1282998 九、發明説明· 【發明所屬之技術領域】 本發明是有關於一種光照射裝置，且特別是有關於一 種照射從激發式氣體分子燈(excimer lamp)等紫外線燈所 放射之紫外線的光照射裝置。 【先前技術】 激發式氣體分子燈例如在使用氙作為放電用氣體的情 況下，放射出中心波長為172nm的高能量的真空紫外線。 此處，把50nm以上、20〇nm以下範圍的紫外線稱為所謂 真空紫外線。因為在空氣中照射這個真空紫外線的話會產 生臭氧，藉由這種臭氧和透過的真空紫外線的相乘效果， 可分解去除玻璃基板等表面的有機物等並將其洗淨。 此，紫外線照射裝置的光源常常用來取代主要放射波長為 185mn和254nm的紫外線的低壓水銀燈，對液晶顯科置 的玻璃基板和半導體單結晶板等進行精密沖洗。 哭^ 錢體分伟是在合成石英麵製的放電笔 :衣入放f用乳體’藉由加以高頻的高賴使之 V臨界放電而放射真空紫外線。過去，如 起謂 2=39她v報上發表的一樣， 工:： 回同吕和小徑的圓筒管做放電容器。^重、，、。構的 日本專利特開2_•細3% =近則採用如 種採用方形箱子形的放電㈣=的那樣，開發-;樣的方形箱子形的放電容器，能燈。因為 /洗的液晶表示裝置的朗基板或半導^^容器到精密 早日日板等表面的 12093pifl.doc 5 1282998 距離一定，所以使易在空氣中衰減的真空紫外線能均一照 f到其表面。採用這樣的放電容器的激發式氣體分子燈， ^近’因為做為精密沖洗對象的液晶表示裝置的玻璃基板 等的^寸變大到了 lm方以上，有必要將燈做長些。因此， 放電谷為的寬度儘管是數十mm左右，但長度要製成像超 ，的極為細長的情況也不少，而這種情況下，激發式 氣^分子燈較易破損。同時，如第5圖表示的那樣，紫外 射裝置是把安裝有複數根激發式氣體分子燈1的鋁製 燈室2安置在搬送進行做精密沖洗的玻璃基板3的傳輸帶 4的上面，藉由鉸鏈2a使之可在這個傳輸帶4上面開合。 因此，激發式氣體分子燈i的兩端部被固定在燈室2上的 $ ’在開合燈室2的時候，因其本身的重量而使得整個框 生扭曲，使激發式氣體分子燈1也被加以使之扭歪的 1量。為此，如果激發式氣體分子燈！被用於作為紫外線 恥射裝置時，其將不能承受那個使之扭歪的力，當開人严 ^時，就會使燈損壞，這是第—個問題。同時，在^ 發和小徑的圓筒管組成的放電容器的激 ^式乳體刀子燈中，由於電極的形狀和配置的不同 ς周圍放射的真空紫外_強度分佈不均―，在這種情況 :能===置預先相對於光源盒固定，則 方开玻璃基板等’特別是在採用 即’採用方形箱子形的放電容器的激發式氣= 足的十月況下’比起採用圓筒管的放電容器的激發式氣體分 12093pifl.doc 6 1282998 子燈，雖然有從燈的側面到精密沖洗用的玻璃基板等的距 離為一疋這樣的長處，但是從其形狀的特點看，從燈的全 體向周圍放射的真空紫外線的強度分佈不均一。因此，如 ，不、、隹持燈的位置對燈室固定，就不能均勻沖洗玻璃基板 =1且’因為真空紫外線在空氣中易衰減，激發式氣體 刀子垃被配置在接近精密沖洗用的玻璃基板等位置，如果 =把採財形箱子形的放電容^的激發式氣體分子燈的位 置=固定，則激發式氣體分子燈與精密沖洗用的玻璃基 二说=接_危險°然而’如果使放電容器的位置相對 Γt、轉固疋’則如前述那樣，激發式氣體分子燈 产二，於燈室的開關時候的扭歪的力量，有損壞的 危險。如上所述，存在第一問題和第二問題。 本發明就是針對這樣的問題而 =射裝置，即使當㈣施加於燈室時的=二 =二其:的也在於提供光照射裝置，== 【=二至上’並能均-放射光。 上設=== 射裝置，其特徵是-燈室 -個支持“可==持持部中至少* 被限制轉動而支撐燈。 、’至^有一個支持部是 動來可轉，他方限制轉 歪力’既防止了燈的破損危險二制二轉=; 12093pifi#(joc 7 1282998 燈的固轻置，使絲均―照射。特別 3= ㈣，一端蝴著能以燈的長的方向: =而來支_。以這樣的構造，即使 支撐著 消失 被加以微量的扭曲力’因為另—端被可轉動地 ’糟由燈全體的微小轉動，從而使燈上產生的扭歪 Α同時’即使職扭雜施加於燈的其他邊部的支持 由於這個其他邊部被騎可能地被支撐著，扭力傳不 ί、、Γ上。因此’無論哪種情況，扭歪力都加不到燈上，也 損的危險。再者，這裡所說的「限制轉動」是指 動谷巧―定精度誤絲_的例如像_等的轉動和移 ，但是不容許超過這個範圍的轉動和移動。 申請專利朗第2項的光㈣裝置是對於專利申請範 項所⑨述的光照概置’所賴能轉動可能地支樓 =饩6持部，其特徵是··具備安裝在燈上的嵌口構件和安裝 :至上的銜接構件，嵌口構件和銜接構件之 成有可轉動的嵌合結構。 在4據此發明，能轉動可能地支撐燈的支持部的旋轉處， 在=〇構件和銜接構件的一處是可動的嵌合結構，所以能 能::構i牛和銜接構件之間，使之具備一個簡單地旋轉機 =部、2部。嵌合結構，例如是具有斷面為圓形的凸部和 ϋ的結構。同時’無論那一方斷面的形狀都能作成多角 8 I2093pifl.doc 1282998 圍第1工^利範圍第3項的光照射裝置，針於直由 Μ弟1項所記述的来心㈣=直對於專利申請範 的支持部，复特…、射裝置’所述的轉動可能的支樓燈 接構件和燈具^钱到燈室上的_構件1 根據這=有：處形成有可轉動的嵌合結構。 是銜接構件和燈=月_：=的支擇，支持部的旋轉處， 在銜接構件和燈門動的肷合結構，所以，可能 1申請專利範圍4:: = :^^ 支持部，其特忿二1:限!轉動的支撐燈的 到燈室上的銜接m ^ :、且上的肷口構件和被安裝 上形成有嵌❹構件和銜接構件之間有二處以 t這個發明’嵌口構件和 構二:=單地限制轉動的機能。