TW538143B - Electrochemical treatment device and method for goods - Google Patents

Electrochemical treatment device and method for goods Download PDF

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Publication number
TW538143B
TW538143B TW90133191A TW90133191A TW538143B TW 538143 B TW538143 B TW 538143B TW 90133191 A TW90133191 A TW 90133191A TW 90133191 A TW90133191 A TW 90133191A TW 538143 B TW538143 B TW 538143B
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Taiwan
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contact
goods
cargo
electrolyte
patent application
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TW90133191A
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Chinese (zh)
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Egon Huebel
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Egon Huebel
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/005Apparatus specially adapted for electrolytic conversion coating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/16Apparatus for electrolytic coating of small objects in bulk
    • C25D17/28Apparatus for electrolytic coating of small objects in bulk with means for moving the objects individually through the apparatus during treatment
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • C25D7/0621In horizontal cells
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/12Semiconductors
    • C25D7/123Semiconductors first coated with a seed layer or a conductive layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing of the conductive pattern
    • H05K3/241Reinforcing of the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

This invention relates to a device and a method of electrochemical plating, etching, oxidizing and reducing on goods. The invented device and method can be used to full scale surface treatment and to electric insulation structure treatment of very small scale like as seen in common printed circuit technology. The device comprises a contact electrode (30), which, through the use of transfer arm (16), is tightly pressed onto the goods (1) to be processed cyclically. Therefore, a small battery for electrolytic treatment is formed. During the period of the treatment, there is no relative movement taking place between the goods (1) and contact electrode (30). After the treatment step, the transfer arm will remove the contact electrode so that the goods can be transferred. A smooth transfer will only occur when the contact electrode does not rest on the surface of the goods.

Description

經濟部智慧財產局員工消費合作社印製 538143 8721pif.doc/012 五、發明說明(/) 發明領域 本發明是有關於平坦以及立體的貨物的電氣化學電 鍍’蝕刻,氧化以及簡化處理,該貨物由至少在表面上是 電傳導的材料所組成。本發明的應用,特別適用在當由一 個非傳導材料所組成的貨物,在其表面需要被局部的做電 氣化學處理時。本發明的應用範例包括塑膠窗體(plastic forms) ’ 塑膠板(piastic plate)以及塑膠片(plastic foils)的電 鎪處理,以及空心的貨物,桿,電路板,混合電路(hybrids), 智能卡(SmartCards)和其他基座(substrates)的電解處理。 本發明的裝置和方法,同時也適用在對在電路板中的 盲孔和穿孔做電氣化學處理。本發明適用在沈浸機器 (immersed machines)和具有連續的水平底板輸送的帶型機 器(band machines)和定時機器(clocked machines)的應用。 習知技術 爲了做電解處理,即將被處理的貨物的表面必須是電 性傳導的,而且是可以用一個電流源的電極點(pole)連接 的。電流源的另一個電極點連接到貨物對面的一個電極 (electrode)上面,該電極因此被稱爲反電極(c〇unter electrode) 〇 塑膠零件的電性傳導的上表面,是由一個具電傳導性 的基層板(base layer)的沉積物所提供的,這些沉積物則是 由例如像是化學金屬化(chemical metallizing)或是藉由薇 射的處理所提供的。這些處理都是相當昂貴的。医|此,必 須使具電傳導的基層板可以做到最薄的地步。因爲需要使 4 _______ 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) 0—-----訂---------線. 538143 Λ7 B7 8721pif. doc/012 五、發明說明(2) 用高電流密度,還有其他關於層板的厚度分佈的品質的理 由,在做電鍍處理之前,必須先規定最小的層板厚度。厚 的基層板’例如像是經由連續累積(sequentially built up, SBU)的電鑛處理所產生的板(boards),在其表面上,電解 液的流向會因爲層板的厚度而有很大的差異,甚至會造成 基層板的熔化耗損(melting off)。 另一個問題是發生在對非傳導基座上的電絕緣結構做 電解處理。實際上,這是由化學沉浸所完成的。在技術上 而言,這些處理都是非常複雜,而且電解液的化學成份組 合也是相當重要的。除此之外,電解槽也必須每個禮拜淸 理一次。 因此,大家都試圖去尋找更好的處理程序,以使得電 絕緣結構可以儘可能的有電性接觸,以做爲電解處理之 用,在物體的邊線部分常見的電接觸在這裏是不可行的。 在德國專利申請案編號DE 196 I2 555文件中揭露一種這 種結構的電解處理方法。即將被處理的表面,在藉由固定 而且精細接線’並且具電傳導性的接點電刷(contact brushes) 連續輸送的期間,因爲連續的接觸而被處理。對電解處理 而言,這些接點電刷只是輕微的撞擊表面,並不會傷害貨 物的表面或是電刷自己本身。這些接點電刷傳導處理電流 到這些電性絕緣表面的區域。 相對應的反電極是安置在接近這些電刷的地方。在每< 排電刷和每排反電極之間,也配置有一個提供電性絕緣的 絕緣片(insulating slip)。 5 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 01! —訂---------線丨----------------------- 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538143 8721pif. doc/012 Λ7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(3 ) 在使用這種電刷做電鍍處理的期間’這些電刷自己本 身常常會被電鑛。因爲用過的電解液具有很局的噴射功率 (throwing power),在分隔牆(dividing wall)上最小的滲漏 (leakage)會造成電場通過,使得該些陰極電刷遭到不需要 的電鍍。在一個很短的時間之內,這些電刷因此變的堅硬 而且不能使用。這些電刷必須每隔大約一分鐘就需要被剝 除一次。在每一個單一電刷的外包裝上加上電絕緣的建議 是不切實際的。玻璃纖維加強底板非常尖銳的邊緣,和在 電刷列之下移動的該些底板上面空洞邊緣的絕緣層都會破 壞掉。當精細的電刷纖維本身的製造粗劣時,這種情形也 會發生。這些因此而發生的耗損更會造成品質的問題。 貨物不同的厚度,對於藉由在處理線上讓貨物持續的 輸送的底板處理較佳的方法而言,是相當不利的。介於電 刷和分隔牆之間的距離,至少在貨物的表面上,是取決於 其厚度的。因爲高度的差異,固定的電刷多少會與底板尖 銳的邊緣相摩擦,造成相當程度的損耗。同時也是固定的 分隔牆,無法滿足它們用來隔絕電刷和反電極的功能。這 個剩下來的間隙是相當巨大的。特別是對於很薄的貨物而 言,相較於較厚的貨物,由與分隔牆具有較大的距離因此 造成的間距是不適當的。除此之外,在結構上而言,也是 很難辦到執行精細傳導技術的最小化電刷的安排。 在05-12-88發表的日本專利申請案編號63297588的’ 文件摘要中,揭露了一種類似的電鍍方法。具有電傳導電 刷和陰極電極(cathode pole)的滾筒(roller),會與即將要處 _ __6___ —__ 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) -· 1 i-i I ϋ ϋ n n · I- ϋ ϋ 1 ϋ ϋ ϋ I ϋ ϋ ϋ ϋ H ϋ ϋ ϋ ϋ ϋ I ϋ ϋ n I H ϋ 1· H ϋ ϋ n 1 538143 Λ7 B7 8721pif.doc/012 五、發明說明(y ) 理的表面相接觸。在該貨物和該接觸滾筒的下方有一個陽 極(anode)。貨物透過滾筒的安排,持續的在滾筒上前進, 並且經由這種方法,貨物在電接觸的表面會被電鍍。在同 一時間,較不利的是’該些接觸滾筒自己本身也很容易被 電鍍,因此很快就變的不能使用。因爲這個原因,這種方 法也是不可行的。 在美國專利申請案編號5 114 558案件中,揭露了另一 種對電絕緣表面和電傳導區域做電解處理的方法。藉由使 用一個多孔分隔板(porous separator)的裝置,電刷和反電 極在一個滾筒或是平面上被分隔開來。面對該貨物,而且 從整個排列的側面通過的金屬纖維,在當即將要被處理的 貨物通過時,會接觸貨物的部分。因爲電刷和反電極相當 接近,因此電氣化學處理就會在該分隔格的排列之內發 生。而且從電刷纖維流向貨物表面的電流,與從該貨物表 面所流出的電流,並不會走相同的路徑。因此貨物也不會 有電解處理發生。 德國專利申請案編號DE 43 37 988的文件,揭露了使 用另外一種裝置的發明應用範例,其中該裝置是一個用在 兀整面板(full panels)上面的接點滾筒(contact rollers)。在 表面上已經被氧化的面板,透過由電解該表面即將被處理 的陰極所產生的氫氣,而減少氧化的部分。 發明槪沭 本發明的目的是描述一種裝置的排列(arrangement)和 一種方法,適用於對平坦和立體的貨物做電解處理,並且 __________7 本紙張&度適用中國國家標準(CNS)A4規格(210 X 297公髮) (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 IT---------^—#1---------------------- 538143 Λ7 B7 8721pif.doc/012 五、發明說明(夂) 沒有上述的已揭露的各種發明的缺點。本發明特別適用在 對在全面板(full panel)技術和晶片和混合電路技術中的結 構(structures)和全面板,做電解精密處理。 本發明的目標是經由專利申請項目第1項中所描述的 該裝置的排列和第12項中所描述的該方法來達成。 該裝置的排列基本上是由一個裝置所組成。該裝置至 少由一個,但通常是由若干個接點片(contact strips)所組 成,在該些接點片之間配置有反電極。這裝置是一個組件 (component),在以下的說明中,這個組件會被參考,並且 被稱爲一個接點電極(contact electrode)。有關接點電極的 詳細說明,已經在附隨的德國專利申請案編號DE 100 43 816.4中詳細揭露及說明。 被接點片接觸的該貨物的表面和該反電極,會形成一 個電解rtt(electrolytic cell),該電解細胞在以下的說明 中,會被參考並且被稱爲一個電解小眺§^(electrolytic small cell)。在電鍍該貨物以及還原該貨物的電解處理時,該貨 物的接觸表面會形成該小細胞的陰極,而反電極會形成該 小細胞的陽極。在蝕刻及氧化時,該貨物的表面會形成陽 極,而反電極會形成陰極。本發明一般適用於在電解液中 可熔解或不可溶解的反電極。如果反電極被當成陽極使 用,則較偏好使用不可溶解的陽極。 接點片從該表面的側邊直到實際接觸的表面的部分,-多少是具電性絕緣的。該接點電極的該些接點片是互相平 行連接的,並且連接到一個電流源的第一個電極點。同樣 _________8_ ___ —本紙張尺/Ϊ適用中國國家標準(CNS)A4規格(210 X 297公釐) ' (請先閱讀背面之注意事項再填寫本頁) #• — 1-----訂---------線· 經濟部智慧財產局員工消費合作社印製 538143 Λ7 B7 8721pif.doc/012 五、發明說明(L ) 的,反電極也是互相平行連接的,並且連接到該電流源的 另一個電極點。適合使用的電流包括直流電流,單極脈衝 電流和雙極脈衝電流。在以下的說明中,這些脈衝電流將 通稱爲電流。 如果即將被處理的貨物是板狀的(平坦的),則該接點 電極的表面,也就是該貨物即將被處理的那一面,也是平 坦的。當貨物是立體狀時,則該接點電極能動的那一表面, 就會被調整成適合於該貨物形狀的表面。中空的貨物被視 爲一種立體的貨物處理。在對平坦狀的貨物做部分的電解 處理時,接點電極會部分的被調整,以搭配相對應的接點 片和反電極。與傳輸方向呈橫向配置的接點電極,一般是 儘量與貨物的寬度相等。因爲貨物有各種不同的寬度。該 接點電極的寬度可以藉由開啓或是關閉該接點電極的群 組,或是藉由遮蓋該貨物的寬度,而達成與貨物的寬度相 等的目的。 接點電極複附著到一個機件運作的移動臂(motion arm) 上。該移動臂將該接點電極壓到該貨物的表面之上。經由 這種方法,接點片就會被緊密的平貼在即將被處理的表面 上面,並且製造電性接觸的機會。重要的是,在接點電極 和貨物接觸的期間,在接點電極和貨物之間,不能有任何 因爲移動所造成的相對運動。藉由接點電極的迫近 (approaching)和在該貨物上所放置的接點片,也就是說, 經由鎖定該接點電極,適當數量的特別配方的電解液會被 灌入到電解小細胞中。在該貨物和該接點電極相對固定的 ___ _______________ 9 ________ 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 -1 A___wr_____— — It---------蓮 ---------------------- 經濟部智慧財產局員工消費合作社印製 538143 8721pif.doc/012 五、發明說明(9 ) 條件之下,該電解處理,亦即部分的處理,也就會發生。 在一段時間之後,這時間是由該程序(process)來決定,該 移動臂會打開該接點電極,也就是從該貨物的表面上提起 來。在同一時間,一個由程序所決定的平緩的相對的前進 就會發生。也就是說,該貨物或是該接點電極就會向前傳 動。經由這些傳動的移動,貨物的表面區域中,總是有新 的區域被接點片所覆蓋,並且有另外的部分被釋放開來。 該貨物在機器上傳送的期間,或是在機器中開啓的接點電 極在該貨物上面平緩的移動的時候,所有的表面區域,都 會因爲有不斷的新的位置被接觸,使得貨物的每個部分, 都可以被以統計上相同的時間長度做電解處理。 藉由接點電極的開啓,在電解小細胞中的電解液會被 交換,而且在電解過程中產生的任何氣體在此時會被釋放 出來。經由接點電極的開啓和關閉,在貨物上面會產生一 個電解液中的流體力學壓力(hydrodynamic pressure)。如果 在貨物中有空洞,舉例來說,空洞是在平板中,在洞中同 時也會產生一個壓力來替換電解液。 藉由使用該移動臂裝置,接點電極會循環的被開啓和 關閉。處理步驟和前進步驟的週期時間是由各別的程序所 決定的。因此電解處理有可能使用小從每個週期幾個毫 秒,或大到每個週期好幾分鐘,例如像是從10毫秒到一 個小時。每個週期輸送的長度,則是取決於各種不同的機' 器類型,從〇·1毫米到3毫米都有可能。連續運轉式機器 (continuous running machines)和沈浸式機器(immersion ____10 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) (請先閱讀背面之注意事項再填寫本頁) -i I I I I I I ^---------· 538143 Λ7 B7 8721pif.doc/012 五、發明說明(幺) machines)的前進速度,通常多是在比較低的範圍之內,而 滾筒到滾筒工廠的前進速度,通常都是在比較高的範圍之 內。一個操縱和同步的裝置被用來協調各自的步驟,例如 像是該移動手臂的移動和該貨物的前進步驟,以及當成定 時開啓或關閉電流的裝置之用。 1 在注滿電解液的電解槽中,配置有一個或是若干個接 觸電極和移動臂。在本發明的第一個實施例中,接點電極 是被包裝在低於液面水平的貨物之中。幫浦則是用來在〜 個I迴路之中’將電解液流過該電解槽,再流過該配方裝置 輸送,例如像是流過過濾器,冷卻,加熱,定量配方。在 另一個實施例中,該特別配方的電解液,藉由使用一個幫 浦’在壓力之下’經由接觸電極的電解液入口,被輸送到 小細胞之中。在這種情況下,高於或低於電解槽中電解液 的液面水平的部分都有可能被處理。電解液是經由接點電 極,或是經由其它電解液的出口,在側邊流出。電解液可 以連續性或是間斷性的被導入。 輸送帶裝置將貨物輸送到電解槽中,或是從電解槽中 輸送出來。在電解槽中貨物的移動,也有可能是藉由這種 輸送裝置。然而,在電解槽中貨物的移動,也可能是藉由 使用另一^ 種问步輸送系統(synchronized transport system)。 輸送帶裝置(conveyer apparatus)和傳送裝置(feed apparatus) 各種不同的形態’是由電解處理機器的各種不同種類所決-定的,例如像是連續運轉式機器或是沈浸式機器。 貨物的電性接觸,電解小紙胞的形成,以及貨物的電 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公髮) Γ请先閱讀背面之>i意事項再填寫本頁) -----訂---------線. 經濟部智慧財產局員工消費合作社印裂 538143 Λ7 B7 8721pif.doc/012 五、發明說明(1 ) 性接觸解除(opening),都是在電流被開啓時發生。但是開 啓和/或解除,也有可能是在沒有電流的時候發生,而且 電流源只有在處理步驟的期間被開啓。電氣或是電子開關 裝置,在適當的時間點開啓或是關閉該電流源。 此方法的各個步驟的同步,例如像是移動臂的步驟, 都是藉由使用一個控制裝置來達成的。一個可能的方法, 會設計接點片在沒有電流的時候接觸接點電極,並且在沒 有電流的時候再一次的釋放它們。當接點電極被釋放時, 對於開啓具有相反的電極點的電流源而言,是相當有利 的。任何金屬沉積物,例如像是在接點上的絕緣缺陷點, 因此也會被電解性的蝕刻。電流的密度在兩個不同的極性 上面也是不同的。 操作模式,電流源的電壓穩定器(voltage stabilizer)或 是電流穩定器(current stabilizer),在各自的極性上,都可 能是相同或是各自不同的。這兩種操作模式都可以被各自 的使用在實際的電解處理程序中。當移動臂具有小到幾秒 鐘的周期時,就應該要使用電子式的電流源,或是最少要 使用電子式的開關裝置。對於較長的時間週期而言,也可 能使用電子機械式(electromechanical)的開關裝置。 在一個電解加工處理的機器中,根據本發明,會具有 一個或若干個裝置的部分組件。對於平坦貨物而言,最少 有兩個接點電極被配置在互相面對的地方,以在貨物的兩' 邊執行電解處理。這種方法對於具有小穿孔的印刷電路板 的電解處理,已經被証明是特別有用的。電解液藉由使用 ___ 12____ 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) .參i:——訂---------線· 經濟部智慧財產局員工消費合作社印製 538143 8721pif.doc/012 Λ7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(to) 一個幫浦,被從電解液入口,擠壓到其中一個接點電極的 小細胞之中。在貨物的另外一邊,卻是藉由一個幫浦,從 電解液出口,再一次地把電解液吸出。用這種方式,令人 驚奇的是,可以相當成功的精確的產生在空洞中流動所需 的抽空(underpressure)和超壓(overpressure),並且直接提 供給即將要處理的表面使用。除此之外,這個電解處理的 重要效應,也可以由相對比較而言較小數量的循環電解液 來達成。在貨物兩邊同時發生的電解液的加壓和抽取動 作,是與移動的步驟相同步的。這種處理的方式的接點電 極,可以在電解槽中電解液液面的上方或下方。而推動電 解液流到小細胞的動作也可以是間斷的,也就是說,這個 動作可以是間斷或是連續的。 對於並不是完全平坦的貨物而言,金屬的粗大的接點 (metallic massive contacts)有可倉g並沒有妥善的安置在整 個貨物的表面之上。當在平板上使用防焊漆(solder resist paint),以及具有比油漆的厚度還深的電性絕緣結構要被 接觸,而且要做電解處理時,同樣的問題也會發生。在這 些情況下,接點則是由一種彈性的,而且具電性傳導的材 料所製成。 像這樣的材料是由例如像是矽(silicon)所組成,這種矽 材料可以藉由一種金屬傳導的塡充材料,例如像是金屬粉 末來補償。彈性的接觸片,將它們自己本身調整的非常好,-以適應即將被處理的表面的個別的不平均性。彈性的金屬 片,特別是以像梳子一樣的槽口的方式設計時,會以同樣 __ 13 (請先閱讀背面之注意事項再填寫本頁) φ I I n I ϋ ϋ ϋ ϋ I -I ϋ ϋ I I n I I n n 本紙張尺度適用中國國家標準(CNS)A4規格(210x297公釐) 538143 8721pif.doc/012 Λ7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明) 的方法,跨接在即將要處理的表面上的各種不平均表面上 面。 經由接點電極的開啓和關閉的動作,造成電解液不斷 的流動,提供電解小細胞調整其尺寸的機會,以適應實際 的電解處理的需求。在小細胞中並不需要大量的電解液。 這意味著接點片之間的距離,相較於即將要被處理的結構 的尺寸而言,可以被保持的非常的小。因爲在電解處理期 間,藉由穩定的接點,接點電極可以穩固的固定在貨物之 上,同時因爲貨物和表面之間並沒有相對的運動,所以可 以保持非常小的接點電極到表面之間的距離,使得不會有 電短路的現象發生。對接點和反電極的微小化而言,並沒 有任何結構上或是技術生產上的限制。可以選定小於一釐 米的最小距離和尺寸。在較偏好被以與貨物的移動方向橫 斷安置的接點片之間的小距離,具有一種效應’這種效應 造成在貨物移動方向的處理線上的部分,當它們在橫向移 動時,或是在有斑點的區域,都會受到或多或少相同時間 的電解處理。接點電極和貨物的表面之間的小距離’具有 一種效應,這種效應造成被大的絕緣面積所圍繞的非常微 小的區域沒有辦法產生峰値,因此這些部分也沒有辦法得 到均衡的電解處理。當使用一種雙極脈衝電流來取代直流 電流,特別是在做結構,空洞,和盲孔的表面電鑛處理時, 可以更加加強電鍍處理的精密度。在對具有控制阻抗 (controlled impedance)的結構做電解處理時’疋:更加需要 這種精密度的。 C請先M讀背面之注意事項再填寫本頁) # 訂---------線. 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538143 Λ7 B7 8721pif.doc/012 五、發明說明(丨上) 在接觸片之間的小的距離對相當細微的層板,例如像 是塑膠電鎪,做電解處理是相當有利的。在電鍍的區域中, 亦即在對微小結構形狀的物體做電鍍處理時,較偏好使用 擴散性的化學傳輸方法,這是因爲藉由對流(convection)所 產生的傳輸,會在電解率上產生一個很大的局部差異,特 別是在邊緣的部分。根據本發明,使用封閉接點電極,並 且不用注入額外的電解液,在電解處理期間,在實際上並 不存在電解液的對流。材料的傳輸是藉由擴散來達成的。 電解液會注滿在平板上的盲微通孔(blind micro vias),因 此可以造成很好的電鍍結果。這種方法同時也適用於具有 控制阻抗的精細生產線。在這裏同時也支援擴散控制的處 理,在這個範例中,可以避免在貨物表面上技術性產生的 電解液急劇湧出(sharp flood)。經由這種方法,一個較厚 的層流(laminar flow)會被保存在貨物的表面,在藉由離子 (ions)擴散的期間,這個較厚的層流會被克服。使用這種 方法,結構和空洞可以被更加平均的處理。 爲讓本發明之上述和其他目的、特徵、和優點能明顯 易懂,下文特舉一較佳實施例,並配合所附圖式,作詳 細說明如下。 