TW201829961A - 蒸汽產生器及反應器 - Google Patents
蒸汽產生器及反應器 Download PDFInfo
- Publication number
- TW201829961A TW201829961A TW106135393A TW106135393A TW201829961A TW 201829961 A TW201829961 A TW 201829961A TW 106135393 A TW106135393 A TW 106135393A TW 106135393 A TW106135393 A TW 106135393A TW 201829961 A TW201829961 A TW 201829961A
- Authority
- TW
- Taiwan
- Prior art keywords
- duct
- lamps
- lamp
- close
- conduit
- Prior art date
Links
- 239000012530 fluid Substances 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 19
- 239000000126 substance Substances 0.000 claims abstract description 6
- 150000001875 compounds Chemical class 0.000 claims abstract description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 30
- 229910052721 tungsten Inorganic materials 0.000 claims description 27
- 239000010937 tungsten Substances 0.000 claims description 27
- -1 tungsten halogen Chemical class 0.000 claims description 27
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 230000005855 radiation Effects 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 7
- 229910010293 ceramic material Inorganic materials 0.000 claims description 6
- 239000002241 glass-ceramic Substances 0.000 claims description 4
- 239000013626 chemical specie Substances 0.000 abstract 1
- 238000012545 processing Methods 0.000 description 38
- 239000007789 gas Substances 0.000 description 11
- 239000007788 liquid Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000009413 insulation Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000006091 Macor Substances 0.000 description 1
- 238000010793 Steam injection (oil industry) Methods 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002803 fossil fuel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/281—Methods of steam generation characterised by form of heating method in boilers heated electrically other than by electrical resistances or electrodes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/284—Methods of steam generation characterised by form of heating method in boilers heated electrically with water in reservoirs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/282—Methods of steam generation characterised by form of heating method in boilers heated electrically with water or steam circulating in tubes or ducts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B1/00—Methods of steam generation characterised by form of heating method
- F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
- F22B1/30—Electrode boilers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
- F22B37/00—Component parts or details of steam boilers
- F22B37/02—Component parts or details of steam boilers applicable to more than one kind or type of steam boiler
- F22B37/10—Water tubes; Accessories therefor
- F22B37/12—Forms of water tubes, e.g. of varying cross-section
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F22—STEAM GENERATION
- F22G—SUPERHEATING OF STEAM
- F22G1/00—Steam superheating characterised by heating method
- F22G1/06—Steam superheating characterised by heating method with heat supply predominantly by radiation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
- F24H1/14—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
- F24H1/142—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form using electric energy supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
- F24H1/14—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
- F24H1/16—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled
- F24H1/162—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled using electrical energy supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/22—Water heaters other than continuous-flow or water-storage heaters, e.g. water heaters for central heating
- F24H1/40—Water heaters other than continuous-flow or water-storage heaters, e.g. water heaters for central heating with water tube or tubes
- F24H1/43—Water heaters other than continuous-flow or water-storage heaters, e.g. water heaters for central heating with water tube or tubes helically or spirally coiled
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
