463 04 δ Α7 _Β7_ 五、發明說明（1 ) 技術範疇 (請先閲讀背面之年意事項再填寫本頁) 本發明一般係關於X射線螢光分析，更特定而言，其爲 用以偵測及分析X射線微螢光的方法與裝置。 發明背景 X射線微螢光爲本技藝中所熟知的一種非破壞檢測技術 ，用於測定薄膜的原子组成及厚度。，基本上，一聚焦的X 射線光束被導引到一樣本上，而由X射線與該樣本互相影 響所感應的X射線螢光即可由位於靠近該樣本的偵測器來 偵測到。該被照射樣本的組成及厚度，即可由該螢光X射 線光子的強度及能量來測定出來。 在一篇11掃描X射線分析顯微鏡的環狀固態偵測器” ("Annular-type solid state detector for a scanning x-ray analytical microscope")的論文中，來自 Rev’· Sci. Instrum· 66(9) (1995 年 9 月），頁4544-4546，在此引用做爲參考，由Shimomura及 Nakazawa提出一種環狀鍺彳貞測器，位於靠近一受照射樣本 ，其可轉換由X射線螢光所造成的能量成爲一單一通道資 料。. r 經濟部智慧財產局員工消費合作社印製 在一篇論文中，"多層金屬膜X射線微螢光分析儀”（"X-ray microfluorescence analyzer for multilayer metal films") J 見於 Thin Solid Films 166(1988)，頁 263-272，其在此用做爲 參考，由Cross及Wherry提出一種系統，其中一摻雜鐘的梦 晶體偵測器捕捉了由暴露在X射線下的樣本所放射出來的 光子。 由Kumakhov所提的美國專利編號5,497,008中，在此引用 -4- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 4 6304 ^ A7 ____ B7 五、發明說明（2) 做爲參考，其提出利用一聚合毛細管X射線光學儀器’亦 稱之爲Kumakhov鏡片，用於X射線螢光分析或光譜分析。 該項儀器使用單一的螢光偵測器。 一單一 X射線光子會在一半導體偵測器中產生許多的電 子洞對’而關於電流脈衝外形的分析則可使該偵測器量測 X射線的光子能量。但是’半導體X射線偵測器，例如上 述的偵測器，係受到累積的資料，其會在當X射線光子暫 時性的彼此很接近來充份區別出目前所產生的脈衝。’ 發明概述 本發明一些方面的目的在於提供執行Χ射線微螢光分析 的改良裝置及方法。 本發明一些方面的另一目的在於，其可提供改良的裝置 及方法，用於有效地偵測來自暴露於高強度乂射線照射下 之樣本的X射線微勞光。 在本發明的較佳具體實施例中，一 x射線微螢光分析儀 包令 χ射線產生斋’其用於照射一樣本。該分析儀另包 含複數個個別的偵測器’其以陣列排列在靠近贏本處，其 捕捉了具有一矣用能量範圍的χ射線.光子，其係.由該樣本 受到X射線照射所發射出來的·。該偵測器在幾何上以李列 排列，藉以捕捉所放射的X射線光子，其大體上會具有比 單一偵測器的標準設計更大的固體角度，.例如前述由cr〇ss 及Wherry所提出的。另外，不像是前述Shim〇mura及463 04 δ Α7 _Β7_ V. Description of the invention (1) Technical scope (please read the annual notice on the back before filling this page) The present invention is generally about X-ray fluorescence analysis, more specifically, it is used for detection Method and device for analyzing X-ray microfluorescence. BACKGROUND OF THE INVENTION X-ray microfluorescence is a non-destructive detection technique known in the art and is used to determine the atomic composition and thickness of thin films. Basically, a focused X-ray beam is guided to the sample, and the X-ray fluorescence induced by the interaction between the X-ray and the sample can be detected by a detector located near the sample. The composition and thickness of the irradiated sample can be determined from the intensity and energy of the fluorescent X-ray photon. In a paper entitled "Annular-type solid state detector for a scanning x-ray analytical microscope" (11), from Rev '· Sci. Instrum · 66 ( 9) (September 1995), pages 4544-4546, which is hereby incorporated by reference. A ring germanium hafnium detector was proposed by Shimomura and Nakazawa, located near an illuminated sample, which can be converted by X-ray fluorescence The resulting energy becomes a single-channel data. R Printed in a paper by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, "Multi-layer metal film X-ray microfluorescence analyzer" multilayer metal films ") J See Thin Solid Films 166 (1988), pages 263-272, which is hereby used as a reference. A system proposed by Cross and Wherry, in which a doped clock dream crystal detector captures Photons emitted from a sample exposed to X-rays. U.S. Patent No. 5,497,008 filed by Kumakhov, cited here -4- This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 6304 ^ A7 ____ B7 V. Description of the invention (2) For reference, it proposes to use a polymerized capillary X-ray optical instrument 'also called Kumakhov lens for X-ray fluorescence analysis or spectral analysis. The instrument uses a single fluorescence detector. A single X-ray photon will generate many electron hole pairs' in a semiconductor detector, and analysis of the shape of the current pulse will enable the detector to measure X-ray photon energy. However, the 'semiconductor X-ray detector, such as the above-mentioned detector, is subject to accumulated data, which will sufficiently distinguish the pulses currently generated when the X-ray photons are temporarily close to each other. Summary of the Invention An object of