TW302376B - - Google Patents

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Publication number: TW302376B
Authority: TW; Taiwan
Prior art keywords: poly; layer; integer; aryl ether; printed
Prior art date: 1994-10-06

Application number

TW84103677A

Other languages

English (en)

Chinese (zh)

Inventor

Viehbeck Alfred

Frederick Walker George

Original Assignee

Ibm

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-10-06

Filing date

1995-04-14

Publication date

1997-04-11

1994-10-06 Priority claimed from US08/319,392 external-priority patent/US5516874A/en

1995-04-14 Application filed by Ibm filed Critical Ibm

1997-04-11 Application granted granted Critical

1997-04-11 Publication of TW302376B publication Critical patent/TW302376B/zh

Links

239000004642 Polyimide Substances 0.000 claims description 49
229920001721 polyimide Polymers 0.000 claims description 48
229920000642 polymer Polymers 0.000 claims description 47
238000000034 method Methods 0.000 claims description 31
150000008378 aryl ethers Chemical class 0.000 claims description 24
238000011049 filling Methods 0.000 claims description 18
HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 claims description 17
238000004806 packaging method and process Methods 0.000 claims description 13
238000000576 coating method Methods 0.000 claims description 11
239000000047 product Substances 0.000 claims description 10
239000011248 coating agent Substances 0.000 claims description 9
-1 poly (aryl benzobenzoxazole Chemical compound 0.000 claims description 9
UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 7
229920005575 poly(amic acid) Polymers 0.000 claims description 6
238000004519 manufacturing process Methods 0.000 claims description 5
239000002904 solvent Substances 0.000 claims description 5
BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical compound C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 claims description 4
230000002079 cooperative effect Effects 0.000 claims description 4
239000002253 acid Substances 0.000 claims description 3
150000001413 amino acids Chemical class 0.000 claims description 3
235000013405 beer Nutrition 0.000 claims description 3
238000010438 heat treatment Methods 0.000 claims description 3
238000000151 deposition Methods 0.000 claims description 2
239000013589 supplement Substances 0.000 claims description 2
PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 claims 2
ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 claims 1
208000004350 Strabismus Diseases 0.000 claims 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
229910052721 tungsten Inorganic materials 0.000 claims 1
239000010937 tungsten Substances 0.000 claims 1
239000010410 layer Substances 0.000 description 77
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 34
229910052802 copper Inorganic materials 0.000 description 32
239000010949 copper Substances 0.000 description 32
238000006243 chemical reaction Methods 0.000 description 17
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 7
AVFZOVWCLRSYKC-UHFFFAOYSA-N 1-methylpyrrolidine Chemical compound CN1CCCC1 AVFZOVWCLRSYKC-UHFFFAOYSA-N 0.000 description 6
239000004952 Polyamide Substances 0.000 description 6
229910052737 gold Inorganic materials 0.000 description 6
239000010931 gold Substances 0.000 description 6
229920002647 polyamide Polymers 0.000 description 6
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
239000002243 precursor Substances 0.000 description 5
239000000126 substance Substances 0.000 description 5
QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 4
239000005751 Copper oxide Substances 0.000 description 4
239000000010 aprotic solvent Substances 0.000 description 4
125000003118 aryl group Chemical group 0.000 description 4
150000001875 compounds Chemical class 0.000 description 4
