TW202037814A - Rotor and roots pump - Google Patents

Abstract

A rotor applied in a roots pump is disclosed. The rotor includes a central axis, an impeller and a cladding layer. The impeller surrounds the central axis, and the cladding layer covers the impeller, wherein a material of the cladding layer is different from a material of the impeller.

Description

Rotor and Lu's pump

The present invention relates to a rotor and a pump, and particularly relates to a rotor and a Lushi pump used in a Lushi pump.

With the development of the science and technology industry, vacuum technology is widely used. For example, thin film deposition, dry etching, ion implantation or lithography processes in the semiconductor manufacturing process need to be performed in a vacuum environment, which in turn drives the vacuum pump ( Also known as the development of vacuum pumps.

Among many vacuum pumps, since the dry vacuum pump is in the intake, compression, exhaust and other strokes, the stroke swept by the rotor movement does not need grease to lubricate or seal, which can avoid the return of oil and gas and maintain a high Cleanliness, so it is widely used in the technology industry.

Dry vacuum pumps can be divided into Lushi pumps, claw pumps, spiral pumps, etc. according to the different rotor types used. Lushi pumps have stable working characteristics, simple structure, easy manufacturing, and operation. Convenience and long maintenance period have attracted widespread attention. The working principle of Lu's pump is to compress air by rotating two rotors in opposite directions, and bring the gas from the low pressure end to the high pressure end to achieve the effect of vacuuming.

The rotor used for Lu's pump includes a central shaft and an impeller. The central shaft and the impeller are made of high-strength metal materials to provide the required structural strength. However, the use of high-strength metal materials will cause the overall weight to be too heavy. In addition, the contour line (also known as the profile line) of the impeller is composed of a set of specific curves. When manufacturing the impeller, usually a piece of material is first used, and then most of the material is removed through processing and the contour line is milled (for example, using a ball cutter Milling), which has the disadvantages of wasting material, long processing time and not conducive to mass production.

The purpose of the present invention is to provide a rotor and Lu's pump to solve the above-mentioned problems.

According to one embodiment of the present invention, a rotor is provided for a Lu's pump. The rotor includes a central shaft, an impeller, and a coating layer. The impeller surrounds the central axis, and the coating layer covers the impeller. The material of one of the layers is different from that of the impeller.

According to the aforementioned rotor, the coating layer and the impeller can be integrally formed by insert molding.

According to the aforementioned rotor, the density of one of the coating layers can be less than that of the central axis, and the material of the coating layer can be plastic.

According to the aforementioned rotor, the density of one of the impellers can be less than the density of the central axis. The impeller can be made by extrusion. The material of the impeller can be aluminum-containing metal. The impeller may include a hollow part. The impeller can be two-lobed, three-lobed or five-lobed.

According to the aforementioned rotor, one of the central shafts can be medium carbon steel or alloy steel.

According to another embodiment of the present invention, there is provided a Lu's pump comprising a pump body and the aforementioned rotor. The pump body is formed with a pump chamber, an inlet and an outlet, and the inlet and the outlet are both connected to In the pump chamber, the rotor is arranged in the pump chamber, and the rotor is used to discharge gas from the inlet to the outlet.

In the rotor of the present invention, the material of one of the coating layers is different from the material of one of the impellers, which facilitates the manufacture of impellers in other ways, thereby reducing material costs, shortening processing time, and favoring mass production. In order to make the above-mentioned features and advantages of the present invention more obvious and understandable, the following specific examples are given in conjunction with the accompanying drawings to describe in detail as follows.

Please refer to FIG. 1, which is a perspective view of a rotor 110 according to an embodiment of the present invention. The rotor 110 is suitable for a Lu's pump. The rotor 110 includes a central shaft 111, an impeller 112, and a coating layer 113. The impeller 112 surrounds the central shaft 111. The coating layer 113 covers the impeller 112, wherein the coating layer 113 One of the materials is different from that of the impeller 112.

The cladding layer 113 and the impeller 112 can be integrally formed in a manner of embedding, injection and injection molding. In this way, the impeller 112 does not need to be processed to achieve the required surface accuracy, but the required surface accuracy can be imparted to the coating layer 113 by embedding the injection molding mold, which is beneficial to shorten the processing time and thereby facilitate mass production.

The central shaft 111 can be made of a high-strength metal material to provide the required structural strength. For example, the central shaft 111 can be made of a material with a strength greater than or equal to medium carbon steel. Specifically, for example, the central shaft 111 The material can be medium carbon steel or alloy steel. The central shaft 111 can be made by lathe and grinding.

The impeller 112 can be combined with the central shaft 111 through a hot jacket or cold pressing, but the present invention is not limited to this, as long as the method of combining the impeller 112 with the central shaft 111 is applicable to the present invention. The impeller 112 can be made of a lighter material than the central shaft 111. The density of the impeller 112 is lower than the density of the central shaft 111, which helps reduce the overall weight of the rotor 110. For example, the material of the impeller 112 can be aluminum-containing metal. For example, the material of the impeller 112 can be pure aluminum or aluminum alloy. The impeller 112 can be made by extrusion, which is different from the previous impeller 112, which is first made into a block and then processed to remove most of the material and milled out the contour line. The extrusion manufacturing helps to greatly reduce the processing time. , And can save material costs. In this embodiment, the impeller 112 is a two-blade type, thereby having the advantage of a large scavenging area. However, the present invention is not limited to this. The impeller 112 can be configured in other types according to actual needs. For example, the impeller 112 can be Three-leaf or five-leaf type. The impeller 112 may include a hollow portion 114, thereby further reducing the overall weight of the rotor 110 and saving material costs.