圖式之簡里說明: 第1圖繪示一個具有小細胞基本結構的接點電極的部 分的截面圖; - 第2圖繪示一個根據本發明,由在截面圖中所顯示的 接點電極所組成的裝置,以及屬於該裝置,用來實現本方 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公餐) -------------ti-----訂---------線蜂 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 538143 87 21pif. doc/012 Λ7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明(β) 法的裝置組件; 第3圖繪示一個在側面圖中顯示的接點電極的細部 圖,並且同時顯示在六個步驟中的基本方法; 第4圖繪不一個在第1圖中所繪式的該接點電極的簡 化圖,包括繪示在第2圖中,屬於該裝置的裝置組件,本 圖將被當成以下第5圖到第10圖的總圖; 第5圖繪示一個電解機器,用來對圓盤狀貨物,例如 像是混合電路做電解處理,以及所伴隨的轉動-時間圖; 第6圖繪示一個電解機器,用來對在滾筒上間斷性傳 動的帶狀的貨物做電解處理,以及所伴隨的路徑-時間圖; 第7圖繪示一個電解機器,用來對在接點電極上連續 通過的帶狀貨物做電解處理,以及所伴隨的路徑-時間圖; 第8圖繪示一個電解機器,用來對側面圖中所顯示的 水平移動的平坦貨物做電解處理,以及所伴隨的路徑-日寺 間圖, 第9圖繪示一個電解機器,用來對截面圖中所顯示的 以垂直的方向通過機器的平坦貨物做電解處理,以及所伴 隨的路徑··時間圖; 第10圖繪示一個電解機器,用來對沈浸在電解槽中的 平坦貨物做電解處理,以及所伴隨的移動-時間圖; 第11圖繪示本身形狀被調整成適應貨物形狀的接點電 極在截面圖中的各個截面; - 第l2a圖繪示一個接點電極的細部圖,其中該接點電 極是使用一種彈性的金屬片,或是一種已經貯存絕緣內裡 (請先閱讀背面之注意事項再填寫本頁) 0 訂---------線· 本紙張尺度適用ΐ7國國家標準(CNS)A4規格(210x297 '— 538143 8721pif.doc/012 〜 --------------- B/ 五、發明說明(丨4 ) (lining)的金屬電刷; 第l2b圖繪示一個接點電極的細部圖,其中該接點電 極是使用一種具有彈性鑲嵌物(inlay)的金屬接點; 第l2c圖繪示一個接點電極的細部圖,其中該接點電 極是使用一種具有彈性絕緣內裡的彈性而且具電性傳導的 接點材料; 第12d圖繪示一個接點電極的細部圖,其中該接點電 極是使用一種剛性的接點材料和一種剛性的絕緣材料; 第13圖繪示一個具有傾斜的彈性接點片的接點電極, 該接點片跨接在即將要處理的貨物表面上很大的不均勻的 表面上; 第14圖繪示電流源到接點電極的連接情形,該連接情 形具有三種可能性:開啓,關閉,或是具有保留電極點的 開啓; 第15圖繪示電解液輸入和流出小細胞的一個接點電極 的截面圖,以及該接點電極的細部圖。 標示的之簡單說明: 1 貨物(goods) 2 電傳導層(electrically conductive layer) 3 接點片(contact strip) 4 接點(contact) 5 接點絕緣(contact insulation) 6 主裝置(main unit) 7 反電極(counter electrode) _____17___ 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公釐) C請先閱讀背面之注意事項再填寫本頁) 訂--- 經濟部智慧財產局員工消費合作社印製 _ I I _______________________ 538143 Λ7 B7 8 721pif. doc/012 五、發明說明(丨() 8 電導體(electrical conductor) 9 小継通(small cell) 10 電解液入口(electrolyte inlet) 11 電解液出口(electrolyte outlet) 12 電流源(current source) 13 電解液入 口管道(electrolyte inlet canal) 14 電解液共同入 口管道(electrolyte common inlet canal) 15 電解液出 口管道(electrolyte outlet canal) 16 移動臂(motion arm) 17 移動方向(feed direction) 18 力量質量(force mass) 19 移動裝置(feed device) 20 處理槽(process tank) 21 輸送裝置(transport apparatus) 22 振動器(vibrator) 23 控制單元(control unit) 24 電解液循環(electrolyte circulation) 25 幫浦(pump) 26 過濾器(filter) 27 劑量供給裝置(dosing unit) 28 電解液(electrolyte) 29 共同出 口通道(common outlet channel) 30 接點電極(contact electrode) _______18_ 本紙張尺度適用中國國家標準(CNS)A4規格(210 x 297公爱) --------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 538143 8721pif.doc/012 五、發明說明(Lb ) 31 鉗位裝置(clamping device) 32 處理區域(process area) 33 收集槽(collecting tank) 34 馬達(motor) 35 鉗位裝置(clamping device) 36 貨物運載工具(goods carrier) 37 凹槽(grooves) 38 絕緣片(insulation strip) 39 接點片(contact strip) 40 弓架(bow) 41 楔形接點(wedge shaped contact) 42 彈性材料(elastic material) 43 電子或者電氣機械開關(electronic or electromechanical switch) 44 輸送帶滾筒(conveyer roller) 鮫佳實施例 本發明的一個較佳實施例,將以參考所附圖形的方式, 在此之後詳加說明。在爾後的說明和圖形中,相同的參考 號碼被用來指定相同的或是類似的組件,所以對相同或是 類似的組件的重覆的說明將被省略。 第1圖繪示即將被處理的貨物1,該貨物1至少具有 在表面上的一個即將要做電氣化學處理的電傳導層2。這^ 個傳導層有可能覆蓋整個表面,也有可能是架構成,或是 由若干個電絕緣區域所組成。在貨物中有可能有盲孔和/ _____ 19 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注咅?事項再填寫本頁) 訂------- ——線----------------------- 538143 Λ7 B7 8721pif.doc/012 五、發明說明(1) 或穿孔存在。即將做電解處理的表面2,是藉由至少一個 接點片3做電性接觸的。在圖面中垂直延伸的接點片3是 由在兩邊的一個接點4和一個接點絕緣5所組成。接點絕 緣5除了在真正接觸的表面之外,會完全的覆蓋接點4, 其中真正接觸的表面是位於電傳導層2之上。接點片3被 附著在主裝置6上。在兩個接點片之間有一個電傳導反電 極7存在。在每一個主裝置6上面,通常有很多個接點片 3和反電極7,舉例來說,每一個主裝置上有可能各有2〇〇 個之多。這些接點4和反電極7是藉由使用電導體8的裝 置,各自的在絕緣的主裝置6上面連接。所有的接點4都 是連接到電流源12的一個電極點。另外一個電極點則接 到反電極7。在第1圖中所繪示的極性,代表當貨物執行 電鍍處理,或是反電鑛處理時所使用的極性。電傳導層2 和反電極7形成電解小細胞9。額外的電解液可以經由電 解液入口 10,被引導流入小細胞9中。這個流動會通過接 點片3和反電極7,並且在側邊再一次的從小細胞中流出。 爲了增加這個流動,這個額外的電解液也可以經由電解液 出口 11,被引導流出小細胞。附著在主裝置6上的接點片 3和反電極7則形成接點電極30 ° 第2圖繪示接點電極30在一種排列之內的安排程序。 接點電極是由一個移動臂16所傳動。這個移動臂可以將 接點電極30從該貨物1上面提起,並且再一次的接近該· 貨物1,以將該接點電極30壓到該貨物1上面。和在提升 位置的接點電極在一起,也有可能是順著傳動方向箭頭n C請先閱讀背面之注意事項再填寫本頁} 經濟部智慧財產局員工消費合作社印製 _____tl_________ft_______________________ 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538143 Λ7 B7 •步 8721pif.doc/012 五、發明說明(j ) 向前行進一步,或是逆著傳動方向箭頭17向後倒退 接點電極從貨物上被提起,或是接近對該貨物,是經由接 點電極的一個直線或是擺動的移動而達成的。擺動會增加 電解液的擴散。接點電極30壓製在貨物1上面,對—個 平坦貨物所開展的固定的質量而言,獲得一個反作用力。 這個質量將被參考爲力量質量18。當貨物1的兩邊同日寺被 處理時,另一個接點電極30就會替代該力量質量18。貨 物1藉由在槽20中的傳動裝置19,緩慢地向前移動。在 槽20的外面,則安置有一個或若干個的輸送裝置,這 些輸送裝置21將該貨物1輸送到該槽20,或是從該槽20 輸送出來。振動器22會在主裝置6上面工作的電解液中 製造一個推力,尤其是在處理具有小空洞的貨物時。接點 4和反電極連接到電流源12,以供給電流到電解小細胞9。 所有移動的模式,都是由一個以虛線所表示的控制單元23 控制和指揮的。 電解液以循環路線24在該槽20中流動。這個循環路 線24包括一個幫浦25,一個過濾器26,和一個用來做電 解液配方處理的劑量供給裝置27。在槽20中的電解液28 的液面高於該接點電極30。但是電解液也可以由幫浦25 ’ 直接注入在第2圖中沒有顯示的小細胞9中。在這個範例 中,空的容器20只是當成一個電解液的收集槽使用。在 容器20中的開口(openings)並沒有繪示在本圖或是以下的 附圖中,貨物1會經由這些開口進入電解槽中,或是離開 電解槽。舉例而言,這有可能藉由操縱設備,發生在Μ谷 21 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱) -------------· ·!訂---------線伞 C請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 538143 A7 B7 8721pif.doc/012 五、發明說明(d) 器的邊界上。也有可能以相同的方式,經由槽璧的裂縫’ 發生在連續輸送的機器中。這些裂縫可以使用正常的封裝 滾輪來密封。所有的各種電氣開關和反轉開關都必須包括 在代表電流源12的符號中。 第3圖繪示一個在側面圖中顯示的接點電極的細部 圖。視圖A到F繪示根據本發明的方法的個別步驟。在步 驟A中,接點電極30是在一個沒有貨物的槽中,其中該 槽並未繪示在附圖中。在步驟B中,即將接受處理的貨物 1被放置在該接點電極30的前方。 在步驟C中,該接點電極30相對的稍微靠近該貨物1 ° 這個貨物的靠近,可以是經由該接點電極30的向前推進 (propulsion)所達成的。附圖中的虛線箭頭顯示這個動作。 接點電極30和貨物1也可以同時互相的向前靠近。但較 偏好的是,接點電極30可以藉由一個移動臂,以延伸箭 頭的方向,向貨物1移動靠近。在步驟D中,接點電極30 被穩固的放置在貨物1上。經由這個動作,接點4的接觸 表面被穩固的壓在貨物1的電傳導層2上面,因此達成_ 接觸的目的。在每個反電極7下方,會形成電解的片狀的 小細胞9。步驟D是實際的電解處理。在步驟E中’接點 電極30和貨物1互相退回,而且在這個時候,在該接點 電極30的前方,電解液會開始交換。在步驟F中,貨物1 是以移動動作的箭頭方向被輸送。接下來,會再重覆步驟C 及其以下的步驟。這些接點電極30的移動和處理的步驟 會被不斷重複,直到該貨物的處理結束。接下來’貨物會 22 __— 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) -#il-----IT---------率 經濟部智慧財產局員工消費合作社印製 538143 Λ7 B7 8721pif.doc/012 五、發明說明(/ ) 被從槽中取出,或是使用一個平緩的輸送通路將貨物移 出。 (請先閱讀背面之注意事項再填寫本頁) 本方法包括下列步驟: 接點電極30和貨物1的相對靠近; 將接點片3放置在即將被處理的貨物的表面上; 在用來做電解處理的表面上停留相同的時間; 在貨物和接點電極30之間沒有相對的輸送移動; 接點電極30從貨物1的表面上被提起,以及接點電極 30和貨物1互相退後; 第3圖繪示對貨物的一邊做處理時,接點電極相對於 貨物的新位置。如果有兩個接點電極被安置在互相面對的 位置,就可以在同一時間對貨物的兩邊做處理。因此本發 明的所有步驟,接下來都可以在貨物的兩邊同時,或是按 照一定的秩序執行。 第4圖在最上方繪示一個在接下來的附圖中通用的符 號。長方形代表具有所有控制裝置組件的一個接點電極30 的簡化版。在附圖中沒有顯示的電流源是連接到標示爲+ 和-的電路連接。虛線則是用符號代表接點片3和反電極7。 經濟部智慧財產局員工消費合作社印製 第5圖繪示對盤狀貨物的電解處理的佈置方案。貨物 1藉由使用一個圓柱狀的鉗位裝置31,被夾在力量質量18 上面。鉗位裝置31的內部形成可以被充滿電解液的工作 區域32。外容器被當成整個佈置方案的一個收集槽33使 用。馬達34以步進的方式,相對於接點電極30的移動, 帶動貨物1轉動而移動,但是這個動作只有在接點電極30 _ 23 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)~ Λ7 B7 8721pif.doc/012 五、發明說明(4 ) 並未與貨物1接觸時才會發生。這些角度性的步進移動, 可以再進一步的被一個漸進性的線性移動所取代。這個線 性的移動在兩個方向交替地發生。第5圖繪示馬達34開 啓和關閉切換時間的圖形。電解處理就發生在這兩個切換 的相位之間。 第6圖繪示對帶狀貨物的兩邊做電解處理的佈置方 案。貨物1依照箭頭的方向’從一個滾筒被漸進的輸送到 下一個滾筒。在第6圖中所繪式的方法/時間圖’以一個 虛線箭頭顯示這個步進移動。移動臂16將接點電極提 起和放下,以執行貨物1的輸送步進的動作。在這個輸送 動作之後,它們會再一次的被放到同樣的位置’並且繼續 執行處理。 第7圖中的佈置方案繪示一個可以連續輸送貨物1的 帶狀機器(band machine)。移動臂16執行趨近貨物1的垂 直的開放或是關閉的移動,並且也會負責執行與輸送方向 相同,相反,或是與貨物平行方向的額外的輸送移動°在 移動臂旁邊的四個箭頭代表這個動作。在電解處理期間’ 封閉的接點電極30與貨物1會以與”飛輪鋸”(flying saw) 類似的當方式,但是確保在貨物1和接點電極3〇之間並 沒有相對移動發生的情況之下,移動一個很小的距離°在 這個移動之後,移動臂16會將接點電極30從貨物1上面 提起,並且以與輸送相反的方向彈回,以將接點電極30 再次的壓到貨物1上,並移動它們。這個步驟被循環的重 複。所有的移動速度都是互相協調而且同步的。接點電極 ______2 4 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公® ) --------------------訂---------^ —A_w« (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 538143 8721pif.doc/012 Λ7 B7 五、發明說明( (請先閱讀背面之注意事項再填寫本頁) 的寬度較偏好與將處理的皮帶的寬度相同。如果貨物的寬 度比接點電極的寬度還窄,則一個電氣絕緣的平坦遮覃, 就會被用來遮蓋接點電極沒有使用的部分。這個遮覃也會 以相同的方式,使用在本發明的每一個其他的應用範例 中。 在輸送方向上的接點電極的長度,是由輸送速度和所 需的暴露時間所決定的。如果要增加容量的話,可以使用 一個具有很多接點片的很長的接點電極3 〇,舉例來說,有 可能有1公尺的長度。在此時所需要的接點片的數目,是 由絕緣結構的尺寸所決定的。在例如像是智能卡的精密技 術中’在輸送方向的小細胞之間的距離,較有利的是使用 像是一毫米的微小距離。在一個電解機器中,在貨物的輸 送方向上,可以使用很多個接點電極30以增加輸出。它 們之間是如此的互相同步的,使得在表面上統計分佈均勻 處理的目標可以達成。 根據第6圖和第7圖的裝置,是相當適用於對具有絕 緣的電導體結構,例如像是平板薄片或是智能卡的連續性 塑膠薄板,做電解處理之用。 經濟部智慧財產局員工消費合作社印製 第8圖繪示一個以側面圖顯示的平坦狀貨物,例如像 是平板的水平連續運轉機器的簡化圖。移動臂16開啓和 關閉接點電極30。在圖中未顯示的驅動機構,在每個處理 步驟之後,藉由滾筒裝置移動該貨物1。在第8圖中的匾 形繪示輸送的步驟。在第8圖中同時也繪示一個在整個佈 置方案中的垂直連續運轉機器,除了處理槽20被轉向90 _— ________ 25 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538143 B7 8721pif.doc/012 五、發明說明(M ) (請先閱讀背面之注意事項再填寫本頁) 度之外,其它的部分皆與前述圖形相同。在這個範例中, 圖形顯示的是一個上視圖。貨物1藉由簡單輕便的輸送裝 置所導引,在這裏與技術標準不同的是,並不需要輸送電 流。第9圖中繪示另一個垂直連續運轉機器,以及適當的 路徑-時間圖。由馬達所驅動的滾筒’逐漸的將平坦貨物1 移動接近到圖上的平面。具有一個根據細部圖的輪廓的上 和/或下驅動傳輸滾筒44是可以適用的。 第10圖繪示一個位在具有處理槽20的沈浸機器中的 裝置。藉由使用鉗位裝置35,平坦貨物1被固定在貨物運 載工具36上。與只適用於所有覆蓋表面的貨物的習知技 術不同的是,鉗位裝置35和貨物運載工具36可以由一種 電非傳導材料組成,因此製造成本低廉。可以提供體積小 而且輕便簡單的傳輸器,所以可以使用更小並且更經濟的 機器’以提升機器的生產力。 經濟部智慧財產局員工消費合作社印製 移動接點片30的移動臂16已於上述說明。在箭頭方 向的貨物移動,可以被開啓或關閉,以確保在每個步驟中, 在貨物1上會有令人滿意的平均分佈的接點電極30電鍍。 在這個裝置的範例中(就像在所有其他的實施例中),藉由 沒有顯示在附圖中的導引元件,貨物可以與開啓的接點電 極保持一個距離。第1〇圖再一次的繪示適當的移動-時間 圖。貨物的處理與會發生在這些移動之間。 第11圖繪示一個立體狀的接點電極30的詳細截面圖 它被完全的調整成適合於貨物1的外形。因爲這種設計, 就可以避免那些在電解處理時,因爲兩者之間有很大差異 26 本紙張尺度適用中國國家標準(Cns)A4規格(21〇 X 297公釐 538143 Λ7 B7 8721pif. doc/012 五、發明說明(yf ) 所產生的電氣峰値。貨物的形狀也可能是中空的。如果只 要執行部分的處理,則接點電極被設計成,只要部分的接 點片調整成適合相對應的角度的表面區域即可。其中一個 範例是只在側邊上要鍍金的接點接頭的平板。 第12圖繪示附著到主裝置的接點片的四種可能的形 式。它們是以截面的方式顯示在圖中,並且延伸進入圖中 的平面。在圖中右方繪示的沒有貨物1的個別的接點片3 上面,以圖解說明接點片的彈性和移動性。第12a圖繪示 一個特別適用於接點電極30生產的精密機器的方法。長 延伸凹槽37被設計成深入金屬主裝置6的內部,這個凹 槽同時也會在兩個接點片3之間,形成反電極7。例如用 塑膠材料所製成的絕緣片38被推進到凹槽37中。一個剛 性,彈性和/或是一個梳子狀的槽口接點片39,以同樣的 被推入到每個凹槽中。 在第12b圖中,剛性的楔形接點41已經被推入到絕緣 片31之中。藉由使用一個彈性材料42,接點被強加以彈 力。這個彈性材料42在同一時間也是電傳導的,並且提 供電性連接給在端末側邊的所有接點41。在透視圖中,楔 形接點可以是由很多個很短的,很薄的楔形金屬片 (platelets)累積而組成的,這些金屬片藉由使用一種傳導的 彈性材料而有電接觸。藉由使用這種方式,即將要處理的 表面高度上的差異可以被處理的很好。 因爲平板化學和實際的電鍍方法也可以被使用在生 產’在第12 c圖和第12 d圖中的接點電極,同時也適用方々 27 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注咅?事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 ··------- — 訂---------線 ----------------------- 538143 Λ7 8721pif.doc/012 β7 五、發明說明(/() 接點片和反電極的小型化。這樣的範例包括在晶片技術, 混合電路技術,和印刷電路板技術中的層板裝配技術,以 及液體電鍍的方法。在第12c圖中,經由磨碎(milling), 蝕刻(etching),侵鈾(eroding)或是固態雷射切割,凹槽37 已經被裝在主裝置6之中,以容納接點片。舉例來說,與 接點絕緣在一起的接點4,被裝入到該凹槽中,並且使用 黏劑或吊鉤固定住。接點4 一個彈性且具電傳導的材料所 組成,這個材料調整它自己本身的外形,以適應將被處理 的貨物表面的不均勻性。接點絕緣5延伸到接點4的接觸 表面。接點4在其末端是互相的電性連接到主裝置6。各 自搭配或不搭配後續的機械處理,經由噴出(squirting), 噴射(praying),灌注(pouring)和塗覆(coating),接點絕緣5 和接點4也可以用若干個步驟直接的裝到凹槽之中。主裝 置6在接點片3之間會形成反電極7。 在第12d圖中,由例如像是金屬材料的剛性物質所組 成的接點片3,附著在主裝置6上面。接點電極適用於彈 性貨物的處理,藉由一個彈性的中間層,該彈性貨物被從 反面壓到該剛性的接點電極的表面之上。 第13圖繪示一個具有傾斜而且具彈性的接點片3的接 點電極。這些梳子狀的槽口或是連續的金屬片,在一個不 均勻的表面上,可以被擱置的相當好。在此圖中,電解液 入口 10象徵性的代表很多通過反電極7的小穿孔。垂直 看入此圖中,同在一條線上的電解液入口 1〇和電解液出 口 11會改變,或是只有電解液入口 1〇存在。相同的情形 ____ 28 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 -0———訂---------線-擎---------------------- 經濟部智慧財產局員工消費合作社印製 538143 8721pif.doc/012 β7 五、發明說明(乂) 也會發生在所有其他形式的接點電極30的入口和出口。 第14圖繪示一個經由一個電導體8,將電流源12連 接到接點電極30的連接路線。在這個電路中已經加入了 電子式或是電氣機械式的開關43。用這種方式,一個控制 裝置會控制切換接點電極的陽極和陰極各自的開啓和關 閉。各自的運作模式是由在那個時間所發生的電解處理的 移動以及處理步驟所決定的。 第15圖繪示一個在處理期間,可以增加在小細胞中的 電解液交換的接點電極。爲了容易說明起見,此圖顯示的 是一個沒有蓋的上視圖。經導入流過在反電極7中的穿孔 10的電解液,可以增加電解液的交換。在主裝置6上的所 有電解液入口 10是互相連接的,電解液流經電解液入口 管道13和共同入口管道14,並且藉由彈性管(圖中未顯 示),連接到一個電解液幫浦。小細胞中的電解液排出動 作會發生在主裝置6的末端。藉由在主裝置6中建立一個 電解液出口 11,並且使電解液流經反電極7,可以更爲增 加電解液的交換,而且可也以達到排出氣體的目的。電解 液可以從追些小細胞,流經這些穿孔而排放出來。藉由使 用共同出口管道29,電解液出口 11可以藉由另一個出口 15,與電解液入口 15結合在一起或是分開。一個藉由彈 性管連接到接點電極的幫浦(圖中未顯示),可以產生一個 流過小細胞9,而且強度可以調整的壓迫電解液循環。一 個相對而言較長時間的處理步驟也可以被選定。經由使用 與習知技藝相比較還少量的用在電解機器中的電解液,相 ______29_ 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) (請先閱讀背面之注意事項再填寫本頁) 0 訂---------線· 538143 8721pif.doc/012 五、發明說明(>1 ) 較而言,本發明可以在電解循環中使用相當少量的電解 液,並且在小_中可以產生或多或少連續的電解液交 換。本發明最大的好處是,電解液只有在需要的時候才會 被替換。這意味著在電解機器中只需要很少量的電解液。 固定元件安裝在主裝置6上面,該主裝置適合固定或移除 在電解機器中的接點電極。 雖然本發明已以較佳實施例揭露如上,然其並非用以 限定本發明,任何熟習此技藝者,在不脫離本發明之精神 與範圍內,當可作少許之變動與潤飾,因此本發明之保護 範圍當視後附之申請專利範圍所界定者爲準。