TW357246B - A method for treating a waste gas and an apparatus thereof - Google Patents

A method for treating a waste gas and an apparatus thereof

Info

Publication number
TW357246B
TW357246B TW087102535A TW87102535A TW357246B TW 357246 B TW357246 B TW 357246B TW 087102535 A TW087102535 A TW 087102535A TW 87102535 A TW87102535 A TW 87102535A TW 357246 B TW357246 B TW 357246B
Authority
TW
Taiwan
Prior art keywords
waste gas
polymers
treating
collection
gas
Prior art date
Application number
TW087102535A
Other languages
English (en)
Inventor
Young-Bae Park
Original Assignee
Union Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Industry Co Ltd filed Critical Union Industry Co Ltd
Application granted granted Critical
Publication of TW357246B publication Critical patent/TW357246B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B01D45/12—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Separating Particles In Gases By Inertia (AREA)
  • Processing Of Solid Wastes (AREA)
TW087102535A 1997-10-08 1998-02-23 A method for treating a waste gas and an apparatus thereof TW357246B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019970051478A KR100225591B1 (ko) 1997-10-08 1997-10-08 폐가스 처리 방법 및 장치

Publications (1)

Publication Number Publication Date
TW357246B true TW357246B (en) 1999-05-01

Family

ID=19522341

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087102535A TW357246B (en) 1997-10-08 1998-02-23 A method for treating a waste gas and an apparatus thereof

Country Status (3)

Country Link
US (1) US6051197A (zh)
KR (1) KR100225591B1 (zh)
TW (1) TW357246B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6821489B1 (en) * 2000-10-10 2004-11-23 International Business Machines Corporation System and method for abating the simultaneous flow of silane and arsine
KR100483577B1 (ko) * 2001-12-21 2005-04-15 유니셈 주식회사 폐가스 처리장치
US6800255B2 (en) 2002-01-23 2004-10-05 Agere Systems, Inc. System and method for the abatement of toxic constituents of effluent gases
GB0509944D0 (en) * 2005-05-16 2005-06-22 Boc Group Plc Gas combustion apparatus
JP7661782B2 (ja) * 2021-05-18 2025-04-15 富士電機株式会社 スクラバ装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TR18132A (tr) * 1973-10-15 1977-03-01 Berz W Toz suezme tertibati
US4508538A (en) * 1977-01-24 1985-04-02 The Dow Chemical Company Recovery of fumed SiO2
FR2616884B1 (fr) * 1987-06-19 1991-05-10 Air Liquide Procede de traitement d'effluents gazeux provenant de la fabrication de composants electroniques et appareil d'incineration pour sa mise en oeuvre
US5183646A (en) * 1989-04-12 1993-02-02 Custom Engineered Materials, Inc. Incinerator for complete oxidation of impurities in a gas stream
JPH05154334A (ja) * 1991-12-11 1993-06-22 Fujitsu Ltd 半導体製造装置の排気ポンプシステム
US5328354A (en) * 1993-03-23 1994-07-12 Mg Industries Incinerator with auxiliary gas evacuation system
JP3280173B2 (ja) * 1994-11-29 2002-04-30 日本エア・リキード株式会社 排ガス処理装置
US5536298A (en) * 1995-02-24 1996-07-16 Awaji; Toshio Method of treating fine particle dust in manufacturing process of semiconductor elements and apparatus therefor
US5562758A (en) * 1995-02-24 1996-10-08 Awaji; Toshio Method of removing fine particle dust and apparatus therefor
EP0779092B1 (en) * 1995-12-14 2002-03-20 Suntec System Co., Ltd. Exhaust gas processing system
KR0176659B1 (ko) * 1996-08-08 1999-03-20 김광호 폐가스 유해성분 처리장치

Also Published As

Publication number Publication date
KR19990030970A (ko) 1999-05-06
KR100225591B1 (ko) 1999-10-15
US6051197A (en) 2000-04-18

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