TWD176128S - 用於晶圓載運器之襯墊 - Google Patents

用於晶圓載運器之襯墊

Info

Publication number
TWD176128S
TWD176128S TW104305235F TW104305235F TWD176128S TW D176128 S TWD176128 S TW D176128S TW 104305235 F TW104305235 F TW 104305235F TW 104305235 F TW104305235 F TW 104305235F TW D176128 S TWD176128 S TW D176128S
Authority
TW
Taiwan
Prior art keywords
design
wafer
support rail
arched
intervals
Prior art date
Application number
TW104305235F
Other languages
English (en)
Inventor
Barry Gregerson
Jason Steffens
Russ Raschke
Original Assignee
安堤格里斯公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 安堤格里斯公司 filed Critical 安堤格里斯公司
Publication of TWD176128S publication Critical patent/TWD176128S/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1911—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like
    • H10P72/1912—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like characterised by shock absorbing elements, e.g. retainers or cushions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1921—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)

Abstract

【物品用途】;本設計係關於一種用於晶圓載運器之襯墊。;【設計說明】;本設計之特點在於包含一拱形長形體，拱形長形體內鄰近二長側邊處各設有一支撐軌道，使各支撐軌道分別連結二短側邊。其中，二支撐軌道所夾設之區域內具有複數間隔設置之拱形形狀的晶圓嚙合段，且於各支撐軌道下方形成有複數間隔設置之向下延伸的細長錐形叉形部。藉由上述襯墊之形狀特徵，使得本設計之整體造型產生俐落且富有層次感之視覺意象，並對消費者產生獨特之視覺效果。;本設計物品於實際使用時，可藉由拱形形狀的晶圓嚙合段容置及保護所載運之晶圓的周緣，以防止載運晶圓時，因錯位或串槽所可能產生之損壞。
TW104305235F 2010-03-11 2011-03-11 用於晶圓載運器之襯墊 TWD176128S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US31271810P 2010-03-11 2010-03-11

Publications (1)

Publication Number Publication Date
TWD176128S true TWD176128S (zh) 2016-06-01

Family

ID=44564174

Family Applications (3)

Application Number Title Priority Date Filing Date
TW104305235F TWD176128S (zh) 2010-03-11 2011-03-11 用於晶圓載運器之襯墊
TW100108271A TWI508905B (zh) 2010-03-11 2011-03-11 晶圓載運器
TW104127340A TWI554455B (zh) 2010-03-11 2011-03-11 晶圓載運器

Family Applications After (2)

Application Number Title Priority Date Filing Date
TW100108271A TWI508905B (zh) 2010-03-11 2011-03-11 晶圓載運器
TW104127340A TWI554455B (zh) 2010-03-11 2011-03-11 晶圓載運器

Country Status (9)

Country Link
US (2) US9472431B2 (zh)
EP (1) EP2544965B1 (zh)
JP (1) JP2013522885A (zh)
KR (1) KR20130054246A (zh)
CN (1) CN102883973B (zh)
MY (1) MY159162A (zh)
SG (1) SG184004A1 (zh)
TW (3) TWD176128S (zh)
WO (1) WO2011113033A2 (zh)

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USD740031S1 (en) * 2010-10-19 2015-10-06 Entegris, Inc. Substrate container
JP5881436B2 (ja) * 2012-01-27 2016-03-09 信越ポリマー株式会社 基板収納容器
SG11201406449YA (en) * 2012-04-09 2014-11-27 Entegris Inc Wafer shipper
CN103474383A (zh) * 2013-09-06 2013-12-25 济南科盛电子有限公司 一种硅片盒
EP3234991B1 (en) * 2014-12-18 2021-07-07 Entegris, Inc. Wafer container with shock condition protection
TWM510539U (zh) * 2015-03-13 2015-10-11 安堤格里斯公司 使用於膜架傳送裝置的修改彈簧墊
US10832927B2 (en) * 2015-12-18 2020-11-10 Texas Instruments Incorporated Interlocking nest wafer protector
JP6673185B2 (ja) * 2016-12-22 2020-03-25 株式会社Sumco 緩衝材
CN106743648A (zh) * 2016-12-25 2017-05-31 信宜市茂森科技实业有限公司 圆形玻璃转运架
TWI615335B (zh) * 2017-03-24 2018-02-21 奇景光電股份有限公司 晶圓卡匣及其製造方法
US10811292B2 (en) * 2018-09-12 2020-10-20 Texas Instruments Incorporated Transport packaging and method for expanded wafers
EP3667711A1 (en) * 2018-12-11 2020-06-17 University of Vienna An arbitrary-distance sample transfer in ultra-high vacuum
CN109686689B (zh) * 2018-12-14 2020-09-29 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 晶圆片装卸装置
CN120709206A (zh) * 2019-07-19 2025-09-26 恩特格里斯公司 晶片缓冲器及支撑晶片的方法
CN111300838A (zh) * 2020-02-28 2020-06-19 北京市塑料研究所 晶圆承载器的制造方法及晶圆承载器
KR102829296B1 (ko) * 2020-05-19 2025-07-02 미라이얼 가부시키가이샤 기판수납용기
CN111769067B (zh) * 2020-07-23 2025-03-25 三和技研股份有限公司 晶圆缺口整平装置
US20230260812A1 (en) * 2020-08-11 2023-08-17 Entegris, Inc. Cassette hold down
KR102808056B1 (ko) * 2020-10-02 2025-05-16 엔테그리스, 아이엔씨. 웨이퍼 용기 및 이를 위한 크기 적응 시스템
KR102772450B1 (ko) 2020-12-15 2025-02-26 주식회사 엘지에너지솔루션 전지 셀 운반용 내부 트레이 및 이를 구비한 전지 셀 운반용 트레이
CN113636195B (zh) * 2021-07-16 2023-04-18 极研(福建)信息科技有限公司 一种用于嵌入式智能芯片的封装盒
CN114743905B (zh) * 2022-04-19 2023-11-17 荣耀半导体材料(嘉善)有限公司 一种半导体晶片收纳容器
KR20250019627A (ko) * 2022-05-31 2025-02-10 미라이얼 가부시키가이샤 기판수납용기 및 뚜껑측 기판지지부
TWI847803B (zh) * 2023-07-19 2024-07-01 鼎洲科技股份有限公司 晶圓儲存盒
CN121511681A (zh) * 2023-07-19 2026-02-10 未来儿股份有限公司 基板收纳容器
CN121511682A (zh) * 2023-07-19 2026-02-10 未来儿股份有限公司 基板收纳容器

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Also Published As

Publication number Publication date
CN102883973B (zh) 2016-02-24
KR20130054246A (ko) 2013-05-24
WO2011113033A3 (en) 2012-01-05
JP2013522885A (ja) 2013-06-13
US10276414B2 (en) 2019-04-30
TW201206791A (en) 2012-02-16
TW201545959A (zh) 2015-12-16
EP2544965A4 (en) 2016-12-07
EP2544965B1 (en) 2019-05-22
US20170062253A1 (en) 2017-03-02
MY159162A (en) 2016-12-30
US9472431B2 (en) 2016-10-18
CN102883973A (zh) 2013-01-16
SG184004A1 (en) 2012-10-30
TWI508905B (zh) 2015-11-21
EP2544965A2 (en) 2013-01-16
TWI554455B (zh) 2016-10-21
WO2011113033A2 (en) 2011-09-15
US20130056389A1 (en) 2013-03-07

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