229910000431 copper oxide Inorganic materials 0.000 description 4
238000004100 electronic packaging Methods 0.000 description 4
238000006116 polymerization reaction Methods 0.000 description 4
BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 4
238000002360 preparation method Methods 0.000 description 4
239000000376 reactant Substances 0.000 description 4
239000000758 substrate Substances 0.000 description 4
LZJHACNNMBYMSO-UHFFFAOYSA-N 1,1-dimethyl-3-propylurea Chemical compound CCCNC(=O)N(C)C LZJHACNNMBYMSO-UHFFFAOYSA-N 0.000 description 3
QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
RWRDLPDLKQPQOW-UHFFFAOYSA-N Pyrrolidine Chemical compound C1CCNC1 RWRDLPDLKQPQOW-UHFFFAOYSA-N 0.000 description 3
229910000831 Steel Inorganic materials 0.000 description 3
238000010521 absorption reaction Methods 0.000 description 3
230000004888 barrier function Effects 0.000 description 3
IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
ZFVMWEVVKGLCIJ-UHFFFAOYSA-N bisphenol AF Chemical compound C1=CC(O)=CC=C1C(C(F)(F)F)(C(F)(F)F)C1=CC=C(O)C=C1 ZFVMWEVVKGLCIJ-UHFFFAOYSA-N 0.000 description 3
238000006482 condensation reaction Methods 0.000 description 3
229920001577 copolymer Polymers 0.000 description 3
150000004985 diamines Chemical class 0.000 description 3
210000004907 gland Anatomy 0.000 description 3
KQNPFQTWMSNSAP-UHFFFAOYSA-N isobutyric acid Chemical compound CC(C)C(O)=O KQNPFQTWMSNSAP-UHFFFAOYSA-N 0.000 description 3
229920001282 polysaccharide Polymers 0.000 description 3
239000005017 polysaccharide Substances 0.000 description 3
229910000027 potassium carbonate Inorganic materials 0.000 description 3
239000002244 precipitate Substances 0.000 description 3
239000010959 steel Substances 0.000 description 3
OUKZCQQNMWXMNE-UHFFFAOYSA-N 1-hexylpyrrolidine Chemical compound CCCCCCN1CCCC1 OUKZCQQNMWXMNE-UHFFFAOYSA-N 0.000 description 2
WTUWXEITWCQIMM-UHFFFAOYSA-N 2-[(2-hydroxyphenyl)-diphenylmethyl]phenol Chemical compound OC1=CC=CC=C1C(C=1C(=CC=CC=1)O)(C=1C=CC=CC=1)C1=CC=CC=C1 WTUWXEITWCQIMM-UHFFFAOYSA-N 0.000 description 2
VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
229930185605 Bisphenol Natural products 0.000 description 2
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
239000004693 Polybenzimidazole Substances 0.000 description 2
239000004721 Polyphenylene oxide Substances 0.000 description 2
KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
229910052804 chromium Inorganic materials 0.000 description 2
239000011651 chromium Substances 0.000 description 2
239000004020 conductor Substances 0.000 description 2
239000011889 copper foil Substances 0.000 description 2
230000000875 corresponding effect Effects 0.000 description 2
239000013078 crystal Substances 0.000 description 2
ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
238000004090 dissolution Methods 0.000 description 2
230000000694 effects Effects 0.000 description 2
238000005516 engineering process Methods 0.000 description 2
230000009477 glass transition Effects 0.000 description 2
125000000623 heterocyclic group Chemical group 0.000 description 2
150000002466 imines Chemical class 0.000 description 2
230000006872 improvement Effects 0.000 description 2
239000000463 material Substances 0.000 description 2
229910052751 metal Inorganic materials 0.000 description 2
239000002184 metal Substances 0.000 description 2
239000002245 particle Substances 0.000 description 2
229920002480 polybenzimidazole Polymers 0.000 description 2
229920000570 polyether Polymers 0.000 description 2
108010094020 polyglycine Proteins 0.000 description 2
229920000232 polyglycine polymer Polymers 0.000 description 2
238000001556 precipitation Methods 0.000 description 2
LXNHXLLTXMVWPM-UHFFFAOYSA-N pyridoxine Chemical compound CC1=NC=C(CO)C(CO)=C1O LXNHXLLTXMVWPM-UHFFFAOYSA-N 0.000 description 2
GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