some aspects of the present invention is to provide an improved apparatus and method for performing X-ray microfluorescence analysis. Another object of some aspects of the present invention is to provide an improved device and method for effectively detecting X-ray microlabor from a sample exposed to high-intensity radon radiation. In a preferred embodiment of the present invention, an x-ray microfluorescence analyzer includes x-ray generators which are used to illuminate a specimen. The analyzer also includes a plurality of individual detectors, which are arranged in an array close to the winning spot, which captures X-rays with a range of useful energy. Photons, which are emitted by the sample by X-ray irradiation from·. The detector is geometrically arranged in a column to capture the emitted X-ray photons, which will generally have a larger solid angle than the standard design of a single detector. For example, as previously described by crOss and Wherry Proposed. In addition, unlike the aforementioned Shimomura and
Nakazawa的系統，其係根據單一的大偵測器，而根據本發 明的一些具體實施例中係使用多個偵>j器，其可使分析者 -5- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------------，裝--- (請先閲讀背面之注意事項I填寫本頁) » . --線- 46304 5 Α7 _ _ Β7 五、發明說明（3) 可以導引大體上更高強度的X射線光束到該樣本，其可大 幅降低累積效應的發生機率。 在本發明的一些較佳具體實施例中，該複數個個別·(貞測 器係配置成一環狀，所以由入射X射線光束的方向，與由 一债測器到該照射點方向所形成的角度，大體上對每個偵 測器皆相同。較佳地是，該環一般皆以該照射點爲中心。 本發明將可藉由以下之較佳具體實施例的詳細説明，配 合所附圖面，而得到更詳盡的瞭解，其中： 圖式簡單説明 圖1A所示爲根據本發明的一較佳具體實施例之一 X射線 微螢光分析儀的架構透视圖；及 圖1B爲圖1A之分析儀的細部放大架構的側視圖。 較佳具體實施例的詳細説明 圖1A所示爲根據本發明的一較佳具體實施例的X射線微 螢光分析儀10的架構透視圖。圖1B則爲分析儀10的基座部 份32的架構放大橫剖面圖。 一 X射線源12照射一單一的聚合毛細管光學儀器16的一 第一端14。X射線源12較佳地是具有一 X射線筒，例如由 美國加州Scotts Valley的Oxford儀器公司所生產者。光學儀 器16最好是使用由美國紐約Albany的X-Ray光學系統公司所 生產的一單一聚合毛細管鏡片。該光學儀器收集x射線， 並將其由光學儀器16的一第二端24聚焦到一圓錐28而成爲 一點26。最佳地是，點26大體上是圓形’而其直徑大約是 在50 μιη的等級。另外，點26則透過“單一毛細管光學儀 -6 - 本紙張尺度適用中國國家標準（CNS)A4规格<210 X 297公釐） ----I.---------裝·-- (靖先閱讀背面之注意事項Ϊ寫本頁) 訂·· 線. 經濟部智慧財產局員工消費合作社印製 463 04 5 A7 ^ --B7_______ '、發明說明（4 ) 器及/或X射線校準針孔來照射’或是本技藝中任何已知的 適當裝置皆可。 (請先閱讀背面之注意事項秦填寫本頁) 最佳地是，點26是位在一樣本22的表面上，其组成及/或 厚度是要由分析儀10來量測。螢光X射線係回應於該照射 的X射線而由樣本22所發射出來的，其係產生於點％之内 ，並由複數個偵測器18來收集，較佳地是8個。每個積測 器18皆可在一共用的能量範圍内捕捉及偵測X射線光子。 偵測器18的配置及運作將在下面做更詳細的說明。來自偵 承1J益18的彳&號係轉換到一處理單元20，其中該信號被分析 後產生點2 6的組成及厚度資訊。最佳地是，來自彳自測器18 的信號可透過複數個脈衝處理器來轉換，而處理單元2〇包 含一多重輸入處理器分析單元。較佳地是，樣本22係由定 位設備（未示出）來以水平方向掃描，此爲本技藝中所熟知 ，所以大體上整個樣本22要分析的整個區域34皆可由分析 儀10來進行分析。另外，分析儀10也可在有興趣的區域34 上做掃描。最佳地是，該掃描係由處理單元2 〇來控制。 經濟部智慧財產局員工消費合作社印製 較佳地是’偵測器18.大致上爲類似的pin二磁體，並以 點26爲中心配置成圓形，其直徑大約.等於9 mm，其距離樣 本22的表雨大约是4 mm。最佳地是，每個監測器皆具有— 有效收集區域，其形式爲邊長2.5 mm的正方形。另外更佳 地是，每個偵測器皆具有大致類似的響應函數，並在__共 用的能量範圍中收集並偵測X射線光子。舉例而言，該侦 測器爲日本Hamamatsu的Hamamatsu光學公司所生產的型號 S1223。其可暸解到前述的偵測器的數·量及種類，及其尺寸 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 463 04 5 A7 —------- 五、發明說明（5) 與位置，皆爲範例之用，故也可使用其它類似的數量，尺 寸，種類及位置。其亦可瞭解到，當所示的偵測器18爲垂 直朝下時，其也可以—角度朝向點％，以便增加呈現在點 上的有效區域。 在藉由圓錐28進行照射時，點26產生螢光乂射線光子而 入射到偵測器18，其中相關的脈衝係依序在偵測器中產生 ，並傳送到處理單元20。該處理單元分析並計算來自該複 數個偵測器18的脈衝。最佳地是，分析儀1〇的基座部份32 大致上是對於點26保持不動，直到已由單元2〇記錄到足夠 的计數，足可決定出點26的組成及厚度。然後，處理單元 20即移動樣本22或是基座部份32，如前所述，到一要分析 的新地點26。 分析儀10所需要花在一點26的時間主要是依據照射在點 26上的X射線強度。在本發明中所使用該照射χ射線的強 度大致上是比目前本技藝中的分析儀所使用的要高，其係 在偵測器中發生脈衝累積效應之前，是由於脈衝是由每個 偵測器個別來接收，而不是來自—單—的大偵剎器。此外 ’當照射X射線強度爲一限制因素時，例如當較高的強度 會造成損睪時’本發明即増加.了有用的共用能量光手的數 目對於總共的光子數目的比例。因此，可在一相當短的時 間内收集到相當大量的光子，所以分析一點2 6所需要的時 間’相對於本技藝中所知的系統，可以降低許多。 其可瞭解到，上述較佳具體實施例僅是引用來做爲範例 ’故本發明並不受限於前述所示及所，説明的内容。