TW202519084A - Light-emitting diode display screen with enhanced light extraction and display pixels for such a screen - Google Patents
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Abstract
Description
本描述一般而言係關於顯示螢幕,該等顯示螢幕包含顯示像素,該等顯示像素包含基於半導體材料的發光二極體,且本描述係關於用於該等顯示螢幕的製造的方法。The present description generally relates to display screens that include display pixels that include light-emitting diodes based on semiconductor materials, and to methods for the manufacture of such display screens.
已知生產包含顯示像素的顯示螢幕,每個顯示像素包含至少一個發光二極體,例如基於具有大多數至少一個第III族元素及一個第V族元素的化合物的半導體材料(例如氮化鎵GaN),下文稱為第III-V族化合物。It is known to produce display screens comprising display pixels each comprising at least one light-emitting diode, for example based on semiconductor materials (such as gallium nitride GaN) having a majority of compounds of at least one Group III element and one Group V element, hereinafter referred to as Group III-V compounds.
顯示螢幕的光提取效率(Light Extraction Efficiency,LEE)通常由自顯示螢幕逸出的光子數量與由顯示像素之發光二極體發射的光子數量之間的比率來限定。希望顯示螢幕的提取效率係儘可能高的。The light extraction efficiency (LEE) of a display screen is usually defined by the ratio between the number of photons escaping from the display screen and the number of photons emitted by the light emitting diodes of the display pixels. It is desirable that the extraction efficiency of a display screen is as high as possible.
用於製造顯示螢幕的一個示例性方法包含將顯示像素設置在面板上,及沉積平坦化層以獲得大體上平坦的發射面。One exemplary method for manufacturing a display screen includes placing display pixels on a panel and depositing a planarization layer to obtain a substantially flat emitting surface.
現有顯示螢幕的一個缺點在於由每個顯示像素發射的光子之一部分並未逸出顯示螢幕。One drawback of existing display screens is that a portion of the photons emitted by each display pixel do not escape the display screen.
一個實施例克服已知顯示螢幕的缺點中之一些或全部。One embodiment overcomes some or all of the disadvantages of known display screens.
一個實施例提供顯示像素,該顯示像素意欲經置放且附接在顯示螢幕之面板上,該顯示像素包含: - 發光區,包含至少一個發光二極體; - 支撐件,對於由該發光區發射的輻射透明,且意欲用於使用在處理該顯示像素中,該支撐件之高度高於5 μm;以及 - 中間層,對於由該發光區發射的輻射透明,該中間層由固體材料製成,且插入該發光區與該支撐件之間,該中間層之折射指數嚴格小於1.5且以高於或等於0.2的折射指數偏差小於該支撐件之折射指數。 One embodiment provides a display pixel intended to be placed and attached to a panel of a display screen, the display pixel comprising: - a light-emitting region comprising at least one light-emitting diode; - a support transparent to the radiation emitted by the light-emitting region and intended for use in processing the display pixel, the height of the support being higher than 5 μm; and - an intermediate layer transparent to the radiation emitted by the light-emitting region, the intermediate layer being made of a solid material and inserted between the light-emitting region and the support, the refractive index of the intermediate layer being strictly less than 1.5 and less than the refractive index of the support by a refractive index deviation higher than or equal to 0.2.
中間層允許由具有高入射的發光區發射的光射線經朝向發光區反射,且僅允許由具有低入射的發光區發射的光射線穿過。由中間層朝向發光區反射的光射線,藉由發生在發光區內的散射及反射現象,然後經發送回中間層,且當其入射低時可穿過中間層。因此,中間層使得有利地可以增加由顯示像素以低入射發射的光射線的數量。此有利地使包含這種顯示像素的顯示螢幕的光提取效率能夠增加,因為顯示螢幕之發射面上的光射線之反射經減少。有利地,支撐件用來處理顯示像素,具體而言當將每個單獨顯示像素置放且附接在面板上時。支撐件之尺寸,具體而言其高度,有利地確保顯示像素在處理期間的良好機械強度。由於中間層由固體材料製成,因此該中間層可允許支撐件與發光區之間的強力機械接合經獲得。The intermediate layer allows light rays emitted by a luminescent region with high incidence to be reflected toward the luminescent region, and only allows light rays emitted by a luminescent region with low incidence to pass through. Light rays reflected by the intermediate layer toward the luminescent region are then sent back to the intermediate layer by scattering and reflection phenomena occurring in the luminescent region, and can pass through the intermediate layer when their incidence is low. Therefore, the intermediate layer advantageously makes it possible to increase the amount of light rays emitted by the display pixels with low incidence. This advantageously enables the light extraction efficiency of a display screen including such display pixels to be increased, because the reflection of light rays on the emitting surface of the display screen is reduced. Advantageously, the support is used to handle the display pixels, specifically when each individual display pixel is placed and attached to the panel. The dimensions of the support, in particular its height, advantageously ensure good mechanical strength of the display pixel during processing. Since the intermediate layer is made of a solid material, the intermediate layer allows a strong mechanical bond between the support and the light-emitting area to be obtained.
根據一個實施例,支撐件係單件式玻璃支撐件。有利地,這係具有良好機械強度及良好光學透明性質的材料。According to one embodiment, the support is a one-piece glass support. Advantageously, this is a material with good mechanical strength and good optical transparency.
根據一個實施例,顯示像素進一步包含接合層,該接合層插入支撐件與中間層之間。此有利地使得顯示像素的製造較容易。According to one embodiment, the display pixel further comprises a bonding layer, which is inserted between the support and the intermediate layer. This advantageously makes the manufacture of the display pixel easier.
根據一個實施例,發光區包含具有線形、圓錐形或截錐形半導體元件的發光二極體。According to one embodiment, the light emitting region includes a light emitting diode having a linear, conical or truncated pyramidal semiconductor element.
根據一個實施例,發光二極體包含紋理化表面。有利地,此允許增加由發光二極體發射的輻射之擴散。According to one embodiment, the LED comprises a textured surface. Advantageously, this allows increasing the diffusion of the radiation emitted by the LED.
根據一個實施例,對於至少一個發光二極體,發光區進一步包含電氣絕緣塊,該電氣絕緣塊覆蓋該發光二極體且插入該中間層與該發光二極體之間。具體而言,該塊允許發光二極體經保護,尤其當發光二極體包含有線、圓錐形或截錐形半導體元件時,平坦的頂表面經獲得,且任擇地顯示像素之發射波長經調整。According to one embodiment, for at least one LED, the luminescent region further comprises an electrically insulating block, which covers the LED and is interposed between the intermediate layer and the LED. In particular, the block allows the LED to be protected, especially when the LED comprises a wired, conical or truncated pyramidal semiconductor element, a flat top surface is obtained, and optionally the emission wavelength of the display pixel is adjusted.
根據一個實施例,該塊係光致發光的。According to one embodiment, the block is photoluminescent.
根據一個實施例,該塊係對於由該發光二極體發射的輻射擴散的。此有利地允許增加由發光二極體發射的輻射之擴散。According to one embodiment, the block is diffusive for the radiation emitted by the LED. This advantageously allows increasing the diffusion of the radiation emitted by the LED.
根據一個實施例,該塊係對於由該發光二極體發射的輻射透明的。According to one embodiment, the block is transparent to the radiation emitted by the LED.
根據一個實施例,該發光區進一步包含與中間層相對的反射層,其中該塊插入該反射層與該中間層之間。此有利地允許防止光射線自與支撐件相對的側上的發光區逸出。According to one embodiment, the luminescent region further comprises a reflective layer opposite to the intermediate layer, wherein the block is inserted between the reflective layer and the intermediate layer. This advantageously allows preventing light rays from escaping from the luminescent region on the side opposite to the support.
根據一個實施例,該發光區進一步包含圍繞該塊的反射壁。有利地,此允許防止光射線在發光區之側邊緣處逸出。According to one embodiment, the luminous area further comprises a reflective wall surrounding the block. Advantageously, this allows preventing the light rays from escaping at the side edges of the luminous area.
根據一個實施例,該顯示像素包含在與支撐件相對的面上的導電接合墊。有利地,此使得顯示像素之接合墊能夠藉由經由支撐件處理顯示像素來附接至面板。According to one embodiment, the display pixel includes a conductive bonding pad on the face opposite the support member. Advantageously, this enables the bonding pad of the display pixel to be attached to the panel by handling the display pixel through the support member.
一個實施例亦提供顯示螢幕,該顯示螢幕包含: - 面板; - 如以上限定的顯示像素,用於顯示像素的支撐件位於面板之相對側上;以及 - 平坦化層,覆蓋面板及顯示像素。 One embodiment also provides a display screen comprising: - a panel; - display pixels as defined above, supports for the display pixels being located on opposite sides of the panel; and - a planarization layer covering the panel and the display pixels.
每個顯示像素之中間層有利地允許增加顯示螢幕的光提取效率,因為顯示螢幕之發射面上的光射線反射經減少。The intermediate layer in each display pixel advantageously allows for increased light extraction efficiency of the display screen, since reflections of light rays off the emitting surface of the display screen are reduced.
一個實施例亦提供用於製造如以上限定的顯示像素的方法,該方法包含以下步驟: - 在半導體板上形成該顯示像素之該發光區的複數個副本; - 在該等發光區上形成該中間層;以及 - 將構成該支撐件的材料之板附接至該中間層;以及 - 分離該等顯示像素。 One embodiment also provides a method for manufacturing a display pixel as defined above, the method comprising the steps of: - forming a plurality of copies of the light-emitting region of the display pixel on a semiconductor board; - forming the intermediate layer on the light-emitting regions; and - attaching a plate of material constituting the support to the intermediate layer; and - separating the display pixels.
一個實施例亦提供用於製造顯示螢幕的方法,該方法包含以下步驟: - 形成如先前限定的顯示像素; - 將每個顯示像素單獨置放且附接在面板上;以及 - 形成覆蓋該等顯示像素及該等顯示像素之間的該面板的平坦化層。 One embodiment also provides a method for manufacturing a display screen, the method comprising the steps of: - forming display pixels as previously defined; - individually placing and attaching each display pixel on a panel; and - forming a planarization layer covering the display pixels and the panel between the display pixels.
顯示像素支撐件允許顯示像素在將顯示像素置放且附接在面板上之步驟期間經單獨處理。The display pixel supports allow the display pixels to be individually handled during the steps of placing and attaching the display pixels to the panel.
根據一個實施例,在將每個顯示像素單獨置放且附接在面板上之步驟期間處理每個顯示像素包含使用夾具,該夾具藉由該顯示像素之該支撐件處理該顯示像素。According to one embodiment, handling each display pixel during the step of individually placing and attaching each display pixel to the panel includes using a fixture that handles the display pixel via the support of the display pixel.
相同特徵已在各圖中藉由相同元件符號標示。具體而言,在各個實施例之間共用的結構及/或功能特徵可以具有相同元件符號且可設置相同的結構、尺寸和材料性質。The same features are marked by the same reference numerals in the various figures. Specifically, the common structural and/or functional features between the various embodiments may have the same reference numerals and may have the same structure, size, and material properties.
為清楚起見,僅詳細示出且描述對於理解本文描述的實施例有用的操作及元件。For clarity, only the operations and elements that are useful for understanding the embodiments described herein are shown and described in detail.
除非另有指示,否則當涉及連接在一起的兩個元件時,此表示除導體之外無任何中間元件的直接連接,且當涉及耦接在一起的兩個元件時,此表示這兩個元件可經連接或該等元件可經由一或多個其他元件耦接。Unless otherwise indicated, when referring to two elements being connected together, this means a direct connection without any intermediate elements other than conductors, and when referring to two elements being coupled together, this means the two elements may be connected or the elements may be coupled via one or more other elements.
在以下揭示中,除非另有指示,否則當涉及諸如術語「前」、「後」、「頂」、「底」、「左」、「右」等的絕對位置限定詞,或諸如術語「上方」、「下方」、「較高」、「較低」等的相對位置限定詞,或諸如「水平」、「垂直」等的定向限定詞時,涉及諸圖中所示的定向。In the following disclosure, unless otherwise indicated, when referring to absolute position qualifiers such as the terms "front", "back", "top", "bottom", "left", "right", etc., or relative position qualifiers such as the terms "above", "below", "higher", "lower", etc., or directional qualifiers such as "horizontal", "vertical", etc., reference is made to the orientation shown in the figures.
除非另有指定,否則表達「大概」、「近似」、「大體上」及「大約」表示在10%內,且較佳地在5%以內。Unless otherwise specified, the expressions “approximately,” “substantially,” and “approximately” mean within 10%, and preferably within 5%.
在以下描述中,層之內部透射率對應於離開該層的輻射之強度與進入層的輻射之強度之間的比率。層之吸收等於1與內部透射率之間的差異。在以下描述中,當穿過層的輻射之吸收小於60%時,該層據稱為是對輻射透明的。在以下描述中,當層中的輻射之吸收高於60%時,該層據稱為是吸收輻射的。當輻射具有帶有最大值的大體上「鐘形」光譜,諸如高斯光譜時,輻射之波長或輻射之中心或主波長係達到光譜最大值的波長。在以下描述中,材料之折射指數對應於材料對於由光電裝置發射的輻射之波長範圍的折射指數。除非另有指示,否則折射指數經視為在有用輻射之波長範圍內大體上恆定,例如等於有用輻射之波長範圍內的折射指數的平均值。折射指數係無因次數,該無因次數表徵媒體的光學性質,具體而言吸收及散射。折射指數等於複光學指數之實部。折射指數可例如藉由橢圓偏振技術決定。In the following description, the internal transmittance of a layer corresponds to the ratio between the intensity of the radiation leaving the layer and the intensity of the radiation entering the layer. The absorption of a layer is equal to the difference between 1 and the internal transmittance. In the following description, a layer is said to be transparent to radiation when the absorption of radiation passing through the layer is less than 60%. In the following description, a layer is said to absorb radiation when the absorption of radiation in the layer is higher than 60%. When the radiation has a generally "bell-shaped" spectrum with a maximum, such as a Gaussian spectrum, the wavelength of the radiation or the center or dominant wavelength of the radiation is the wavelength at which the spectrum maximum is reached. In the following description, the refractive index of a material corresponds to the refractive index of the material for the wavelength range of radiation emitted by the optoelectronic device. Unless otherwise indicated, the refractive index is considered to be substantially constant within the wavelength range of the useful radiation, for example equal to the average value of the refractive index within the wavelength range of the useful radiation. The refractive index is a dimensionless number that characterizes the optical properties of the medium, in particular absorption and scattering. The refractive index is equal to the real part of the complex optical index. The refractive index can be determined, for example, by elliptical polarization techniques.
此外,術語「絕緣體」及「導體」分別被認為意味「電氣絕緣的」及「導電的」。Furthermore, the terms "insulator" and "conductor" are considered to mean "electrically insulating" and "electrically conductive", respectively.
第1圖部分地且高度示意性地例示顯示螢幕1之一實例。FIG. 1 partially and highly schematically illustrates an example of a display screen 1 .
顯示螢幕1包含面板2及顯示像素3,該等顯示像素附接至面板2,第1圖中示出單個顯示像素3。對於一些應用,希望顯示螢幕1之發射面6係大體上平面的。為此,顯示螢幕1包含覆蓋顯示像素3及顯示像素3之間的面板2的平坦化層4,及覆蓋平坦化層4且定界顯示螢幕1之發射面6的層堆疊5。平坦化層4允許顯示像素3經封裝且保護。層堆疊5允許顯示螢幕1之一些光學性質以已知方式改良。堆疊5包括例如抗反射塗層。The display screen 1 comprises a panel 2 and display pixels 3, which are attached to the panel 2, a single display pixel 3 being shown in FIG. 1 . For some applications, it is desired that the emitting surface 6 of the display screen 1 is substantially planar. To this end, the display screen 1 comprises a planarization layer 4 covering the display pixels 3 and the panel 2 between the display pixels 3, and a layer stack 5 covering the planarization layer 4 and delimiting the emitting surface 6 of the display screen 1. The planarization layer 4 allows the display pixels 3 to be encapsulated and protected. The layer stack 5 allows some optical properties of the display screen 1 to be improved in a known manner. The stack 5 comprises, for example, an anti-reflection coating.
顯示像素3包含基板7,發光區8經形成在該基板上。顯示像素3在基板7之側上附接至面板2。顯示像素3進一步包含支撐件9,例如玻璃塊,以便賦能顯示像素3之處理。發光區8然後經插入基板7與支撐件9之間。The display pixel 3 comprises a substrate 7 on which a light emitting region 8 is formed. The display pixel 3 is attached to the panel 2 on the side of the substrate 7. The display pixel 3 further comprises a support 9, such as a glass block, to enable processing of the display pixel 3. The light emitting region 8 is then inserted between the substrate 7 and the support 9.
第2圖例示在第1圖中所示的顯示螢幕1之操作期間藉由模擬獲得的光射線路徑。在第2圖中,發光區8藉由點光源模擬。如可自此圖中可看出,由光源發射的射線中之一些在層堆疊5與空氣之間的界面處經反射,且保持截留在顯示器1中,從而導致所發射射線的提取效率之降低。FIG. 2 illustrates light ray paths obtained by simulation during operation of the display screen 1 shown in FIG. 1. In FIG. 2, the light emitting area 8 is simulated by a point light source. As can be seen from this figure, some of the rays emitted by the light source are reflected at the interface between the layer stack 5 and the air and remain trapped in the display 1, resulting in a reduction in the extraction efficiency of the emitted rays.
第3圖係顯示螢幕10之一實施例的部分高度示意性橫截面圖。FIG. 3 is a partially schematic, highly schematic, cross-sectional view of an embodiment of screen 10.
第3圖中所示的顯示螢幕10包含第1圖中所示的顯示螢幕1之所有元件,差異在於顯示像素3由顯示像素3'替代,每個顯示像素3'包含顯示像素3之所有元件且進一步包含中間層12,該中間層插入發光區8與支撐件9之間。The display screen 10 shown in FIG. 3 includes all the elements of the display screen 1 shown in FIG. 1 , with the difference that the display pixel 3 is replaced by a display pixel 3 ′, each display pixel 3 ′ includes all the elements of the display pixel 3 and further includes an intermediate layer 12 inserted between the light-emitting area 8 and the support 9.