239000007787 solid Substances 0.000 description 2
DEQUKPCANKRTPZ-UHFFFAOYSA-N (2,3-dihydroxyphenyl)-phenylmethanone Chemical compound OC1=CC=CC(C(=O)C=2C=CC=CC=2)=C1O DEQUKPCANKRTPZ-UHFFFAOYSA-N 0.000 description 1
ADCBAIUWZPOIMC-UHFFFAOYSA-N 1-benzyl-4-fluorobenzene Chemical compound C1=CC(F)=CC=C1CC1=CC=CC=C1 ADCBAIUWZPOIMC-UHFFFAOYSA-N 0.000 description 1
DODRSIDSXPMYQJ-UHFFFAOYSA-N 1h-benzimidazol-4-ol Chemical compound OC1=CC=CC2=C1N=CN2 DODRSIDSXPMYQJ-UHFFFAOYSA-N 0.000 description 1
AEGVUEQKQXIYHS-UHFFFAOYSA-N 2-(2-hydroxyphenyl)guanidine Chemical compound NC(N)=NC1=CC=CC=C1O AEGVUEQKQXIYHS-UHFFFAOYSA-N 0.000 description 1
BKOOMYPCSUNDGP-UHFFFAOYSA-N 2-methylbut-2-ene Chemical compound CC=C(C)C BKOOMYPCSUNDGP-UHFFFAOYSA-N 0.000 description 1
YQAWCLBKYKTVHQ-UHFFFAOYSA-N 2-phenylethynol Chemical group OC#CC1=CC=CC=C1 YQAWCLBKYKTVHQ-UHFFFAOYSA-N 0.000 description 1
ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
LSQARZALBDFYQZ-UHFFFAOYSA-N 4,4'-difluorobenzophenone Chemical compound C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 LSQARZALBDFYQZ-UHFFFAOYSA-N 0.000 description 1
BQWAJIFVKAXHCO-UHFFFAOYSA-N 4-(1h-indol-2-yl)phenol Chemical compound C1=CC(O)=CC=C1C1=CC2=CC=CC=C2N1 BQWAJIFVKAXHCO-UHFFFAOYSA-N 0.000 description 1
125000004176 4-fluorobenzyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1F)C([H])([H])* 0.000 description 1
125000004203 4-hydroxyphenyl group Chemical group [H]OC1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
DVGWZXQOLABSCQ-UHFFFAOYSA-N 4-prop-2-ynylphenol Chemical group OC1=CC=C(CC#C)C=C1 DVGWZXQOLABSCQ-UHFFFAOYSA-N 0.000 description 1
241000283153 Cetacea Species 0.000 description 1
241001331845 Equus asinus x caballus Species 0.000 description 1
229910052691 Erbium Inorganic materials 0.000 description 1
241000272168 Laridae Species 0.000 description 1
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
239000004697 Polyetherimide Substances 0.000 description 1
239000004698 Polyethylene Substances 0.000 description 1
108010020346 Polyglutamic Acid Proteins 0.000 description 1
239000004793 Polystyrene Substances 0.000 description 1
WTKZEGDFNFYCGP-UHFFFAOYSA-N Pyrazole Chemical compound C=1C=NNC=1 WTKZEGDFNFYCGP-UHFFFAOYSA-N 0.000 description 1
101100222278 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) CUS2 gene Proteins 0.000 description 1
239000006087 Silane Coupling Agent Substances 0.000 description 1
229920002125 Sokalan® Polymers 0.000 description 1
FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical compound C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 description 1
229910052776 Thorium Inorganic materials 0.000 description 1
239000012790 adhesive layer Substances 0.000 description 1
230000002411 adverse Effects 0.000 description 1
HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
150000001412 amines Chemical class 0.000 description 1
125000003277 amino group Chemical group 0.000 description 1
238000004458 analytical method Methods 0.000 description 1
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
230000008901 benefit Effects 0.000 description 1
125000005605 benzo group Chemical group 0.000 description 1
230000005540 biological transmission Effects 0.000 description 1
239000004305 biphenyl Substances 0.000 description 1
235000010290 biphenyl Nutrition 0.000 description 1
239000007767 bonding agent Substances 0.000 description 1
FFGPTBGBLSHEPO-UHFFFAOYSA-N carbamazepine Chemical compound C1=CC2=CC=CC=C2N(C(=O)N)C2=CC=CC=C21 FFGPTBGBLSHEPO-UHFFFAOYSA-N 0.000 description 1
229960000623 carbamazepine Drugs 0.000 description 1
BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
230000008859 change Effects 0.000 description 1
239000007795 chemical reaction product Substances 0.000 description 1
238000004132 cross linking Methods 0.000 description 1
