TW593097B - Automated material handling system - Google Patents

Abstract

An automated material handling system. The automated material handling system includes a main route, a plurality of transport vehicles, a loading and unloading route, a stocker, a rapid route and an emergency route. The plurality of transport vehicles move on the main route. The loading and unloading route has a first entrance and a first exit. The first entrance and first exit are connected to the main route. The stocker is disposed beside the loading and unloading route. The transport vehicles enter the loading and unloading route and stop at the stocker to load and unload a material. The rapid route has a second entrance and a second exit. The second entrance and second exit are connected to the main route. The emergency route is connected to the main route. The transport vehicles leave the main route via the emergency route.

Description

593097 Cliff No. 92105452 Description of the fifth invention (2) After loading the wafer loading and unloading module 丨 6, it will move a conveying lane 1 1 until the complete conveying flow 2 1 4 must be moved along the conveying trolley 1 4 Unnecessary journey. In addition, * two stops. 'This increases the number of transport trolleys. 13) When a fault occurs and the motion stops, the right transport trolley (for example, the transport trolleys 14, 15 cannot follow along together. Herein, the object of the present invention is to provide a kind of simultaneous transmission system 'which can greatly improve wafer loading and unloading. Even when a transporting trolley fails, it will not affect the integration and further improve the process efficiency. SUMMARY OF THE INVENTION It is an object of the present invention to provide a co-located multi-track automatic transfer system. The co-located multi-track automated transfer system includes a main track; a plurality of handling trolleys traveling on the main track; a loading and unloading The road has a first entrance end and a first exit end, wherein the first entrance end and the first exit end are connected to the main execution road, and the handling trolleys enter the road through the first entrance end. Loading and unloading track, and re-entering the main track through the first exit end; a storage device is arranged beside the loading and unloading track, wherein the special handling trolley is passed through the The track is docked at the storage device to load or unload a material; the throttling track has a second inlet end and a second outlet end, wherein the second inlet end and the second outlet end are connected to The ballast track, the handling trolleys enter the throttling track through the second entrance end and re-enter the main track through the second exit end; and an emergency exit track connected to the main track, where 'the Waiting

〇532-9186twfl (nl); pt-ap-15〇; hawdong.Ptd page 7 593097

Case No. 92: 054 Zhao V. Explanation of the invention (3) The car departed from the main track via the emergency exit track. At the same time, the same-position multi-track automatic conveying system according to the present invention further includes a '-first sequence control device i' arranged at the connection between the first exit end and the main track, which is used to control the passage of the handling trolleys. order. According to the system as described above, it further includes a second sequence control device, which is used to control the passing sequence of the special handling trolley at the connection between the second exit end and the main track. The material is a wafer-loaded unloading mold. group. The storage device is a wafer-loading mold unloader, and other transportation trolleys are transporting systems to the mining track.) According to the system described above, the storage device is the system described above. According to the system described above, OHS (〇ver-head shuttle car. According to the system described above, the handling trolleys 〇HT (〇Vebu head holst, overhead crane; ^ open the trolley. According to the system as described above, the type of handling further includes a robot arm, between the μ loading and unloading track and the storage device, which is used to load the reading trolleys. A Another purpose of the present invention for unloading the material is to provide A co-location multi-track conveying method, it is used to have a main track, a plurality of handling platforms, an automatic soil transfer track, a storage device, a throttling track, and an emergency: loading and unloading multi-track automatic conveying system One by one-exit end

〇532-9186twfl (nl); pt.ap-150; hawdong.ptd The main track travels, the loading and unloading rails; first: the entrance 7 2 is W097 x ^ ^^ Yifu ~ 05452 5. Description of the invention ( 4)-$ Road, the storage device ^ = the second inlet end and an outlet end are connected to the main track, the party is to load or unload a material end into the loading and unloading track; load or unload the material; " Hai main track; move these tracks' to save the moving ^ by the second exit end ^ 0 guard, the moving platform track. At the same time, according to the present invention, one step is involved: one machine and trolley. Controlling the travelling via the main track according to the control device as described above Controlling the travelling via the main track according to the control device as described above is a preferred embodiment of the present invention in the context of a specific embodiment Revise with the description of the drawings _____ Set in Yanhai a second out of the main track method includes the following, the docking of these temple transport trolleys through the transport trolley into the main rail car into the Ming of the same mechanical arm Loading and unloading lanes, the first, and the next steps when waiting for the transport trolley to move the trolley on the trolley through the second entry time; road; and when the emergency exit rail multi-performed automatic loading or unloading, The entrance end of the throttling second exits quickly and the transportation is conducted through the first exit end of the first storage warehouse to move the transportation lanes away from the track equipment. And the lane-linked car needs an entrance to be installed. The throttling trolley is introduced at the end, so the main transfer method is opened. The materials are transferred in the handling method, and the step includes the step of importing the passage sequence. A step-by-step introduction of the passing sequence features and advantages of the drawings to make detailed the first transporting trolley method, and the purpose of the second transporting trolley, and to cooperate with the main rail of the first order and the main rail in the second order The orbit and the θ can be more clearly understood and explained in detail. Preferred implementation of the invention