中間層12係對由發光區8發射的輻射透明的層。中間層12之折射指數儘可能接近於1,較佳地嚴格小於基板9之折射指數,且嚴格小於構成與中間層12接觸的發光區8的一或多個材料之折射指數。根據一個實施例,中間層12之折射指數嚴格小於1.5,較佳地在1至1.3之範圍內。根據一個實施例,中間層12由選自包含氟化鎂(MgF 2)及有機聚合物,具體而言丙烯酸酯的群組的材料製成。中間層12係由固體材料製成的層之事實有利地允許支撐件9與發光區8之間的接合經促進,且具體而言支撐件9與發光區8之間的強機械接合經獲得。根據一個實施例,中間層12之厚度小於或等於2 μm,較佳地小於或等於1 μm,且更佳地小於或等於500 nm。根據一個實施例,中間層12之厚度大於或等於10 nm。根據一個實施例,中間層12包含相對且平坦的下面13及上面14。根據一個實施例,面13及14平行於發射面6。根據一個實施例,中間層12係共形沉積層。根據一個實施例,中間層12由適合於旋塗沉積的材料製成。 The intermediate layer 12 is a layer transparent to the radiation emitted by the luminescent region 8. The refractive index of the intermediate layer 12 is as close to 1 as possible, preferably strictly smaller than the refractive index of the substrate 9, and strictly smaller than the refractive index of the one or more materials constituting the luminescent region 8 in contact with the intermediate layer 12. According to one embodiment, the refractive index of the intermediate layer 12 is strictly smaller than 1.5, preferably in the range of 1 to 1.3. According to one embodiment, the intermediate layer 12 is made of a material selected from the group consisting of magnesium fluoride (MgF 2 ) and an organic polymer, in particular acrylate. The fact that the intermediate layer 12 is a layer made of solid material advantageously allows the bonding between the support 9 and the luminescent region 8 to be promoted, and in particular a strong mechanical bonding between the support 9 and the luminescent region 8 to be obtained. According to one embodiment, the thickness of the intermediate layer 12 is less than or equal to 2 μm, preferably less than or equal to 1 μm, and more preferably less than or equal to 500 nm. According to one embodiment, the thickness of the intermediate layer 12 is greater than or equal to 10 nm. According to one embodiment, the intermediate layer 12 comprises a relatively and flat lower surface 13 and an upper surface 14. According to one embodiment, the faces 13 and 14 are parallel to the emitting surface 6. According to one embodiment, the intermediate layer 12 is a conformally deposited layer. According to one embodiment, the intermediate layer 12 is made of a material suitable for spin-on deposition.
支撐件9係對於由發光區8發射的輻射透明的。根據一個實施例,支撐件9由選自包含玻璃及藍寶石的群組的材料製成。根據一個實施例,支撐件9之高度大於5 μm,較佳地在20 μm與500 μm之間。支撐件9之厚度足夠大,以使支撐件9能夠在顯示像素3'處理步驟期間,具體而言在面板2上的每個顯示像素3'的置放及單獨附接期間,為包含支撐件9、中間層12、發光區8及基板7的總成提供機械支撐。相比較而言,發光區8之厚度可大於500 nm,較佳地在1 μm與50 μm之間,中間層12之厚度可小於或等於2 μm,較佳地小於或等於1 μm,且更佳地小於或等於500 nm,如先前所指示,且當存在時,基板7之厚度可小於100 μm。基板9之縱橫比,亦即基板9之高度與最大寬度之間的比率,可在0.01與10之間,較佳地在0.05與2之間。支撐件9之折射指數嚴格大於1.3,較佳地在1.4至1.6之範圍內。較佳地,支撐件9之折射指數與中間層12之折射指數之間的折射指數偏差大於0.2。根據一個實施例,支撐件9包含在與發光區8相對的側上的上面15。較佳地,上面15係平坦的。The support 9 is transparent to the radiation emitted by the luminescent area 8. According to one embodiment, the support 9 is made of a material selected from the group comprising glass and sapphire. According to one embodiment, the height of the support 9 is greater than 5 μm, preferably between 20 μm and 500 μm. The thickness of the support 9 is large enough so that the support 9 can provide mechanical support for the assembly comprising the support 9, the intermediate layer 12, the luminescent area 8 and the substrate 7 during the display pixel 3' processing steps, specifically during the placement and individual attachment of each display pixel 3' on the panel 2. In comparison, the thickness of the luminescent region 8 may be greater than 500 nm, preferably between 1 μm and 50 μm, the thickness of the intermediate layer 12 may be less than or equal to 2 μm, preferably less than or equal to 1 μm and more preferably less than or equal to 500 nm, as previously indicated, and when present, the thickness of the substrate 7 may be less than 100 μm. The aspect ratio of the substrate 9, i.e. the ratio between the height and the maximum width of the substrate 9, may be between 0.01 and 10, preferably between 0.05 and 2. The refractive index of the support 9 is strictly greater than 1.3, preferably in the range of 1.4 to 1.6. Preferably, the refractive index deviation between the refractive index of the support 9 and the refractive index of the intermediate layer 12 is greater than 0.2. According to one embodiment, the support 9 comprises an upper surface 15 on the side opposite to the light emitting area 8. Preferably, the upper surface 15 is flat.
根據一個實施例,顯示像素3'之最大高度在20 μm與500 μm之間。顯示像素3'之縱橫比,亦即顯示像素3'之高度與最大寬度之間的比率,可在0.01與10之間,較佳地在0.05與2之間。According to one embodiment, the maximum height of the display pixel 3' is between 20 μm and 500 μm. The aspect ratio of the display pixel 3', ie the ratio between the height and the maximum width of the display pixel 3', may be between 0.01 and 10, preferably between 0.05 and 2.
用於製造顯示像素3'的方法之一個實施例包含形成包含顯示像素3'的複數個副本的板及然後分離顯示像素3'。具體而言,用於製造顯示像素3'的方法之一個實施例包含以下步驟: - 在半導體板上形成發光區8的複數個副本; - 在發光區8上形成中間層12;以及 - 將構成支撐件9的材料之板附接至中間層12; - 分離顯示像素3'。 One embodiment of a method for manufacturing a display pixel 3' includes forming a plate including a plurality of copies of the display pixel 3' and then separating the display pixel 3'. Specifically, one embodiment of a method for manufacturing a display pixel 3' includes the following steps: - forming a plurality of copies of the light-emitting region 8 on a semiconductor plate; - forming an intermediate layer 12 on the light-emitting region 8; and - attaching a plate of material constituting the support 9 to the intermediate layer 12; - separating the display pixel 3'.
分離顯示像素3'可藉由切割板來執行,具體而言藉由機械鋸切或雷射切割執行。Separating the display pixels 3' may be performed by cutting the board, in particular by mechanical sawing or laser cutting.
用於製造顯示螢幕10的方法之一個實施例包含每個顯示像素3'至面板2的置放及單獨附接,然後是覆蓋顯示像素3'及顯示像素3'之間的面板2的平坦化層4,及在存在的情況下,層堆疊5的形成。具體而言,根據一個實施例,在將每個顯示像素3'置放並單獨附接在面板2上的步驟期間對每個顯示像素3'的處理包含藉由支撐件9處理顯示像素3'的夾具之使用。根據一個實施例,夾具將吸力施加在支撐件9之上面15上。出於此目的,有利地,支撐件9之上面15係平的。One embodiment of a method for manufacturing a display screen 10 comprises the placement and individual attachment of each display pixel 3' to a panel 2, followed by the formation of a planarization layer 4 covering the display pixel 3' and the panel 2 between the display pixels 3', and, if present, a layer stack 5. Specifically, according to one embodiment, the handling of each display pixel 3' during the step of placing and individually attaching each display pixel 3' to the panel 2 comprises the use of a fixture for handling the display pixel 3' by means of a support 9. According to one embodiment, the fixture applies suction to an upper surface 15 of the support 9. For this purpose, advantageously, the upper surface 15 of the support 9 is flat.
第4圖例示第3圖中所示的顯示螢幕10的模擬光路徑。在第4圖中,發光區8藉由點光源模擬。與顯示螢幕1的光提取效率相比,顯示螢幕10的光提取效率增加。藉由模擬可估計,在具有折射指數係1.2的中間層12的情況下,顯示螢幕10的光提取效率與顯示螢幕1的光提取效率相比可增加30%至40%。FIG. 4 illustrates a simulated light path of the display screen 10 shown in FIG. 3. In FIG. 4, the light emitting area 8 is simulated by a point light source. The light extraction efficiency of the display screen 10 is increased compared to the light extraction efficiency of the display screen 1. It can be estimated by simulation that in the case of the intermediate layer 12 having a refractive index of 1.2, the light extraction efficiency of the display screen 10 can be increased by 30% to 40% compared to the light extraction efficiency of the display screen 1.
第5圖在左側示意性地例示第1圖中所示的顯示螢幕1的顯示像素3的光射線路徑R1及R2,且在右側示意性地例示第3圖中所示的顯示螢幕10的顯示像素3'的光射線路徑R1'及R2'。出於說明目的,平坦化層4、支撐件9、發光區8及層堆疊5之折射指數在第5圖中大體上相等。FIG5 schematically illustrates on the left the light ray paths R1 and R2 of the display pixel 3 of the display screen 1 shown in FIG1, and schematically illustrates on the right the light ray paths R1' and R2' of the display pixel 3' of the display screen 10 shown in FIG3. For illustrative purposes, the refractive indices of the planarization layer 4, the support 9, the luminescent region 8 and the layer stack 5 are substantially equal in FIG5.