- H05B3/0038—Heating devices using lamps for industrial applications
- H05B3/0052—Heating devices using lamps for industrial applications for fluid treatments
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H2250/00—Electrical heat generating means
- F24H2250/14—Lamps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Resistance Heating (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662412526P | 2016-10-25 | 2016-10-25 | |
| US62/412,526 | 2016-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201829961A true TW201829961A (zh) | 2018-08-16 |
Family
ID=62025398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW106135393A TW201829961A (zh) | 2016-10-25 | 2017-10-17 | 蒸汽產生器及反應器 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20190249863A1 (fr) |
| EP (1) | EP3532777A4 (fr) |
| JP (1) | JP2019537700A (fr) |
| KR (1) | KR20190075995A (fr) |
| CN (1) | CN110023689A (fr) |
| TW (1) | TW201829961A (fr) |
| WO (1) | WO2018080885A1 (fr) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7908847B2 (en) | 2004-01-13 | 2011-03-22 | Emcon Technologies Llc | Method and apparatus for starting up a fuel-fired burner of an emission abatement assembly |
| US7685811B2 (en) | 2004-01-13 | 2010-03-30 | Emcon Technologies Llc | Method and apparatus for controlling a fuel-fired burner of an emission abatement assembly |
| CN114207839B (zh) | 2019-06-06 | 2025-08-29 | 埃地沃兹真空泵有限责任公司 | 用于半导体工艺的气体/固体分离的液体过滤装置 |
| NL2023510B1 (en) * | 2019-07-16 | 2021-02-08 | Reflexy Nederland B V | Heating device for liquids |
| EP4066591A4 (fr) * | 2019-11-26 | 2024-02-28 | NxStage Medical, Inc. | Dispositifs de chauffage, procédés et systèmes |
| US11705345B2 (en) | 2020-04-30 | 2023-07-18 | Edwards Vacuum Llc | Semiconductor system with steam generator and reactor |
| US11931682B2 (en) | 2020-09-22 | 2024-03-19 | Edwards Vacuum Llc | Waste gas abatement technology for semiconductor processing |
| US12599860B2 (en) | 2021-11-16 | 2026-04-14 | Edwards Vacuum Llc | Liquid filter apparatus with thermal shield |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2954826A (en) * | 1957-12-02 | 1960-10-04 | William E Sievers | Heated well production string |
| US4835363A (en) * | 1985-11-23 | 1989-05-30 | Robert Krups Stiftung & Co. Kg. | Electric steam iron heated by halogen lamp and having a ceramic sole plate |
| US5054107A (en) * | 1989-05-19 | 1991-10-01 | Geoffrey Batchelder | Radiating lamp fluid heating system |
| JP2583159B2 (ja) * | 1991-02-08 | 1997-02-19 | 株式会社小松製作所 | 流体加熱器 |
| US5590240A (en) * | 1995-05-30 | 1996-12-31 | Process Technology Inc | Ultra pure water heater with coaxial helical flow paths |
| IT246360Y1 (it) * | 1998-11-25 | 2002-04-08 | Andrea Gerosa | Dispositivo per produrre istantaneamente vapore |
| JP4743495B2 (ja) * | 2005-07-08 | 2011-08-10 | 東京エレクトロン株式会社 | 流体加熱装置 |
| CN100520173C (zh) * | 2005-12-28 | 2009-07-29 | 海尔集团公司 | 一种快速产生过热蒸汽的方法及其装置 |
| JP5138515B2 (ja) * | 2008-09-05 | 2013-02-06 | 東京エレクトロン株式会社 | 蒸気発生器、蒸気発生方法および基板処理装置 |
| DE102009010989B4 (de) * | 2009-02-19 | 2012-08-23 | E.G.O. Elektro-Gerätebau GmbH | Verfahren und Vorrichtung zur Dampferzeugung |
| JP5307780B2 (ja) * | 2010-09-13 | 2013-10-02 | 東京エレクトロン株式会社 | 液体加熱ユニット、これを備える液処理装置、および液処理方法 |
| JP5019082B1 (ja) * | 2011-03-25 | 2012-09-05 | 栗田工業株式会社 | 液体加熱方法及び液体加熱装置並びに加熱液体供給装置 |
-
2017
- 2017-10-17 TW TW106135393A patent/TW201829961A/zh unknown
- 2017-10-19 EP EP17863868.0A patent/EP3532777A4/fr not_active Withdrawn
- 2017-10-19 WO PCT/US2017/057356 patent/WO2018080885A1/fr not_active Ceased
- 2017-10-19 JP JP2019543172A patent/JP2019537700A/ja active Pending
- 2017-10-19 CN CN201780066320.9A patent/CN110023689A/zh active Pending
- 2017-10-19 KR KR1020197014815A patent/KR20190075995A/ko not_active Withdrawn
-
2019
- 2019-04-24 US US16/392,917 patent/US20190249863A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| CN110023689A (zh) | 2019-07-16 |
| WO2018080885A1 (fr) | 2018-05-03 |
| JP2019537700A (ja) | 2019-12-26 |
| US20190249863A1 (en) | 2019-08-15 |
| EP3532777A4 (fr) | 2020-03-25 |
| KR20190075995A (ko) | 2019-07-01 |
| EP3532777A1 (fr) | 2019-09-04 |
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