TW202239697A - 電可致動的微機電系統開關 - Google Patents

電可致動的微機電系統開關 Download PDF

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Publication number
TW202239697A
TW202239697A TW111108219A TW111108219A TW202239697A TW 202239697 A TW202239697 A TW 202239697A TW 111108219 A TW111108219 A TW 111108219A TW 111108219 A TW111108219 A TW 111108219A TW 202239697 A TW202239697 A TW 202239697A
Authority
TW
Taiwan
Prior art keywords
layer
electrically actuatable
insulating layer
switching element
mems switch
Prior art date
Application number
TW111108219A
Other languages
English (en)
Chinese (zh)
Inventor
猶根 蘭穆斯
馬修 路易斯
Original Assignee
德商羅伯特 博世有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 德商羅伯特 博世有限公司 filed Critical 德商羅伯特 博世有限公司
Publication of TW202239697A publication Critical patent/TW202239697A/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate

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  • Micromachines (AREA)
TW111108219A 2021-03-09 2022-03-07 電可致動的微機電系統開關 TW202239697A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021202238.3 2021-03-09
DE102021202238.3A DE102021202238A1 (de) 2021-03-09 2021-03-09 Elektrisch betätigbarer MEMS-Schalter

Publications (1)

Publication Number Publication Date
TW202239697A true TW202239697A (zh) 2022-10-16

Family

ID=80685166

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111108219A TW202239697A (zh) 2021-03-09 2022-03-07 電可致動的微機電系統開關

Country Status (4)

Country Link
DE (1) DE102021202238A1 (fr)
FR (1) FR3120622A1 (fr)
TW (1) TW202239697A (fr)
WO (1) WO2022189056A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021202409A1 (de) 2021-03-12 2022-09-15 Robert Bosch Gesellschaft mit beschränkter Haftung Kapazitiv betätigbarer MEMS-Schalter
DE102021203574A1 (de) 2021-04-12 2022-10-13 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS Schalter mit Kappenkontakt
DE102021203566A1 (de) 2021-04-12 2022-10-13 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS Schalter mit eingebettetem Metallkontakt

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030018420A1 (en) 2001-06-19 2003-01-23 Christopher Apanius Double acting crash sensor
US7190245B2 (en) 2003-04-29 2007-03-13 Medtronic, Inc. Multi-stable micro electromechanical switches and methods of fabricating same
DE102007035633B4 (de) * 2007-07-28 2012-10-04 Protron Mikrotechnik Gmbh Verfahren zur Herstellung mikromechanischer Strukturen sowie mikromechanische Struktur
KR101272359B1 (ko) 2010-03-01 2013-06-07 오므론 가부시키가이샤 스위치 및 그 제조 방법 및 릴레이
JP5257383B2 (ja) * 2010-03-10 2013-08-07 オムロン株式会社 スイッチ及びその製造方法並びにリレー
JP5131298B2 (ja) * 2010-03-10 2013-01-30 オムロン株式会社 スイッチ及びその製造方法並びに静電リレー
JP5263203B2 (ja) * 2010-03-12 2013-08-14 オムロン株式会社 静電リレー
JP5720485B2 (ja) * 2011-08-12 2015-05-20 オムロン株式会社 電子部品

Also Published As

Publication number Publication date
FR3120622A1 (fr) 2022-09-16
DE102021202238A1 (de) 2022-09-15
WO2022189056A1 (fr) 2022-09-15

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