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 538143 8721pif.doc / 012 V. Description of the Invention (/) Field of the Invention The present invention relates to the electro-chemical plating, etching, and simplified processing of flat and three-dimensional goods. At least the surface is made of electrically conductive material. The application of the present invention is particularly applicable when a cargo composed of a non-conductive material needs to be partially electro-chemically treated on its surface. Application examples of the present invention include electrical processing of plastic forms' plastic plates and plastic foils, and hollow goods, rods, circuit boards, hybrids, and smart cards ( SmartCards) and other substrates. The device and method of the present invention are also suitable for electrochemical treatment of blind holes and perforations in circuit boards. The present invention is applicable to immersed machines and band machines and clocked machines with continuous horizontal floor transport. Conventional technology In order to perform electrolytic treatment, the surface of the cargo to be processed must be electrically conductive and can be connected by a pole of a current source. The other electrode point of the current source is connected to an electrode on the opposite side of the cargo. This electrode is therefore called a counter electrode. The upper surface of the electrical conduction of the plastic part is electrically conductive. This is provided by the deposits of the base layer, which are provided, for example, by chemical metallizing or by a process such as wicking. These processes are quite expensive. Medical | Therefore, it is necessary to make the base plate with electrical conduction the thinnest possible. Because it is necessary to make 4 _______ This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page) 0 —----- Order ----- ---- Line. 538143 Λ7 B7 8721pif. Doc / 012 V. Description of the invention (2) With high current density, there are other reasons for the quality of the thickness distribution of the laminate. Before the plating process, the minimum must be specified The thickness of the laminate. Thick substrates, for example, are boards that are produced by a sequential build-up (SBU) electro-mineralization process. On the surface, the flow of the electrolyte will be large due to the thickness of the laminate. The difference may even cause melting off of the base plate. Another problem is the electrolytic treatment of electrically insulating structures on non-conductive bases. In fact, this is done by chemical immersion. Technically, these processes are very complicated, and the chemical composition of the electrolyte is also very important. In addition, the electrolytic cell must be handled once a week. Therefore, everyone is trying to find a better processing program so that the electrical insulation structure can have as much electrical contact as possible for electrolytic treatment. The common electrical contact on the edge of the object is not feasible here. . An electrolytic treatment method of this structure is disclosed in German patent application number DE 196 I2 555. The surface to be processed is processed due to continuous contact during continuous conveyance by fixed and fine wiring 'and electrically conductive contact brushes. For electrolytic treatment, these contact brushes only slightly impact the surface and will not harm the surface of the goods or the brush itself. These contact brushes conduct processing current to the areas of these electrically insulating surfaces. The corresponding counter electrode is placed close to these brushes. In every < An insulating slip is provided between the row of brushes and each row of counter electrodes to provide electrical insulation. 5 (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 01! —Order --------- line 丨 ----------- ------------ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 538143 8721pif.  doc / 012 Λ7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (3) During the electroplating process using these brushes, these brushes themselves are often mined by electricity. Because the used electrolyte has a very small throwing power, the smallest leakage on the dividing wall will cause the electric field to pass, and these cathode brushes will be subjected to unwanted plating. Within a short time, these brushes became stiff and unusable. These brushes must be stripped every about a minute. The proposal to add electrical insulation to the outer packaging of each single brush is impractical. The very sharp edges of the fiberglass-reinforced soleplates, as well as the insulating layer on the edges of the holes above the soleplates that are moving under the brush column, will break. This situation can also occur when the fine brush fibers themselves are poorly manufactured. These losses will cause quality problems. The different thicknesses of the goods are quite unfavorable for the better method of handling the floor by the continuous transportation of the goods on the processing line. The distance between the brush and the dividing wall, at least on the surface of the cargo, depends on its thickness. Due to the difference in height, the fixed brushes will rub against the sharp edges of the base plate to some extent, causing considerable losses. At the same time, it is a fixed partition wall, which cannot meet their function of isolating brushes and counter electrodes. This remaining gap is quite huge. Especially for very thin goods, the distance caused by the greater distance from the partition wall is not appropriate compared to thicker goods. In addition, structurally, it is also difficult to implement the arrangement of minimizing brushes for implementing fine conduction technology. A similar plating method is disclosed in the 'Paper Abstract' of Japanese Patent Application No. 63297588 published on 05-12-88. The roller with electrically conductive brushes and cathode poles will meet the upcoming _ __6___ —__ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read first Note on the back, please fill out this page)-· 1 ii I ϋ ϋ nn · I- ϋ ϋ 1 ϋ ϋ ϋ I ϋ ϋ ϋ ϋ H ϋ ϋ ϋ ϋ ϋ I ϋ ϋ n IH ϋ 1 · H ϋ ϋ n 1 538143 Λ7 B7 8721pif. doc / 012 V. Description of the invention (y) The surface of the physical contact. Below the cargo and the contact drum there is an anode. The goods pass through the arrangement of the drum and continuously advance on the drum, and by this method, the goods are electroplated on the surface of the electrical contact. At the same time, it is disadvantageous that the contact rollers themselves are also easily plated, and therefore become unusable soon. For this reason, this method is also not feasible. In U.S. Patent Application No. 5 114 558, another method of electrolytically treating an electrically insulating surface and an electrically conductive region is disclosed. By using a porous separator device, the brush and the counter electrode are separated on a roller or a flat surface. Facing the cargo, and the metal fibers passing through the entire side of the array, contact the part of the cargo as the cargo to be processed passes. Because the brush and the counter electrode are quite close, electrochemical treatment will occur within the arrangement of the partitions. Moreover, the current flowing from the brush fiber to the surface of the cargo does not follow the same path as the current flowing from the surface of the cargo. Therefore, the cargo will not undergo electrolytic treatment. The German patent application number DE 43 37 988 discloses an example of an inventive application using another device, wherein the device is a contact roller used on a full panel. Panels that have been oxidized on the surface pass through the hydrogen generated by electrolysis of the cathode that is to be treated on the surface, thereby reducing the oxidized portion. Invention 的 The purpose of the present invention is to describe an arrangement of the device and a method suitable for electrolytic treatment of flat and three-dimensional goods. (210 X 297) (Please read the notes on the back before filling out this page) Printed by IT --------- ^ — # 1 ------- --------------- 538143 Λ7 B7 8721pif. doc / 012 V. Description of Invention (i) There are no shortcomings of the various inventions disclosed above. The present invention is particularly suitable for electrolytic precision processing of structures and full boards in full panel technology and wafer and hybrid circuit technology. The object of the present invention is achieved by the arrangement of the device described in item 1 of the patent application item and the method described in item 12. The arrangement of the device basically consists of one device. The device is composed of at least one, but is usually composed of several contact strips, and a counter electrode is arranged between the contact strips. This device is a component. In the following description, this component will be referred to and referred to as a contact electrode. A detailed description of the contact electrode has been provided in the accompanying German patent application number DE 100 43 816. Detailed disclosure and explanation in 4. The surface of the cargo contacted by the contact piece and the counter electrode will form an electrolytic rtt (electrolytic cell). In the following description, the electrolytic cell will be referred to and referred to as an electrolytic cell. ^ (Electrolytic small cell). During electroplating of the cargo and electrolytic treatment to reduce the cargo, the contact surface of the cargo will form the cathode of the small cell, and the counter electrode will form the anode of the small cell. During etching and oxidation, the surface of the cargo will form an anode, and the counter electrode will form a cathode. The present invention is generally applicable to a counter electrode which is fusible or insoluble in an electrolytic solution. If the counter electrode is used as an anode, an insoluble anode is preferred. The contact piece runs from the side of the surface to the portion of the surface that is actually in contact, which is more or less electrically insulating. The contact pieces of the contact electrode are connected in parallel to each other and are connected to the first electrode point of a current source. Similarly _________8_ ___ — This paper ruler / Ϊ applies Chinese National Standard (CNS) A4 (210 X 297 mm) '(Please read the precautions on the back before filling this page) # • — 1 ----- Order --------- Line Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 538143 Λ7 B7 8721pif. doc / 012 5. In the description of the invention (L), the counter electrodes are also connected in parallel to each other and connected to another electrode point of the current source. Suitable currents include DC current, unipolar pulsed current, and bipolar pulsed current. In the following description, these pulse currents will be collectively referred to as currents. If the cargo to be processed is plate-shaped (flat), the surface of the contact electrode, that is, the side of the cargo to be processed, is also flat. When the cargo is three-dimensional, the surface on which the contact electrode can move is adjusted to a surface suitable for the shape of the cargo. Hollow cargo is considered a three-dimensional cargo handling. During the partial electrolytic treatment of flat goods, the contact electrodes are partially adjusted to match the corresponding contact pieces and counter electrodes. Generally, the contact electrodes arranged laterally with the transmission direction should be the same as the width of the cargo. Because the goods come in various widths. The width of the contact electrode can be achieved by turning on or off the group of the contact electrode, or by covering the width of the cargo to achieve the same purpose as the width of the cargo. The contact electrode is affixed to a motion arm which is operated by a mechanism. The moving arm presses the contact electrode onto the surface of the cargo. By this method, the contact piece is tightly flat against the surface to be processed, and an opportunity for electrical contact is created. It is important that during contact between the contact electrode and the cargo, there must be no relative movement between the contact electrode and the cargo due to movement. With the approaching of the contact electrode and the contact piece placed on the cargo, that is, by locking the contact electrode, an appropriate amount of specially formulated electrolyte will be poured into the small electrolytic cells . The goods and the contact electrodes are relatively fixed ___ _______________ 9 ________ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) Ministry of Economy Printed by the Consumer Property Cooperative of the Intellectual Property Bureau -1 A___wr_____ — — It --------- Lian ---------------------- Intellectual Property of the Ministry of Economic Affairs Printed by the Bureau's Consumer Cooperatives 538 143 8721 pif. doc / 012 5. Under the conditions of the invention (9), the electrolytic treatment, that is, a partial treatment, also occurs. After a period of time, this time is determined by the process. The moving arm will open the contact electrode, that is, lift it from the surface of the cargo. At the same time, a gentle relative advance determined by the procedure will occur. In other words, the cargo or the contact electrode moves forward. Through the movement of these drives, a new area in the surface area of the cargo is always covered by the contact piece, and another part is released. While