TW344105B - Liquid treatment method and apparatus - Google Patents

Liquid treatment method and apparatus

Info

Publication number
TW344105B
TW344105B TW086111457A TW86111457A TW344105B TW 344105 B TW344105 B TW 344105B TW 086111457 A TW086111457 A TW 086111457A TW 86111457 A TW86111457 A TW 86111457A TW 344105 B TW344105 B TW 344105B
Authority
TW
Taiwan
Prior art keywords
treatment
liquid
treatment liquid
processed
supply device
Prior art date
Application number
TW086111457A
Other languages
Chinese (zh)
Inventor
Naoki Shindo
Miyako Yamasaka
Yuji Kawakami
Original Assignee
Tokyo Uei Lih Ke Chuanq Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Uei Lih Ke Chuanq Kk filed Critical Tokyo Uei Lih Ke Chuanq Kk
Priority to TW086111457A priority Critical patent/TW344105B/en
Application granted granted Critical
Publication of TW344105B publication Critical patent/TW344105B/en

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  • Cleaning By Liquid Or Steam (AREA)

Abstract

A liquid treatment method comprising the following steps: supplying a treatment liquid from a treatment liquid supply device, transporting the treatment liquid to contact with an object to be processed and perform a specified treatment process thereto, allowing a cleaning liquid to be transported to and contact with the object to be processed thereby completing a washing process; in which after the specified treatment process, the cleaning liquid is supplied by the treatment liquid supply device to remove the treatment liquid remained in the treatment liquid supply device, and the cleaning liquid is transported to and contacts with the object to be processed thereby carrying out the washing process.
TW086111457A 1997-08-11 1997-08-11 Liquid treatment method and apparatus TW344105B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086111457A TW344105B (en) 1997-08-11 1997-08-11 Liquid treatment method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086111457A TW344105B (en) 1997-08-11 1997-08-11 Liquid treatment method and apparatus

Publications (1)

Publication Number Publication Date
TW344105B true TW344105B (en) 1998-11-01

Family

ID=58263700

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086111457A TW344105B (en) 1997-08-11 1997-08-11 Liquid treatment method and apparatus

Country Status (1)

Country Link
TW (1) TW344105B (en)

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