TW518632B - Manufacturing process of cathode plate for nano carbon tube field emission display - Google Patents

Abstract

The present invention is related to a manufacturing process of cathode plate for nano carbon tube field emission display. By using photosensitive conducting liquid and dielectric material capable of being etched, and combining with the photolithographic process as well as the etching process, the invented cathode plate for nano carbon tube field emission display is manufactured. The manufacturing process includes the manufacture of bottom electrode, the manufacture of dielectric layer, the manufacture of gate electrode layer, and the manufacture of nano carbon tube field emission layer. The cathode plate structure is packaged and assembled with the anode plate to form a nano carbon tube field emission display array. In comparison with the cathode pattern printed by the conventional screen printing method, the resolution is greatly increased in the invention so as to improve the display quality. In addition, the resolution of dielectric layer in the structure can be determined when manufacturing the gate electrode so as to decrease the complicated alignment. The manufacturing process is simple and the uniformity of film thickness is excellent. Furthermore, the printed pattern can be arbitrarily disposed without causing any fidelity loss and even without non-uniformity of electric field intensity distribution.

Description

518632 — ^^-5. Description of the invention (1) 1 --- Field of the invention The present invention relates to a field emission display (field emission display 'FED). In particular, it relates to a cathode plate and a process for a nano-carbon tube (^ 1 ^ 〇11 nan〇 tUbe, CNT) field emission display. Background of the Invention Although liquid crystal displays (LCDs) are the most popular display screens under Japanese protection. However, many new display technologies are constantly being developed. Field emission display is a promising technology that replaces liquid crystal displays. It uses cold cathode emitter tips as a source of electrons to replace hot cathode electron grabbers in cathode ray tubes. (H〇t cath〇 (Je electron guη). When the field emission display is placed in an electric field, the emitter tip faces a direction of an anode substrate coated with phosphor, and a beam is emitted. Fig. 1 is a schematic diagram of the structure of a conventional field emission display. The electric field is used to attract cold electrons on the cathode glass substrate, 〇〇2 emitter tip, 〇03, and leave the cathode plate in a vacuum environment. The field emission electrons are attracted by the acceleration of the positive voltage on the anode glass substrate 104, and collide with the fluorescent powder 106 of the anode 105 to emit luminescence.

Page 5 518632 V. Description of the invention (2) The cathode plate of the field emission display in the past is mostly made by thick film screen printing technology, that is, the pre-adjusted slurry is scraped through the patterned screen plate with a scraper. The patterns are printed on the substrate, and the patterns are stacked layer by layer in this way. Because this method is limited by the mesh and mesh size of the stencil, the resolution of the printed pattern cannot be improved, so that a relatively high field emission starting voltage must be provided in order to achieve the required brightness of the display. In addition, it will be affected by the unevenness of the screen tension, resulting in poor film thickness uniformity and printing, distortion, and the disadvantages of uneven electric field intensity distribution and alignment difficulties in subsequent processes. According to the current development situation, if the field emission display is to occupy the market, it is necessary to overcome the above problems. Develop another method of manufacturing the cathode plate of the field emission display to improve the pattern analysis and film thickness uniformity. Pattern, thereby improving the performance of the display. ~ Summary of the Invention This description overcomes the shortcomings of traditional field emission displays. Main purpose

: It is a pot ΐ: A method for manufacturing a cathode plate of a carbon nanotube field emission display. The main principle: The use of photosensitive conductive paste and etchable media, combined with the photolithography (MChlng) process, to produce nano-carbon tube field emission display devices. Cathode phase

