施方式，熟悉此技藝之人士可由本說明書所揭示之內容輕易地了解本創作之優點及功效。 The following is a specific example to illustrate the implementation of this creation. Those who are familiar with this technique can easily understand the advantages and effects of this creation from the content disclosed in this manual.
不同於先前藉由熱變形補償技術先量取機台溫度變化，再算出機台熱變形量的方法，我們揭露新的解決方法，是在多軸加工機台上，安裝熱膨脹三維校正定位基座，利用此低熱膨脹量三維定位基座之低熱變異特性，配合不變形光斑影像取像定位技術，同時提供加工(刀具)單元及物件單元之三維熱膨脹感知位移量，進而可精確獲得加工(刀具)單元與物件單元之三維相對熱飄移量，用來校正補償加工機定位精度，滿足多軸加工機之精密加工定位需求。 Different from the previous method of measuring the temperature change of the machine by thermal deformation compensation technology, and then calculating the thermal deformation of the machine, we disclosed a new solution is to install a thermal expansion three-dimensional correction positioning base on a multi-axis processing machine. Using the low thermal variation characteristics of this low thermal expansion three-dimensional positioning base, combined with the non-deformable light spot image acquisition and positioning technology, it also provides the three-dimensional thermal expansion sensing displacement of the processing (tool) unit and the object unit, so that the processing (tool) can be accurately obtained The three-dimensional relative thermal drift of the unit and the object unit is used to correct and compensate the positioning accuracy of the processing machine to meet the precision processing positioning requirements of the multi-axis processing machine.
請參閱第一圖，為本發明一種熱漂移精密量測校正及補償之裝置示意圖。如圖一所示，本發明所提供一種熱漂移精密量測校正及補償之裝置，包括：一三軸平移台110，其包含一X軸平移台111、一Y軸平移台112及一Z軸平移台113，該X軸平移台111、Y軸平移台112及Z軸平移台113相互垂直設置；一定位基座單元120，係用來提供定位座標，其包含一X軸定位基座121、一Y-Z軸定位基座122，該X軸定位基座121、Y-Z軸定位基座122相互垂直設置；一物件單元130，設置於該X軸平移台上111，係用來固定物件，其包含有二個光斑影像讀取頭131；一加工單元140，設置於該Z軸平移台113上，係用來加工物件，其包含有二個光斑影像 讀取頭141；一機台座150，用以提供穩定的基底，上述所有元件皆設置於該機台座150上。 Please refer to the first figure, which is a schematic diagram of a thermal drift precision measurement correction and compensation device according to the present invention. As shown in FIG. 1, the present invention provides a thermal drift precision measurement correction and compensation device, including: a three-axis translation stage 110, which includes an X-axis translation stage 111, a Y-axis translation stage 112, and a Z-axis Translation stage 113, the X-axis translation stage 111, the Y-axis translation stage 112, and the Z-axis translation stage 113 are arranged perpendicular to each other; a positioning base unit 120 is used to provide positioning coordinates, which includes an X-axis positioning base 121, A YZ-axis positioning base 122, the X-axis positioning base 121, and the YZ-axis positioning base 122 are arranged perpendicular to each other; an object unit 130, which is arranged on the X-axis translation stage 111, is used for fixing objects, and includes: Two spot image reading heads 131; a processing unit 140, which is disposed on the Z-axis translation stage 113, is used to process objects, and includes two spot image reading heads 141; and a machine base 150 for providing A stable substrate. All the above components are disposed on the machine base 150.
本發明中光斑影像讀取頭131、141的不變形光斑取像定位技術中，設計了(不變形)光斑影像讀取頭131、141可以確認一個建射性干涉斑點進入二維影像器取像窗到移出取像窗，此干涉斑點之相對光程差變化量小於五分之一波長，所以進入光斑影像取像範圍之建射性光斑亮點，到移出光斑影像取像範圍之光斑，大部分還是維持建設性干涉，看起來還是一個亮點，此光斑影像經影像處理軟體(SAD、SSD、NCC、SURF、SIFT等)比對定位，可以獲得正確比對位移量，此位移量是擷取相鄰2張不變形光斑影像進行光斑影像特徵點之產生與比對，利用統計消去法，去除大於位移標準差1.5倍之特徵配對點，可以精確比對兩張相鄰光斑影像在像平面位移量之標準差小於0.008像素大小，約等於百分之一像素之標準差大小，因此，利用(不變形)光斑影像讀取頭擷取熱膨脹物體表面前後兩張光斑影像，再經SIFT或SURF等圖像比對定位方法，可精確獲得物面熱膨脹前後之相對熱膨脹位移量，提供本發明所需之精密位移量測數據。 In the non-deformable light spot imaging and positioning technology of the light spot image reading heads 131 and 141 in the present invention, the (non-deformation) light spot image reading heads 131 and 141 are designed to confirm that a constructive interference spot enters a two-dimensional imager and takes an image. From the window to the image acquisition window, the change in the relative optical path difference of this interference spot is less than one-fifth of a wavelength, so the light spot that enters the image acquisition range of the speckle image and the light spot that is removed from the image acquisition range of the speckle image are mostly It still maintains constructive interference, and it still looks like a bright spot. This spot image is compared and positioned by image processing software (SAD, SSD, NCC, SURF, SIFT, etc.) to obtain the correct comparison displacement. This displacement is the acquisition phase. Generate and compare the spot image feature points between two undistorted spot images. Use statistical elimination to remove feature matching points that are greater than 1.5 times the standard deviation of displacement. This can accurately compare the standard displacement of two adjacent spot images in the image plane. The difference is less than 0.008 pixels, which is approximately equal to the standard deviation of one hundredth of a pixel. Therefore, the (non-deformable) spot image reading head is used to capture the front and back of a thermally expanded object surface. Zhang spot images, then by like SIFT or SURF positioning image comparison method, can be obtained accurately relative displacement amount of thermal expansion of the surface before and after the thermal expansion thereof, to provide data required for precise measurement of the amount of displacement of the present invention.
本發明設計使用低熱膨脹係數材質之三維定位基座單元120，包括X軸花崗岩定位基座(X軸定位基座121)及光斑牆(Y、Z軸)花崗岩定位基座(Y-Z軸定位基座122)，其中，X軸花 崗岩定位基座及光斑牆(Y、Z軸)花崗岩定位基座互相垂直，而物件單元(包含一個物件夾持裝置及C軸旋轉台)則為承載、固裝加工物件之機械單元，可以在X軸平移台111移動及在C軸旋轉台轉動(未標示)，另外，刀具單元(加工單元140)為承載、固裝加工刀具之機械單元，可以在Y、Z雙軸平移台移動及在A軸旋轉台轉動；本發明利用固定臂142將光斑影像讀取頭141與刀具單元140固裝成一體，利用固定臂142上之二個不變形光斑影像讀取頭141，來讀取刀具單元140在光斑牆(Y、Z軸)花崗岩定位基座(Y-Z軸定位基座122)X=0之Y-Z表面定位點之光斑影像。 The present invention uses a three-dimensional positioning base unit 120 with a low thermal expansion coefficient material, which includes an X-axis granite positioning base (X-axis positioning base 121) and a light spot wall (Y, Z axis) granite positioning base (YZ-axis positioning base). 122), wherein, X-axis positioning granite base wall and spot (Y, Z-axis) granite base is positioned perpendicular to each other, and the object unit (object holding means comprises a rotary table and a C-axis), compared with the carrier, solid The mechanical unit for processing objects can be moved on the X-axis translation stage 111 and rotated on the C-axis rotary table (not labeled). In addition, the tool unit (processing unit 140) is a mechanical unit that carries and fixes the processing tools. The Z and Z dual-axis translation stages move and rotate on the A-axis rotation stage; the present invention uses a fixed arm 142 to fix the spot image reading head 141 and the cutter unit 140 into one, and uses two non-deformed spot images on the fixed arm 142 to read Take the head 141 to read the spot image of the cutter unit 140 on the YZ surface positioning point of the granite positioning base (YZ axis positioning base 122) X = 0 of the light spot wall (Y, Z axis).