0532-9186twf1 (nl); pt.ap · 15〇; hawdong.ptd 593097 V. Description of the invention (5) Please refer to FIG. 2. The co-located multi-track automatic transmission system 100 of the present invention mainly includes a main execution channel 110, A plurality of handling trolleys 120, a plurality of loading and unloading rails 130, a plurality of storage devices 1440, a plurality of throttle rails 150, and a plurality of emergency exit rails 160. Each loading and unloading lane 130 has a first inlet end 131 and a first outlet end 132, and the first inlet end 131 and the first outlet end 132 are connected to the main track no. The storage device 1 40 is located beside the loading lane 1 300. Each of the throttling rails 501 has a second inlet end 151 and a second outlet end 152, and the second inlet end 151 and the second outlet end 152 are also connected to the main rail 110. The emergency exit track 160 is connected to the main track 11 and can be installed in any part of the main track \ 1〇. In this example, the handling trolley 12o can be an OHT or 〇Hs type. The carrying trolley i 20 can be loaded with a wafer wafer module (f〇UPM70, and the storage device 14) For the storage of a wafer loading and unloading module, please refer to “Figure 2” “handling trolley”. It is mainly entered at the main road. When a handling trolley is required to be unloaded at the wafer loading and unloading module warehouse 1 to 40. When the wafer loading and unloading module 170 is used, the transporting trolley 12. Will be H: The second port end 131 enters the loading and unloading track 130, and the rest of the moving trolley is driven by the main track 110, so it will not cause the main road ιι〇 = Then, the situation of waiting. Similarly, when the handling cart 120 is stopped i: the 0 loading and unloading nuclear storage unit 14o, ^ to use one: Yu Jing =) to unload the wafer loading and unloading module on the handling cart 120 1? 〇. (The unloaded handling trolley 120 can go through the first exit 132 and then unload Wang Zhidao

593097 V. Description of the invention (6) 110 ° Next, since the unloading transport trolley 丨 20 has completed its transfer task, there is no need to continue along the main track 丨 丨 〇. Therefore, the unloading transport trolley 1 2 0 can enter the throttling track 15 through the second entrance end 51, then enter the main execution road 11 through the second exit end 152, and return to the starting point of the main execution road 110. It is worth noting that there can be multiple throttling lanes 150 on the main track 丨 10, so any handling trolley 丨 20 can pass through the nearest section after completing its transfer task. Liu Zhi Road returned to the starting point of the main track 110. And the transfer cart 120 that completes the transfer task first and returns first can then load the wafer loading and unloading module 170 to perform another transfer task. Therefore, the time required for the manufacturing process can be greatly reduced. In addition, as shown in FIG. 2, since there are a plurality of emergency exit tracks 160 on the main execution road 丨 丨 〇, in case there is a failure of the transportation trolley 1 2 〇 and it is impossible to travel, 'this will occur at this time The faulty handling trolley 1220 is guided to the nearest emergency exit track 160 for easy maintenance. Therefore, even if the handling trolley 12 fails and cannot travel, it will not affect the full operation of the co-located multi-execution automatic conveying system 1000. As mentioned above, the co-location multi-execution automatic conveying system of the present invention has another feature. As shown in FIG. 2, the connection between the first exit end 132 of the loading and unloading track and the main execution path 110 is as follows. There is also a first sequence control device (interlock control device) i80. This first sequence control device, device 1 80, is used to control the passing sequence of the handling trolley 1220. That is to say, when the loading trolley 1 2 0 after the clothing is unloaded is going to enter the main road 110 through the first exit end 132 of the loading and unloading track 1 3 0, there may also be a transport on the main track no.

