TW569652B - Method for producing radiation - Google Patents

Method for producing radiation Download PDF

Info

Publication number
TW569652B
TW569652B TW091120911A TW91120911A TW569652B TW 569652 B TW569652 B TW 569652B TW 091120911 A TW091120911 A TW 091120911A TW 91120911 A TW91120911 A TW 91120911A TW 569652 B TW569652 B TW 569652B
Authority
TW
Taiwan
Prior art keywords
target
pulse
energy
main
size
Prior art date
Application number
TW091120911A
Other languages
English (en)
Chinese (zh)
Inventor
Magnus Berglund
Bjoern Hansson
Oscar Hemberg
Hans Hertz
Lars Rymell
Original Assignee
Innolite Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Innolite Ab filed Critical Innolite Ab
Application granted granted Critical
Publication of TW569652B publication Critical patent/TW569652B/zh

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/10—Power supply arrangements for feeding the X-ray tube
    • H05G1/20—Power supply arrangements for feeding the X-ray tube with high-frequency AC; with pulse trains
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/008—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation
    • H05G2/0082—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam
    • H05G2/0088—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam for preconditioning the plasma generating material

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Radiation-Therapy Devices (AREA)
TW091120911A 2002-05-13 2002-09-12 Method for producing radiation TW569652B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02076898A EP1365635B1 (de) 2002-05-13 2002-05-13 Verfahren zur Strahlungserzeugung

Publications (1)

Publication Number Publication Date
TW569652B true TW569652B (en) 2004-01-01

Family

ID=29286188

Family Applications (1)

Application Number Title Priority Date Filing Date
TW091120911A TW569652B (en) 2002-05-13 2002-09-12 Method for producing radiation

Country Status (5)

Country Link
EP (1) EP1365635B1 (de)
KR (1) KR20050005478A (de)
AT (1) ATE331424T1 (de)
DE (1) DE60212581T2 (de)
TW (1) TW569652B (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004005242B4 (de) * 2004-01-30 2006-04-20 Xtreme Technologies Gmbh Verfahren und Vorrichtung zur plasmabasierten Erzeugung intensiver kurzwelliger Strahlung
KR20060125905A (ko) * 2004-03-17 2006-12-06 사이머 인코포레이티드 Ｌｐｐ ｅｕｖ 광원
DE102005014433B3 (de) * 2005-03-24 2006-10-05 Xtreme Technologies Gmbh Verfahren und Anordnung zur effizienten Erzeugung von kurzwelliger Strahlung auf Basis eines lasererzeugten Plasmas

Also Published As

Publication number Publication date
DE60212581T2 (de) 2007-07-05
EP1365635B1 (de) 2006-06-21
KR20050005478A (ko) 2005-01-13
DE60212581D1 (de) 2006-08-03
EP1365635A1 (de) 2003-11-26
ATE331424T1 (de) 2006-07-15

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Legal Events

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GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees