TW358145B - Multi-level vacuum pump and the assembly method - Google Patents

Multi-level vacuum pump and the assembly method

Info

Publication number
TW358145B
TW358145B TW087110232A TW87110232A TW358145B TW 358145 B TW358145 B TW 358145B TW 087110232 A TW087110232 A TW 087110232A TW 87110232 A TW87110232 A TW 87110232A TW 358145 B TW358145 B TW 358145B
Authority
TW
Taiwan
Prior art keywords
vacuum pump
level vacuum
assembly method
partition
rotor
Prior art date
Application number
TW087110232A
Other languages
Chinese (zh)
Inventor
Chuen-Jian Chen
Ming-Hsin Liu
Tian-Mu Shen
Rung-Jen Jian
Tzung-Hsin Lin
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW087110232A priority Critical patent/TW358145B/en
Application granted granted Critical
Publication of TW358145B publication Critical patent/TW358145B/en
Priority to JP11149563A priority patent/JP2000009073A/en
Priority to JP2000001398U priority patent/JP3071651U/en

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  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A sort of multi-level vacuum pump, including mainly individual and continuous casing, partition panel, rotary axis and rotor, including: rotary axis and rotor formed integrally, and the compression chambers formed by individual casings, with partition panels for partition of the compression chamber formed by opposing panels.
TW087110232A 1998-06-25 1998-06-25 Multi-level vacuum pump and the assembly method TW358145B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW087110232A TW358145B (en) 1998-06-25 1998-06-25 Multi-level vacuum pump and the assembly method
JP11149563A JP2000009073A (en) 1998-06-25 1999-05-28 Multilayer vacuum pump and method of assembling the same
JP2000001398U JP3071651U (en) 1998-06-25 2000-03-10 Multi-layer vacuum pump and its assembly structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087110232A TW358145B (en) 1998-06-25 1998-06-25 Multi-level vacuum pump and the assembly method

Publications (1)

Publication Number Publication Date
TW358145B true TW358145B (en) 1999-05-11

Family

ID=21630492

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087110232A TW358145B (en) 1998-06-25 1998-06-25 Multi-level vacuum pump and the assembly method

Country Status (2)

Country Link
JP (2) JP2000009073A (en)
TW (1) TW358145B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5263558B2 (en) * 2011-10-05 2013-08-14 株式会社四葉機械製作所 Corrosion-resistant multistage vacuum pump
GB2498807A (en) * 2012-01-30 2013-07-31 Edwards Ltd Multi-stage vacuum pump with solid stator
FR3121716B1 (en) * 2021-04-08 2023-03-24 Pfeiffer Vacuum Vacuum pump

Also Published As

Publication number Publication date
JP3071651U (en) 2000-09-14
JP2000009073A (en) 2000-01-11

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