在無中間層12的情況下,由發光區8以相對於發射面6的高入射發射的光射線R2在發射面6上反射,該發射面對應於層堆疊5與空氣之間的界面。發射面6僅讓由與發射面6相比入射較低的發光區8發射的光射線R1穿過。In the absence of the intermediate layer 12, the light ray R2 emitted by the luminescent region 8 at a high incidence relative to the emitting surface 6 is reflected on the emitting surface 6, which corresponds to the interface between the layer stack 5 and the air. The emitting surface 6 only allows the light ray R1 emitted by the luminescent region 8 at a lower incidence than the emitting surface 6 to pass through.
中間層12允許將由與發射面6相比入射較高的發光區8發射的光射線R2'朝向發光區8反射,且讓由與發射面6相比入射較低的發光區8發射且大部分將管理以自顯示螢幕10逸出的光射線R1'穿過。由中間層12朝向發光區8反射的光射線R2',藉由發生在發光區8內的散射及反射現象,然後經發送回中間層12,且當其入射與發射面6相比較低時,可穿過中間層12。因此增加最終以低入射到達發射面6的光射線之總數,使得增加顯示螢幕10的光提取效率。換言之,中間層12因此允許由發光區8發射的射線在層堆疊5與空氣之間的界面處的反射經降低或甚至消除,因而產生光射線R2'在發光區8處的一類再循環。The intermediate layer 12 allows the light ray R2' emitted from the luminescent region 8 with a higher incidence than the luminescent surface 6 to be reflected toward the luminescent region 8, and allows the light ray R1' emitted from the luminescent region 8 with a lower incidence than the luminescent surface 6 and mostly managed to escape from the display screen 10 to pass through. The light ray R2' reflected from the intermediate layer 12 toward the luminescent region 8 is then sent back to the intermediate layer 12 by the scattering and reflection phenomena occurring in the luminescent region 8, and can pass through the intermediate layer 12 when its incidence is lower than the luminescent surface 6. Therefore, the total number of light rays that finally reach the luminescent surface 6 with low incidence is increased, so that the light extraction efficiency of the display screen 10 is increased. In other words, the intermediate layer 12 therefore allows the reflection of the radiation emitted by the luminescent region 8 at the interface between the layer stack 5 and the air to be reduced or even eliminated, thereby producing a kind of recycling of the light radiation R2' at the luminescent region 8.
根據一個實施例,每個顯示像素3'之發光區8包含至少一個發光二極體,較佳地發光二極體之集合。每個發光二極體可係三維發光二極體或平面發光二極體。根據一個實施例,發光二極體LED包含例如GaN、AlN、InN、InGaN、AlGaN或AlInGaN的第III-V族化合物,或第II-VI族化合物的半導體層。According to one embodiment, the light emitting region 8 of each display pixel 3' comprises at least one light emitting diode, preferably a collection of light emitting diodes. Each light emitting diode may be a three-dimensional light emitting diode or a planar light emitting diode. According to one embodiment, the light emitting diode LED comprises a semiconductor layer of a III-V compound, such as GaN, AlN, InN, InGaN, AlGaN or AlInGaN, or a II-VI compound.
三維發光二極體包含三維半導體元件,例如線、錐體、截錐體或稜錐體元件,具體而言微米線或奈米線,發光二極體的主動區在該三維半導體元件上延伸。術語「微米線」或「奈米線」表示沿著較佳方向伸長的三維結構,其中稱為次要尺寸的至少兩個尺寸處於5 nm與2.5 μm之間,較佳地在50 nm與2.5 μm之間,稱為主要尺寸的第三尺寸係次要尺寸中最大者的至少1倍,較佳地至少2倍。在一些實施例中,次要尺寸可小於或等於約3 μm,較佳地在100 nm與3 μm之間,更佳地在1 μm與1.5 μm之間。在一些實施例中,每個微米線或奈米線之高度可大於或等於500 nm,較佳地在1 μm與50 μm之間。The three-dimensional light-emitting diode comprises a three-dimensional semiconductor element, such as a wire, a pyramid, a truncated pyramid or a prism pyramid element, in particular a microwire or a nanowire, on which the active region of the light-emitting diode extends. The term "microwire" or "nanowire" refers to a three-dimensional structure elongated along a preferred direction, wherein at least two dimensions, referred to as minor dimensions, are between 5 nm and 2.5 μm, preferably between 50 nm and 2.5 μm, and a third dimension, referred to as a major dimension, is at least 1 times, preferably at least 2 times, the largest of the minor dimensions. In some embodiments, the minor dimension may be less than or equal to about 3 μm, preferably between 100 nm and 3 μm, and more preferably between 1 μm and 1.5 μm. In some embodiments, the height of each microwire or nanowire may be greater than or equal to 500 nm, preferably between 1 μm and 50 μm.
第6圖係第3圖中所示的顯示螢幕10之顯示像素3'之一實施例的示意性部分橫截面圖,其中發光區8包含奈米線或微米線發光二極體LED。FIG. 6 is a schematic partial cross-sectional view of an embodiment of a display pixel 3' of the display screen 10 shown in FIG. 3, wherein the light emitting region 8 comprises a nanowire or microwire light emitting diode LED.
在第6圖中自底部至頂部,發光區8包含: - 用於由發光二極體LED發射的輻射的反射層16; - 發光二極體LED之集合(示意性地示出八個發光二極體LED之兩個集合作為一實例),每個發光二極體LED在此具有奈米線或微米線的一般形狀; - 絕緣塊18,在此擱置在反射層16上,每個塊18面向發光二極體LED中之一個或發光二極體LED之總成且完全圍繞發光二極體LED,每個塊18係對於由發光二極體LED發射的輻射透明的塊,及/或散射由發光二極體LED發射的輻射的塊,及/或光致發光塊;以及 - 塊18之間的壁22,每個壁22係對於由發光二極體LED發射的輻射不透明的。 From bottom to top in FIG. 6 , the luminescent region 8 comprises: - a reflective layer 16 for the radiation emitted by the light-emitting diode LED; - a set of light-emitting diode LEDs (two sets of eight light-emitting diode LEDs are schematically shown as an example), each light-emitting diode LED having the general shape of a nanowire or microwire here; - Insulating blocks 18, here placed on the reflective layer 16, each block 18 facing one of the LEDs or the assembly of LEDs and completely surrounding the LEDs, each block 18 being a block transparent to the radiation emitted by the LEDs, and/or a block scattering the radiation emitted by the LEDs, and/or a photoluminescent block; and - walls 22 between the blocks 18, each wall 22 being opaque to the radiation emitted by the LEDs.
在第6圖中自底部至頂部,顯示像素3'包含: - 基板7,包含下面23及與下面23相對的上面24,上面24較佳地係至少在發光二極體LED處平坦的; - 發光區8,發光區8之反射層16擱置在上面24上; - 中間層12,覆蓋發光區8,具體而言塊18及壁22; - 任擇地,濾色器26或多於一個濾色器,覆蓋塊18中之至少一些,以實例之方式示出覆蓋塊18的單個濾光器26,中間層12插入塊18與濾光器26或多個濾光器之間; - 接合層28;以及 - 支撐件9。 In FIG. 6 , from bottom to top, the pixel 3 ′ is shown to include: - a substrate 7 including a lower surface 23 and an upper surface 24 opposite to the lower surface 23, the upper surface 24 being preferably flat at least at the light-emitting diode LED; - a light-emitting region 8, the reflective layer 16 of the light-emitting region 8 being placed on the upper surface 24; - an intermediate layer 12 covering the light-emitting region 8, specifically the block 18 and the wall 22; - optionally, a color filter 26 or more than one color filter covering at least some of the blocks 18, a single filter 26 covering the block 18 is shown by way of example, the intermediate layer 12 being inserted between the block 18 and the filter 26 or filters; - a bonding layer 28; and - a support 9.
第7圖係第3圖中所示的顯示螢幕10之顯示像素3'之另一實施例的示意性部分橫截面圖,其中發光區8包含至少一個平面發光二極體LED。平面發光二極體,亦稱為二維發光二極體,係藉由在基板上形成大體上平面的半導體層之堆疊,然後例如藉由將溝槽蝕刻至半導體層之堆疊中來定界發光二極體而製造。FIG7 is a schematic partial cross-sectional view of another embodiment of a display pixel 3' of the display screen 10 shown in FIG3, wherein the light emitting region 8 comprises at least one planar light emitting diode LED. Planar light emitting diodes, also called two-dimensional light emitting diodes, are manufactured by forming a stack of substantially planar semiconductor layers on a substrate and then defining the light emitting diodes, for example by etching trenches into the stack of semiconductor layers.
第7圖中所示的顯示像素3'包含第6圖中所示的顯示像素3'之所有元件,差異在於發光二極體LED包含大體上平坦的層之堆疊。根據一個實施例,發光二極體LED包含上面29,該上面係對於由發光二極體LED發射的輻射擴散的。The display pixel 3' shown in Fig. 7 comprises all the elements of the display pixel 3' shown in Fig. 6, with the difference that the light emitting diode LED comprises a stack of substantially planar layers. According to one embodiment, the light emitting diode LED comprises an upper surface 29 which is diffuse for the radiation emitted by the light emitting diode LED.