請參閱第二圖，為本發明一種物件單元座標讀取示意圖。如圖二所示，物件單元二個光斑影像定位點於X軸定位基座121上的三維校正用的定位基座之座標，分別是Y=0、X-Z面之光斑影像定位點座標(X object,0,Z object)及Z=Z1、X-Y面之光斑影像定位點座標(X object,Y object,Z 1)，綜合二定位點可得物件單元定位於花崗岩三維校正用的定位基座之光斑影像定位座標為(X object,Y object,Z object)，其中，該三維校正用的定位基座之座標，係利用物件單元上的兩個光斑影像讀取頭分別讀取該X軸定位基座台不同面的不變形光斑影像，來定義出物件單元定位點座標(X object,Y object,Z object)。 Please refer to the second figure, which is a schematic diagram of reading the coordinate of an object unit according to the present invention. As shown in FIG. 2, the coordinates of the three-dimensional correction positioning base of the two spot image positioning points on the X-axis positioning base 121 of the object unit are the coordinates of the spot image positioning points of X = 0 and XZ planes ( X object , 0, Z object ) and Z = Z1, XY plane spot image positioning point coordinates ( X object , Y object , Z 1 ), combining the two positioning points to obtain the spot of the object unit positioned on the positioning base for 3D correction of granite The image positioning coordinates are ( X object , Y object , Z object ), and the coordinates of the positioning base for the three-dimensional correction are read by the two spot image reading heads on the object unit respectively to read the X-axis positioning base. Undistorted light spot images on different surfaces of the platform to define the coordinates ( X object , Y object , Z object ) of the positioning point of the object unit.
請參閱第三圖，為本發明一種加工單元座標讀取示意圖。如圖三所示，刀具單元(加工單元)之固裝方式較複 雜，先是將Z軸平移台固裝於Y軸平移台上，所以移動Y方向位移是移動整個Z軸平移台，然後刀具單元再固裝於Z軸平移台上，因此刀具單元可以做Y、Z方向之移動，本實施例在Z軸平移台頂端，加裝光斑影像讀頭的固定臂，用來量取Y-Z軸定位基座Z=Z 2之X-Y面之光斑影像定位點座標(X cutter,Y cutter,Z 2)，而另一固定臂，用來量取Y-Z軸定位基座X=0之Y-Z面之光斑影像定位點座標(0,Y cutter,Z cutter)，綜合二定位點可得刀具單元定位於花崗岩三維校正用的定位基座之光斑影像定位座標為(X cutter,Y cutter,Z cutter)，其中，該刀具單元的三維校正用的定位基座之座標，係利用刀具單元上的兩個光斑影像讀取頭分別讀取該Y-Z軸定位基座不同面的不變形光斑影像，來定義出加工(刀具)單元定位點座標(X cutter,Y cutter,Z cutter)。 Please refer to the third figure, which is a schematic diagram of reading coordinates of a processing unit according to the present invention. As shown in Figure 3, the mounting method of the cutter unit (processing unit) is more complicated. First, the Z-axis translation stage is fixed on the Y-axis translation stage, so moving the Y-direction displacement is to move the entire Z-axis translation stage, and then the tool unit It is fixed on the Z-axis translation stage, so the cutter unit can move in the Y and Z directions. In this embodiment, a fixed arm of the light spot image reading head is installed at the top of the Z-axis translation stage to measure the YZ-axis positioning base. The coordinates of the spot image positioning point ( XY cutter , Y cutter , Z 2 ) on the XY plane of the Z = Z 2 seat, and the other fixed arm is used to measure the spot image positioning of the YZ plane of the YZ axis positioning base X = 0 Point coordinates (0, Y cutter , Z cutter ), and the two positioning points can be combined to obtain the spot image positioning coordinates of the cutter unit positioned on the positioning base for 3D correction of granite as ( X cutter , Y cutter , Z cutter ), where the The coordinates of the positioning base for the three-dimensional correction of the tool unit are defined by the two spot image reading heads on the tool unit to read the non-deformed light spot images on different sides of the YZ axis positioning base to define the processing (tool) Coordinates of unit positioning point ( X cutter , Y cutter , Z cutter ) .
由上述物件單元定位於花崗岩三維校正用的定位基座(X軸定位基座)之光斑影像定位座標(X object,Y object,Z object)及刀具單元定位於花崗岩三維校正用的定位基座(Y-Z軸定位基座)之光斑影像定位座標(X cutter,Y cutter,Z cutter)，配合各個光斑影像讀取頭固定臂固裝尺寸、方位，可獲得物件單元與刀具單元幾何中心相對於花崗岩三維校正用的定位基座之絕對座標位址；三維校正用的定位基座(定位基座單元)之製做精度會影響未來機台熱膨脹補償校正精度，所以必須要求X軸定位基座要盡量垂直Y-Z軸光斑牆(Y-Z軸定位基座)，另外也需製做X、Y、Z三軸之起始定位標線，製做Z=Z1、X-Y面之X=X 0， X軸起始定位標線及Y=0、X-Z面之X=X 0，X軸起始定位標線，此二條X軸起始定位標線之X軸讀值是一樣的，同樣地製作Z=Z2、X-Y面之Y=Y 0之Y軸起始定位標線及X=0、Y-Z面，Z=Z 0，Z軸起始定位標線，此三軸工作起始標線定位精度也會影響未來機台熱膨脹補償校正精度。 The spot image positioning coordinates ( X object , Y object , Z object ) of the object unit positioned on the positioning base (X-axis positioning base) for 3D correction of granite and the cutter unit positioned on the positioning base (3D correction for granite) YZ axis positioning base) spot image positioning coordinates ( X cutter , Y cutter , Z cutter ), combined with the fixed size and orientation of the fixed arm of each spot image reading head, to obtain the three-dimensional geometric center of the object unit and the cutter unit relative to the granite The absolute coordinate address of the positioning base for calibration; the accuracy of the positioning base (positioning base unit) for 3D calibration will affect the accuracy of future thermal expansion compensation of the machine, so the X-axis positioning base must be as vertical as possible YZ axis light spot wall (YZ axis positioning base), in addition, it is necessary to make the initial positioning marks of the X, Y, and Z axes, and make Z = Z1, X = X 0 on the XY plane, and X axis initial positioning reticle and Y = 0, X XZ plane of = X 0, X-axis positioning marking start, read this two X-axis X-axis value of the initial positioning of the reticle is the same, the same manner as Z = Z2, XY plane from the starting Y = Y Y-axis and positioning the reticle X = 0, YZ plane, Z = Z 0, Z 0 axis of Positioning reticle, this reticle three-axis positioning accuracy of the operation start of the next machine also affects the thermal expansion compensation correction accuracy.
本發明使用足夠強壯之花崗岩作為三維校正用的定位基座，使其總變形量小於規格值，再設計良好絕熱機構，使機台熱量不易傳到花崗岩三維校正用的定位基座(定位基座單元)，而且花崗岩三維校正用的定位基座之本體溫度很容易被精確控制，因此花崗岩三維校正用的定位基座可以提供一個極佳、極穩定之三維參考座標系統；本發明提出在多軸加工機台上，置入低膨脹係數之三維校正用的定位基座，利用三維校正用的定位基座本身之低熱變異特性及良好剛性，提供一個不會隨溫度變化之三維座標定位基座，配合時時讀取物件單元及刀具單元於花崗岩三維定位基座之絕對定位座標，回饋於軸控單元，進行精密加工，此加工定位方法，可以時時消除機台熱變形誤差，獲得極佳之加工精度。 The invention uses sufficiently strong granite as a positioning base for three-dimensional correction, so that the total deformation amount is less than the specification value, and then designs a good thermal insulation mechanism, so that the heat of the machine is not easily transmitted to the positioning base for three-dimensional correction of granite (positioning base Unit), and the body temperature of the positioning base for three-dimensional granite calibration can be easily controlled accurately, so the positioning base for three-dimensional granite calibration can provide an excellent and stable three-dimensional reference coordinate system; the present invention proposes a multi-axis On the processing machine, a positioning base for three-dimensional correction with a low expansion coefficient is placed, and the low thermal variability and good rigidity of the positioning base for three-dimensional correction are used to provide a three-dimensional positioning base that does not change with temperature. Read the absolute positioning coordinates of the object unit and the cutter unit on the three-dimensional positioning base of the granite from time to time, and feed it back to the axis control unit for precise processing. This processing and positioning method can eliminate the thermal deformation error of the machine from time to time and obtain excellent results. Precision.
上述之實施例僅為例示性說明本創作之特點及功效，非用以限制本創作之實質技術內容的範圍。任何熟悉此技藝之人士均可在不違背創作之精神及範疇下，對上述實施例進行修飾與變化。因此，本創作之權利保護範圍，應如後述之申請專利範圍所列。 The above-mentioned embodiments are only for illustrative purposes to explain the features and effects of this creation, and are not intended to limit the scope of the substantial technical content of this creation. Anyone familiar with the art can modify and change the above embodiments without departing from the spirit and scope of the creation. Therefore, the scope of protection of the rights of this creation shall be as listed in the scope of patent application mentioned later.
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