TW280932B - Single wafer conveying system - Google Patents

Single wafer conveying system

Info

Publication number
TW280932B
TW280932B TW84110540A TW84110540A TW280932B TW 280932 B TW280932 B TW 280932B TW 84110540 A TW84110540 A TW 84110540A TW 84110540 A TW84110540 A TW 84110540A TW 280932 B TW280932 B TW 280932B
Authority
TW
Taiwan
Prior art keywords
track
area
conveying system
wafer
single wafer
Prior art date
Application number
TW84110540A
Other languages
Chinese (zh)
Inventor
Horng-Ren Wu
Jaw-Tarng Chen
Jiunn-Lin Lay
Yih-Yih Chen
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW84110540A priority Critical patent/TW280932B/en
Application granted granted Critical
Publication of TW280932B publication Critical patent/TW280932B/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A single wafer conveying system, that is applicable to convey one wafer located in cartridge between multiple process equipments which could be divided into multiple area and there are some processequipments in each area, comprises of: one multi-track inter-area track for conveying the wager between those area; one multi-track intra-area track, each is used to convey the wafer between process equipments in the area; multiple buffering device independently connected to between the multi-track inter-area track and multi-track intra-area track for storing the wager and changing the wafer conveying track.
TW84110540A 1995-10-06 1995-10-06 Single wafer conveying system TW280932B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW84110540A TW280932B (en) 1995-10-06 1995-10-06 Single wafer conveying system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW84110540A TW280932B (en) 1995-10-06 1995-10-06 Single wafer conveying system

Publications (1)

Publication Number Publication Date
TW280932B true TW280932B (en) 1996-07-11

Family

ID=51397619

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84110540A TW280932B (en) 1995-10-06 1995-10-06 Single wafer conveying system

Country Status (1)

Country Link
TW (1) TW280932B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI508215B (en) * 2013-04-03 2015-11-11 Utechzone Co Ltd Cartridge laser marking system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI508215B (en) * 2013-04-03 2015-11-11 Utechzone Co Ltd Cartridge laser marking system

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