當然， -8 - -------- -----裝 i I (請先閲讀背面之注意事項I寫本頁) 訂： 線- 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 297公釐） 4 63 04 5Nakazawa's system is based on a single large detector, and according to some embodiments of the present invention, multiple detectors are used, which enables analysts to apply this national paper standard ( CNS) A4 specification (210 X 297 mm) ------------, installed --- (Please read the precautions on the back I fill out this page) ». --- 46304 5 Α7 _ Β7 V. Description of the invention (3) A substantially higher-intensity X-ray beam can be guided to the sample, which can greatly reduce the occurrence of cumulative effects. In some preferred embodiments of the present invention, the plurality of individual detectors are arranged in a ring shape, so the direction formed by the incident X-ray beam and the direction from a debt detector to the irradiation point are formed. The angle is generally the same for each detector. Preferably, the ring is generally centered on the irradiation point. The present invention can be accompanied by the following detailed description of the preferred specific embodiments and the accompanying drawings For a more detailed understanding, in which: the drawings are briefly explained. FIG. 1A is a perspective view of the architecture of an X-ray microfluorescence analyzer according to a preferred embodiment of the present invention; and FIG. 1B is a schematic view of FIG. 1A. Side view of the detailed enlarged structure of the analyzer. Detailed Description of the Preferred Embodiment FIG. 1A shows a perspective view of the structure of an X-ray microfluorescence analyzer 10 according to a preferred embodiment of the present invention. FIG. 1B An enlarged cross-sectional view of the structure of the base portion 32 of the analyzer 10. An X-ray source 12 illuminates a first end 14 of a single polymeric capillary optical instrument 16. The X-ray source 12 preferably has an X-ray Canister, for example by Sco, California Produced by Oxford Instruments, TTS Valley. The optical instrument 16 is preferably a single polymerized capillary lens produced by X-Ray Optical Systems, Inc. of Albany, New York, USA. The optical instrument collects x-rays and passes them through the optical instrument. A second end 24 of 16 is focused on a cone 28 and becomes a point 26. Optimally, the point 26 is generally circular and its diameter is on the order of 50 μm. In addition, the point 26 passes through a "single capillary tube" Optical instrument-6-This paper size is applicable to China National Standard (CNS) A4 specifications < 210 X 297 mm) ---- I .--------- installation · (Jing Xian read the back Precautions (written on this page). Ordering ... Line. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives, 463 04 5 A7 ^ --B7 _______ ', Description of Invention (4) and / or X-ray calibration pinholes for irradiation' or Any suitable device known in the art may be used. (Please read the notes on the back first and fill in this page). Most preferably, point 26 is located on the surface of a sample 22. Its composition and / or thickness is To be measured by the analyzer 10. The fluorescent X-ray is The ones emitted by Ben 22 are generated within the point% and are collected by a plurality of detectors 18, preferably 8. Each accumulator 18 can be captured within a common energy range. And detection of X-ray photons. The configuration and operation of the detector 18 will be described in more detail below. The 彳 & number from the detection 1J benefit 18 is converted to a processing unit 20, where the signal is generated after analysis The composition and thickness information of point 26. Optimally, the signal from the self-test unit 18 can be converted by a plurality of pulse processors, and the processing unit 20 includes a multiple-input processor analysis unit. Preferably, the sample 22 is scanned in a horizontal direction by a positioning device (not shown), which is well known in the art, so generally the entire area 34 to be analyzed by the entire sample 22 can be analyzed by the analyzer 10 . In addition, the analyzer 10 may scan the area of interest 34. Optimally, the scanning is controlled by the processing unit 20. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is preferably 'detector 18. It is roughly a similar pin two magnet, and is arranged in a circle with the point 26 as the center, and its diameter is approximately equal to 9 mm and its distance The surface rain of Sample 22 is approximately 4 mm. Optimally, each monitor has an effective collection area in the form of a square with a side length of 2.5 mm. It is also better that each detector has a roughly similar response function and collects and detects X-ray photons in a common energy range. For example, the detector is a model S1223 produced by Hamamatsu Optical Company of Hamamatsu, Japan. It can understand the number, quantity and type of the aforementioned detectors, and their sizes. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) 463 04 5 A7 —------- 5. Description of the invention (5) and position are examples, so other similar quantities, sizes, types and positions can also be used. It can also be understood that when the detector 18 shown is oriented vertically downwards, it can also be-angled towards the point% in order to increase the effective area presented on the point. When irradiated by the cone 28, the point 26 generates fluorescent chirped ray photons and enters the detector 18, and the related pulses are sequentially generated in the detector and transmitted to the processing unit 20. The processing unit analyzes and calculates pulses from the plurality of detectors 18. Optimally, the base portion 32 of the analyzer 10 remains substantially stationary for the point 26 until a sufficient count has been recorded by the unit 20 to determine the composition and thickness of the point 26. The processing unit 20 then moves the sample 22 or the base portion 32, as previously described, to a new location 26 to be analyzed. The time that the analyzer 10 needs to spend at a point 26 is mainly based on the intensity of the X-rays irradiated on the point 26. The intensity of the irradiated x-rays used in the present invention is generally higher than that used by the analyzers in the present technology. Before the pulse accumulation effect occurs in the detector, it is because the pulse is detected by each detector. Detectors receive them individually, rather than from a large single detector. In addition, when the intensity of the irradiated X-ray is a limiting factor, for example, when a higher intensity causes damage, the present invention increases the ratio of the number of useful shared energy photons to the total number of photons. Therefore, a considerable amount of photons can be collected in a relatively short period of time, so the time required to analyze a point 26 can be reduced much compared to the systems known in the art. It can be understood that the above-mentioned preferred embodiments are merely cited as examples, so the present invention is not limited to the content shown and described above. Of course, -8--------- ----- Install i I (please read the notes on the back I write this page) Order: Line-Printed on paper by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs Standards are applicable to China National Standard (CNS) A4 (210 297 mm) 4 63 04 5
五、發明說明（6 ) 本發明的範圍係包含有前述的不同特徵的組合及次组合， 以及其變化及修正’對於本技藝的專業人士而言，在閱讀 前述説明後皆可瞭解並進行，而皆在先前技藝中所未揭示 的0 • ---- --- -裝 i \-·; C請先閱讀背面之注意事項W填寫本頁) . --線· 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）5. Description of the invention (6) The scope of the present invention includes the combinations and sub-combinations of the different features described above, as well as changes and modifications thereof. 'For professionals in the art, they can understand and proceed after reading the foregoing description. They are all undisclosed in the previous art. 0 • ---- ----Install i \-·; C, please read the precautions on the back first and fill in this page).-Line Employees of Intellectual Property Bureau of the Ministry of Economic Affairs The paper size printed by the consumer cooperative is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm)