TWI267939B - Alignment method and apparatus, lithographic apparatus, device manufacturing method, and alignment tool - Google Patents

Alignment method and apparatus, lithographic apparatus, device manufacturing method, and alignment tool Download PDF

Info

Publication number
TWI267939B
TWI267939B TW094121304A TW94121304A TWI267939B TW I267939 B TWI267939 B TW I267939B TW 094121304 A TW094121304 A TW 094121304A TW 94121304 A TW94121304 A TW 94121304A TW I267939 B TWI267939 B TW I267939B
Authority
TW
Taiwan
Prior art keywords
substrate
alignment
mark
image
radiation
Prior art date
Application number
TW094121304A
Other languages
English (en)
Chinese (zh)
Other versions
TW200625500A (en
Inventor
Joeri Lof
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Publication of TW200625500A publication Critical patent/TW200625500A/zh
Application granted granted Critical
Publication of TWI267939B publication Critical patent/TWI267939B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7084—Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7007—Alignment other than original with workpiece
    • G03F9/7015—Reference, i.e. alignment of original or workpiece with respect to a reference not on the original or workpiece

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW094121304A 2004-07-09 2005-06-24 Alignment method and apparatus, lithographic apparatus, device manufacturing method, and alignment tool TWI267939B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/887,311 US7292339B2 (en) 2004-07-09 2004-07-09 Alignment method and apparatus, lithographic apparatus, device manufacturing method, and alignment tool

Publications (2)

Publication Number Publication Date
TW200625500A TW200625500A (en) 2006-07-16
TWI267939B true TWI267939B (en) 2006-12-01

Family

ID=35159717

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094121304A TWI267939B (en) 2004-07-09 2005-06-24 Alignment method and apparatus, lithographic apparatus, device manufacturing method, and alignment tool

Country Status (7)

Country Link
US (1) US7292339B2 (de)
EP (1) EP1615077A3 (de)
JP (1) JP4373376B2 (de)
KR (1) KR100697298B1 (de)
CN (1) CN1725112A (de)
SG (1) SG119276A1 (de)
TW (1) TWI267939B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050118532A1 (en) * 2003-11-14 2005-06-02 International Business Machines Corporation Back to Front Alignment with Latent Imaging
US7420676B2 (en) * 2004-07-28 2008-09-02 Asml Netherlands B.V. Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus
US7251018B2 (en) 2004-11-29 2007-07-31 Asml Netherlands B.V. Substrate table, method of measuring a position of a substrate and a lithographic apparatus
US7675606B2 (en) * 2006-05-05 2010-03-09 Asml Netherlands B.V. Lithographic apparatus and method
US20090128792A1 (en) * 2007-10-19 2009-05-21 Asml Netherlands B.V. Lithographic apparatus and method
US9052604B2 (en) * 2008-11-06 2015-06-09 Micron Technology, Inc. Photolithography systems and associated alignment correction methods
US8354678B1 (en) 2011-07-11 2013-01-15 International Business Machines Corporation Structure and method for forming a light detecting diode and a light emitting diode on a silicon-on-insulator wafer backside
CN103576467B (zh) * 2012-08-10 2016-02-03 上海微电子装备有限公司 一种对准装置及对准方法
KR102145884B1 (ko) * 2012-12-24 2020-08-20 삼성디스플레이 주식회사 레티클, 이를 포함하는 노광 장치, 및 노광 방법
CN105474104B (zh) * 2013-08-26 2017-10-10 株式会社村田制作所 曝光装置
JP6115543B2 (ja) * 2014-10-30 2017-04-19 ウシオ電機株式会社 アライメント装置、露光装置、およびアライメント方法
CN106610570B (zh) * 2015-10-21 2020-11-13 上海微电子装备（集团）股份有限公司 一种实现运动台定位的装置及方法
US10485590B2 (en) * 2017-01-18 2019-11-26 K2M, Inc. Rod reducing device
JP6980562B2 (ja) * 2018-02-28 2021-12-15 キヤノン株式会社 パターン形成装置、アライメントマークの検出方法及びパターン形成方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5843831A (en) 1997-01-13 1998-12-01 Taiwan Semiconductor Manufacturing Company, Ltd. Process independent alignment system
US6376329B1 (en) * 1997-08-04 2002-04-23 Nikon Corporation Semiconductor wafer alignment using backside illumination
JP3336955B2 (ja) 1998-05-26 2002-10-21 ウシオ電機株式会社 裏面アライメント機能を備えた露光装置
EP1406126A1 (de) 2001-01-15 2004-04-07 ASML Netherlands B.V. Verfahren zur Herstellung einer Vorrichtung
KR100579603B1 (ko) * 2001-01-15 2006-05-12 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치
US6525805B2 (en) 2001-05-14 2003-02-25 Ultratech Stepper, Inc. Backside alignment system and method
TW594431B (en) 2002-03-01 2004-06-21 Asml Netherlands Bv Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods
US6782160B2 (en) * 2002-04-10 2004-08-24 Lockheed Martin Corporation Optical-signal coupler and related method
US7130049B2 (en) * 2003-12-24 2006-10-31 Asml Netherlands B.V. Method of measurement, method for providing alignment marks, and device manufacturing method

Also Published As

Publication number Publication date
TW200625500A (en) 2006-07-16
US7292339B2 (en) 2007-11-06
EP1615077A3 (de) 2006-01-25
KR100697298B1 (ko) 2007-03-20
EP1615077A2 (de) 2006-01-11
KR20060049974A (ko) 2006-05-19
JP2006024944A (ja) 2006-01-26
CN1725112A (zh) 2006-01-25
SG119276A1 (en) 2006-02-28
JP4373376B2 (ja) 2009-11-25
US20060007441A1 (en) 2006-01-12

Similar Documents

Publication Publication Date Title
JP3693654B2 (ja) 較正方法、較正基板、リソグラフィ装置およびデバイス製造方法
TWI332118B (en) Lithographic apparatus and device manufacturing method
TWI237744B (en) Level sensor for lithographic apparatus
US9116439B2 (en) Illumination system and lithographic apparatus
US20090115987A1 (en) Position measurement system and lithographic apparatus
TWI267939B (en) Alignment method and apparatus, lithographic apparatus, device manufacturing method, and alignment tool
EP3117270B1 (de) Substrathandhabungssystem und lithografische vorrichtung
TW200921083A (en) Lithographic apparatus and device manufacturing method
TW200840988A (en) A method of measurement, an inspection apparatus and a lithographic apparatus
TW200540574A (en) Method of measurement, method for providing alignment marks, and device manufacturing method
TW200305928A (en) Exposure apparatus and method
TW201937313A (zh) 圖案形成裝置、對齊標記檢測方法和圖案形成方法
KR101185462B1 (ko) 리소그래피 장치 및 디바이스 제조 방법
KR100724050B1 (ko) 기판에 대한 정보를 측정하는 방법 및 리소그래피 장치에서사용하기 위한 기판
JP2001244194A (ja) リソグラフィ装置に使用するアッベ・アーム較正システム
TWI326016B (en) Focus determination method, device manufacturing method, and mask
TW200533887A (en) Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby
US7398177B2 (en) Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification method
EP1341046A2 (de) Kalibrationsverfahren, Kalibrationssubstrate, lithographischer Apparat und Verfahren zur Herstellung von Artikeln
TWI251129B (en) Lithographic apparatus and integrated circuit manufacturing method
JP2007208240A (ja) 基板テーブル、基板位置の測定方法、およびリソグラフィ装置
TW200527157A (en) Method of preparing a substrate, method of measuring, device manufacturing method, lithographic apparatus, computer program and substrate
JP3919719B2 (ja) アライメントツール、リソグラフィ装置、アライメント方法、デバイス製造方法、およびそれにより製造されたデバイス
TWI285794B (en) Device and method for manipulation and routing of a metrology beam
JP2004356411A (ja) 位置計測方法及び装置、露光方法及び装置、並びにプログラム

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees