TW511650U - Ventilator device for cleaning container - Google Patents

Ventilator device for cleaning container

Info

Publication number
TW511650U
TW511650U TW090215658U TW90215658U TW511650U TW 511650 U TW511650 U TW 511650U TW 090215658 U TW090215658 U TW 090215658U TW 90215658 U TW90215658 U TW 90215658U TW 511650 U TW511650 U TW 511650U
Authority
TW
Taiwan
Prior art keywords
cleaning container
ventilator device
ventilator
cleaning
container
Prior art date
Application number
TW090215658U
Other languages
English (en)
Inventor
Tzung-Ming Wu
Wu-Cheng Su
Sheng-Fu Tsai
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW090215658U priority Critical patent/TW511650U/zh
Priority to US09/989,383 priority patent/US6732877B2/en
Publication of TW511650U publication Critical patent/TW511650U/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D51/00—Closures not otherwise provided for
    • B65D51/16—Closures not otherwise provided for with means for venting air or gas
    • B65D51/1605—Closures not otherwise provided for with means for venting air or gas whereby the interior of the container is maintained in permanent gaseous communication with the exterior
    • B65D51/1616—Closures not otherwise provided for with means for venting air or gas whereby the interior of the container is maintained in permanent gaseous communication with the exterior by means of a filter

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Closures For Containers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW090215658U 2001-09-12 2001-09-12 Ventilator device for cleaning container TW511650U (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW090215658U TW511650U (en) 2001-09-12 2001-09-12 Ventilator device for cleaning container
US09/989,383 US6732877B2 (en) 2001-09-12 2001-11-21 Air vent plug arrangement having a mounting ring, a plug body, and a plug cap for securing the plug body to the mounting ring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW090215658U TW511650U (en) 2001-09-12 2001-09-12 Ventilator device for cleaning container

Publications (1)

Publication Number Publication Date
TW511650U true TW511650U (en) 2002-11-21

Family

ID=21686423

Family Applications (1)

Application Number Title Priority Date Filing Date
TW090215658U TW511650U (en) 2001-09-12 2001-09-12 Ventilator device for cleaning container

Country Status (2)

Country Link
US (1) US6732877B2 (zh)
TW (1) TW511650U (zh)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100615761B1 (ko) * 2002-09-11 2006-08-28 신에츠 폴리머 가부시키가이샤 기판 수납 용기
KR100607302B1 (ko) * 2002-10-25 2006-07-31 신에츠 폴리머 가부시키가이샤 기판 수납 용기
US7463338B2 (en) * 2003-07-08 2008-12-09 Hoya Corporation Container for housing a mask blank, method of housing a mask blank, and mask blank package
US7201276B2 (en) * 2003-11-07 2007-04-10 Entegris, Inc. Front opening substrate container with bottom plate
US7328727B2 (en) * 2004-04-18 2008-02-12 Entegris, Inc. Substrate container with fluid-sealing flow passageway
CN100560443C (zh) * 2004-04-18 2009-11-18 安堤格里斯公司 具有流体密封流路的基板容器
US20060065571A1 (en) * 2004-09-27 2006-03-30 Tim Hsiao Wafer shipping box and wafer transportation method
JP4800155B2 (ja) * 2006-09-04 2011-10-26 信越ポリマー株式会社 基板収納容器及び逆止弁
JP4953010B2 (ja) * 2006-09-13 2012-06-13 株式会社ダイフク 基板収納用の収納容器
KR101494024B1 (ko) * 2007-02-28 2015-02-16 엔테그리스, 아이엔씨. 기판 컨테이너를 위한 퍼지 시스템
TWM337832U (en) * 2007-11-15 2008-08-01 Gudeng Prec Industral Co Ltd Storage apparatus and filter apparatus therein
TWM331514U (en) * 2007-11-15 2008-05-01 Gudeng Prec Industral Co Ltd Storage apparatus for storing semiconductor element or reticle
US8215510B2 (en) * 2008-03-24 2012-07-10 Taiwan Semiconductor Manufacturing Company, Ltd. Photomask storage apparatus
WO2010019897A1 (en) * 2008-08-15 2010-02-18 Marketshare Partners Llc Automatically prescribing total budget for marketing and sales resources and allocation across spending categories
US9189937B2 (en) * 2008-10-30 2015-11-17 Nir Shechter Protecting a material from contamination
TWI346638B (en) * 2008-12-26 2011-08-11 Gudeng Prec Industral Co Ltd A purging valve and a wafer container having the purging valve
BR112012019285A2 (pt) 2010-02-02 2018-05-08 Diversey Inc recipiente de distribuição de líquido e método
WO2011112835A2 (en) 2010-03-11 2011-09-15 Diversey, Inc. Vent tube apparatus and method
US20120048871A1 (en) * 2010-08-30 2012-03-01 Teh-Tsung Chiu Waterproof and breathable plug
US8881931B2 (en) * 2010-08-30 2014-11-11 Avc Industrial Corp. Waterproof and breathable plug
TWI414464B (zh) * 2011-01-11 2013-11-11 家登精密工業股份有限公司 具有固定結構之極紫外光光罩儲存傳送盒
TWI501910B (zh) * 2011-11-17 2015-10-01 家登精密工業股份有限公司 具有排水結構之極紫外光光罩儲存傳送盒
TWI642605B (zh) * 2012-11-20 2018-12-01 恩特葛瑞斯股份有限公司 具有清洗埠的基板收納盒
DE102013111992B3 (de) * 2013-10-30 2015-01-22 Günther Spelsberg GmbH & Co. KG Gehäuse mit Belüftungselement
US10337948B2 (en) * 2016-02-18 2019-07-02 Solaredge Technologies Ltd Method and apparatus for hermeticity test
WO2018047541A1 (ja) * 2016-09-06 2018-03-15 信越ポリマー株式会社 基板収納容器及び気体置換ユニット
WO2018203384A1 (ja) * 2017-05-02 2018-11-08 ミライアル株式会社 基板収納容器
TWM587714U (zh) * 2018-01-11 2019-12-11 家登精密工業股份有限公司 快拆式氣閥及應用其之基板容器
JP7125000B2 (ja) * 2018-03-13 2022-08-24 信越ポリマー株式会社 基板収納容器
WO2022081467A1 (en) * 2020-10-12 2022-04-21 Donaldson Company, Inc. Enclosure vent assembly
CN112320051B (zh) * 2020-11-26 2024-11-29 常州宝农新材料科技有限公司 一种透气塞
TWI782689B (zh) * 2021-09-02 2022-11-01 家登精密工業股份有限公司 快拆式氣閥、具有快拆式氣閥的基板容器及快拆式氣閥的安裝和拆卸方法
KR102733145B1 (ko) * 2022-04-05 2024-11-25 주식회사 삼에스코리아 웨이퍼 수납용기 및 그에 사용되는 캡 조립체
US20250029857A1 (en) * 2023-07-21 2025-01-23 Entegris, Inc. Module retainer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2650673A (en) * 1950-03-29 1953-09-01 Horace L Bering Vent and filter plug closure
US4765499A (en) * 1987-12-29 1988-08-23 Von Reis Charles Filter cap
KR100190865B1 (ko) * 1996-10-21 1999-06-01 정몽규 연료탱크의 누출방지 장치

Also Published As

Publication number Publication date
US6732877B2 (en) 2004-05-11
US20030047562A1 (en) 2003-03-13

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model