在第6圖及第7圖中,基板7可對應於單件式結構。該基板可不存在。基板7可對應於積體電路,該積體電路經設置以驅動發光區8之一或多個發光二極體LED且包含電子部件,具體而言絕緣閘場效電晶體,亦稱為MOS電晶體,或薄膜電晶體,亦稱為TFT電晶體。這些被稱為智慧型顯示像素3'。當基板7不存在(未示出)時,發光二極體(多個)可經轉印在包含電子部件的積體電路,具體而言控制電路上,且可經由在顯示像素3'之下部分上製作的導電墊(未示出)進行連接,該下部分則係相對於發光區8與支撐件9相對的那個部分。導電墊然後經電氣連接至稍後描述的電極層。In Figures 6 and 7, the substrate 7 may correspond to a single-piece structure. The substrate may not exist. The substrate 7 may correspond to an integrated circuit that is configured to drive one or more light-emitting diodes LED in the light-emitting area 8 and includes electronic components, specifically insulated gate field effect transistors, also known as MOS transistors, or thin film transistors, also known as TFT transistors. These are called smart display pixels 3'. When the substrate 7 does not exist (not shown), the light-emitting diode (s) may be transferred onto an integrated circuit including electronic components, specifically a control circuit, and may be connected via a conductive pad (not shown) made on the lower part of the display pixel 3', which is the part opposite to the light-emitting area 8 and the support 9. The conductive pads are then electrically connected to the electrode layer described later.
在第6圖及第7圖中,反射層16在基板7之上表面24上連續地示出。實際上,反射層16可經中斷以允許發光二極體LED連接至基板7。In FIGS. 6 and 7 , the reflective layer 16 is shown continuously on the upper surface 24 of the substrate 7. In practice, the reflective layer 16 may be interrupted to allow a light emitting diode LED to be connected to the substrate 7.
在上述實施例中,反射層16可係導電層,具體而言金屬層,例如由鐵、銅、鋁、鎢、銀、鈦、鉿、鋯或這些化合物中之至少兩種之組合製成。較佳地,反射層16由與微電子學中使用的製造方法相容的材料形成。較佳地,反射層16由鋁或銀製成。根據一個實施例,反射層16之厚度在100 nm與300 nm之間。或者,反射層16可係包含具有不同折射指數的層之堆疊的布拉格(Bragg)鏡。在此狀況下,反射層16由介電材料組成,該等介電材料諸如氧化矽(SiO 2)、氮化矽(SiN)、氧化鈦(TiO 2),或對於由發光區8發射的輻射之波長透明的任何其他氧化物或氮化物。在反射層16係布拉格鏡的狀況下,其可係至多10 μm厚。 In the above-mentioned embodiments, the reflective layer 16 can be a conductive layer, specifically a metal layer, for example made of iron, copper, aluminum, tungsten, silver, titanium, uranium, zirconium or a combination of at least two of these compounds. Preferably, the reflective layer 16 is formed of a material compatible with the manufacturing methods used in microelectronics. Preferably, the reflective layer 16 is made of aluminum or silver. According to one embodiment, the thickness of the reflective layer 16 is between 100 nm and 300 nm. Alternatively, the reflective layer 16 can be a Bragg mirror comprising a stack of layers with different refractive indices. In this case, the reflective layer 16 consists of a dielectric material such as silicon oxide ( SiO2 ), silicon nitride (SiN), titanium oxide ( TiO2 ), or any other oxide or nitride transparent to the wavelength of radiation emitted by the light emitting region 8. In the case where the reflective layer 16 is a Bragg mirror, it may be at most 10 μm thick.
接合層28允許基板9經附接至中間層12。根據一個實施例,接合層28由聚合物製成,該聚合物經設置以當暴露於例如紫外線輻射的輻射時硬化。接合層28可對應於光學黏合劑,例如由Norland公司以名稱NOA銷售的光學黏合劑。根據一個實施例,接合層28之厚度大於1 μm,較佳地在5 μm與30 μm之間。接合層28之折射指數嚴格大於1.3,較佳地在1.4至1.6的範圍內。根據一個實施例,中間層12之折射指數嚴格小於接合層28之折射指數,具體而言具有高於0.2的偏差。接合層28之折射指數可大體上等於支撐件9之折射指數。The bonding layer 28 allows the substrate 9 to be attached to the intermediate layer 12. According to one embodiment, the bonding layer 28 is made of a polymer, which is arranged to harden when exposed to radiation, such as ultraviolet radiation. The bonding layer 28 may correspond to an optical adhesive, such as the optical adhesive sold by the company Norland under the name NOA. According to one embodiment, the thickness of the bonding layer 28 is greater than 1 μm, preferably between 5 μm and 30 μm. The refractive index of the bonding layer 28 is strictly greater than 1.3, preferably in the range of 1.4 to 1.6. According to one embodiment, the refractive index of the intermediate layer 12 is strictly less than the refractive index of the bonding layer 28, specifically with a deviation higher than 0.2. The refractive index of the bonding layer 28 may be substantially equal to the refractive index of the support member 9.
每個塊18之縱橫比,亦即塊18之高度與最大寬度之間的比率,可在0.01與10之間,較佳地在0.05與2之間。垂直於上面24量測的每個塊18之高度可在500 nm與15 μm之間。每塊18之折射指數在1.4與2之間。根據一個實施例,中間層12之折射指數嚴格低於每個塊18之折射指數,具體而言具有大於0.2的偏差。根據一個實施例,塊18之上面係平坦的且平行於基板7之上面24。根據一個實施例,塊18之側壁(多個)垂直於上面24。或者,塊18之側壁(多個)可相對於上面24傾斜。The aspect ratio of each block 18, i.e. the ratio between the height and the maximum width of the block 18, can be between 0.01 and 10, preferably between 0.05 and 2. The height of each block 18 measured perpendicularly to the upper surface 24 can be between 500 nm and 15 μm. The refractive index of each block 18 is between 1.4 and 2. According to one embodiment, the refractive index of the intermediate layer 12 is strictly lower than the refractive index of each block 18, in particular with a deviation greater than 0.2. According to one embodiment, the upper surface of the block 18 is flat and parallel to the upper surface 24 of the substrate 7. According to one embodiment, the side wall(s) of the block 18 are perpendicular to the upper surface 24. Alternatively, the side wall(s) of block 18 may be inclined relative to upper surface 24.
根據一個實施例,當塊18係光致發光塊時,其包含磷光體,該磷光體當藉由由相關聯的發光二極體LED發射的光激勵時適於發射與由相關聯的發光二極體LED發射的光之波長不同的波長的光。According to one embodiment, when block 18 is a photoluminescent block, it includes a phosphor that, when excited by light emitted by an associated light emitting diode LED, is adapted to emit light of a wavelength different from the wavelength of light emitted by the associated light emitting diode LED.
根據一個實施例,每個光致發光塊18包含例如透明基質中的至少一個光致發光材料之粒子。光致發光材料之一個實例係藉由三價鈰離子活化的釔鋁石榴石(yttrium-aluminum garnet,YAG),亦稱為YAG:Ce或YAG:Ce 3+。習知光致發光材料之平均粒子大小通常大於5 μm。 According to one embodiment, each photoluminescent block 18 includes at least one particle of a photoluminescent material, for example, in a transparent matrix. An example of a photoluminescent material is yttrium-aluminum garnet (YAG) activated by trivalent ribonium ions, also known as YAG:Ce or YAG:Ce 3+ . It is known that the average particle size of the photoluminescent material is generally greater than 5 μm.
根據一個實施例,每個光致發光塊18包含無機或有機材料的基質,其中任擇地分散有半導體材料的奈米大小的單晶粒子,下文中亦稱為半導體奈米晶體或奈米磷光體粒子。光致發光材料的內部量子產率QY int等於由光致發光物質發射的光子數量與吸收的光子數量之比率。半導體奈米晶體的內部量子產率QY int高於5%,較佳地高於10%,更佳地高於20%。 According to one embodiment, each photoluminescent block 18 comprises a matrix of inorganic or organic material, in which nano-sized single crystal particles of semiconductor material are optionally dispersed, hereinafter also referred to as semiconductor nanocrystals or nanophosphor particles. The internal quantum yield QY int of the photoluminescent material is equal to the ratio of the number of photons emitted by the photoluminescent substance to the number of photons absorbed. The internal quantum yield QY int of the semiconductor nanocrystal is higher than 5%, preferably higher than 10%, and more preferably higher than 20%.
根據一個實施例,當塊18包含磷光體時,可根據發光二極體LED之集合來提供不同的磷光體。According to one embodiment, when block 18 includes phosphors, different phosphors may be provided depending on the set of light emitting diodes LEDs.
根據一個實施例,奈米晶體的平均大小在0.5 nm至1000 nm的範圍內,較佳地自0.5 nm至500 nm,甚至更佳地自1 nm至100 nm,尤其是自2 nm至30 nm。對於低於50 nm的尺寸,半導體奈米晶體的光轉換性質主要取決於量子侷限現象。半導體奈米晶體則對應於量子盒(在三維侷限之狀況下)或量子阱(在二維侷限之狀況下)。According to one embodiment, the average size of the nanocrystals is in the range of 0.5 nm to 1000 nm, preferably from 0.5 nm to 500 nm, even more preferably from 1 nm to 100 nm, and in particular from 2 nm to 30 nm. For sizes below 50 nm, the light conversion properties of semiconductor nanocrystals mainly depend on quantum confinement phenomena. Semiconductor nanocrystals correspond to quantum boxes (in the case of three-dimensional confinement) or quantum wells (in the case of two-dimensional confinement).