二處 或多角形。的凸部和凹部構成，其斷面形狀可為圓形 ~申睛專利範圍第5項的光照 靶圍第1項的光照射裝置中，所述^ 〜〔申請專利 支持部，其特徵是··具備安裝在 而支撐燈的 燈室上的銜接構件，嵌口構件和婦安裝到 型的嵌合結構。 娜之咖成有非圓 根據這個發明，欲口構件和銜接構件 相嵌合，從而能簡單地使之限制轉動。這=的所面 的歲合結構」，具有斷面為非圓形的凹部和凸部之形 12093pifl.doc 9 1282998 只要能限制轉動就可以了以 也可以，孽如右二 /、乂狀右為圓以外的形狀 申心剎ΐ二角四角形等的多角形和橢圓形等。 述燈的形㈣林光縣打+’其特徵是上 放電:有曲面形狀的圓筒管的 玻璃基板表面的距離f與要精密沖洗的對象- 身重量使燈室產生^曲、二=果’即使由於燈室的本 食採用圓〜 不會損壞燈自身。即，本發明 效果。同官的放電容器的燈相比，能得到更顯著的相關 關之利;置’其為具備有可開 置，JL特徵^ :至中，、有方4的—燈之光照射裝 以燈軸為I 、—端續於贿室上，且該燈能 上Γ且外二進打轉動；該燈的另—端支持於該燈室 :置Ϊ 方向平行的假想直線，且位於該燈的重心 為讓本發明之上述和其他 易懂，下文特舉一較佳實施例 說明如下。 目的、特徵和優點能更明顯 ，並配合所附圖式，作詳細 【實施方式】 此根==，詳細說明為實施本發日㈣較佳實施形態。 在’弟1®衫林發_-個實_之激發式氣體分 12093pifl.doc 10 1282998 子燈的女褒構造的斜視圖。第2圖是表示本發明的一個實 施例之女裝有激發式氣體分子燈的紫外線照射裝置的構造 的縱斷面正面圖。第3圖是表示本發明的一個實施例之具 有不同形狀嵌口的另一實例的激發式氣體分子燈的斜視 圓。第4圖表示採用方形箱子形放電容器的激發式氣體分 子燈之一個實例的斜視圖。第5圖是表示使用激發式氣體 为子;^且的务、外線照射裝置構造的斜視圖。無論在那個的圖 中’ 1表示激發式氣體分子燈、la表示放電容器、lb表示 電極、lc表示電極、2表示燈室、5表示嵌口、兄表示凹 部、6表示嵌口、6a表示凹部、7表示銜接構件、％表示 凸部、8表示銜接構件及8a表示凸部。 。。在此，以使用了具有薄而細長的方形箱子形的放電容 器la的激發式氣體分子燈丨的紫料照職置作為例子加 ^兒明。這個激發式氣體分子燈丨是❹如第4圖所示的 薄而細長的方形箱子形的放電容n la。此放電容器^是 把橫截面為寬幅的薄方形的長的合成石英玻璃管的兩端塞 住，向内部填充氣氣而製成的，其呈薄而細長的方形箱子 形。該放電容H la在其平坦的上和下面上分別形成有金屬 薄翻案而作為電極lb，le。放電容器la上面㈣極^ 是幾乎被形成於幾乎整個平坦的上表面，但下面的電極k 則被做成魏狀的圖案，而料_可以從這個網眼的間 隙照射到下面去。在這樣的放電容器上，如第1圖所示， 各自在兩端部安裝有陶聽的嵌σ構件5、6。喪口構件5、 6相對的側面是開π的方形的容敝，激發式氣體分子燈i 12093pifl.doc 11 1282998 的兩端部就嵌入於這些開口部。同時，一側（第丨圖的左下 方）的喪口構件5在與開口部相反的側面的兩端被形成圓 孔狀的凹部5a;另一側（第1圖右上方)的嵌口構件6在與 開口部相反的側面的中央部形成圓孔狀的凹部6a。這些的 嵌口構件5、6，圖示雖省略，但在内部被固定連接在激發 式氣體分子燈1上的電極lb、lc的接線被拉出。同時，紫 外線照射裝置，如第2圖所示，在鋁製的燈室2的下部， 併，安裝了複數根激發式氣體分子燈1。燈室2在比激發 式氣體分子燈1長得多的長形燈室基板2b的下部，其周圍 以下邛側壁2C遮盍住，同時，燈室基板以的上部四周由 上部側壁2d遮蓋住。並且，在燈室基板2b的下方的下側 壁^的内側安裝有複數根激發式氣體分子燈1，同時在這 板2b上的上部儀2d _設置有這些激發式氣 :刀子k 1的電源部2e¥。而且，這個燈室2藉由安裝在 光源基板2b侧端而未圖示的鉸鏈被安裝到傳輸帶4 ^上 :子ΪΠ專= 帶4的上面可以開關。上述各激發式氣體 且，被各自用一對安裝構件7、8安裝 左:藉 構件8 St9 向。另一（第2圖右側)安褒 α疋在光源基板2b下方的右側 ，不’被絲於朝向安裝構件二如= 安裝構件7 ^下方)的 有上述嵌π構件5的㈣" '感77托1，在其一端裝 的凹邛5a，在與凹部5a相嵌合的2處 12093pifid〇c 12 上‘⑽98 的凸部7a、7 安裝構件8的H成突狀；在另一側(第1圖的右上方)的 裝在激發式氣體^^設有1處的凸部％，其可與被安 凹部6a相叙合。並 山的另^上的上述嵌口構件β的 件5和安裳構H、嵌口構件6和安裝構件8及嵌口構 8的與燈室相銜接的tlirr部分。包括安裝構件 裳構件7的藉由朝向處支持部，同時，包括安 處支持部。 ⑽至的彈黃9、9的安震部分構成另一 分子‘ 1，—丄使燈】、、、卜在 a射裝置上安裝激發式氣體 端部的嵌口構件5H一 ^相對於燈室2逐漸傾斜，把 時，使凸部7a向凹冑5 7上的同 體分子燈！推向H y其；;，料把激發式氣 9。並且，把絲麵 件迫彈簧9、 1牛6配置在安裝構件8的前二:二:端::嵌口構 氣體分子燈1向其另一側 /㈣夏9 ’而使激發式 8a向嵌口構件6的 ^而使安震構件8的凸部 2b上的電源部2e上，則安裝完成。 的尾至基板 分子從射裝置上的各激發式氣趙 極lb、1C Η，而的高頻的高電愿施加在電 卜：二：器13的底部向下方放射直3 外線。亚且，猎由搬送在紫外綠日刀 ，、工系 輸帶4上面的玻璃基板3 :能使個^下方的载置在傳 使乂個破璃板3的表面照射 12093pifl.doc 13 1282998 到真空紫外線而完成精密沖洗。 這時，激發式氣體分子燈1放射的是波長為172nm的 面月匕真空紫外線’因其在空氣中立刻哀減，所以需要使放 電容為la的底部和玻璃基板3的表面的間隔控制在3mm 以下的極短的一定間隔。即，如果玻璃基板3被水平搬送， 激發式氣體分子燈1的放電容器la的底部在所定高度位置 也需要保持水平狀態，為不使這個激發式氣體分子燈1的 雨端的任何一端偏離水平狀態或產生旋轉，激發式氣體分 子燈1必須被支撐於燈室上。 因此’對來自激發式氣體分子燈1的兩端部的水平狀 悲的偏差’藉由對後口構件5、6的凹部5a、6a與欲入構 件7、8的凸部7a、8a的嵌合來限制上下位置，對於沿激 發式氣體分子燈1的長轴中心的旋轉，藉由一處的嵌口構 件5的2處凹部5a與嵌入構件7的2處凸部％的嵌合來 限制旋轉。上述燈室2，因為藉由鉸鏈使在傳輸帶4上可 乂開關，這個開關操作的時候，既長又比較薄的燈室基板 2b，有時因燈室2的本身重量而在兩端部間產生扭曲。因 ，扭曲傳到某一嵌接構件7上，藉由2處的凸部7a與凹 4 5a的嵌合，即使激發式氣體分子燈丨在一端被受到扭 ，，，另一側嵌口 ό因對於嵌接構件8只在丨處的凹部如 部8a的圓形的嵌合，而可以轉動，所以這個激發式氣 —刀子燈1本身只以小角度繞長軸中心轉，而不在兩端 紐歪。 相反，如果扭歪力傳到另一側的嵌接構件8的情況 12093pifl.doc 14 1282998 Γ的因圓嵌^構件8對嵌口構件6只在1處以凸部8a和凹部 子燈1 耿合’而可轉動，所以不會使激發式氣體分 板^取歪。因此，即使燈室2的開關操作使燈室基 了访Φ曲^数發式軋體分子燈^也不會被扭曲’防止 电各器la的破損。 哭1^上述實施形11中，描述了使时形箱子形的放電容 激發式氣體分子燈1，不過，用於本發明的放電容 二，H用任何形狀都可以。譬如，雙重結構的圓筒管等形 狀’,11用了以軸中心的迴轉體組成的放電容器1&時，安 衣到燈室2上之後，即使沿這個軸心旋轉了，真空紫外線 向圓2方向以均一的強度放射，即使是這樣的放電容器 la :如用半圓筒狀等的電極，由於電極的形狀和配置等 1不同，而有時使得真空紫外線的輻射分佈產生變化。此 時，限制放電容器la產生旋轉的支撐是必要的。同時，放 電容器la不局限於象圓柱型和方形一樣的直線形的東 西，譬如像U字管等一樣的彎的形狀的也可以。但越是當 扭歪力施加於兩端而容易破損的長形放電容器u，本發明 就更有效地得到實施。 同時，上述實施形態，表示了在空氣中配置激發式氣 體分子燈1的開放型的紫外線照射裝置，不過，即使是在 激發式氣體分子燈的周圍用充滿氮氣的紫外線照射裝置的 情況，在安裝上燈室2之後’激發式氣體分子燈1沿轴中 心旋轉，真空紫外線的輻射分饰若產生變化，則實際照射 在玻璃基板3上的真空紫外線也會產生不均勻的現象。在 15 12093pifl.doc 1282998 這樣的情況下，其支撐也有必要限制放電容器la旋轉。 上述實施形態，表示用嵌口構件5、6包圍激發式氣體 分子燈1的兩端周圍，不過如第3圖所示，也可適用縱斷 面呈匸字形，比放電容器la幅度窄的嵌口構件5、6。因 為用這樣的嵌口構件5，6的話，可防止這些嵌口構件5、 6在放電容器ia的寬度方向的過分突出，從而能在這個寬 度方向沒有間隙地羅列配置激發式氣體分子燈i。 在上述實施形態中，雖然只表示了在激發式氣體分子 燈1的肷口構件5、6上設置圓孔狀的凹部5a、6a，在嵌 接構件7、8上設置凸部7a、8_情況，不過，各自反過 來設置這些凹部和凸部，而使之嵌合也可以。並且，嵌口 和銜接構件7,因為只要能限制激發錢體分子燈1 :轉f尤可以了，即使是使之在3處以上設置有凹部和凸 多5或橢圓形的凹部和凸部使之喪合而限 : Γγ嵌口構件5和銜接構件7，因為只 其他凹部和凸部嵌合的任意可=採: 螺釘或鑲嵌等方法也可以固定。 " s 銜接構件8使激發式氣體分子燈=轉=嵌合構件6和 用凹部與凸部相嵌合以外的任音可以’所以採 時，也可以使一側的嵌口構件;手段也可以。同 限制另-侧的嵌口構件6和銜接1構件7能轉動，而 簧9除了能安裝到銜接構件7的一的轉動。並且，彈 一側的銜接構件8上，或同時 ^以外’也可安裝到另 衣至】衡接構件7、8上也可 12093pifl.doc 16 1282998 以。而且，不一定必須要用山 體分子燈丨，也可以來支撐激發式氣 支 置 同時，所謂這鑛料氣體分子^料7、8的安裳方法。 限於燈的較長方向兩端足1的兩端部，不—定只 樓’由於激發式氣體分；燈i 在較長方向兩端部 的扭歪▲力，則更能顯示出^明到紫外線照射装 所謂限制轉動和移動，嬖 間隙等的-定範圍内的轉動;移 過這個範圍的轉動和移動。 疋合汗的仁不谷卉超 同時’在上述實施形能中站一 皙屏障放雷二心、中頒不了關於利用的是電介 貝胁放式讀分子奸 激發式氣體分子燈1的光日績^ 外線的 的九…射衣置，不過，用哪樣的種類 的燈都相’譬如，齡其他的激發式氣體分子發光的燈， 激發式氣體分子發私外的健水麵料料線燈同樣 也能實施。並且，在上述實施形態中，表示了關於使用紫 外線燈放射的紫外線作為精密沖洗手段，不過，即使是燈 被用於其他的用途時，同樣可以實施。 且 產業上利用的可能性： 根據本發明，可以製造一種紫外線照射裝置，其可抑 制伴隨開關燈室而造成的燈破損。同時，燈的安裝位置， 也可以被製成相對與燈室維持固定。這樣的紫外線照射裝 置’此作為譬如進行玻璃基板和半導體集成回路等的精密 沖洗的紫外線照射裝置等使用，從而被產業上利用。 雖然本發明已以較佳實施例揭露如上，然其並非用以限定 12093pifl.doc 17 1282998 ^發明’任何熟習此㈣者，在不麟本發明 圍内，當可作些許之更動與溷 ^ 月砷和乾 當視後附之申請專利範圍所界定準/之保護範圍 【圖式簡單說明】 / 第1圖是表示本發明的—個 燈的安裝構造的斜棚。 ^體分子 體分發式氣 口的^是表示本發明的—個實施例之具有不同形狀嵌 一只例的激發式氣體分子燈的斜視圖。 子二採用方形箱子形放電容器的激發式氣體分 卞;且之個貫例的斜視圖。 置構示使用激發式氣體分子燈的紫外線照射裝 【主要元件符號說明】 1 ·激發式氣體分子燈 la •放電容器 lb ' le:電極 2 ： 燈室 5、 6 :嵌口構件 5a 、6a :凹部 7、 8:銜接構件 7a ' 8a :凸部 18 12093pifl.docBACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light irradiation device, and more particularly to a light irradiation of ultraviolet light emitted from an ultraviolet lamp such as an excimer lamp. Device. [Prior Art] An excited gas molecular lamp emits high-energy vacuum ultraviolet rays having a center wavelength of 172 nm, for example, when ruthenium is used as a discharge gas. Here, ultraviolet rays in the range of 50 nm or more and 20 Å nm or less are referred to as so-called vacuum ultraviolet rays. When this vacuum ultraviolet ray is irradiated in the air, ozone is generated, and by the synergistic effect of the ozone and the transmitted vacuum ultraviolet ray, the organic matter on the surface such as the glass substrate can be decomposed and washed. Therefore, the light source of the ultraviolet irradiation device is often used to replace the low-pressure mercury lamp which mainly emits ultraviolet rays having a wavelength of 185 nm and 254 nm, and the glass substrate and the semiconductor single crystal plate of the liquid crystal display are precisely washed. Weeping ^ The money is divided into a discharge pen made of synthetic quartz surface: the emulsion is put into the f', and the vacuum ultraviolet rays are emitted by the high-frequency high-voltage. In the past, as the name 2=39 she published in the report, the work:: Back to the cylindrical tube of the Lu and the small path to make the discharge capacitor. ^重,,,. The Japanese patent special opening 2_•fine 3%=near is developed like a square box-shaped discharge (four)=, a square-shaped discharge vessel, a lamp. Since the distance from the long substrate or the semi-conducting container of the /washing liquid crystal display device to the surface of the precision early day plate is 12093pifl.doc 5 1282998, the vacuum ultraviolet light which is easily attenuated in the air can be uniformly applied to the surface. The excitation type gas molecular lamp using such a discharge vessel is close to the lm side of the glass substrate of the liquid crystal display device which is a target for precision cleaning, and it is necessary to make the lamp longer. Therefore, although the width of the discharge valley is about several tens of mm, the length is required to be super-imaged, and the extremely slender case is also quite large, and in this case, the excited gas molecular lamp is more likely to be broken. Meanwhile, as shown in Fig. 5, the ultraviolet ray apparatus is disposed on the upper side of the transport belt 4 of the glass substrate 3 which is transported for precise rinsing, by mounting the aluminum lamp chamber 2 on which the plurality of activated gas molecular lamps 1 are mounted. It can be opened and closed on this conveyor belt 4 by the hinge 2a. Therefore, both ends of the excited gas molecular lamp i are fixed to the lamp chamber 2 at the time of opening and closing the lamp chamber 2, and the entire frame is twisted due to its own weight, so that the excited gas molecular lamp 1 It is the amount that it is twisted. For this, if the gas molecules are excited! When used as an ultraviolet ray shaving device, it will not be able to withstand the force that makes it twist. When it is opened, it will damage the lamp. This is the first problem. At the same time, in the emulsion type knives of the discharge vessel composed of the cylindrical tube of the small diameter and the small diameter, due to the difference in the shape and arrangement of the electrodes, the vacuum ultraviolet intensity distribution around the ς is uneven. Situation: can === pre-fixed with respect to the light source box, then open the glass substrate, etc. 'especially in the case of the use of the square-shaped discharge vessel of the excitation type of gas = foot in the case of the month' The excitation gas of the discharge tube of the bobbin is 12093pifl.doc 6 1282998 sub-light, although there is such a distance from the side of the lamp to the glass substrate for precision rinsing, etc., from the characteristics of the shape, the lamp The intensity distribution of the vacuum ultraviolet rays radiated to the surroundings is not uniform. Therefore, if, for example, the position of the lamp is fixed to the lamp chamber, the glass substrate cannot be uniformly washed = 1 and 'because the vacuum ultraviolet rays are easily attenuated in the air, the excited gas knife is disposed close to the glass for precision washing. If the position of the substrate is equal to the position of the excited gas molecular lamp of the discharge capacitor of the shape of the box, the excited gas molecular lamp and the glass base for precision rinsing are said to be dangerous. However, if As the position of the discharge vessel is relative to Γt, and the rotation is fixed, as described above, the exciting gas molecular lamp produces a second, and the twisting force at the time of switching of the lamp chamber may cause damage. As described above, there are a first problem and a second problem. The present invention is directed to such a problem that the radiation device, even when (4) is applied to the lamp chamber, is in the form of a light irradiation device, == [= two to upper] and can uniformly emit light. The above-mentioned === shooting device is characterized in that - the lamp room - one supports "may == at least * in the holding portion is restricted to rotate to support the lamp., 'to ^ has a support portion that is movable and can be transferred, and other restrictions Turning force 'protects the risk of damage to the lamp. Two systems and two turns =; 12093pifi# (joc 7 1282998 The light is fixed and light, so that the wire is all-illuminated. Specially 3 = (four), one end can be lighted in the long direction of the lamp : =而来支_. With such a structure, even if the support disappears, a slight amount of twisting force is applied 'because the other end is rotatably' caused by a slight rotation of the entire lamp, thereby causing the twist on the lamp simultaneously 'Even if the support of the other side of the lamp is applied to the other side of the lamp because the other side is supported by the ride, the torque is not transmitted, and the squat is on. Therefore, in either case, the twisting force cannot be increased. On the lamp, there is also a danger of damage. In addition, the term "restricted rotation" as used herein refers to the rotation and movement of, for example, _, etc., but does not allow rotation and movement beyond this range. The light (4) device for applying for patent lang item 2 is for the patent application program. The light profile 'is able to rotate the possible branch = 饩 6 holding part, which is characterized by having