593097 V. Description of the invention (7) The connection point between the trolley 120 and the main road 110 through the first exit end 132, so ▲ the unloaded transport truck 120 or the transport car 1 2 0 on the main road 110 reaches the first Sequence control device 丨 At 8 o'clock, the analysis and comparison of the first sequence control device 180 is used to determine which handling trolley 120 can pass the connection point between the first exit end 132 and the main track 11 first. Avoid collision between the two handling trolleys 1 2 0. Similarly, there is also a second sequence control device 90 at the connection between the second exit end of the throttle track 150 and the main track 1 10, and this second sequence control device 190 is also used to control The passing sequence of the transport trolley 120. In other words, when the handling trolley 120 is to enter through the second exit end 152 of the throttling track 150, there may also be a place on the main track 110 where the handling trolley 120 is connected to the main track 11 through the second exit end 152 So, when the transport trolley from the stream track 150? nTen cars 120 arrive at the second sequence control; analysis and comparison of the transport platform on the main track is set at 190, and the equipment is controlled by the time of the wrong sequence ^, and one of the transport vehicles 1 2 0 can pass and pass The connection point between the second exit end 152 and the main track 11Λ ^ ^ is set in advance, i; L ^, 11 〇, so that a collision between # 二 hauling trolley 1 2 0 can be avoided. I ”avoids the problem. In summary, the present invention has the following advantages and points: ° 100X special-purpose automatic transfer system dedicated delivery efficiency, and save process time. The comprehensiveness of the impact of automatic transmission = Therefore, the scope of impact can be reduced in the early stage, and it will not operate in the early days. Although the present invention has been limited to the present invention by any means, anyone familiar with this subject is also disclosed above, but it is not intended to be a skilled person without departing from the spirit of the present invention.

0532-9186twf (nl); pt.ap-150; hawdong.ptd Page 12 593097 V. Description of the invention (8) Within the scope of God and God, there can be some changes and retouching, so the scope of protection of the present invention should be considered The attached application patent shall prevail.

0532-9186twf (nl); pt.ap-150; hawdong.ptd Page 13 593097 Brief description of the diagrams Figure 1 is a schematic diagram showing a conventional automated transmission system; and Figure 2 is a parity multi-performer of the present invention Schematic diagram of an automated transmission system. DESCRIPTION OF SYMBOLS 1 ~ Conventional automated conveying system 11 ~ Conveyor rails 12,13,14,15 ~ Transport trolley 16 ~ Wafer loading and unloading module 1 7, 18 ~ Wafer loading and unloading module storage device I 0 0 ~ Multiple locations Automated automatic conveying system II 0 ~ Main runway 120 ~ Transport trolley 1 3 0 ~ Loading and unloading runway 131 ~ First entrance end 132 ~ First exit end 140 ~ Warehouse device 1 50 0 ~ Throttling runway 1 5 1 ~ 2nd entrance end 1 52 ~ 2nd exit end 16 0 ~ emergency exit lane 1 7 0 ~ wafer loading and unloading module 1 8 0 ~ first sequence control device 1 9 0 ~ second sequence control device

0532-9186twf (nl); pt.ap-150; hawdong.ptd Page 14

Claims (1)