Page 6 518632 V. Description of the invention (3) According to the present invention, the cathode plate of the nano carbon tube field emission display is made of a transparent substrate, a cathode electrode, a dielectric layer, and a dielectric layer. The fabrication of the gate layer (seven to six layers) and the fabrication of the nano carbon tube field emission layer (CNT emissiorl Uyer). These manufacturing processes further include the following steps: (a) preparing a transparent substrate, the transparent substrate is provided with upper and lower surfaces, and (b) applying a photo-conductive paste to a transparent substrate On the surface, a pattern is made using a photolithography process, and the bottom electrode layer is completed after sintering. (C) A layer of silver-etchable dielectric material is coated on the bottom electrode layer, (d) A layer of photosensitive gate material is completely coated on the dielectric material layer, and then a pattern is formed by using a photolithography process and a gate pattern is formed after sintering. (E) The gate pattern is used as a protective layer to combine one In the etching process, a portion of the dielectric layer that is not protected by the gate pattern is etched, and then a carbon nanotube layer is filled on the bottom electrode layer to form the cathode plate structure. In a preferred embodiment of the present invention, the transparent substrate, such as a glass substrate, is provided with upper and lower surfaces. The lithography process includes prebake, defining a pattern with a photo mask, and performing exposure (expose) and development (d e v e 1 op). Before the nano-carbon tube layer is filled, the etching process uses the gate electrode as a protective layer, and the dielectric layer is etched to obtain a dielectric layer pattern, and the organic material (〇rganic mater ial) in the mother layer is sintered. . The nano carbon tube layer can be filled by an electrophoresis method or micro

V. Description of the invention (4) The shadow method is completed. 'Also, according to the present invention, the gate electrode layer may be printed with a carbon nanotube layer by screen printing after completion of the bottom electrode of step (b), and then a dielectric acoustic and a dielectric layer etching may be performed to complete the cathode plate. structure. Said according to the present invention, such nanometer carbon tube field emission is significantly improved in pattern analysis and film thickness, and can be used for any sound; the electrode plate can be combined with the anode plate package to complete-nanocarbon two = extremely Array (Held emisslon array). a Lu Zhuomao shows that in a preferred embodiment of the present invention, the master is 300 millijoules per square centimeter to 500 millijoules per square centimeter, Gu Er ::: at the room temperature of the exposure energy, 0.5 to 5 Weight of 7 hundred eighty v. The condition is that the line width of a line spacing of 20 to 25 degrees Celsius (1 ine SPace) is 30 "m wild X-ray indicator array is a pattern printed by each method, the present invention greatly improves the resolution compared with the use of traditional web Printing and analysis can be done at the time of making the gate electrode—and the process of reducing the dielectric layer in the structure and making the display are reduced. Μ, = reduces the troublesome alignment, and does not improve. The description and the details of the patent application are detailed below. In conjunction with the following detailed description of the examples, the above and other objects and preferred inventions of the present invention are described in detail 518632 V. Explanation of the invention (5) The cathode plate 201, bottom of the nanometer carbon tube field emission display invented by the company. Consider Figure 2a 'This cathode plate mainly contains-transparent substrate layer 207 and 2: polar layer (ie cathode layer) 2 0 3,-dielectric Layer 205. The gate electrode is a carbon nanotube layer 209. In addition to the transparent substrate 001, the 忘 electrode layer 203 has a plurality of long parallel lines 仡 dielectric layers m and The leisure pole layer 207 has a plurality of pieces, respectively; a circle hole opening is formed at the intersection with =: · 夂 crossing. Line: = Filled vertically in the circular hole of the gate layer., Anti-e layer 209 according to the present invention, the structure of the dielectric layer can also be increased-sub-lithographic process, which will only correspond to the gate; However, in the embodiment of the car driver Jiaguan of the present invention, the range of the line width / space between the bottom electrodes can be 30 ° and the horizontal lines of the two and two electric layers are shown in the gates in the figure. The electrode layer circular hole can be 10 ～ em / 50 // m. The thickness range is about 3.5 ~ 5.5 / ^, the dielectric # / wide opening. The bottom electrode layer is 10 ～ 30, and the thickness of the gate layer is about ^ ^ The degree of valley range is about 3 ~ 5 // m. The thickness range of the field is about 3 ~ 5 // m. '. ~ 5 · 5 V m' Nanocarbon tube This cathode substrate structure is combined with _ typical p-plate package to complete a The nano-carbon tube field emits an anode base and an array of horns for each display. Figure 2b is 518632

A top view of an anode plate of a typical field emission display. The anode plate includes a panel 2 1 1, a transparent electrode layer 2 3 and a phosphor layer 2 15. The manufacturing process of the bottom electrode layer, the dielectric layer, the gate layer and the nanometer carbon field emission layer of the present invention shown in FIG. Figures 3a and 3b illustrate the manufacturing process of the bottom electrode layer of the cathode plate of the present invention. Referring to FIG. 3a, the manufacturing process of the bottom electrode layer further includes the following steps ... (a) A transparent substrate 2 is prepared. The transparent substrate is provided with upper and lower surfaces. (B) A photosensitive conductive paste 3 ( H is coated on one surface of this transparent substrate 201, and a lithography process is used, and the bottom electrode layer 203 is completed after sintering. The lithography process includes pre-baking to define a pattern with a photomask 3 〇3, and making Exposure 305 and development. Figure 3b is a schematic cross-sectional structure diagram of the pattern of the bottom electrode layer 203 after the development is completed. In a preferred embodiment of the present invention, the photosensitive conductive paste may be made of silver (Ag ), Nickel (Ni) or chromium (Cr) special conductive metal powder (powder) and tris (pentyl) pentoxide (trimethylpentanediol monoisobutyrate), acrylic resin (acrylic resin) Cryptomethyl methyl acrylate special resin is prepared by adding a solvent (siovent) and a photosensitizer to a photosensitive paste. The sintering temperature and processing time are about the air atmosphere. Sintering at 480 ~ 560 ° C for 30 minutes, and transparent substrates such as glass Board.

Page 10 518632 V. Description of the invention (7) After the bottom electrode layer 203 is completed, a comprehensive coating is performed on the bottom electrode layer: the layer can be etched dielectric material as the dielectric layer 205, Its cross-sectional structure is shown in Figure 4. Shi Xi (the material of the dielectric layer in the example of st can be made of powder i, 1 /) 1), oxidized clock (Li2Q), oxidized oxide (Pb02), = chemical solution, and the top three Resins such as pentyl glycol monoisobutyl, acrylic 2 s, fluorenyl acrylate, etc. are prepared by adding a solvent to a slurry. Fig. 5a and Fig. 5b illustrate the generation process of this smoke tomorrow evening. The flow of the fabrication of the gate layer of the cathode plate of the R & M cathode is shown in Fig. 5a 'on top of this dielectric layer 205 is coated with an optical gate material 5 0 1 and reused # # 主 主 布Previously, Γ will dielectrically coat the full Λ photoresistive gate electrode material 501 with a temperature and processing time of about 4,000; the ingenious: the machine material burns out. Sintered for 30 minutes. Light lithography penetration = burned under hole flood, 480 ~ 54 degrees Celsius, and exposed for 5.5 two shadows. # = Including pre-bake to define the pattern with a mask 503, J ,,, and ° are not intended. The preferred embodiment and processing time of the present invention are similar to those of the above-mentioned materials and sintering temperature of the four electrode layers. The above coating methods include spin, roller and screen printing.

Page 11 518632 V. Description of the invention (8) Three ways. The solvents of the materials of the above layers can be carb ο X y 1 ic acid, aliphatic acid, ethyl 4-dimethylamin〇benzoate, 2 A mixture of 2,2-dimethoxy-2-phenyl acetophenone. The solid content of the slurry (s0Hd content) is about 5Q ~ π%. Figures 6a and 6b illustrate the fabrication process of a nano-carbon tube field emission layer of a cathode plate of the present invention. Referring to FIG. 6a, after the development of the gate layer is completed, the gate ^ pattern 2 7 is used as a protective layer, and a nano carbon tube layer μ 9 is filled on the bottom electrode layer 2 0 3 in combination with an etching process to form A cathode plate structure. In this second embodiment, the etching process is to etch the dielectric layer 205 to obtain a dielectric acoustic II :, and burn off the organic material in each layer, and the sintered core is as shown in Figure b. . :: In the present invention, the production of the nano-carbon tube layer 209 can fill the nano-carbon tube layer on the bottom electrode layer 203, which is also == a charge; The top electrode layer 203 is a schematic diagram of a cross-sectional structure after t structure is completed. The following is how to make these two carbon nanotube layers. The following conditions are used to make photosensitive nano carbon tube ingredients from the shadow method: 2: J: column step: U) will be used as a protective layer with this idle electrode pattern m: = :: cathode plate, meaning out, ⑷ In a high-temperature furnace, in the gas; (two

518632 V. Description of the invention (9) ------ Sintering at 480 ~ 500 ° for 30 minutes. The photosensitive nano carbon tube is composed of 5 to 30 weight percent of the tube powder and 5 to 30 weight percent of the silver powder, and then mixed with the positive type or :; and: The photoresist used in electrophoresis to produce a carbon nanotube layer in sequence includes the following steps: (a) or negative photoresist is fully coated on the cathode plate shown in Figure ，, (, this gate pattern 2 0 7 as The protective layer, the pattern is defined by positional exposure. (C) The nano-carbon official ingredients are electrographed in the pattern, where the current is 35 volts = about 30 to 60 seconds, (d) in a high temperature furnace in a nitrogen atmosphere. Sintering at 48 ° ~ 500 ° C for 30 minutes. The carbon nanotubes produced by electrophoresis method are 3 ~ 50 weight percent of carbon nanotube powder and water (HJ) and other solvents. 0.2 to 0.2 grams per liter of a dispersant of carboxyl methyl cellulose 'CMC. In addition to the manufacturing process of FIGS. 3 to 6, the cathode plate of the present invention The manufacturing process of another preferred embodiment of the method includes sequentially providing a transparent substrate, manufacturing a bottom electrode, manufacturing a carbon nanotube layer, manufacturing a dielectric layer, and manufacturing a gate layer. In other words, following FIG. 3b After the fabrication of the bottom electrode is completed, the nanostone anti-official layer is first produced, and then the dielectric layer, the gate layer and the dielectric layer are fabricated. Layers are etched to complete the cathode plate. The component labels in Figures 7 to 10 illustrate these manufacturing processes in order.

Page 13 518632

% "Picture: So: Following the figure, M printed the carbon nanotube layer 2 on the pattern of the bottom electrode layer 203 by screen printing. After that, a layer of U dielectric material was completely coated. As the dielectric layer 205, as shown in Fig. 8. Fig. 9a and: from the brother: the fabrication process of the gate layer is the same as that of the gate layer in Figs. 5a and 5b, so it is continued to be used. Its components are marked, but the description will not be repeated. == After the development of the pattern of the gate electrode 207 of Erzhi is completed, the gate electrode is then etched with a dielectric layer of silver as shown in Figure 6 ^. The layer pattern 601 'sub-burns out the organic material in the mother layer, and the cathode plate structure of the present invention. Wu Cheng-Root, the analysis of the' dielectric layer of the present invention 'can be combined during the fabrication of the gate electrode: thick Si whisker and increase Pattern analysis and patterns can also be arbitrarily arranged. Acoustic bath ^: According to the present invention, the structure of the cathode layer of the cathode plate of the nano-carbon tube field emission layer of the anode layer of the cathode is structured as _ 极 声 R ^ A schematic diagram, in which the horizontal and thick line structure "case 1101 'and the vertical pattern structure is ^ figure dry) is; the layer 1105 is filled in the circular hole of 50 ", a dielectric layer (not shown in micro Scenery, go to the V " production layer pattern under 1103. The filling system of the nano tube broken layer is 300 to _ clever: ^ The filming process is based on the exposure energy per square centimeter, and the shirt condition is 20 to 2 degrees Celsius. At a room temperature of 5 ° C, in the case of a potassium carbonate (κπ〇3) solution with a weight percentage of 0.1%, the line width of each line interval is 30 Å, which is not included in the official emission display array.

518632

The phase plate is a picture of the cathode layer made by the traditional screen system. Figure 12 shows the combined photolithography printed by the screen printing method: (, a thick line with a width of more than 100 ”" and Kawamoto Photograph: 1 2 03: Photograph of the first layer of the cathode (a line width of 30V m and a vertical fine-grained image that greatly improves the resolution of the gate. * Figure 12 shows the large V of the present invention, thus improving the quality of the display. Dilihao: As mentioned in the second paragraph, the present invention uses a photosensitive conductive paste and an etchable medium to be printed on the substrate, and combines the lithography process and the etching process to make a nano carbon tube field. The cathode plate overcomes the shortcomings that the traditional screen printing method cannot be used to analyze the printed pattern. Not only is the process simple, but the film thickness is uniform, and the printed image will not be distorted in any arrangement, and there is no uneven distribution of the electric field strength. Or the disadvantages of difficulty in alignment during the process of "backward", "backward", "backward", etc. The ones mentioned above are only the preferred embodiments of the present invention, and it is not used to limit the scope of the present invention. The equal changes and modifications made in the scope of the patent application of the present invention shall still belong to the present invention. = Within the scope of the patent. |

518632 Brief description of the drawings Brief description of the drawings Figure 1 is a schematic diagram of the structure of a conventional field emission display. Figure 2a is a top view of the cathode plate of a nano-carbon tube field emission display according to the present invention. Figure 2b is a top view of the anode plate of a typical field emission display. 3 to 6 illustrate the manufacturing process of the bottom electrode layer, the dielectric layer, the gate layer, and the nano-carbon tube field emission layer of the cathode plate of FIG. 2a in detail. 3a and 3b illustrate the manufacturing process of the bottom electrode layer of the cathode plate of the present invention. FIG. 4 illustrates a manufacturing process of a dielectric layer of a cathode plate of the present invention. 5a and 5b illustrate the manufacturing process of the gate layer of the cathode plate of the present invention. Fig. 6a and Fig. 6b illustrate the manufacturing process of the field emission and layer of the nano carbon tube of the cathode plate of the present invention. Fig. 7 illustrates the manufacturing process of printing the carbon nanotube layer on the pattern of the bottom electrode layer after Fig. 3b.

Page 16 518632

Schematic illustration

A layer of etchable dielectric material FIG. 8 illustrates the manufacturing process of a comprehensive coating as a dielectric layer after FIG. 7. Figures 9a and 9b illustrate the flow chart of the fabrication of the gate layer following Figure 8. Figure 10 illustrates the structure of the cathode plate of the present invention after the dielectric layer is formed by the etched dielectric layer following Figure 9. Figure 2 shows the nano-structure of the present invention. The enlarged picture of the cathode layer and the gate layer of the cathode plate of the carbon tube field emission layer. 1 2 FIG. 12 is a schematic diagram showing an enlarged photograph comparing a cathode layer pattern printed by a screen printing method with a cathode layer pattern combined with the photolithography process of the present invention. Description of drawing number 1 〇 1 cathode glass substrate 1 〇 3 emitter tip 1 0 5 anode 1 0 2 cold cathode 1 〇 4 anode glass substrate 1 〇 6 fluorescent powder 2 0 3 bottom electrode layer 2 0 7 interlayer

Page 17 1 0 1 Transparent substrate 2 0 5 Dielectric layer 2 2 0 9 Nano carbon tube layer 518632 Simple illustration 2 11 Panel 21 3 Transparent electrode layer 2 1 5 Phosphor layer 3 0 1 Photosensitive conductive paste 3 0 3 mask 3 0 5 exposure 5 0 1 photosensitive material 5 0 3 mask 5 0 5 exposure 601 dielectric layer pattern 11 0 1 cathode layer pattern 11 0 3 gate layer pattern 11 0 5 nanometer carbon tube layer 1 2 0 1 Cathode layer pattern printed by traditional screen printing method 1 2 0 3 Cathode layer pattern combined with lithography process of the present invention

Page 18

Claims (1)

518632 Six plates made according to the law show the launching tube carbon meter Fannai II gc- ^ 0 Specially, please include the order in the following steps; the bottom of the table is one or two. The transparent board is based on the transparent cloth and the material is transparently applied. The electrical conductivity of the paddle board is transparent and transparent. The sense of electricity and the electricity of the general can be prepared. The extremely engraved bottom of the dielectric layer can be layered and finished. The micro-layer of the whole process of the upper shadow is grounded with extremely favorable electricity, and the upper is the pole; the gate pattern is shown in the figure. The gate layer is formed into a cloth and coated with a cohesive burnt surface. Li Jie's layer again. The material is made in the material process. 0- The joint layer protection is used as the pole gate of the crime. The figure of the electrode protection layer of the dielectric layer is shown in the figure. Wei Nai constructed a knot of the law of Fan Fanzuoli system, please ask the board Shen Ji as Yin 2 of the tube display tube to show the carbon emission meter Fanai field, the tube, carbon in the upper, \) / meter e The steps should be in the layer electrode-the bottom layer should be in the layer carbon carbon Nai Haigu ° electrophoresis method-use of electricity. The system is based on the law, the law, the law, the law, the system, and the special system, please ask the board Shen Jiru Yin 3 of the device display tube to show the carbon emission meter, the nanometer field, the Λ- / Γ officer, the carbon in the meter e) The above steps should be at ^ ¾ to ^ 3 at the end of the filling tube. The carbon shadow should be used. The shadow should be shimmered. Use the upper layer as the layer electrode. Page 19, 518632 6. Application scope of patent 4. The method for manufacturing the cathode plate of the nano carbon tube field emission display as described in item 1 of the scope of patent application, in this step (e), the nano carbon tube layer is filled Before entering, the money engraving process is to #etch the dielectric layer to obtain a dielectric layer pattern, and burn off the organic material in each layer. 5. The method for manufacturing a cathode plate of a nano-carbon tube field emission display according to item 1 of the scope of patent application, wherein the photolithography process includes pre-baking to define a pattern with a photomask, and performing exposure and development. Handler. 6. The method for manufacturing a cathode plate of a nano-carbon tube field emission display as described in item 1 of the scope of patent application, wherein in the step (e), the nano-carbon tube layer is filled by an electrophoresis method, The electrophoresis method includes the following steps in sequence: (a) a photoresist is fully coated on the cathode plate; (b) the gate pattern is used as a protective layer, and the pattern is defined by registration exposure; (c) ) Electronize carbon nanotubes in the pattern; and (d) sinter the organic material in each layer of the cathode plate in a high-temperature furnace. 7. The method for manufacturing a cathode plate of a nano-carbon tube field emission display as described in item 1 of the scope of patent application, wherein in the step (e), the nano-carbon tube layer is filled by a lithography method. The lithography method includes the following steps in order: (a) coating the photosensitive carbon nanotube material on the cathode plate in full; (b) using the gate pattern as a protective layer and using positional exposure Will pattern Page 20 518632 6. The scope of patent application is defined; and (C) In a high-temperature furnace, the organic material in each layer of the cathode plate is sintered. 8. The method for manufacturing a cathode plate of a nano-carbon tube field emission display according to item 1 of the scope of patent application, wherein in step (b), the photosensitive conductive paste is made of conductive metal powder and resin, a solvent and The photosensitizer is adjusted to a photosensitive paste. 9. The method for manufacturing a cathode plate for a nanometer field emission display as described in item 1 of the scope of patent application, wherein in step (d), the photosensitive gate material is made of conductive metal powder and resin, solvent and photosensitive The agent is adjusted to a photosensitive paste. 10. The method for manufacturing a cathode plate of a nanometer carbon tube field emission display device as described in item 1 of the scope of patent application, wherein in step (c), the dielectric layer material is composed of silicon dioxide, sodium oxide, and oxide. Powder and resin of lithium, lead oxide, or boron oxide are prepared by adding a solvent to a slurry. 11. The method for manufacturing a cathode plate of a nano-carbon tube field emission display as described in item 1 of the scope of patent application, wherein in step (b), the sintering temperature and processing time are about 480 to 5 ° C in an air atmosphere Sintering at 0 degrees for 30 minutes 0 12. Nano carbon tube field emission display as described in item 1 of the scope of patent application 518632 6. The method for manufacturing a cathode plate within the scope of a patent application, wherein the sintering temperature and the treatment interval in step (d) are about 30 minutes at 480 to 560 degrees Celsius in an air atmosphere. 13. The method for manufacturing a cathode plate of a nano-carbon tube field emission display as described in item} of the patent application scope, wherein before step (d), co-sintering is performed on the electric layers, and the organic materials in each layer are sintered. Material burns out. 14. The method for manufacturing a cathode plate of a nano-carbon tube field emission display as described in item 3 of the patent application scope, wherein the sintering temperature and processing time are about ^ sintered in an air-rolled atmosphere at 540 ° C for 30 minutes . 15. The manufacturing method of the cathode plate of the nano carbon tube field emission display field as described in item 6 of the patent scope of Shenyang Patent, wherein the nano carbon tube is composed of 3 to 50 weight percent of the nano carbon tube. Powder and solvent, mixed with dispersant. ° 16. The method for manufacturing a cathode plate of a nano-carbon tube field emission display as described in item 7 of the scope of patent application, wherein the photosensitive nano-carbon powder is 5-30 weight percent of nano-carbon tube powder. And 5 to 30 weight percent of silver powder, and then combined with the photoresist Shanghai. 1 7 · A method for manufacturing a cathode plate of a nano carbon tube field emission display device, which includes the following steps in sequence: The 518632 pattern is burned off as a protective layer to protect the gate pattern. The substrate is prepared with upper and lower surfaces. The bottom electrode layer is completed after sintering on one surface of the transparent substrate. The carbon tube layer is printed on the bottom electrode. A layer of dielectric material is used as the dielectric layer. Surface coating a layer of salt & & said, θ. ^ ^ Layer sense precursor gate and &,., Α to form a gate pattern;, bonding-etching process , The dielectric layer part is etched, and the cathode plate structure is etched. Apply the patent application scope (a) in the mother layer (a) through (b) to photosensitivity, and then (c) use a net to sinter (d) to fully apply (e) to the interlayer material. And (f) using the gate electrode to remove the substrate made of the organic material, coating the transparent conductive paste with a lithography process, and printing a nano pattern on the pattern; a layer of etchable electrical material is placed on top 18-kinds of carbon nanotube field emission display using full lithography process-Transparent: Substrate 1 The transparent substrate is provided with upper and lower surfaces encapsulating: a polar layer with a plurality of flat flat lengths formed on the transparent substrate. A 'strip electrode, which forms a layer of etchable dielectric thunder, and has C, which is formed on the surface of the bottom electrode layer. M IA is a plurality of flat dielectric materials, and the length of the A surface electrode layer is long. The line electrode is perpendicular to the gate electrode, and the gate layer is shaped to be flat with each other. The long line electrode is above the dielectric layer, and has a plurality of vertical crosses, and power is cut off from the long line with the bottom electrode layer at six inches.桎, 乂 form a circle again, every day " 6. Scope of patent application 19. The carbon nanotube field emission as described in item 18 of the scope of patent application. "The cathode plate", where the lines of the horizontal lines of the electrodes of the bottom electrode layer, and the range of the display distance It is 3〇 # m / 3〇 # m ~ 'Milk 20 · The cathode plate of the nano-carbon tube field emission display as described in item 18 of the patent application scope, wherein the line width / space of the horizontal lines of the dielectric layer The range is 30 / zm / 30 // m ~ 300 // m / 5. 2 1 · The cathode plate of a nano-carbon tube field emission display as described in item 18 of the patent application scope, wherein the The circular hole in the gate layer is an opening of 10 to 50 m. 2 2. The cathode plate of the nano carbon tube field emission display as described in item 18 of the scope of patent application, wherein the thickness of the bottom electrode layer is approximately 3. 5 ~ 5. 5 β m 〇2 3. The cathode plate of the nano-carbon tube field emission display as described in item 18 of the scope of patent application, wherein the thickness of the dielectric layer is in the range of about 10 ~ 3. v ^. 2 4 · The cathode plate of a nano-carbon tube field emission display as described in item 18 of the scope of the patent application, wherein the range of the gate layer is about 3 · 5 ~ 5 · 5 // m. 25. The carbon nanotube field emission display 518632 as described in item 18 of the scope of patent application 6. The cathode plate of the scope of patent application, wherein the thickness of the nanometer carbon tube layer ranges from about 3 to 5 // m 26. A nano-carbon tube field emission display array structure is completed by a cathode plate and an anode plate package of the nano-carbon tube field emission display described in item 18 of the patent application scope. I Page 25