the goods are being transported on the machine, or when the contact electrodes opened in the machine are moving gently on the goods, all surface areas will be contacted due to constant new positions, making each of the goods In some cases, they can be electrolyzed for statistically the same length of time. By opening the contact electrode, the electrolyte in the electrolytic small cells will be exchanged, and any gas generated during the electrolysis will be released at this time. By opening and closing the contact electrodes, a hydrodynamic pressure in the electrolyte is generated on the cargo. If there is a hole in the cargo, for example, the hole is in a flat plate, and a pressure is also generated in the hole to replace the electrolyte. By using this moving arm device, the contact electrodes are opened and closed cyclically. The cycle times of the processing steps and the forward steps are determined by individual procedures. It is therefore possible to use electrolytic treatments ranging from a few milliseconds per cycle, or as large as several minutes per cycle, such as from 10 milliseconds to an hour. The length of each cycle depends on the type of machine, from 0.1 mm to 3 mm. Continuous running machines and immersion ____10 This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) (Please read the precautions on the back before filling out this page) -i IIIIII ^ --------- · 538143 Λ7 B7 8721pif. doc / 012 V. Invention description (幺) The advance speed of machines is usually in a relatively low range, and the advance speed of a drum to a drum factory is usually in a relatively high range. A manipulating and synchronizing device is used to coordinate the respective steps, such as the movement of the mobile arm and the advancement step of the cargo, and it is used as a device to turn the current on or off at regular times. 1 In the electrolytic cell filled with electrolyte, one or several contact electrodes and moving arms are arranged. In the first embodiment of the present invention, the contact electrodes are packaged in a cargo below the liquid level. The pump is used to flow the electrolyte through the electrolytic cell in the ~ I circuits, and then through the formulating device, such as flowing through a filter, cooling, heating, and quantifying the formula. In another embodiment, the specially formulated electrolyte is delivered to the small cells by using a pump 'under pressure' through the electrolyte inlet of the contact electrode. In this case, portions higher or lower than the liquid level of the electrolyte in the electrolytic cell may be treated. The electrolyte flows out through the contact electrodes or through other electrolyte outlets. The electrolyte can be introduced continuously or intermittently. The conveyor belt device transports goods to or from the electrolytic cell. It is also possible that the movement of the goods in the electrolytic cell is caused by such a conveying device. However, the movement of goods in the electrolytic cell may also be achieved by using another synchronized transport system. The various forms of the conveyor apparatus and the feed apparatus are determined by various types of electrolytic processing machines, such as continuous operation machines or immersion machines. The electrical contact of the goods, the formation of small electrolytic paper cells, and the size of the electric paper of the goods are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297). (Page) ----- Order --------- line.  The Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 538143 Λ7 B7 8721pif. doc / 012 5. Description of the Invention (1) The opening of sexual contact occurs when the current is turned on. However, turning on and / or turning off may occur when there is no current, and the current source is turned on only during the processing step. An electrical or electronic switching device that turns the current source on or off at the appropriate time. The synchronization of the steps of this method, such as the steps of moving an arm, is achieved by using a control device. One possible method is to design the contact pieces to contact the contact electrodes when there is no current, and release them again when there is no current. When the contact electrode is released, it is quite advantageous to turn on the current source with the opposite electrode point. Any metal deposits, such as insulation defects on the contacts, will also be electrolytically etched. The current density is also different for two different polarities. In the operation mode, the voltage stabilizer or current stabilizer of the current source may be the same or different in their respective polarities. Both of these modes of operation can be used in the actual electrolytic process. When the moving arm has a period as small as a few seconds, an electronic current source should be used, or at least an electronic switching device should be used. For longer periods of time, electromechanical switching devices may also be used. In an electrolytic processing machine, according to the invention, there will be parts of one or several devices. For flat cargo, at least two contact electrodes are placed facing each other to perform electrolytic treatment on both sides of the cargo. This method has proven to be particularly useful for the electrolytic treatment of printed circuit boards with small perforations. Electrolyte use ___ 12____ This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page). Reference i: ---- Order --------- Line Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 538143 8721pif. doc / 012 Λ7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (to) A pump is squeezed from the electrolyte inlet into a small cell at one of the contact electrodes. On the other side of the cargo, the electrolyte was again sucked out from the electrolyte outlet through a pump. In this way, it is surprising that the underpressure and overpressure required to flow in the cavity can be generated with great accuracy and directly provided to the surface to be treated. In addition, this important effect of electrolytic treatment can also be achieved by a relatively small amount of circulating electrolyte. The simultaneous pressurization and extraction of the electrolyte on both sides of the cargo is synchronized with the movement steps. The contact electrode of this treatment method can be above or below the liquid level of the electrolyte in the electrolytic cell. The action of pushing the electrolyte to the small cells can also be intermittent, that is, the action can be intermittent or continuous. For cargoes that are not completely flat, metallic massive contacts are not stored properly on the entire surface of the cargo. The same problem also occurs when a solder resist paint is used on a flat plate, and an electrically insulating structure having a thickness deeper than the thickness of the paint is to be contacted, and an electrolytic treatment is to be performed. In these cases, the contacts are made of a flexible, electrically conductive material. A material like this is composed of, for example, silicon. This silicon material can be compensated by a metal-conducting filling material, such as metal powder. The elastic contact pieces adjust themselves very well-to accommodate the individual unevenness of the surface to be treated. The flexible metal sheet, especially when designed with a notch like a comb, will be the same __ 13 (Please read the precautions on the back before filling this page) φ II n I ϋ ϋ ϋ ϋ I -I ϋ ϋ II n II nn This paper size is applicable to China National Standard (CNS) A4 (210x297 mm) 538143 8721pif. doc / 012 Λ7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention), across the various uneven surfaces on the surface to be treated. The opening and closing of the contact electrode causes the electrolyte to continuously flow, providing the opportunity for the electrolytic small cell to adjust its size to meet the needs of the actual electrolytic treatment. A large amount of electrolyte is not required in small cells. This means that the distance between the contact pieces can be kept very small compared to the size of the structure to be processed. Because during the electrolytic treatment, the contact electrode can be firmly fixed on the cargo by the stable contact, and because there is no relative movement between the cargo and the surface, a very small contact electrode can be maintained on the surface. The distance between them makes no electrical short circuit happen. There are no structural or technical restrictions on the miniaturization of contacts and counter electrodes. You can select a minimum distance and size of less than one centimeter. The small distance between the contact pieces that are preferred to be placed transversely to the direction of movement of the goods has an effect 'this effect causes portions of the processing line in the direction of movement of the goods when they are moved laterally, or Spotted areas are subject to more or less the same electrolytic treatment. The small distance between the contact electrode and the surface of the cargo has an effect. This effect causes very small areas surrounded by a large insulation area to have no way to generate peaks. Therefore, there is no way to obtain balanced electrolytic treatment of these parts. . When a bipolar pulsed current is used to replace the DC current, especially when the surface is electro-mineralized for structures, voids, and blind holes, the precision of the plating process can be further enhanced. When electrolyzing a structure with controlled impedance ’, it ’s even more demanding. (Please read the notes on the back before filling in this page) # Order --------- line.  This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 538143 Λ7 B7 8721pif. doc / 012 V. Description of the invention (above) The small distance between the contact pieces is quite advantageous for relatively fine laminates, such as plastic batteries, for example. In the electroplated area, that is, when electroplating a microstructured object, it is preferred to use a diffusive chemical transmission method. This is because the transmission generated by convection will result in the electrolysis rate. A big local difference, especially at the edges. According to the present invention, a closed contact electrode is used without injecting additional electrolyte, and there is virtually no convection of the electrolyte during the electrolytic treatment. The transport of materials is achieved by diffusion. The electrolyte fills the blind micro vias on the plate, which can lead to good plating results. This method is also suitable for fine production lines with controlled impedance. This also supports the diffusion control process. In this example, a sharp flood of the electrolyte produced technically on the surface of the cargo can be avoided. By this method, a thicker laminar flow will be stored on the surface of the cargo. During the diffusion by ions, this thicker laminar flow will be overcome. Using this method, structures and holes can be processed more evenly. In order to make the above and other objects, features, and advantages of the present invention comprehensible, a preferred embodiment is given below and described in detail with the accompanying drawings. Brief description of the drawings: Fig. 1 shows a cross-sectional view of a portion of a contact electrode having a basic structure of small cells;-Fig. 2 shows a contact electrode shown in a cross-sectional view according to the present invention; The device composed and belonging to the device is used to realize the local paper size applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 meals) ------------- ti-- --- Order --------- Line Bee (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 538143 87 21pif.  doc / 012 Λ7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Device assembly of the invention description (β) method; Figure 3 shows a detailed view of the contact electrode shown in the side view, and is also displayed in The basic method in six steps; Figure 4 does not show a