YQHLDYVWEZKEOX-UHFFFAOYSA-N cumene hydroperoxide Chemical compound OOC(C)(C)C1=CC=CC=C1 YQHLDYVWEZKEOX-UHFFFAOYSA-N 0.000 description 1
230000008021 deposition Effects 0.000 description 1
RAABOESOVLLHRU-UHFFFAOYSA-N diazene Chemical compound N=N RAABOESOVLLHRU-UHFFFAOYSA-N 0.000 description 1
229910000071 diazene Inorganic materials 0.000 description 1
125000005442 diisocyanate group Chemical group 0.000 description 1
238000010292 electrical insulation Methods 0.000 description 1
UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
125000003754 ethoxycarbonyl group Chemical group C(=O)(OCC)* 0.000 description 1
238000000855 fermentation Methods 0.000 description 1
230000004151 fermentation Effects 0.000 description 1
XJUJXVATKIRSAM-UHFFFAOYSA-N fluoro(phenyl)methanol Chemical compound OC(F)C1=CC=CC=C1 XJUJXVATKIRSAM-UHFFFAOYSA-N 0.000 description 1
125000004175 fluorobenzyl group Chemical group 0.000 description 1
125000001207 fluorophenyl group Chemical group 0.000 description 1
239000011888 foil Substances 0.000 description 1
230000000762 glandular Effects 0.000 description 1
150000004676 glycans Chemical class 0.000 description 1
229920006158 high molecular weight polymer Polymers 0.000 description 1
125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
230000007257 malfunction Effects 0.000 description 1
239000012528 membrane Substances 0.000 description 1
239000012046 mixed solvent Substances 0.000 description 1
239000000203 mixture Substances 0.000 description 1
229910052750 molybdenum Inorganic materials 0.000 description 1
239000011733 molybdenum Substances 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
239000001301 oxygen Substances 0.000 description 1
229910052760 oxygen Inorganic materials 0.000 description 1
238000012536 packaging technology Methods 0.000 description 1
238000012856 packing Methods 0.000 description 1
230000037361 pathway Effects 0.000 description 1
230000000704 physical effect Effects 0.000 description 1
239000011505 plaster Substances 0.000 description 1
229920000962 poly(amidoamine) Polymers 0.000 description 1
239000004584 polyacrylic acid Substances 0.000 description 1
229920000412 polyarylene Polymers 0.000 description 1
239000004417 polycarbonate Substances 0.000 description 1
229920000515 polycarbonate Polymers 0.000 description 1
229920001601 polyetherimide Polymers 0.000 description 1
229920000573 polyethylene Polymers 0.000 description 1
229920002643 polyglutamic acid Polymers 0.000 description 1
229920002223 polystyrene Polymers 0.000 description 1
238000007639 printing Methods 0.000 description 1
239000011241 protective layer Substances 0.000 description 1
239000011677 pyridoxine Substances 0.000 description 1
235000008160 pyridoxine Nutrition 0.000 description 1
230000009257 reactivity Effects 0.000 description 1
230000009467 reduction Effects 0.000 description 1
238000007790 scraping Methods 0.000 description 1
239000011877 solvent mixture Substances 0.000 description 1
210000002784 stomach Anatomy 0.000 description 1
238000005382 thermal cycling Methods 0.000 description 1
YXFVVABEGXRONW-UHFFFAOYSA-N toluene Substances CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 1
229940011671 vitamin b6 Drugs 0.000 description 1

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Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)

TW84103677A 1994-10-06 1995-04-14 TW302376B (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US08/319,392 US5516874A (en)	1994-06-30	1994-10-06	Poly(aryl ether benzimidazoles)

Publications (1)

Publication Number	Publication Date
TW302376B true TW302376B (de)	1997-04-11

Family

ID=51626189

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW84103677A TW302376B (de)	1994-10-06	1995-04-14

Country Status (1)

Country	Link
TW (1)	TW302376B (de)

1995
- 1995-04-14 TW TW84103677A patent/TW302376B/zh active

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