TW344112B - Substrate holding device and manufacturing method therefor - Google Patents

Substrate holding device and manufacturing method therefor

Info

Publication number
TW344112B
TW344112B TW084113077A TW84113077A TW344112B TW 344112 B TW344112 B TW 344112B TW 084113077 A TW084113077 A TW 084113077A TW 84113077 A TW84113077 A TW 84113077A TW 344112 B TW344112 B TW 344112B
Authority
TW
Taiwan
Prior art keywords
holding device
manufacturing
substrate holding
method therefor
substrate
Prior art date
Application number
TW084113077A
Other languages
English (en)
Inventor
Koichi Oridaira
Yasunori Ando
Hiroshi Inemi
Original Assignee
Nisshin Denki Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nisshin Denki Kk filed Critical Nisshin Denki Kk
Application granted granted Critical
Publication of TW344112B publication Critical patent/TW344112B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0432—Apparatus for thermal treatment mainly by conduction
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4935—Heat exchanger or boiler making

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Manipulator (AREA)
TW084113077A 1994-12-08 1995-12-08 Substrate holding device and manufacturing method therefor TW344112B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33194894A JPH08165571A (ja) 1994-12-08 1994-12-08 基板保持装置およびその製造方法

Publications (1)

Publication Number Publication Date
TW344112B true TW344112B (en) 1998-11-01

Family

ID=18249438

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084113077A TW344112B (en) 1994-12-08 1995-12-08 Substrate holding device and manufacturing method therefor

Country Status (5)

Country Link
US (1) US5685363A (zh)
EP (1) EP0716441A3 (zh)
JP (1) JPH08165571A (zh)
KR (1) KR960026536A (zh)
TW (1) TW344112B (zh)

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JP3512968B2 (ja) * 1996-04-11 2004-03-31 株式会社日本自動車部品総合研究所 半導体装置の製造方法
EP1005659B1 (en) 1997-08-19 2006-03-29 Prysmian Cavi e Sistemi Energia S.r.l. Method of and apparatus for manufacturing an optical fiber preform
JP2000133693A (ja) * 1998-08-19 2000-05-12 Shibaura Mechatronics Corp 真空装置用駆動機構および真空装置
US6202739B1 (en) * 1998-11-25 2001-03-20 Motorola, Inc. Apparatus including a heat-dissipating apparatus, and method for forming same
US6241005B1 (en) * 1999-03-30 2001-06-05 Veeco Instruments, Inc. Thermal interface member
JP4569167B2 (ja) * 1999-04-19 2010-10-27 株式会社村田製作所 外力検知センサの製造方法
KR100313418B1 (ko) * 1999-07-07 2001-11-07 김종배 반도체기판 수평진공 흡착장치
US7630198B2 (en) 2006-03-08 2009-12-08 Cray Inc. Multi-stage air movers for cooling computer systems and for other uses
JP2001355072A (ja) * 2000-06-13 2001-12-25 Anelva Corp 基板処理装置
EP1305563B1 (en) * 2000-07-14 2009-05-06 University Of Virginia Patent Foundation Heat exchange foam
JP2003158173A (ja) * 2001-11-20 2003-05-30 Oki Electric Ind Co Ltd ウェハホルダ
US20050155270A1 (en) * 2002-09-23 2005-07-21 Snyder Douglas D. Motion activated firearm laser sight
JP2004140056A (ja) * 2002-10-16 2004-05-13 Nok Corp 静電チャック
US7007741B2 (en) * 2002-10-18 2006-03-07 Sun Microsystems, Inc. Conformal heat spreader
TWI257543B (en) * 2003-07-02 2006-07-01 Delta Electronics Inc Equalizing temperature device
US7106416B2 (en) * 2003-12-10 2006-09-12 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
TWI381494B (zh) * 2004-01-07 2013-01-01 事業創造研究所股份有限公司 Cooling device
US7177156B2 (en) * 2004-07-08 2007-02-13 Cray Inc. Assemblies for holding heat sinks and other structures in contact with electronic devices and other apparatuses
US7193851B2 (en) * 2004-12-09 2007-03-20 Cray Inc. Assemblies for holding heat sinks and other structures in contact with electronic devices and other apparatuses
US8038796B2 (en) 2004-12-30 2011-10-18 Lam Research Corporation Apparatus for spatial and temporal control of temperature on a substrate
JP2007002295A (ja) * 2005-06-23 2007-01-11 Ulvac Japan Ltd 巻取式真空成膜装置および巻取式真空成膜方法
CN100357093C (zh) * 2005-12-30 2007-12-26 珠海元盛电子科技有限公司 一种小压机
US7352438B2 (en) * 2006-02-14 2008-04-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US20100212331A1 (en) * 2006-07-21 2010-08-26 The Curators Of The University Of Missouri Cryopreservation method and device
US8176972B2 (en) * 2006-08-31 2012-05-15 International Business Machines Corporation Compliant vapor chamber chip packaging
US8448693B2 (en) * 2007-02-08 2013-05-28 Lundell Manufacturing Corporation Sealed thermal interface component
US20090154091A1 (en) 2007-12-17 2009-06-18 Yatskov Alexander I Cooling systems and heat exchangers for cooling computer components
US8170724B2 (en) 2008-02-11 2012-05-01 Cray Inc. Systems and associated methods for controllably cooling computer components
US7898799B2 (en) 2008-04-01 2011-03-01 Cray Inc. Airflow management apparatus for computer cabinets and associated methods
US8076569B2 (en) * 2008-05-12 2011-12-13 Mtpv, Llc Method and structure, using flexible membrane surfaces, for setting and/or maintaining a uniform micron/sub-micron gap separation between juxtaposed photosensitive and heat-supplying surfaces of photovoltaic chips and the like for the generation of electrical power
US7903403B2 (en) 2008-10-17 2011-03-08 Cray Inc. Airflow intake systems and associated methods for use with computer cabinets
US8081459B2 (en) 2008-10-17 2011-12-20 Cray Inc. Air conditioning systems for computer systems and associated methods
US8776868B2 (en) 2009-08-28 2014-07-15 International Business Machines Corporation Thermal ground plane for cooling a computer
US8472181B2 (en) 2010-04-20 2013-06-25 Cray Inc. Computer cabinets having progressive air velocity cooling systems and associated methods of manufacture and use
JP2012014779A (ja) * 2010-06-30 2012-01-19 Ulvac Japan Ltd 磁気記録媒体の製造方法
US9829804B1 (en) 2016-07-28 2017-11-28 Mapper Lithography Ip B.V. Substrate holding device, method for manufacturing such a device, and use of such a device in a lithography system
CN114730718A (zh) 2019-12-02 2022-07-08 Ev 集团 E·索尔纳有限责任公司 用于加热衬底的设备和方法
JP7613050B2 (ja) * 2020-10-26 2025-01-15 富士電機株式会社 半導体装置の製造方法及びホットプレート
JP7596912B2 (ja) * 2021-04-27 2024-12-10 住友電気工業株式会社 熱交換器及びウエハ保持部材
CN117604478A (zh) * 2023-11-13 2024-02-27 中国科学院上海光学精密机械研究所 一种大口径光学薄膜元件镀膜夹具

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Publication number Priority date Publication date Assignee Title
GB329758A (en) * 1929-03-27 1930-05-29 Leon Walter Law Improvements in or relating to carburettors of internal combustion engines
JPS5544673A (en) * 1978-09-26 1980-03-29 Nec Corp Liquid cooling device for data processor
US4282924A (en) * 1979-03-16 1981-08-11 Varian Associates, Inc. Apparatus for mechanically clamping semiconductor wafer against pliable thermally conductive surface
EP0017472A1 (en) * 1979-04-06 1980-10-15 Lintott Engineering Limited Evacuable equipment containing a device for heat transfer and process for the manufacture of semi-conductor components using this equipment
JPS6158260A (ja) * 1984-08-29 1986-03-25 Ulvac Corp 基板の冷却装置
US4667944A (en) * 1985-08-29 1987-05-26 Vichem Corporation Means for handling semiconductor die and the like
US4997032A (en) * 1987-09-25 1991-03-05 Minnesota Mining And Manufacturing Company Thermal transfer bag
US4832781A (en) * 1988-01-07 1989-05-23 Varian Associates, Inc. Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum
US5006924A (en) * 1989-12-29 1991-04-09 International Business Machines Corporation Heat sink for utilization with high density integrated circuit substrates
US4993482A (en) * 1990-01-09 1991-02-19 Microelectronics And Computer Technology Corporation Coiled spring heat transfer element

Also Published As

Publication number Publication date
US5685363A (en) 1997-11-11
EP0716441A2 (en) 1996-06-12
JPH08165571A (ja) 1996-06-25
EP0716441A3 (en) 1998-02-25
KR960026536A (ko) 1996-07-22

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