TW442830B - Device for pulling up single crystal - Google Patents

Device for pulling up single crystal Download PDF

Info

Publication number: TW442830B
Authority: TW; Taiwan
Prior art keywords: pulling; crystal pulling; chamber; single crystal; cylinder
Prior art date: 1997-12-11

Application number

TW87120103A

Other languages

English (en)

Chinese (zh)

Inventor

Ryo Yamagishi

Kenichi Yoshizawa

Ayumi Suda

Toshiaki Tsunoka

Original Assignee

Komatsu Machinery Corp

Komatsu Denshi Kinzoku Kk

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-12-11

Filing date

1998-12-03

Publication date

2001-06-23

1998-12-03 Application filed by Komatsu Machinery Corp, Komatsu Denshi Kinzoku Kk filed Critical Komatsu Machinery Corp

2001-06-23 Application granted granted Critical

2001-06-23 Publication of TW442830B publication Critical patent/TW442830B/zh

Links

239000013078 crystal Substances 0.000 title claims abstract description 100
230000002079 cooperative effect Effects 0.000 claims description 9
241000272165 Charadriidae Species 0.000 claims 1
238000005096 rolling process Methods 0.000 claims 1
239000004065 semiconductor Substances 0.000 abstract description 30
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
229910052710 silicon Inorganic materials 0.000 description 6
239000010703 silicon Substances 0.000 description 6
230000002093 peripheral effect Effects 0.000 description 5
229910000831 Steel Inorganic materials 0.000 description 4
239000010959 steel Substances 0.000 description 4
239000003921 oil Substances 0.000 description 3
230000001133 acceleration Effects 0.000 description 2
230000005540 biological transmission Effects 0.000 description 2
238000000034 method Methods 0.000 description 2
235000015170 shellfish Nutrition 0.000 description 2
241000252233 Cyprinus carpio Species 0.000 description 1
230000005856 abnormality Effects 0.000 description 1
230000000903 blocking effect Effects 0.000 description 1
230000006835 compression Effects 0.000 description 1
238000007906 compression Methods 0.000 description 1
230000002950 deficient Effects 0.000 description 1
238000010586 diagram Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000004898 kneading Methods 0.000 description 1
239000000463 material Substances 0.000 description 1
230000000149 penetrating effect Effects 0.000 description 1
238000011084 recovery Methods 0.000 description 1
235000012431 wafers Nutrition 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Crystallography & Structural Chemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Control Of Position Or Direction (AREA)
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

TW87120103A 1997-12-11 1998-12-03 Device for pulling up single crystal TW442830B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP34109597A JPH11171688A (ja)	1997-12-11	1997-12-11	単結晶引上げ装置

Publications (1)

Publication Number	Publication Date
TW442830B true TW442830B (en)	2001-06-23

Family

ID=18343220

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW87120103A TW442830B (en)	1997-12-11	1998-12-03	Device for pulling up single crystal

Country Status (3)

Country	Link
JP (1)	JPH11171688A (2)
DE (1)	DE19857253C2 (2)
TW (1)	TW442830B (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI426163B (zh) *	2010-10-08	2014-02-11	Sumitomo Metal Fine Technology Co Ltd	Single crystal pulling device and crucible support device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE10102081A1 (de) *	2001-01-18	2002-07-25	Crystal Growing Systems Gmbh	Kristallziehanlage
EP2250139B1 (en) *	2007-12-17	2016-10-26	Imerys	Ceramic honeycomb structures
KR102344844B1 (ko) *	2020-02-04	2021-12-30	(주)한국아이티에스	반도체 단결정 잉곳의 이송 장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6041038B2 (ja) *	1981-05-19	1985-09-13	フエロフルイデイクス・コ−ポレイシヨン	結晶成長炉からの結晶の処理装置及び処理方法

1997
- 1997-12-11 JP JP34109597A patent/JPH11171688A/ja active Pending
1998
- 1998-12-03 TW TW87120103A patent/TW442830B/zh not_active IP Right Cessation
- 1998-12-11 DE DE1998157253 patent/DE19857253C2/de not_active Expired - Fee Related

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI426163B (zh) *	2010-10-08	2014-02-11	Sumitomo Metal Fine Technology Co Ltd	Single crystal pulling device and crucible support device

Also Published As

Publication number	Publication date
DE19857253C2 (de)	2003-11-20
DE19857253A1 (de)	1999-06-17
JPH11171688A (ja)	1999-06-29

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Legal Events

Date	Code	Title	Description
2001-11-07	GD4A	Issue of patent certificate for granted invention patent
2015-04-01	MM4A	Annulment or lapse of patent due to non-payment of fees