simplified diagram of the contact electrode as shown in Figure 1, including the device components belonging to the device shown in Figure 2. It is regarded as the general diagram of the following Figures 5 to 10; Figure 5 shows an electrolytic machine for electrolytic treatment of disc-shaped goods, such as a hybrid circuit, and the accompanying rotation-time diagram; Figure 6 shows an electrolytic machine used to electrolytically process belt-shaped goods intermittently driven on a drum, and the accompanying path-time diagram; Figure 7 shows an electrolytic machine used to The strip-shaped goods passing continuously on the electrodes are electrolyzed, and the accompanying path-time diagram; Figure 8 shows an electrolysis machine for electrolyzing the horizontally moving flat goods shown in the side view, and Accompanying road -Japanese temple map, Figure 9 shows an electrolytic machine, used to electrolytically process the flat goods shown in the cross-section through the machine in a vertical direction, and the accompanying path · time diagram; Figure 10 An electrolysis machine is used to electrolyze a flat cargo immersed in an electrolytic cell, and the accompanying movement-time diagram; Figure 11 shows a cross-sectional view of a contact electrode whose shape is adjusted to fit the shape of the cargo Sections in Figure-Figure 12a shows a detailed view of a contact electrode, where the contact electrode is made of a flexible metal sheet, or an insulated inner layer (please read the precautions on the back before filling in this Page) 0 order --------- line · This paper size applies to 7 national standards (CNS) A4 specifications (210x297 '— 538143 8721pif. doc / 012 ~ --------------- B / Fifth, the description of the invention (丨 4) (lining) metal brush; Figure 12b shows a detailed view of a contact electrode, The contact electrode is a metal contact with an elastic inlay. Fig. 12c shows a detailed view of a contact electrode. The contact electrode is a kind of flexible and electrically charged material with elastic insulation inside. Figure 12d shows a detailed view of a contact electrode, where the contact electrode uses a rigid contact material and a rigid insulating material; Figure 13 shows a slanted elasticity A contact electrode of a contact piece, the contact piece is connected across a large uneven surface on the surface of the cargo to be processed; FIG. 14 shows a connection situation of a current source to the contact electrode, and the connection situation has Three possibilities: open, close, or open with retention electrode points; Figure 15 shows a cross-sectional view of a contact electrode with electrolyte input and outflow of small cells, and a detailed view of the contact electrode. Simple instructions for labeling: 1 goods 2 electrically conductive layer 3 contact strip 4 contact 5 contact insulation 6 main unit 7 Counter electrode (counter electrode) _____17___ This paper size is applicable to the Chinese National Standard (CNS) A4 (210 x 297 mm) C Please read the precautions on the back before filling this page) Order --- Consumption by the Intellectual Property Bureau of the Ministry of Economy Printed by the cooperative _ II _______________________ 538143 Λ7 B7 8 721pif.  doc / 012 V. Description of the invention (丨 () 8 Electrical conductor 9 Small cell 10 Electrolyte inlet 11 Electrolyte outlet 12 Current source 13 Electrolyte inlet canal 14 Electrolyte common inlet canal 15 Electrolyte outlet canal 16 Motion arm 17 Feed direction 18 Force mass mass) 19 mobile device (feed device) 20 process tank 21 transport device 22 vibrator 23 control unit 24 electrolyte circulation 25 pump 26 filter 27 dosing unit 28 electrolyte 29 common outlet channel 30 contact electrode _______18_ This paper standard applies to China National Standard (CNS) A4 (210 x 297 public love) -------------------- Order --------- line (Please read the notes on the back first (Please fill in this page again) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 538143 8721pif. doc / 012 V. Description of the Invention (Lb) 31 Clamping device 32 Process area 33 Collecting tank 34 Motor 35 Clamping device 36 Cargo carrier ( goods carrier) 37 grooves 38 insulation strip 39 contact strip 40 bow 41 wedge shaped contact 42 elastic material 43 electronics or electrical Mechanical switch (electronic or electromechanical switch) 44 Conveyor roller. Preferred embodiment A preferred embodiment of the present invention will be described in detail hereinafter with reference to the accompanying drawings. In subsequent descriptions and drawings, the same reference numbers are used to designate the same or similar components, so repeated descriptions of the same or similar components will be omitted. Fig. 1 shows a cargo 1 to be processed. The cargo 1 has at least one electrically conductive layer 2 on the surface to be subjected to electrochemical treatment. The ^ conductive layer may cover the entire surface, it may be a frame, or it may be composed of several electrically insulating regions. There may be blind holes in the goods and / _____ 19 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the note on the back? Matters before filling this page) Order --- ---- ---- Line ----------------------- 538143 Λ7 B7 8721pif. doc / 012 V. Description of the invention (1) Or perforation exists. The surface 2 to be subjected to electrolytic treatment is electrically contacted by at least one contact piece 3. The contact piece 3 extending vertically in the drawing is composed of a contact 4 and a contact insulation 5 on both sides. The contact insulation 5 completely covers the contact 4 in addition to the surface that is actually in contact, wherein the surface that is actually in contact is located on the electrically conductive layer 2. The contact piece 3 is attached to the main device 6. An electrically conductive counter electrode 7 is present between the two contact pieces. On each main device 6, there are usually a plurality of contact pieces 3 and counter electrodes 7, for example, each main device may have as many as 200 each. These contacts 4 and the counter electrode 7 are each connected to an insulated main device 6 by a device using an electric conductor 8. All contacts 4 are an electrode point connected to a current source 12. The other electrode point is connected to the counter electrode 7. The polarity shown in Figure 1 represents the polarity used when the goods are electroplated or anti-electrolytically treated. The electrically conductive layer 2 and the counter electrode 7 form an electrolytic small cell 9. Additional electrolyte can be directed into the small cells 9 via the electrolyte inlet 10. This flow will pass through the contact sheet 3 and the counter electrode 7 and flow out of the small cells again on the side. To increase this flow, this additional electrolyte can also be directed out of the small cells via the electrolyte outlet 11. The contact piece 3 and the counter electrode 7 attached to the main device 6 form a contact electrode 30 °. FIG. 2 shows the arrangement procedure of the contact electrodes 30 in an arrangement. The contact electrode is driven by a moving arm 16. This moving arm can lift the contact electrode 30 from the cargo 1 and approach the cargo 1 again to press the contact electrode 30 onto the cargo 1. With the contact electrode in the lifted position, it may be along the drive direction arrow n C Please read the precautions on the back before filling out this page} Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs _____tl_________ft_______________________ This paper size is applicable to China National Standard (CNS) A4 Specification (210 X 297 mm) 538143 Λ7 B7 • Step 8721pif. doc / 012 V. Description of the invention (j) Moving forward, or backwards against the direction of the transmission direction arrow 17 backwards The contact electrode is lifted from the cargo, or it is close to the cargo through a straight line of the contact electrode or It is achieved by a swinging movement. Swinging increases the diffusion of the electrolyte. The contact electrode 30 is pressed on the cargo 1, and a reaction force is obtained for a fixed mass carried out by a flat cargo. This mass will be referred to as Power Mass 18. When the same day temples on both sides of Goods 1 are processed, the other contact electrode 30 will replace the force mass 18. The goods 1 are moved forward slowly by means of a transmission 19 in a slot 20. Outside the tank 20, one or several transport devices are arranged. These transport devices 21 transport the goods 1 to or from the tank 20. The vibrator 22 creates a thrust in the electrolyte working on the main unit 6, especially when handling cargo with small voids. The contact 4 and the counter electrode are connected to a current source 12 to supply a current to the electrolytic small cell 9. All modes of movement are controlled and directed by a control unit 23 indicated by a dashed line. The electrolyte flows in the tank 20 in a circulation path 24. The circulation line 24 includes a pump 25, a filter 26, and a dose supply device 27 for electrolytic solution formulation processing. The level of the electrolyte 28 in the tank 20 is higher than the contact electrode 30. However, the electrolyte can also be directly injected from the pump 25 'into small cells 9 not shown in the second figure. In this example, the empty container 20 is used only as a collection tank for the electrolyte. The openings in the container 20 are not shown in this figure or the following drawings. The goods 1 will enter the electrolytic cell or leave the electrolytic cell through these openings. For example, this may happen by manipulating the device in the M Valley 21 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love) ------------- · · Order --------- Line Umbrella C, please read the notes on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 538143 A7 B7 8721pif. doc / 012 5. Description of the invention (d) on the boundary of the device. It is also possible in the same way that cracks' through the stables occur in continuously conveyed machines. These cracks can be sealed using normal packaging rollers. All various electrical switches and reverse switches must be included in the symbol representing the current source 12. Figure 3 shows a detailed view of the contact electrode shown in the side view. Views A to F show the individual steps of the method according to the invention. In step A, the contact electrode 30 is in a slot without a cargo, wherein the slot is not shown in the drawing. In step B, the cargo 1 to be processed is placed in front of the contact electrode 30. In step C, the contact electrode 30 is relatively close to the cargo 1 °, and the approach of the cargo may be achieved by the forward propulsion of the contact electrode 30. The dotted arrow in the drawing shows this action. The contact electrode 30 and the goods 1 can also approach each other at the same time. However, it is preferred that the contact electrode 30 can be moved toward the goods 1 by a moving arm to extend the direction of the arrow. In step D, the contact electrode 30 is firmly placed on the cargo 1. Through this action, the contact surface of the contact 4 is firmly pressed on the electrically conductive layer 2 of the cargo 1, so the purpose of contact is achieved. Below each counter electrode 7, small electrolytic cells 9 in the form of sheets are formed. Step D is the actual electrolytic treatment. In step E, the contact electrode 30 and the cargo 1 return to each other, and at this time, the electrolyte will start to exchange in front of the contact electrode 30. In step F, the cargo 1 is transported in the direction of the arrow of the movement operation. Next, repeat steps C and below. The movement and processing steps of these contact electrodes 30 are repeated until the processing of the goods is completed. Next 'Cargo Association 22 __ — This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)-# il ----- IT- -------- Rate printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 538143 Λ7 B7 8721pif. doc / 012 5. Invention Description (/) is taken out of the tank, or the goods are removed using a smooth conveying path. (Please read the precautions on the back before filling this page) This method includes the following steps: The contact electrode 30 is relatively close to the goods 1; The contact piece 3 is placed on the surface of the goods to be processed; Stay on the electrolytically treated surface for the same time; there is no relative transport movement between the cargo and the contact electrode 30; the contact electrode 30 is lifted from the surface of the cargo 1, and the contact electrode 30 and the cargo 1 recede from each other; Figure 3 shows the new position of the contact electrode relative to the cargo when one side of the cargo is processed. If two contact electrodes are placed facing each other, both sides of the cargo can be processed at the same time. Therefore, all steps of the present invention can be performed on both sides of the goods at the same time or in a certain order. Fig. 4 shows at the top a symbol commonly used in the following drawings. The rectangle represents a simplified version of one contact electrode 30 with all control device components. The current sources not shown in the drawing are connected to the circuit marked + and-. The dotted line represents the contact piece 3 and the counter electrode 7 with symbols. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 5 shows the layout of the electrolytic treatment of disc-shaped goods. The cargo 1 is clamped on the force mass 18 by using a cylindrical clamping device 31. The inside of the clamping device 31 forms a working area 32 which can be filled with an electrolyte. The outer container is used as a collection tank 33 for the entire arrangement. The motor 34 moves the goods 1 in a stepwise manner relative to the movement of the contact electrode 30, but this movement is only performed on the contact electrode 30 _ 23 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ~ Λ7 B7 8721pif. doc / 012 V. Description of the Invention (4) This will only happen if it is not in contact with Goods 1. These angular step movements can be further replaced by a gradual linear movement. This linear movement occurs alternately in both directions. Figure 5 shows a graph of the switching time of the motor 34 on and off. Electrolytic treatment occurs between these two switched phases. Fig. 6 shows the arrangement of electrolytic treatment on both sides of the strip goods. The goods 1 are conveyed progressively from one roller to the next roller in the direction of the arrow '. The method / time diagram 'shown in Figure 6 shows this step movement with a dashed arrow. The moving arm 16 lifts and lowers the contact electrode to perform the step-by-step movement of the conveyance of the goods 1. After this conveying action, they will be placed in the same position again 'and continue processing. The arrangement in Fig. 7 shows a band machine capable of continuously transporting the goods 1. The moving arm 16 performs a vertical opening or closing movement approaching the goods 1 and is also responsible for performing additional conveying movements in the same direction as the conveying direction, or in parallel to the goods. Four arrows next to the moving arm Represent this action. During the electrolytic process, the 'closed contact electrode 30' and cargo 1 will behave in a similar manner to a "flying saw", but make sure that no relative movement between cargo 1 and contact electrode 30 occurs. Below, move a small distance ° After this movement, the moving arm 16 will lift the contact electrode 30 from the goods 1, and bounce back in the opposite direction to the conveyance to press the contact electrode 30 again to Cargo 1 and move them. This step is repeated iteratively. All movement speeds are coordinated and synchronized. Contact electrode ______2 4 This paper size applies to China National Standard (CNS) A4 specification (210 X 297 male®) -------------------- Order ---- ----- ^ —A_w «(Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 538143 8721pif. doc / 012 Λ7 B7 5. The description of the invention ((Please read the precautions on the back before filling this page) The width of the preference is the same as the width of the belt to be processed. If the width of the goods is narrower than the width of the contact electrode, then An electrically insulating flat cover will be used to cover the unused part of the contact electrode. This cover will also be used in every other application example of the present invention in the same manner. The length of the contact electrode is determined by the transfer speed and the required exposure time. If you want to increase the capacity, you can use a long contact electrode 3 with many contact pieces. For example, it is possible It has a length of 1 meter. The number of contact pieces required at this time is determined by the size of the insulating structure. In precision technology such as smart cards, the distance between small cells in the transport direction, It is advantageous to use a minute distance like one millimeter. In an electrolytic machine, many contact electrodes 30 can be used in the direction of the goods to increase the output. They are They are so synchronized with each other that the goal of uniform statistical distribution on the surface can be achieved. The device according to Figures 6 and 7 is quite suitable for insulating electrical conductor structures, such as flat sheets or It is a continuous plastic sheet of smart card for electrolytic treatment. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 8 shows a flat-shaped goods shown in a side view, such as the simplification of a horizontally continuous machine like a flat plate Figure. The moving arm 16 opens and closes the contact electrode 30. The drive mechanism, not shown in the figure, moves the goods by a roller device after each processing step. The plaques in Figure 8 show the conveyed In Figure 8, a vertical continuous running machine is also shown in the entire layout, except that the processing tank 20 is turned to 90 __ ________ 25 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 Mm) 538143 B7 8721pif. doc / 012 V. Description of the invention (M) (please read the precautions on the back before filling this page), the other parts are the same as the previous figures. In this example, the graphic shows a top view. The cargo 1 is guided by a simple and lightweight conveying device. Unlike the technical standard here, no electrical current needs to be conveyed. Figure 9 shows another vertical continuous machine and a suitable path-time diagram. The drum 'driven by the motor gradually moves the flat goods 1 closer to the plane on the figure. It is applicable to have an upper and / or lower driving transfer roller 44 according to the outline of the detail drawing. FIG. 10 shows a device located in an immersion machine having a treatment tank 20. By using the clamping device 35, the flat cargo 1 is fixed to the cargo carrying tool 36. Unlike the conventional technique, which is only applicable to all surface-covered goods, the clamping device 35 and the goods carrying vehicle 36 may be composed of an electrically non-conductive material, and thus the manufacturing cost is low. It is possible to provide a small, lightweight and simple transmitter, so a smaller and more economical machine can be used ' to increase machine productivity. The mobile arm 16 of the mobile contact piece 30 printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs has been described above. The movement of the goods in the direction of the arrow can be turned on or off to ensure that in each step there will be a satisfactory evenly distributed contact electrode 30 plating on the goods 1. In the example of this device (as in all other embodiments), the goods can be kept at a distance from the open contact electrode by a guide element not shown in the drawing. Figure 10 again shows the appropriate movement-time diagram. The handling of goods will occur between these movements. FIG. 11 shows a detailed cross-sectional view of a three-dimensional contact electrode 30 which is completely adjusted to the shape of the cargo 1. Because of this design, it is possible to avoid those during electrolytic treatment, because there is a big difference between the two. 26 This paper size applies the Chinese national standard (Cns) A4 specification (21〇 X 297 mm 538143 Λ7 B7 8721pif.  doc / 012 V. Electrical peaks generated by invention description (yf). The shape of the cargo may also be hollow. If only part of the processing is to be performed, the contact electrodes are designed so long as part of the contact pieces are adjusted to a surface area suitable for the corresponding angle. One example is a flat plate of a contact connector with gold plating on the sides only. Figure 12 shows four possible forms of contact pieces attached to the host device. They are shown in the drawing as a section and extend into the plane of the drawing. The elasticity and mobility of the contact pieces are illustrated on the individual contact pieces 3 without the goods 1 shown on the right side of the figure. Figure 12a shows a method particularly suitable for precision machines for the production of contact electrodes 30. The long extension groove 37 is designed to penetrate into the inside of the metal main device 6, and this groove will also form the counter electrode 7 between the two contact pieces 3 at the same time. An insulating sheet 38 made of, for example, a plastic material is pushed into the groove 37. A stiff, elastic and / or comb-shaped notch contact piece 39 is equally pushed into each groove. In Fig. 12b, the rigid wedge contact 41 has been pushed into the insulating sheet 31. By using an elastic material 42, the contacts are forced to spring. This elastic material 42 is also electrically conductive at the same time, and it is electrically connected to all the contacts 41 on the terminal side. In a perspective view, a wedge-shaped contact may consist of a plurality of very short, thin wedge-shaped platelets that are in electrical contact by using a conductive elastic material. By using this method, the difference in the height of the surface to be processed can be handled very well. Because the plate chemistry and the actual plating method can also be used in the production of the contact electrodes in Figure 12c and Figure 12d, and the same applies. 27 This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the note on the back? Matters before filling out this page) Printed by the Consumer Consumption Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs ·· ------- — Order --------- Line ----------------------- 538143 Λ7 8721pif. doc / 012 β7 V. Description of the Invention (/ () Miniaturization of contact pads and counter electrodes. Such examples include chip assembly technology in wafer technology, hybrid circuit technology, and printed circuit board technology, and liquid plating Method: In Fig. 12c, through milling, etching, eroding, or solid-state laser cutting, the groove 37 has been installed in the main device 6 to accommodate the contact piece. For example, the contact 4 insulated from the contact is inserted into the groove and fixed with an adhesive or a hook. The contact 4 is made of a flexible and electrically conductive material. The material adjusts its own shape to accommodate the unevenness of the surface of the cargo to be processed. The contact insulation 5 extends to the contact surface of the contact 4. The contacts 4 are mutually electrically connected to the main device 6 at their ends. .With or without subsequent mechanical treatment, through squirting, spraying, pouring, and coating, contact insulation 5 and contact 4 can also be directly installed in several steps. Into the groove. The main device 6 is at the contact A counter electrode 7 is formed between the sheets 3. In Fig. 12d, a contact sheet 3 composed of, for example, a rigid material such as a metal material, is attached to the main device 6. The contact electrode is suitable for the handling of elastic goods, With an elastic intermediate layer, the elastic goods are pressed from the reverse side onto the surface of the rigid contact electrode. Figure 13 shows a contact electrode with an inclined and elastic contact piece 3. These comb The notch-like slot or continuous metal sheet can be placed quite well on an uneven surface. In this figure, the electrolyte inlet 10 symbolically represents a lot of small perforations through the counter electrode 7. Seen vertically In this figure, the electrolyte inlet 10 and the electrolyte outlet 11 on the same line will change, or only the electrolyte inlet 10 exists. The same situation ____ 28 This paper standard applies to China National Standard (CNS) A4 Specifications (210 X 297 mm) (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-0--Order --------- Line-Engine- --------------------- Wisdom of the Ministry of Economic Affairs Property Office employees consumer cooperatives printed 538143 8721pif. doc / 012 β7 V. Description of the invention (ii) It also occurs at the entrance and exit of all other forms of contact electrode 30. FIG. 14 shows a connection route for connecting the current source 12 to the contact electrode 30 via an electric conductor 8. Electronic or electromechanical switches 43 have been added to this circuit. In this way, a control device controls the anode and cathode of the switching contact electrode to be turned on and off, respectively. The respective mode of operation is determined by the movement of the electrolytic treatment and the processing steps that occur at that time. Figure 15 shows a contact electrode that can increase electrolyte exchange in small cells during processing. For ease of illustration, this figure shows an uncovered top view. By introducing the electrolytic solution flowing through the perforations 10 in the counter electrode 7, the exchange of the electrolytic solution can be increased. All electrolyte inlets 10 on the main device 6 are interconnected. The electrolyte flows through the electrolyte inlet pipe 13 and the common inlet pipe 14 and is connected to an electrolyte pump through a flexible tube (not shown). . The electrolyte discharge operation in the small cells occurs at the end of the main device 6. By establishing an electrolyte outlet 11 in the main device 6 and flowing the electrolyte through the counter electrode 7, the exchange of electrolyte can be further increased, and the purpose of exhausting gas can also be achieved. Electrolyte can be discharged from chasing small cells through these perforations. By using the common outlet pipe 29, the electrolyte outlet 11 can be combined with or separated from the electrolyte inlet 15 through another outlet 15. A pump (not shown in the figure) connected to the contact electrode by a flexible tube can generate a pressure electrolyte cycle that flows through the small cells 9 and can be adjusted in strength. A relatively long processing step can also be selected. After using a small amount of electrolyte used in electrolytic machines compared with the conventional techniques, the following ______29_ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back first (Fill in this page again) 0 Order --------- Line · 538143 8721pif. doc / 012 V. Description of the invention (> 1) Comparatively speaking, the present invention can use a relatively small amount of electrolytic solution in the electrolytic cycle, and can produce more or less continuous electrolyte exchange in a small amount. The greatest advantage of the present invention is that the electrolyte is only replaced when needed. This means that only a small amount of electrolyte is required in the electrolytic machine. The fixing element is mounted on the main device 6, which is suitable for fixing or removing the contact electrode in the electrolytic machine. Although the present invention has been disclosed in the preferred embodiment as above, it is not intended to limit the present invention. Any person skilled in the art can make minor changes and decorations without departing from the spirit and scope of the present invention. The scope of protection shall be determined by the scope of the attached patent application. (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is in accordance with China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

538143 A8 B8 D8 8721pif.doc/012 * e·' f.. f 1 : 六、申請專利範^^I/ 4 1·一種裝置,用來對在一電解機器中的一貨物做電氣 化學電鍍,蝕刻,氧化,以及減化的處理,該裝置至少包 括: (a) -處理槽,用來包含一電解液和該貨物; (b) —電解液輸送系統,用來將該電解液在該槽中循 環,一電解液過濾器,以及一電解液配方調節槽; (c) 一裝置,用來將該貨物輸送到該槽的外面; (d) —在該槽中的接點電極,其中該接點電極由至少一 電接點片所組成,以及一接近該接點電極的反電極; (e) —電絕緣裝置,被安置在每一該電接點片和每一該 反電極之間,以形成一或複數個電解液小細胞; ⑴一電流源和一適當的電導體,以提供一電流給該些 電解液小細胞; 其特徵爲 (g) —接點電極,其中該接點電極配合在該貨物將被電 解處理的一面的一形狀; (h) 至少一移動臂,用來執行循環性的複數個步驟,也 就是相對的靠近該接點電極和該貨物,將該些接點片放置 到該貨物的該表面之上,駐留在該表面上的該些接點片 上,以執行電解處理,將該些接點片從該表面上提起,以 及將該接點電極和該貨物互相移開,針對該接點電極,重 新定位該貨物; ⑴在該槽中至少一輸送裝置,其中該輸送裝置是以下 列方法形成和控制的,當與該貨物的該表面上的該接點電 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) —----I------ ----11 Aw (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 538143 A8 B8 C8 8721pif.doc/012 D8 六、申請專利範圍 極接觸時,在該接點電極和該貨物的該表面之間,並沒有 由該輸送動作所引起的相對移動發生;以及 ⑴至少一控制裝置’用來使該貨物或該接點電極的前 進,同步於在該處理槽中的該些接點電極的開啓和關閉移 動。 2 ·如申g靑專利範园弟1項所述之裝置,其中該電流丨原, 根據該處理步驟’可以切換性的開啓和關閉和/或極性顚 倒。 3·如申請專利範圍第1項或第2項所述之裝置,其中 該至少一控制裝置是用來協調控制該接點電極的移動,該 貨物的輸送,以及該些電流源的切換狀態。 4·如申請專利範圍第1項所述之裝置,其中該輸送帶 裝置是由複數個滾筒’複數個汽缸,複數個夾子,和複數 鉤子所組成,用來將該貨物輸送到該槽,通過該槽,並且 再一次的將該貨物從該槽中送出。 5·如申請專利範圍第1項所述之裝置,其中更加包括 在5亥些電解液小細胞的一^陽極和一^陰極之間的一距離,宜 中5亥距離是可以根據將要處理的一最小的結構的一尺寸而 調整的。 6·如申請專利範圍第丨項所述之裝置,其中更加包括 一輸送帶裝置,將該貨物從該汽缸輸送到另一該汽缸。 7·如申請專利範圍第丨項所述之裝置,其中該移動臂 將該封閉的接點電極,在該處理槽中,以該貨物的一輸送 方向輸送,該移動臂與該貨物的輸送同步,並且將該開啓 32 紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱) -- --------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 538143 8721pif.doc/012 A8 B8 C8 D8 經濟部智慧財產局員工消費合作社印製 六、申請專利範圍 的接點電極,以與該貨物的該輸送方向相反的方向輸送。 8.如申請專利範圍第1項所述之裝置,其中更加包括 複數個振動器,在該些接點電極上面運作。 9·如申請專利範圍第1項所述之裝置,其中該些接點 電極具有複數個剛性的接點和複數個剛性的接點絕緣。 10.如申請專利範圍第1項所述之裝置,其中該些接點 電極具有複數個彈性的接點和複數個彈性的接點絕緣。 11·如申請專利範圍第1項所述之裝置,其中該些接點 電極具有複數個集成的電解液入口和複數個集成的電解液 出口。 12·—種方法,用來對在至少具有一處理槽,一電流源, 和一電解液的一電解機器中的一貨物做電氣化學電鍍,蝕 刻,氧化,以及減化的處理,特別的是該方法使用申請專 利範圍第1項的該配置方案,該方法包括以下步驟: (a) 將該貨物載入到該處理槽中; (b) 將該貨物與該電解液接觸; (c) 將該電解液流過該槽和流過一電解液配方調節裝 置,以執行電解液的循環; 該些步驟特徵爲: (d) 當執行該貨物的一面處理時,將該貨物定位在〜接 點電極的前方,當執行該貨物的雙面處理時,將該貨物定 位在二接點電極之間; (e) 藉由使用至少一移動臂的裝置,將該或該些接點電 極,相對的移動以趨近將做電解處理的該或該些表面; 33 --------------------訂--------線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538143 A8 B8 C8 D8 8721pif.doc/012 六、申請專利範圍 (f) 將一或二接點電極放置在該貨物的該表面之上,其 中該或該些接點的電極至少是部分電傳導的,並且可以形 成複數個電解液小細胞; (g) 電解處理該貨物,並且確定在該接點電極和該貨物 之間,沒有任何由輸送動作所引起的相對移動發生; (h) 將該接點電極的該些接點,從該貨物的該表面上提 起,並且相對的移開; ⑴將該接點電極移開到距離該貨物夠遠的地方,使得 新的配方的電解液可以替代使用過的電解液,而且在這個 時候,在該些小細胞中所可能產生的任何氣體都可以被移 出;以及 ⑴藉由使用一輸送裝置,將該貨物重新定位在該些接 點電極的前方,該定位動作發生在與下列該些步驟相同的 時間:步驟⑷,(h),⑴和⑴,以從0.01秒到一小時的時 間週期,重覆的的執行步驟(e)到(j),與此相一致的,該些 移動步驟(d),(e),(f),(h),⑴和⑴的時間週期,被選擇 成比步驟(g)還小。 13·如申請專利範圍第12項所述之方法,其中連接到 該些電解液小細胞的該些電流源,在所有移動和處理的該 些步驟期間,是完全切換開啓的。 14_如申請專利範圍第12項所述之方法,其中連接到 該些電解液小細胞的該些電流源,只有在步驟g的期間是· 切換開啓的。 15·如申請專利範圍第12項或第13項所述之方法,其 34 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公爱1 " 一 --------------------訂---------線 Φ. (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 538143 8721pif.doc/012 A8 B8 C8 D8 六、申請專利範圍 (請先閱讀背面之注意事項再填寫本頁) 中該或該些電流源,在該些移動的步驟期間,以一極性連 接到該些小細胞,而在步驟g期間,以另一極性連接到該 些小細胞。 16. 如申請專利範圍第12項所述之方法,其中所有的 該些步驟和該些切換程序,都是藉由一同步和控制裝置, 在時間上同步化的。 17. 如申請專利範圍第12項所述之方法,其中當重新 定位該貨物時,經由移動步驟j,該貨物的一系統化的平 緩輸送會在該槽中發生。 18. 如申請專利範圍第17項所述之方法,其中該貨物 是以每一步0.1毫米到3公尺的範圍輸送的。 19. 如申請專利範圍第12項所述之方法,其中該些接 點電極,至少在步驟g的期間,是藉由該些振動器激勵而 做振動移動的。 20. 如申請專利範圍第12項所述之方法,其中在一面 上即將被電解處理的一彈性貨物,被從該貨物的另一面壓 到一接點電極上,其中該接點電極是藉由一遍佈表面的彈 性材料,包含堅硬的金屬接點元件所組成。 經濟部智慧財產局員工消費合作社印製 21. 如申請專利範圍第12項所述之方法,其中藉由流 經在該些反電極中的的複數個穿孔的該電解液在該些小細 胞中的流進和流出,在該些電解液小細胞中的一增加的電 解液交換就會發生。 22. 如申請專利範圍第12項所述之方法,其中在對具 有該些穿孔的該貨物的雙面,同時進行電解處理時,藉由 35 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) 538143 A8 B8 C8 D8 8721pif.doc/012 六、申請專利範圍 一幫浦裝置,將該電解液灌入該接點電極中,同時也是使 用一幫浦裝置,將該電解液由在該貨物對面的另一該接點 電極中吸出。 23·如申請專利範圍第12項所述之方法,其中輸送在 該些連續運轉機器的該貨物,是發生在該些接點電極放在 5亥:k物的雙面上’並且接受電解處理,抓住該貨物,並且 將其向前移動一步,接下來將該貨物放下,並且讓該貨物 在不執行一更多步驟的情況下,將其移回開放位置的同一 時間時發生。 24·如申請專利範圍第12項所述之方法,其中在該些 沈fe槽中,g亥貨物的重新定位在該些接點電極前方,是經 由與該些接點電極平行的一貨物移動而發生的,其中該些 接點電極,是當該些接點電極並未放置在該裝置的該表面 上時,藉由該控制裝置開啓的。 25·如申請專利範圍第12項所述之方法,其中在使用 連續輸送皮帶,將該貨物在該處理槽中輸送時,在琴虎 步驟期間」位在該貨物的該表面上的該些接點電極°,^空 中移動與5亥貨物的-小距離,而且兩者之間並沒有相對移 動發生,其中該貨物被電解處理,接下來,該些接點電極 會被再一次的開啓,以傳輸的反方向移動回來,接下來會 再-次關閉,以執行連同貨物的另1步輸送步驟。 26·如申請專_圍第25麵―方法,其中該同步 的輸送以(U毫米到3公尺之_〜_在空中移動。 27·如申請__第12 _―方法,其中該接點 _____ 36 本紙張尺度適用中國國家標準(CNS)A^n21Q x 297 〜------ --------訂---------線 AW. (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 538143 A8 B8 8721pif.doc/012 f、申請專利範圍 電極的一有效寬度,從該輸送方向的橫向來看,藉由關閉 該些接點電極群組,是調整成適應該貨物的該寬度的。 28. 如申請專利範圍第12項所述之方法,其中對於一 窄貨物而言,該些接點電極在複數個邊緣上沒有使用的一 區域,藉由使用複數個電絕緣遮罩被遮蓋起來。 29. 如申請專利範圍第12項所述之方法,其中該些接 點電極被調整,以適應於該貨物的一形狀和一尺寸,用這 種方式,該貨物只有在複數個想要處理的地方會被電解處 理。 30. 如申請專利範圍第12項所述之方法,其中使用該 電鑛方法時,在該些處理步驟期間,該些接點片形成一陽 極,而該些反電極形成一陰極。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 37 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐)538143 A8 B8 D8 8721pif.doc / 012 * e · 'f .. f 1: 6. Application for patent application ^^ I / 4 1. A device for electrochemical plating of a cargo in an electrolytic machine, Etching, oxidizing, and reducing treatment, the device at least includes: (a)-a treatment tank for containing an electrolyte and the cargo; (b)-an electrolyte delivery system for placing the electrolyte in the tank Medium cycle, an electrolyte filter, and an electrolyte formula adjustment tank; (c) a device for transporting the goods to the outside of the tank; (d) a contact electrode in the tank, where the The contact electrode is composed of at least one electrical contact piece, and a counter electrode close to the contact electrode; (e)-an electrical insulation device is disposed between each of the electrical contact pieces and each of the counter electrodes To form one or more electrolyte small cells; 电流 a current source and an appropriate electric conductor to provide an electric current to the electrolyte small cells; characterized by (g)-a contact electrode, wherein the contact A shape in which the electrodes fit on the side of the cargo to be electrolytically treated; (h) at least one A boom is used to perform a plurality of cyclical steps, that is, relatively close to the contact electrode and the goods, placing the contact pieces on the surface of the goods, and resident on the surfaces. On the contact piece to perform electrolytic treatment, lift the contact pieces from the surface, and move the contact electrode and the goods away from each other, and reposition the goods against the contact electrode; ⑴ in the groove At least one conveying device, wherein the conveying device is formed and controlled by the following method, when the paper size of the contact with the contact on the surface of the cargo is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) —---- I ------ ---- 11 Aw (Please read the notes on the back before filling out this page) Printed by the Consumer Consumption Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 538143 A8 B8 C8 8721pif.doc / 012 D8 6. When the patent application is in extreme contact, there is no relative movement between the contact electrode and the surface of the cargo caused by the conveying action; and at least one control device is used to make the cargo or The contact electrode Before entering, in synchronization with the plurality of contact electrodes in the open treatment tank and the closing movement. 2. The device as described in item 1 of the patent fanyuan patent, wherein the current is switched on and off and / or reversed in polarity according to the processing step. 3. The device as described in item 1 or 2 of the scope of patent application, wherein the at least one control device is used to coordinately control the movement of the contact electrode, the transportation of the goods, and the switching state of the current sources. 4. The device according to item 1 of the scope of patent application, wherein the conveyor belt device is composed of a plurality of rollers, a plurality of cylinders, a plurality of clamps, and a plurality of hooks, and is used to convey the goods to the trough, through The trough, and again sends the goods out of the trough. 