根據一個實施例,半導體奈米晶體之半導體材料選自包含以下各者的群組:硒化鎘(CdSe)、磷化銦(InP)、硫化鎘(CdS)、硫化鋅(ZnS)、硒化鋅(ZnSe)、碲化鎘(CdTe)、碲化鋅(ZnTe)、氧化鎘(CdO)、氧化鋅鎘(ZnCdO)、硫化鎘鋅(CdZnS)、硒化鎘鋅(CdZnSe)、硫化銀銦(AgInS 2)、PbScX 3型的鈣鈦礦,其中X係鹵素原子,具體而言碘(I)、溴(Br)或氯(Cl),以及這些化合物中之至少兩種的混合物。根據一個實施例,半導體奈米晶體之半導體材料選自Le Blevenec等人的名稱為Physica Status Solidi (RRL) - Rapid Research Letters第8卷,第4期,第349-352頁,2014年4月的出版品中引用的材料。 According to one embodiment, the semiconductor material of the semiconductor nanocrystal is selected from the group consisting of cadmium selenide (CdSe), indium phosphide (InP), cadmium sulfide (CdS), zinc sulfide (ZnS), zinc selenide (ZnSe), cadmium telluride (CdTe), zinc telluride (ZnTe), cadmium oxide (CdO), cadmium zinc oxide (ZnCdO), cadmium zinc sulfide (CdZnS), cadmium zinc selenide (CdZnSe), silver indium sulfide ( AgInS2 ), PbScX3 type calcium titanate, wherein X is a halogen atom, specifically iodine (I), bromine (Br) or chlorine (Cl), and a mixture of at least two of these compounds. According to one embodiment, the semiconductor material of the semiconductor nanocrystal is selected from the materials cited in the publication by Le Blevenec et al. entitled Physica Status Solidi (RRL) - Rapid Research Letters, Vol. 8, No. 4, pp. 349-352, April 2014.
根據一個實施例,半導體奈米晶體之尺寸係根據由半導體奈米晶體發射的輻射之所要的波長來選擇。例如,具有3.6 nm之平均大小的CdSe奈米晶體適合於將藍光轉換為紅光,且具有1.3 nm之平均大小的CdSe奈米晶體適合於將藍光轉換為綠光。根據另一實施例,半導體奈米晶體之組成係根據由半導體奈米晶體發射的輻射之所要的波長來選擇。According to one embodiment, the size of the semiconductor nanocrystals is selected based on the desired wavelength of radiation emitted by the semiconductor nanocrystals. For example, CdSe nanocrystals with an average size of 3.6 nm are suitable for converting blue light into red light, and CdSe nanocrystals with an average size of 1.3 nm are suitable for converting blue light into green light. According to another embodiment, the composition of the semiconductor nanocrystals is selected based on the desired wavelength of radiation emitted by the semiconductor nanocrystals.
基質係由對於由光致發光粒子及/或發光二極體LED發射的輻射至少部分透明,較佳地多於80%的材料製成。基質例如由二氧化矽製成。基質可例如由任何至少部分透明的聚合物製成,具體而言由矽酮、環氧樹脂、聚甲基丙烯酸甲酯(poly(methyl methacrylate),PMMA)類型的丙烯酸樹脂,或聚乙酸(PLA)製成。具體而言,基質可由與三維印表機一起使用的至少部分透明的聚合物製成。基質可係光敏或非光敏旋塗玻璃(spin-on glass,SOG)。根據一個實施例,基質含有以重量計自2%至90%,較佳地自10%至60%的奈米晶體,例如以重量計大約30%的奈米晶體。The substrate is made of a material that is at least partially transparent, preferably more than 80%, to the radiation emitted by the photoluminescent particles and/or the light-emitting diode LED. The substrate is made of silicon dioxide, for example. The substrate can be made of any at least partially transparent polymer, in particular of silicone, epoxy, acrylic resin of the poly(methyl methacrylate) (PMMA) type, or polyvinyl acetate (PLA). In particular, the substrate can be made of an at least partially transparent polymer used with a three-dimensional printer. The substrate can be photosensitive or non-photosensitive spin-on glass (SOG). According to one embodiment, the substrate contains from 2% to 90% by weight, preferably from 10% to 60% by weight of nanocrystals, for example about 30% by weight of nanocrystals.
光致發光塊18之高度取決於奈米晶體之濃度及所使用的奈米晶體之類型。當發光二極體係線形時,光致發光塊18之高度較佳地高於發光二極體之高度,且小於或等於壁22之高度。當自上方觀察時,每個光致發光塊18可對應於正方形、長方形、「L」形多邊形等,其面積可等於具有自1 μm量測至100 μm,較佳地自3 μm量測至15 μm的邊的正方形的面積。The height of the photoluminescent block 18 depends on the concentration of the nanocrystals and the type of nanocrystals used. When the light-emitting diodes are linear, the height of the photoluminescent block 18 is preferably higher than the height of the light-emitting diodes and less than or equal to the height of the wall 22. When viewed from above, each photoluminescent block 18 may correspond to a square, a rectangle, an "L"-shaped polygon, etc., and its area may be equal to the area of a square having sides measured from 1 μm to 100 μm, preferably from 3 μm to 15 μm.
根據一個實施例,當塊18係散射塊時,其包含適合於散射由相關聯的發光二極體LED發射的輻射的粒子,該等粒子散佈在透明基質中。粒子係例如氧化鈦(TiO 2)、氧化鋯(ZrO 2)、硫化鋅(ZnS)或硫化鉛(PbS)粒子。散射粒子之平均大小通常在100 nm至300 nm的範圍內。基質係對於由發光二極體LED發射的輻射至少部分透明的,較佳地多於80%。基質可由上述用於光致發光塊18的任何材料製成。散射塊18可包括或可不包括量子點。 According to one embodiment, when block 18 is a scattering block, it comprises particles suitable for scattering radiation emitted by an associated light-emitting diode LED, the particles being dispersed in a transparent matrix. The particles are, for example, titanium oxide (TiO 2 ), zirconium oxide (ZrO 2 ), zinc sulfide (ZnS) or lead sulfide (PbS) particles. The average size of the scattering particles is typically in the range of 100 nm to 300 nm. The matrix is at least partially transparent to the radiation emitted by the light-emitting diode LED, preferably more than 80%. The matrix can be made of any of the materials described above for photoluminescent block 18. Scattering block 18 may or may not include quantum dots.
根據一個實施例,當塊18係光致發光塊時,其亦係用於藉由光轉換發射的輻射的散射塊。光致發光塊18可藉由磷光體之存在而係擴散的。或者,光致發光塊18可進一步包括散射粒子。塊18之散射特性可藉由雙向散射分佈函數(Bidirectional Scattering Distribution Function,BSDF)來表徵,該雙向散射分佈函數具體包括雙向反射率分佈函數(Bidirectional Reflectance Distribution Function,BRDF)及雙向透射率分佈函數(Bidirectional Transmittance Distribution Function,BTDF)。雙向透射率分佈函數可使用專用量測儀器來決定。According to one embodiment, when the block 18 is a photoluminescent block, it is also a scattering block for emitting radiation by light conversion. The photoluminescent block 18 may be diffuse due to the presence of a phosphor. Alternatively, the photoluminescent block 18 may further include scattering particles. The scattering properties of the block 18 may be characterized by a bidirectional scattering distribution function (BSDF), which specifically includes a bidirectional reflectance distribution function (BRDF) and a bidirectional transmittance distribution function (BTDF). The bidirectional transmittance distribution function may be determined using a dedicated measurement instrument.
根據一個實施例,當塊18係透明塊時,其由可係上述用於光致發光塊18之基質的材料之一的材料製成。According to one embodiment, when the block 18 is a transparent block, it is made of a material that can be one of the materials used for the substrate of the photoluminescent block 18 described above.
根據一個實施例,不透明壁22反射由發光二極體LED發射的輻射。壁22至少部分地由反射材料製成。反射材料可係金屬材料,諸如鐵、銅、鋁、鎢、銀、鈦、鉿、鋯或這些化合物中之至少兩種之組合。較佳地,壁22由與微電子學中使用的製造方法相容的材料製成。較佳地,壁22由鋁或銀製成。According to one embodiment, the opaque wall 22 reflects the radiation emitted by the light emitting diode LED. The wall 22 is at least partially made of a reflective material. The reflective material can be a metallic material, such as iron, copper, aluminum, tungsten, silver, titanium, einsteinium, zirconium or a combination of at least two of these compounds. Preferably, the wall 22 is made of a material compatible with the manufacturing methods used in microelectronics. Preferably, the wall 22 is made of aluminum or silver.
在垂直於上面24的方向上量測的壁22之高度在300 nm至200 μm的範圍內,較佳地在3 μm至15 μm的範圍內。在平行於上面24的方向上量測的壁22之厚度在100 nm至50 μm的範圍內,較佳地在0.5 μm至10 μm的範圍內。The height of the wall 22 measured in a direction perpendicular to the upper face 24 is in the range of 300 nm to 200 μm, preferably in the range of 3 μm to 15 μm. The thickness of the wall 22 measured in a direction parallel to the upper face 24 is in the range of 100 nm to 50 μm, preferably in the range of 0.5 μm to 10 μm.
根據一個實施例,壁22可由反射材料製成,或者每個壁22藉由覆蓋有塗層來包含反射壁,該塗層係對於由光致發光塊18及/或發光二極體LED發射的輻射之波長反射的,例如具有TiO 2粒子的聚合物。 According to one embodiment, the walls 22 may be made of a reflective material, or each wall 22 comprises a reflective wall by being covered with a coating that is reflective for the wavelength of radiation emitted by the photoluminescent block 18 and/or the light emitting diode LED, such as a polymer with TiO 2 particles.