The density of the covering layer 113 may be less than the density of the central axis 111, thereby further reducing the overall weight of the rotor 110. The material of the coating layer 113 can be plastic. The usable plastics include but are not limited to acrylonitrile-butadiene-styrene copolymer (Acrylonitrile-Butadiene-Styrene Copolymer, ABS), ethylene-vinyl acetate copolymer (Ethylene -Vinyl Acetate Copolymer, EVA), High Density Polyethylene (HDPE), Polyamide (PA) or Polybutylene Terephthalate (PBT).

Please refer to Figures 2 and 3. Figure 2 is a schematic cross-sectional view of Lu's pump 200 according to another embodiment of the present invention, and Figure 3 is another cross-sectional view of Lu's pump 200 in Figure 2 In a schematic diagram, the viewing angles of Fig. 2 and Fig. 3 are different, and the rotation angle of the rotor 210 is also different. The Lushi pump 200 includes a rotor 210 and a pump body 220.

The number of the rotor 210 is two. The rotor 210 includes a central shaft 211, an impeller 212, and a coating layer 213. The impeller 212 surrounds the central shaft 211. The coating layer 213 covers the impeller 212. The impeller 212 is a two-blade type and includes The hollow portion 214, the details of the rotor 210 can be the same as the rotor 110 in FIG. 1 without any contradiction, and will not be repeated here.

The pump body 220 is formed with a pump chamber 221, an inlet 222 and an outlet 223. The inlet 222 and the outlet 223 are both connected to the pump chamber 221, the rotor 210 is arranged in the pump chamber 220, and the rotor 210 It is used to discharge gas from the inlet 222 to the outlet 223. The operating principle of the Lushi pump 200 is well known to those with ordinary knowledge in the art, and will not be repeated here. By using the rotor 210, it is beneficial to reduce the material cost and processing time of the Lushi pump 200 and is beneficial to mass production.

Please refer to FIG. 4, which is a schematic cross-sectional view of a Lu's pump 300 according to another embodiment of the present invention. The Lushi pump 300 includes a rotor 310 and a pump body 320.

The number of the rotor 310 is two. The rotor 310 includes a central shaft 311, an impeller 312, and a coating layer 313. The impeller 312 surrounds the central shaft 311. The coating layer 313 covers the impeller 312. The impeller 312 is trilobal and The hollow part 314 is included, and the details about the rotor 310 can be the same as the rotor 110 in FIG. 1 without any contradiction, and will not be repeated here.

The pump body 320 is formed with a pump chamber 321, an inlet 322, and an outlet 323. The inlet 322 and the outlet 323 are both connected to the pump chamber 321. The rotor 310 is disposed in the pump chamber 320, and the rotor 310 It is used to discharge gas from the inlet 322 to the outlet 323. The operating principle of the Lu's pump 300 is well known to those with ordinary knowledge in the art, and will not be repeated here. By using the rotor 310, it is beneficial to reduce the material cost and processing time of the Lushi pump 300 and is beneficial to mass production.

Compared with the prior art, the rotor of the present invention has a different coating material and impeller material, which facilitates the use of other methods to manufacture the impeller, thereby reducing material costs, shortening processing time, and mass production. The foregoing descriptions are only preferred embodiments of the present invention, and all equivalent changes and modifications made in accordance with the scope of the patent application of the present invention shall fall within the scope of the present invention.

110, 210, 310: rotor 111, 211, 311: central axis 112, 212, 312: impeller 113, 213, 313: coating layer 114, 214, 314: hollow part 200, 300: Lu's pump 220, 320: pump body 221, 321: pump chamber 222, 322: Entrance 223, 323: Export

Figure 1 is a perspective schematic view of a rotor according to an embodiment of the present invention. Figure 2 is a schematic cross-sectional view of a Lu's pump according to another embodiment of the present invention. Figure 3 is another schematic cross-sectional view of the Lu's pump in Figure 2. Figure 4 is a schematic cross-sectional view of a Lu's pump according to another embodiment of the present invention.

110: Rotor

111: central axis

112: Impeller

113: Overlay

114: hollow part

Claims (11)

A rotor for a Lu's pump, the rotor includes: A central axis; An impeller surrounding the central axis; and A coating layer covering the impeller; The material of the coating layer is different from the material of the impeller. The rotor according to claim 1, wherein the cladding layer and the impeller train are integrally formed by insert molding. The rotor according to claim 1, wherein a density of the coating layer is less than a density of the central axis. The rotor according to claim 1, wherein the material of the coating layer is plastic. The rotor according to claim 1, wherein a density of the impeller is less than a density of the central axis. The rotor according to claim 1, wherein the impeller train is made in an extrusion manner. The rotor according to claim 1, wherein the material of the impeller is aluminum-containing metal. The rotor according to claim 1, wherein the impeller includes a hollow portion. The rotor according to claim 1, wherein the impeller is of a two-lobe type, a three-lobe type or a five-lobe type. The rotor according to claim 1, wherein one of the central shafts is made of medium carbon steel or alloy steel. A kind of Lu's pump, including: A pump body, in which a pump chamber, an inlet and an outlet are formed, the inlet and the outlet are both connected to the pump chamber; and The rotor according to any one of claims 1 to 10 is arranged in the pump chamber, and the rotor is used for discharging gas from the inlet to the outlet.

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