TW297909B - - Google Patents

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Info

Publication number: TW297909B
Authority: TW; Taiwan
Prior art keywords: sensor; item; offset; vibrating mass; mass body
Prior art date: 1994-08-18

Application number

TW084108671A

Other languages

English (en)

Chinese (zh)

Original Assignee

British Tech Group

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-08-18

Filing date

1995-08-19

Publication date

1997-02-11

1995-08-19 Application filed by British Tech Group filed Critical British Tech Group

1997-02-11 Application granted granted Critical

1997-02-11 Publication of TW297909B publication Critical patent/TW297909B/zh

Links

230000001133 acceleration Effects 0.000 claims description 14
238000005530 etching Methods 0.000 claims description 13
238000006073 displacement reaction Methods 0.000 claims description 10
238000000034 method Methods 0.000 claims description 10
239000013078 crystal Substances 0.000 claims description 6
230000007246 mechanism Effects 0.000 claims description 6
239000004065 semiconductor Substances 0.000 claims description 6
238000004519 manufacturing process Methods 0.000 claims description 5
239000000463 material Substances 0.000 claims description 5
238000005259 measurement Methods 0.000 claims 2
230000006835 compression Effects 0.000 claims 1
238000007906 compression Methods 0.000 claims 1
238000010422 painting Methods 0.000 claims 1
229910052710 silicon Inorganic materials 0.000 description 8
239000010703 silicon Substances 0.000 description 8
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
230000008859 change Effects 0.000 description 4
239000003990 capacitor Substances 0.000 description 2
239000004020 conductor Substances 0.000 description 2
230000008569 process Effects 0.000 description 2
ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
241001442234 Cosa Species 0.000 description 1
244000089409 Erythrina poeppigiana Species 0.000 description 1
235000009776 Rathbunia alamosensis Nutrition 0.000 description 1
238000005452 bending Methods 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
229910052796 boron Inorganic materials 0.000 description 1
238000004364 calculation method Methods 0.000 description 1
238000006880 cross-coupling reaction Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
230000003993 interaction Effects 0.000 description 1
230000002265 prevention Effects 0.000 description 1
239000004576 sand Substances 0.000 description 1
239000000725 suspension Substances 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Pressure Sensors (AREA)
Micromachines (AREA)

TW084108671A 1994-08-18 1995-08-19 TW297909B (ja)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GB9416683A GB9416683D0 (en)	1994-08-18	1994-08-18	Accelerometer

Publications (1)

Publication Number	Publication Date
TW297909B true TW297909B (ja)	1997-02-11

Family

ID=10760018

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW084108671A TW297909B (ja)	1994-08-18	1995-08-19

Country Status (6)

Country	Link
EP (1)	EP0776475A1 (ja)
JP (1)	JPH10504649A (ja)
KR (1)	KR970705755A (ja)
GB (2)	GB9416683D0 (ja)
TW (1)	TW297909B (ja)
WO (1)	WO1996006358A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19506401A1 (de) *	1995-02-23	1996-08-29	Siemens Ag	Beschleunigungssensor
SE9800194D0 (sv) *	1998-01-23	1998-01-23	Gert Andersson	Anordning för mätning av vinkelhastighet
FR2810976B1 (fr) *	2000-06-29	2003-08-29	Planhead Silmag P H S	Microcomposant electronique, capteur et actionneur incorporant un tel microcomposant
GB2498520A (en) *	2012-01-13	2013-07-24	Secr Defence	Accelerometer
US10634499B2 (en) *	2015-06-11	2020-04-28	Georgia Tech Research Corporation	MEMS inertial measurement apparatus having slanted electrodes for quadrature tuning
CN114323395B (zh) *	2021-12-23	2022-11-11	西安交通大学	一种基于soi工艺的mems六轴力传感器芯片及其制备方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5000817A (en) *	1984-10-24	1991-03-19	Aine Harry E	Batch method of making miniature structures assembled in wafer form
US4922756A (en) *	1988-06-20	1990-05-08	Triton Technologies, Inc.	Micro-machined accelerometer
GB8718004D0 (en) *	1987-07-29	1987-12-16	Marconi Co Ltd	Accelerometer
US4812199A (en) *	1987-12-21	1989-03-14	Ford Motor Company	Rectilinearly deflectable element fabricated from a single wafer
US4879914A (en) *	1989-02-27	1989-11-14	Sundstrand Data Control, Inc.	Unitary push-pull force transducer
US4919993A (en) *	1989-02-27	1990-04-24	Sundstrand Data Control, Inc.	Flexures and method for creating flexures in a wafer
US5045152A (en) *	1989-03-06	1991-09-03	Ford Motor Company	Force transducer etched from silicon
SE500615C2 (sv) *	1992-12-03	1994-07-25	Gert Andersson	Anordning för mätning av kraftkomponenter, förfarande för framställning av dylik samt användning därav.

1994
- 1994-08-18 GB GB9416683A patent/GB9416683D0/en active Pending
1995
- 1995-08-18 WO PCT/GB1995/001966 patent/WO1996006358A1/en not_active Ceased
- 1995-08-18 JP JP8507867A patent/JPH10504649A/ja active Pending
- 1995-08-18 KR KR1019970701018A patent/KR970705755A/ko not_active Ceased
- 1995-08-18 EP EP95928591A patent/EP0776475A1/en not_active Withdrawn
- 1995-08-18 GB GB9516992A patent/GB2292462A/en not_active Withdrawn
- 1995-08-19 TW TW084108671A patent/TW297909B/zh active

Also Published As

Publication number	Publication date
GB2292462A (en)	1996-02-21
EP0776475A1 (en)	1997-06-04
KR970705755A (ko)	1997-10-09
GB9516992D0 (en)	1995-10-18
GB9416683D0 (en)	1994-10-19
JPH10504649A (ja)	1998-05-06
WO1996006358A1 (en)	1996-02-29

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US6928872B2 (en)	2005-08-16	Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane
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CN100437118C (zh)	2008-11-26	单测试质量块的三轴mems传感器
JP2765316B2 (ja)	1998-06-11	容量型三軸加速度センサ
JP2825664B2 (ja)	1998-11-18	Ｌ字形状のばね脚部を有するセンサー構造
CN101270989B (zh)	2011-04-06	一种基于mems技术的集成五轴运动传感器
US10371715B2 (en)	2019-08-06	MEMS accelerometer with proof masses moving in an anti-phase direction
US20060169044A1 (en)	2006-08-03	Mems accelerometers
EP2284545B1 (en)	2018-08-08	Coplanar proofmasses employable to sense acceleration along three axes
JP2003194545A (ja)	2003-07-09	垂直振動質量体を有するｍｅｍｓジャイロスコープ
US6539801B1 (en)	2003-04-01	Z-axis vibratory gyroscope
EP2784530B1 (en)	2016-03-02	A two axes MEMS resonant magnetometer
US10794701B2 (en)	2020-10-06	Inertial sensor with single proof mass and multiple sense axis capability
JPH09113534A (ja)	1997-05-02	加速度センサー
KR20030068437A (ko)	2003-08-21	가속도 센서
TW297909B (ja)	1997-02-11
KR100508198B1 (ko)	2005-08-17	가속도 센서
JP2006177823A (ja)	2006-07-06	加速度センサ
JPH0854240A (ja)	1996-02-27	角速度センサおよび角速度検出装置
Park et al.	1999	Capacitive type surface-micromachined silicon accelerometer with stiffness tuning capability
US5962788A (en)	1999-10-05	Transducer
EP1365211A1 (en)	2003-11-26	Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane
TW200422623A (en)	2004-11-01	Z-axis solid state gyroscope and three-axis inertial measurement apparatus
EP2201387B1 (en)	2016-11-02	Flexural pivot for micro-sensors