根據一個實施例,每個壁22包含不透明壁。例如,每個壁22可包含塗佈有黑色樹脂層的壁。此樹脂較佳地適於吸收光譜範圍內的電磁輻射,該光譜範圍包括發光區8的發射光譜及磷光體當存在時的發射光譜。根據另一實施例,每個壁22由對於可見光部分透明的樹脂製成。根據一個實施例,壁22不完全由黑色樹脂製成。According to one embodiment, each wall 22 comprises an opaque wall. For example, each wall 22 may comprise a wall coated with a layer of black resin. This resin is preferably suitable for absorbing electromagnetic radiation in a spectral range that includes the emission spectrum of the luminescent region 8 and the emission spectrum of the phosphor when present. According to another embodiment, each wall 22 is made of a resin that is partially transparent to visible light. According to one embodiment, the wall 22 is not completely made of black resin.
較佳地,壁22圍繞塊18。壁22降低相鄰塊18之間的串擾。較佳地,中間層12與壁22接觸。在第6圖及第7圖中所示的實施例中,中間層12經示出為完全覆蓋壁22。或者,壁22可穿過中間層12中之全部或部分。Preferably, the wall 22 surrounds the block 18. The wall 22 reduces crosstalk between adjacent blocks 18. Preferably, the intermediate layer 12 contacts the wall 22. In the embodiment shown in Figures 6 and 7, the intermediate layer 12 is shown as completely covering the wall 22. Alternatively, the wall 22 may pass through all or part of the intermediate layer 12.
顯示像素3'可任擇地包含覆蓋塊18中之至少一些的一個、兩個或三個濾色器26,例如單個黃色濾光器;兩個濾光器,第一濾光器係黃色濾光器且第二濾光器係紅色濾光器;或三個濾光器,第一濾光器係紅色濾光器,第二濾光器係綠色濾光器且第三濾光器係藍色濾光器。濾光器26可對應於形成布拉格濾光器的彩色層或不同折射指數之層的堆疊。根據一個實施例,每個濾光器26可包含適於吸收且/或反射由發光區8發射的輻射的一或多個層。The display pixel 3' may optionally include one, two or three filters 26 covering at least some of the blocks 18, for example a single yellow filter; two filters, the first filter being a yellow filter and the second filter being a red filter; or three filters, the first filter being a red filter, the second filter being a green filter and the third filter being a blue filter. The filters 26 may correspond to a stack of colored layers or layers of different refractive indices forming a Bragg filter. According to one embodiment, each filter 26 may include one or more layers suitable for absorbing and/or reflecting radiation emitted by the luminescent region 8.
當發光二極體LED之上表面29係散射表面時,該上表面可經紋理化以使由發光二極體LED發射的輻射能夠經散射。紋理化上面29可藉由化學或物理蝕刻來達成。當藉由上面29獲得的擴散充分時,覆蓋上面29的塊18可係對於由發光二極體LED發射的輻射透明的塊。When the upper surface 29 of the LED is a scattering surface, the upper surface can be textured to enable the radiation emitted by the LED to be scattered. The textured upper surface 29 can be achieved by chemical or physical etching. When the diffusion obtained by the upper surface 29 is sufficient, the block 18 covering the upper surface 29 can be a transparent block for the radiation emitted by the LED.
第8圖係第6圖中所示的顯示像素3'之更詳細實施例的示意性部分橫截面圖。FIG. 8 is a schematic partial cross-sectional view of a more detailed embodiment of the display pixel 3' shown in FIG. 6.
在本實施例中,發光區8自底部至頂部包含: - 晶種層30,由線生長促進材料製成,且佈置在基板7之上面24上; - 絕緣層32,覆蓋晶種層30,且包含使晶種層30之部分暴露的開口34; - 發光二極體LED(示出六個發光二極體),每個發光二極體LED藉由開口34中之一個與晶種層30接觸; - 絕緣層36,在發光二極體LED之下部分的側翼上延伸,且在發光二極體LED之間的絕緣層32上延伸; - 導電層38,形成覆蓋每個發光二極體LED且進一步在發光二極體LED之間的絕緣層36上方延伸的電極; - 反射層16,在此對應於在發光二極體LED之間的電極層38上方延伸的導電層,反射層16替代地插入電極層38與發光二極體LED之間的絕緣層36之間; - 介電保護層40,在層38及16上方延伸; - 塊18,覆蓋發光二極體LED總成; - 絕緣層42,覆蓋每個塊18之上面,或僅覆蓋塊18中之一些,絕緣層42可不存在; - 保護層44,覆蓋絕緣層42、塊18之側面及塊18之間的電極層38; - 塊18之間的壁22,每個壁22包含由反射塗層48圍繞的芯46;以及 - 保護層49,覆蓋整個結構,且塗佈有中間層12,第8圖中未示出。 In this embodiment, the light-emitting region 8 includes from bottom to top: - a seed layer 30 made of a wire growth promoting material and disposed on the upper surface 24 of the substrate 7; - an insulating layer 32 covering the seed layer 30 and including an opening 34 exposing a portion of the seed layer 30; - LEDs (six LEDs are shown), each LED being in contact with the seed layer 30 via one of the openings 34; - an insulating layer 36 extending on the side of the lower portion of the LED LED and on the insulating layer 32 between the LED LEDs; - Conductive layer 38, forming an electrode covering each LED and further extending over insulating layer 36 between the LEDs; - Reflective layer 16, here corresponding to a conductive layer extending over electrode layer 38 between the LEDs, reflective layer 16 being inserted between electrode layer 38 and insulating layer 36 between the LEDs instead; - Dielectric protective layer 40, extending over layers 38 and 16; - Block 18, covering the LED assembly; - - an insulating layer 42, covering the top of each block 18, or only covering some of the blocks 18, the insulating layer 42 may not exist; - a protective layer 44, covering the insulating layer 42, the sides of the blocks 18 and the electrode layer 38 between the blocks 18; - walls 22 between the blocks 18, each wall 22 comprising a core 46 surrounded by a reflective coating 48; and - a protective layer 49, covering the entire structure and coated with an intermediate layer 12, not shown in FIG. 8.
第9圖係顯示像素3'之發光二極體LED之一實施例的示意性部分橫截面圖。根據一個實施例,每個發光二極體LED包含藉由開口34中之一個與晶種層30接觸的線50,以及包含覆蓋線50之側壁及頂部的半導體層堆疊的外殼52。這種組態稱為徑向組態。由每個線50及相關聯的外殼52形成的總成構成發光二極體LED。FIG. 9 is a schematic partial cross-sectional view showing an embodiment of a light-emitting diode LED of a pixel 3'. According to one embodiment, each light-emitting diode LED comprises a wire 50 contacting the seed layer 30 through one of the openings 34, and a housing 52 comprising a semiconductor layer stack covering the sidewalls and top of the wire 50. This configuration is called a radial configuration. The assembly formed by each wire 50 and the associated housing 52 constitutes a light-emitting diode LED.
外殼52可包含若干層之堆疊,具體而言包含主動層54及接合層56。主動層54係由發光二極體LED供應的輻射中之大部分,較佳地全部由其發射的層。根據一個實例,主動層54可包括侷限構件,諸如單個量子阱或多個量子阱。接合層56可包含與線50相同的第III-V族材料但具有與線50相反的導電類型的半導體層之堆疊。Housing 52 may include a stack of layers, specifically an active layer 54 and a bonding layer 56. Active layer 54 is the layer from which most, preferably all, of the radiation supplied by the light emitting diode LED is emitted. According to one example, active layer 54 may include a confinement member, such as a single quantum well or multiple quantum wells. Bonding layer 56 may include a stack of semiconductor layers of the same III-V material as line 50 but having an opposite conductivity type to line 50.
第10圖係用於顯示像素3'的發光二極體LED之另一實施例的示意性部分橫截面圖。第10圖中所示的發光二極體LED包含第9圖中所示的發光二極體LED之所有元件,差異在於外殼52僅存在於線50之頂部處。這種組態稱為軸向組態。Fig. 10 is a schematic partial cross-sectional view of another embodiment of a light emitting diode LED for displaying pixel 3'. The light emitting diode LED shown in Fig. 10 includes all the elements of the light emitting diode LED shown in Fig. 9, with the difference that the housing 52 is only present at the top of the line 50. This configuration is called an axial configuration.
形成第9圖及第10圖中所示的發光二極體LED,亦即在開口64中生長線50,且形成塗佈線50的外殼52,可例如藉由金屬有機化學氣相沉積(Metal-Organic Chemical Vapor Deposition,MOCVD)或任何其他合適的方法來執行。Forming the light emitting diode LED shown in FIGS. 9 and 10 , that is, growing the wire 50 in the opening 64 and forming the outer shell 52 of the wire 50 can be performed, for example, by Metal-Organic Chemical Vapor Deposition (MOCVD) or any other suitable method.
晶種層30由促進線生長的材料製成。例如,構成晶種層30的材料可係來自元素週期表的第IV、V或VI行的過渡金屬之氮化物、碳化物或硼化物,或這些化合物之組合。根據另一實施例,晶種層30可不存在。根據另一實施例,晶種層30可由例如形成在開口34之底部處的晶種墊替代。The seed layer 30 is made of a material that promotes wire growth. For example, the material constituting the seed layer 30 may be a nitride, carbide or boride of a transition metal from row IV, V or VI of the periodic table, or a combination of these compounds. According to another embodiment, the seed layer 30 may not exist. According to another embodiment, the seed layer 30 may be replaced by a seed pad formed at the bottom of the opening 34, for example.
每個絕緣層32、36、40、42、44、50及芯46可由例如氧化矽(SiO 2)、氮化矽(Si xN y),其中x係約3且y係約4,例如Si 3N 4、氮氧化矽(具體而言具有通式SiO xN y,例如Si 2ON 2)、氧化鋁(Al 2O 3)、氧化鉿(HfO 2)、二氧化鈦(TiO 2),或金鋼石的介電材料製成。每個絕緣層32、36、40、42、44、50可係單層結構或二或更多個層之堆疊。 Each insulating layer 32, 36, 40, 42, 44, 50 and the core 46 may be made of a dielectric material such as silicon oxide ( SiO2 ), silicon nitride (Si x N y ), where x is about 3 and y is about 4, such as Si 3 N 4 , silicon oxynitride (specifically having the general formula SiO x N y , such as Si 2 ON 2 ), aluminum oxide (Al 2 O 3 ), hexagonal oxide (HfO 2 ), titanium dioxide (TiO 2 ), or diamond. Each insulating layer 32, 36, 40, 42, 44, 50 may be a single layer structure or a stack of two or more layers.
電極層38係至少部分透明的,從而允許由發光二極體發射的電磁輻射穿過。構成電極層38的材料可係透明的導電材料,諸如氧化銦錫(ITO)、鋁或鎵摻雜的氧化鋅,或石墨烯。電極層38之厚度可在0.01 μm與10 μm之間。The electrode layer 38 is at least partially transparent, thereby allowing electromagnetic radiation emitted by the LED to pass through. The material constituting the electrode layer 38 may be a transparent conductive material, such as indium tin oxide (ITO), aluminum or gallium doped zinc oxide, or graphene. The thickness of the electrode layer 38 may be between 0.01 μm and 10 μm.
各種實施例及變體已經描述。熟習此項技術者將理解,這些實施例之某些特徵可經組合,且熟習此項技術者將容易想到其他變體。最後,基於上文提供的功能描述,本文描述的實施例及變體的實際實現在熟習此項技術者的能力範圍內。Various embodiments and variants have been described. Those skilled in the art will appreciate that certain features of these embodiments may be combined, and those skilled in the art will readily conceive of other variants. Finally, based on the functional description provided above, the actual implementation of the embodiments and variants described herein is within the capabilities of those skilled in the art.
1:顯示螢幕 2:面板 3:顯示像素 3':顯示像素 4:平坦化層 5:層堆疊 6:發射面 7:基板 8:發光區 9:支撐件 10:顯示螢幕 12:中間層 13:下面 14:上面 15:上面 16:反射層 18:絕緣塊 22:壁 23:下面 24:上面/上表面 26:濾色器 28:接合層 29:上表面 30:晶種層 32:絕緣層 34:開口 36:絕緣層 38:導電層 40:絕緣層 42:絕緣層 44:保護層 46:芯 48:反射塗層 49:保護層 50:線 52:外殼 54:主動層 56:接合層 R1,R2:光射線路徑 R1',R2':光射線路徑 LED:發光二極體 1: Display screen 2: Panel 3: Display pixel 3': Display pixel 4: Planarization layer 5: Layer stack 6: Emitting surface 7: Substrate 8: Light-emitting area 9: Support 10: Display screen 12: Intermediate layer 13: Bottom 14: Top 15: Top 16: Reflection layer 18: Insulation block 22: Wall 23: Bottom 24: Top/upper surface 26: Color filter 28: Bonding layer 29: Upper surface 30: Seed layer 32: Insulation layer 34: Opening 36: Insulation layer 38: Conductive layer 40: Insulation layer 42: Insulation layer 44: Protective layer 46: Core 48: Reflective coating 49: Protective layer 50: Wire 52: Shell 54: Active layer 56: Bonding layer R1, R2: Light ray path R1', R2': Light ray path LED: Light emitting diode
前述特徵及優點以及其他特徵及優點將在藉由例示而非限制方式給出的特定實施例之以下描述中參考伴隨圖式進行詳細描述,在伴隨圖式中:The foregoing features and advantages, as well as other features and advantages, will be described in detail in the following description of specific embodiments given by way of illustration and not limitation, with reference to the accompanying drawings, in which:
第1圖部分地且高度示意性地例示顯示螢幕之一實例;FIG. 1 partially and highly schematically illustrates an example of a display screen;
第2圖例示用於第1圖中所示的顯示螢幕的光路徑;FIG. 2 illustrates an example of an optical path for the display screen shown in FIG. 1;
第3圖部分地且示意性地例示顯示螢幕之一實施例;FIG. 3 partially and schematically illustrates an embodiment of a display screen;
第4圖例示用於第3圖中所示的顯示螢幕的光路徑;FIG. 4 illustrates an example of an optical path for the display screen shown in FIG. 3;
第5圖在左側示意性地例示用於第1圖中所示的顯示螢幕的顯示像素的光束路徑且在右側示意性地例示用於第3圖中所示的顯示螢幕的顯示像素的光束路徑;FIG. 5 schematically illustrates on the left a beam path for a display pixel of the display screen shown in FIG. 1 and on the right a beam path for a display pixel of the display screen shown in FIG. 3 ;
第6圖部分地且示意性地例示第3圖中所示的顯示螢幕的顯示像素之一實施例;FIG. 6 partially and schematically illustrates one embodiment of display pixels of the display screen shown in FIG. 3;
第7圖部分地且示意性地例示第3圖中所示的顯示螢幕的顯示像素之另一實施例;FIG. 7 partially and schematically illustrates another embodiment of the display pixels of the display screen shown in FIG. 3;
第8圖部分地且示意性地例示第6圖中所示的顯示像素之更詳細實施例;FIG. 8 partially and schematically illustrates a more detailed embodiment of the display pixel shown in FIG. 6;
第9圖例示三維發光二極體之一實施例;且FIG. 9 illustrates an embodiment of a three-dimensional light-emitting diode; and
第10圖例示三維發光二極體之另一實施例。FIG. 10 illustrates another embodiment of a three-dimensional light-emitting diode.
國內寄存資訊(請依寄存機構、日期、號碼順序註記) 無 國外寄存資訊(請依寄存國家、機構、日期、號碼順序註記) 無 Domestic storage information (please note in the order of storage institution, date, and number) None Foreign storage information (please note in the order of storage country, institution, date, and number) None
2:面板 2: Panel
3':顯示像素 3': Display pixels
4:平坦化層 4: Planarization layer
5:層堆疊 5: Layer stacking
6:發射面 6: Emitting surface
7:基板 7:Substrate
8:發光區 8: Luminous area
9:支撐件 9: Support parts
10:顯示螢幕 10: Display screen
12:中間層 12:Middle layer
13:下面 13: Below
14:上面 14: Above
15:上面 15: Above
Claims (16)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR2306210 | 2023-06-16 | ||
| FR2306210A FR3150042A1 (en) | 2023-06-16 | 2023-06-16 | LIGHT EMITTING DIODE DISPLAY SCREEN WITH IMPROVED LIGHT EXTRACTION AND DISPLAY PIXELS FOR SUCH A SCREEN |
| PCT/EP2024/064562 WO2024256158A1 (en) | 2023-06-16 | 2024-05-28 | Display screen with light-emitting diodes with improved light extraction and display pixels for such a screen |
| WOPCT/EP2024/064562 | 2024-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202519084A true TW202519084A (en) | 2025-05-01 |
Family
ID=88504958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW113121631A TW202519084A (en) | 2023-06-16 | 2024-06-12 | Light-emitting diode display screen with enhanced light extraction and display pixels for such a screen |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP4728570A1 (en) |
| KR (1) | KR20260025129A (en) |
| CN (1) | CN121359616A (en) |
| FR (1) | FR3150042A1 (en) |
| TW (1) | TW202519084A (en) |
| WO (1) | WO2024256158A1 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150295154A1 (en) * | 2005-02-03 | 2015-10-15 | Epistar Corporation | Light emitting device and manufacturing method thereof |
| JP6061581B2 (en) * | 2012-09-19 | 2017-01-18 | ソニーセミコンダクタソリューションズ株式会社 | Display device |
| FR3053530B1 (en) * | 2016-06-30 | 2018-07-27 | Aledia | PIXEL OPTOELECTRONIC DEVICE WITH IMPROVED CONTRAST AND LUMINANCE |
-
2023
- 2023-06-16 FR FR2306210A patent/FR3150042A1/en active Pending
-
2024
- 2024-05-28 KR KR1020267000577A patent/KR20260025129A/en active Pending
- 2024-05-28 WO PCT/EP2024/064562 patent/WO2024256158A1/en not_active Ceased
- 2024-05-28 EP EP24729286.5A patent/EP4728570A1/en active Pending
- 2024-05-28 CN CN202480040309.5A patent/CN121359616A/en active Pending
- 2024-06-12 TW TW113121631A patent/TW202519084A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| EP4728570A1 (en) | 2026-04-22 |
| WO2024256158A1 (en) | 2024-12-19 |
| FR3150042A1 (en) | 2024-12-20 |
| KR20260025129A (en) | 2026-02-23 |
| CN121359616A (en) | 2026-01-16 |
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