TW201849B - - Google Patents

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Publication number: TW201849B
Authority: TW; Taiwan
Prior art keywords: layer; gate; patent application; item; procedure
Prior art date: 1992-03-13

Application number

TW81107242A

Other languages

English (en)

Chinese (zh)

Original Assignee

Advanced Power Technology

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1992-03-13

Filing date

1992-09-15

Publication date

1993-03-11

1992-03-13 Priority claimed from US07/852,932 external-priority patent/US5262336A/en

1992-09-15 Application filed by Advanced Power Technology filed Critical Advanced Power Technology

1993-03-11 Application granted granted Critical

1993-03-11 Publication of TW201849B publication Critical patent/TW201849B/zh

Links

238000000034 method Methods 0.000 claims description 167
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239000000758 substrate Substances 0.000 claims description 68
238000000151 deposition Methods 0.000 claims description 63
239000002019 doping agent Substances 0.000 claims description 59
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 57
229910052710 silicon Inorganic materials 0.000 claims description 53
239000010703 silicon Substances 0.000 claims description 53
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 52
239000007789 gas Substances 0.000 claims description 50
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125000004429 atom Chemical group 0.000 claims description 37
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 37
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Electrodes Of Semiconductors (AREA)

TW81107242A 1992-03-13 1992-09-15 TW201849B (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US07/852,932 US5262336A (en)	1986-03-21	1992-03-13	IGBT process to produce platinum lifetime control

Publications (1)

Publication Number	Publication Date
TW201849B true TW201849B (fr)	1993-03-11

Family

ID=51356588

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW81107242A TW201849B (fr)	1992-03-13	1992-09-15

Country Status (1)

Country	Link
TW (1)	TW201849B (fr)

1992
- 1992-09-15 TW TW81107242A patent/TW201849B/zh active

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