5. The device according to item 1 of the scope of patent application, which further includes a distance between the anode and cathode of the electrolyte small cells, and the distance between Yizhong and Haihai can be processed according to Adjusted for one size of one smallest structure. 6. The device according to item 丨 of the scope of patent application, which further comprises a conveyor belt device for conveying the goods from the cylinder to the other cylinder. 7. The device according to item 丨 in the scope of patent application, wherein the moving arm conveys the closed contact electrode in the processing tank in a conveying direction of the goods, and the moving arm is synchronized with the conveying of the goods , And this open 32 paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love) ---------------------- Order --- ------ line (Please read the notes on the back before filling this page) Printed by the Consumers 'Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 538143 8721pif.doc / 012 A8 B8 C8 D8 Printed by the Employees' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 6. The contact electrodes within the scope of the patent application are transported in a direction opposite to the transport direction of the goods. 8. The device according to item 1 of the scope of patent application, further comprising a plurality of vibrators operating on the contact electrodes. 9. The device according to item 1 of the scope of patent application, wherein the contact electrodes have a plurality of rigid contacts and a plurality of rigid contact insulations. 10. The device according to item 1 of the scope of patent application, wherein the contact electrodes have a plurality of elastic contacts and a plurality of elastic contact insulations. 11. The device according to item 1 of the scope of patent application, wherein the contact electrodes have a plurality of integrated electrolyte inlets and a plurality of integrated electrolyte outlets. 12 · —A method for electrochemical plating, etching, oxidation, and reduction of a cargo in an electrolytic machine having at least a processing tank, a current source, and an electrolyte, especially The method uses the configuration scheme of the first patent application scope, and the method includes the following steps: (a) loading the cargo into the processing tank; (b) contacting the cargo with the electrolyte; (c) applying The electrolyte flows through the tank and through an electrolyte formulation adjustment device to perform the circulation of the electrolyte; the steps are characterized by: (d) when performing one side treatment of the cargo, positioning the cargo at the ~ contact In front of the electrodes, when performing double-sided processing of the goods, the goods are positioned between the two contact electrodes; (e) by using a device using at least one moving arm, the contact electrodes or electrodes are opposite Move to approach the surface or surfaces to be electrolytically treated; 33 -------------------- Order -------- line (please read first Note on the back, please fill out this page again) This paper size is applicable to China National Standard (CNS) A4 (210 X 297) ) 538143 A8 B8 C8 D8 8721pif.doc / 012 6. Scope of patent application (f) Place one or two contact electrodes on the surface of the goods, wherein the electrodes of the contact or contacts are at least partially electrically conductive And can form a plurality of electrolyte small cells; (g) electrolytically treat the cargo, and determine that there is no relative movement caused by the transportation action between the contact electrode and the cargo; (h) The contacts of the contact electrode are lifted from the surface of the goods and are relatively moved away; ⑴ Move the contact electrodes far enough away from the goods so that the new formula of the electrolyte can replace Used electrolyte, and at this time, any gas that may be generated in the small cells can be removed; and, by using a transport device, relocating the cargo in front of the contact electrodes, The positioning action occurs at the same time as the following steps: steps ⑷, (h), ⑴, and ⑴, repeatedly performing steps (e) to (j) in a time period from 0.01 seconds to one hour, Consistent with this, the time periods of the moving steps (d), (e), (f), (h), ⑴ and ⑴ are selected to be smaller than those of step (g). 13. The method according to item 12 of the scope of patent application, wherein the current sources connected to the electrolyte small cells are completely switched on during all the steps of movement and processing. 14_ The method according to item 12 of the scope of patent application, wherein the current sources connected to the electrolyte small cells are switched on only during step g. 15. The method described in item 12 or item 13 of the scope of patent application, in which 34 paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 Public Love 1 " 1 -------- ------------ Order --------- line Φ. (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 538143 8721pif .doc / 012 A8 B8 C8 D8 6. The scope of the patent application (please read the notes on the back before filling this page), the current source or sources in the moving steps, with a polarity connected to the small cells And during step g, connect to the small cells with another polarity. 16. The method described in item 12 of the scope of patent application, wherein all the steps and the switching procedures are performed by a synchronization and The control device is synchronized in time. 17. The method as described in item 12 of the scope of patent application, wherein when the goods are repositioned, through the moving step j, a systematic smooth conveyance of the goods will be in the tank. 18. The method described in item 17 of the scope of patent application, wherein the goods It is conveyed in a range of 0.1 mm to 3 meters per step. 19. The method according to item 12 of the patent application scope, wherein the contact electrodes are at least during the step g by the vibrators Excited and vibrated. 20. The method as described in item 12 of the scope of patent application, wherein a flexible cargo that is to be electrolytically treated on one side is pressed onto a contact electrode from the other side of the cargo, where The contact electrode is composed of an elastic material covering the surface, including hard metal contact elements. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 21. The method described in item 12 of the scope of patent application, wherein By the inflow and outflow of the electrolyte through the perforations in the counter electrodes in the small cells, an increased electrolyte exchange in the electrolyte small cells will occur. The method as described in item 12 of the scope of patent application, in which, when both sides of the goods with the perforations are subjected to electrolytic treatment at the same time, the Chinese National Standard (CNS) A4 regulations are applied by 35 paper standards (210 X 297 mm) 538143 A8 B8 C8 D8 8721pif.doc / 012 6. Application for a patent A pump device, the electrolyte is poured into the contact electrode, and a pump device is also used to electrolyze The liquid is sucked out by another contact electrode opposite to the cargo. 23. The method according to item 12 of the scope of patent application, wherein the cargo transported on the continuously running machines occurs at the contact electrodes. Place it on both sides of the object: and accept the electrolytic treatment. Grab the cargo and move it forward one step, then lower the cargo and leave the cargo without performing one more step. It happens at the same time as moving it back to the open position. 24. The method as described in item 12 of the scope of patent application, wherein in the sink grooves, the goods are repositioned in front of the contact electrodes, and are moved through a cargo parallel to the contact electrodes. What happened is that the contact electrodes are opened by the control device when the contact electrodes are not placed on the surface of the device. 25. The method according to item 12 of the scope of application for a patent, wherein when using a continuous conveyor belt to transport the goods in the processing tank, during the "Qinhu" step, said receiving units positioned on the surface of the goods The point electrode °, ^ moves in the air and-a small distance between the goods, and there is no relative movement between the two, where the goods are electrolytically processed, and then the contact electrodes will be opened again to The transfer moves back in the opposite direction, and then closes again to perform another 1-step delivery step along with the goods. 26 · If you apply for the _25th surface method, where the synchronous conveyance moves in the air with a distance of _ ~ _ from U mm to 3 meters. 27 · If you apply for the __12th method, where the contact _____ 36 This paper size applies to Chinese National Standard (CNS) A ^ n21Q x 297 ~ ------ -------- Order --------- Line AW. (Please read first Note on the back, please fill out this page again) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 538143 A8 B8 8721pif.doc / 012 f. An effective width of the patent application electrode, viewed from the side of the conveying direction, by closing The contact electrode groups are adjusted to fit the width of the cargo. 28. The method as described in item 12 of the scope of patent application, wherein for a narrow cargo, the contact electrodes are on a plurality of edges An area not used above is covered by the use of a plurality of electrically insulating masks. 29. The method as described in item 12 of the scope of the patent application, wherein the contact electrodes are adjusted to fit the area of the cargo. Shape and size, in this way, the goods are only in a plurality of places 30. The method according to item 12 of the scope of patent application, wherein when using the power ore method, during the processing steps, the contact pieces form an anode and the counter electrodes form a cathode (Please read the precautions on the back before filling out this page) Printed by the Intellectual Property Bureau Employee Consumer Cooperatives of the Ministry of Economic Affairs 37 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)
TW90133191A 2000-09-06 2001-12-31 Electrochemical treatment device and method for goods TW538143B (en)

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DE10065643C2 (en) * 2000-12-29 2003-03-20 Egon Huebel Device and method for the electrochemical treatment of strip-like and plate-like material
WO2003060201A1 (en) * 2001-12-28 2003-07-24 Huebel Egon System and method for items to be electrochemically treated
DE10202431C1 (en) * 2002-01-22 2003-05-28 Egon Huebel Apparatus for electrochemical metallization, etching, oxidation or reduction of materials uses small electrochemical cells with contact electrodes fed with electrical pulses
DE10207941A1 (en) * 2002-02-17 2003-09-04 Egon Huebel Method and device for electrical contacting of flat goods in electrolytic systems
DE10241619B4 (en) * 2002-09-04 2004-07-22 Atotech Deutschland Gmbh Device and method for the electrolytic treatment of at least superficially electrically conductive material to be treated
DE102004041812A1 (en) * 2004-08-26 2006-03-09 Siemens Ag Reactor for generating surface reactions and its use
TW200829726A (en) * 2006-11-28 2008-07-16 Basf Ag Method and device for electrolytic coating

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US5114558A (en) * 1989-02-15 1992-05-19 Kadija Igor V Method and apparatus for manufacturing interconnects with fine lines and spacing
DE4337988A1 (en) * 1993-11-06 1995-05-11 Hoellmueller Maschbau H Process for the production of multilayers and device for carrying out this process
DE19612555C2 (en) * 1996-03-29 1998-03-19 Atotech Deutschland Gmbh Process for the selective electrochemical treatment of printed circuit boards and device for carrying out the process

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