5930SCL · Amendment No. 92105452; Amendment A on day 6. Application for a patent I Tuwei 1. A co-location multi-actuated automatic conveying system, including: a main track; a plurality of carrying trolleys traveling on the main track; a loading and unloading track with a first The entrance end and a first exit end, among which the first entrance end passage, which carries a thing through the trolley system, the passage, which passes through the trolley system 2. Send the system end and the sequence. 3. Send the system to the end. Waiting for the transportation by the first warehouse to load the material; Throttling rails for the second-class transportation for the emergency retreat through the application, including the main track and the first exit end system connected to the main rail trolley system via the first An entrance end enters the loading and unloading track, and the end enters the main track; it is placed beside the loading and unloading track, wherein the handling lanes are docked at the storage device to load or unload an exit, and a loading and unloading track is provided. A second entrance end and a second exit end, the entrance end and the second exit end being connected to the main trolley and entering the throttling track via the second entrance end, and the two exit ends reentering the main track; and The track is connected to the main track, wherein the transportations exit the track in an emergency and leave the main track. The same-position multi-track automatic transmission device described in item 1 of the patent scope includes a first sequence control device, which is arranged at the connection of the first exit and is used to control the passage of the handling trolleys. The co-located multi-track automatic two-pass sequence control device described in item 1 of the connection track of the main track is located at the second exit and is used to control the passage of these handling trolleys. 0532-9186twf1 (nl); pt.ap >150; hawdong.ptd Page 15 593097 ΛΒ_92105452 VI. The scope of the patent application is amended The material is a wafer loading module. Legendization, / / ★ Declared in the same multi-execution automated transmission U 糸 〃 described in the first patent scope, the storage device is a wafer-based module storage device, and / / from the scope of patent application The parity multi-action auto described in item 1 is 1 only. 11 糸. Among them, the #handling trolley is a 0HS (over ~ head shuttle) plastic handling trolley. , 矣 Λ 如!同 The same-position multi-track automatic transmission system described in item 1 of the patent scope u 糸 ,,, ',, and medium. These transportation trolleys are 0HT (〇ver-head hoist, overhead elevated transportation system) type transportation trolleys. It is the same as the multi-track automatic transmission system described in item 1 of the patent scope, including a robot arm, which is installed on the loading and unloading lane and the storage " 9 for loading or unloading the material in these Carriage of trolleys. : • A co-location multi-execution automatic transmission method,:. Track, a plurality of handling trolleys, an F unloading track, a ^ for having a mainstream roadway and an emergency exit: = set,-section, the material handling trolley is at = = = = = the track has a -first entrance end And a first exit and the first exit end are connected to the main track two; an entrance end is next to the loading and unloading track, and the throttling track has one or two layers: The entrance and the second exit include the following steps: * On the 3 Hai main track, this method involves moving the handling trolleys when they need to load or unload materials, 0532-9186twfl (nl); pt. ap-150; hawdong.ptd page 16 amended the case of Yuerishan case No. 921054R9_ ^ 'Patent application scope The transport trolley is introduced into the loading and unloading lane through the first entrance; it is expected that the parking trolleys are docked in the warehouse installation to Loading or unloading the goods into the main rail via the first exit end;: the moving trolleys pass through the second entrance guide rail, which saves the travel time of the moving trolleys; and The trolley is introduced through this second exit end Primary rail; Che ί retreat when such failure of the conveyance carriage, the conveyance carriage guiding people like the emergency, the track to leave the main executors. 1. As described in item 9 of the scope of the patent application, the co-located multi-track automatic transmission is carried out, and the step of docking the transport trolleys in the storage device to load or unload the material further includes a step: The display is loaded with a robotic arm to load or unload the material onto the handling trolleys. The co-located multi-track sigma automation method 2 described in item 10 of the scope of patent application, wherein the robot arm is disposed between the loading and unloading rail storage device. / 、 Layering 1 2 · The same-position, multi-execution type automatic feeding method as described in item g of the patent application scope, wherein the step of transferring the transporting trolleys through the first exit # = to the main track further includes One step: A first sequence control device is used to control the sequence of entry through the main track at the first exit end and the moving platforms traveling on the main track. + 夂 Pass along 1 3 · Parallel multi-track automation as described in item 12 of patent application scope 0532_9186twfl (nl); Pt.aP-150; hawdong.ptd p. 17 / ^ ^-MMt 92105452_ year, month, date, application special --- ^ month->(Special; ^ 方 0 »口 舯 ι, where the first sequence control device is provided in the first and connected with the first The connection point of the main track. As described in item 9 of the scope of the patent application, the co-location multi-execution automation method, wherein, in the step of guiding the transport trolleys to the 4 main track through the second exit end, It also includes a step of entering a second sequence control device to control the passing sequence of the main rails that are introduced into the main rail through the second exit end and that travel on the main rails. 1. 5 If the scope of patent application The same-position multi-track automatic conveying method according to item 14, wherein the second sequence control device is provided at the connection between the second exit end and the main track. 1 6 · As described in item 9 of the scope of patent application The same-position multi-track automatic conveying method described above, wherein the material is a wafer loading and unloading module. 1 7 · The same-position multi-track automatic conveying method described in item 9 of the scope of patent application, wherein the storage device is a Wafer loading module storage device. 1 8 · The same-position multi-track automatic conveying method as described in item 9 of the scope of patent application, wherein the handling trolleys are 0HS (over-head shuttle) plastic handling trolleys. 1 9 · If applying for a patent The same-position multi-track automatic conveying method described in the item 9 of the scope, wherein the handling trolleys are OHT (over-head hoist, lifting overhead track transferring system) type handling trolleys.