TW352460B - Method for planarizing surface of DRAM - Google Patents

Method for planarizing surface of DRAM

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Publication number
TW352460B
TW352460B TW086106264A TW86106264A TW352460B TW 352460 B TW352460 B TW 352460B TW 086106264 A TW086106264 A TW 086106264A TW 86106264 A TW86106264 A TW 86106264A TW 352460 B TW352460 B TW 352460B
Authority
TW
Taiwan
Prior art keywords
dielectric layer
doped dielectric
doped
planarizing surface
dram
Prior art date
Application number
TW086106264A
Other languages
Chinese (zh)
Inventor
Pe-Yuan Wu
Hung-Nan Chen
Jr-Shiang Tzeng
Shan-Jie Jian
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW086106264A priority Critical patent/TW352460B/en
Application granted granted Critical
Publication of TW352460B publication Critical patent/TW352460B/en

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Abstract

A method for planarizing surface at least includes: to provide a silicon substrate which is the IC body; to form a first non-doped dielectric layer on the silicon substrate; to form a doped dielectric layer on the first non-doped dielectric layer; to process thermal flow; to etch back the doped dielectric layer; and to form a second non-doped dielectric layer on the doped dielectric layer; the second non-dielectric will isolate the doped dielectric layer and the ensuing doped polysilicon layer.
TW086106264A 1997-05-12 1997-05-12 Method for planarizing surface of DRAM TW352460B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW086106264A TW352460B (en) 1997-05-12 1997-05-12 Method for planarizing surface of DRAM

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW086106264A TW352460B (en) 1997-05-12 1997-05-12 Method for planarizing surface of DRAM

Publications (1)

Publication Number Publication Date
TW352460B true TW352460B (en) 1999-02-11

Family

ID=57940069

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086106264A TW352460B (en) 1997-05-12 1997-05-12 Method for planarizing surface of DRAM

Country Status (1)

Country Link
TW (1) TW352460B (en)

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