a fitting member mounted on the lamp and mounting: the upper connecting member, the fitting member and the engaging member are rotatable According to the invention, according to the invention, the rotation of the support portion which can support the lamp can be rotated, and the movable member is movable at a position of the 〇 member and the engaging member, so that it can be: The connecting members are provided with a simple rotating machine=part and two parts. The fitting structure is, for example, a structure having a convex portion and a circular shape with a circular cross section, and at the same time, the shape of the cross section can be A multi-angle 8 I2093pifl.doc 1282998 The light-illuminating device of the third item of the first working area, the third item, is the heart that is written by the younger brother (4) = the support department of the patent application, the special... The member 1 of the rotating device that rotates the possible branch light connecting member and the lamp to the lamp chamber is formed according to this = there is a rotatable fitting structure. It is the connecting member and the lamp = month _: = the choice, the rotation of the support, the coupling between the connecting member and the lamp door Structure, therefore, may apply for patent scope 4:: = :^^ Support, its feature 2: Limit! The connection of the rotating support lamp to the lamp chamber m ^ :, and the upper jaw member and There are two places between the embedding member and the connecting member formed by the installation of the 'incision member and the second structure:= single ground limit rotation function. Two or polygonal. The convex portion and the concave portion are formed. In the light irradiation device of the first item of the light target of the fifth aspect of the invention, the patent application support unit is characterized in that it has a lamp chamber mounted to support the lamp. The upper engaging member, the fitting member, and the fitting structure of the female fitting type. According to the invention, the mouth member and the engaging member are fitted so as to be able to simply restrict the rotation. This is the old-fashioned structure of the face, which has a concave and convex shape with a non-circular cross section. 12093pifl.doc 9 1282998 As long as the rotation can be restricted, it can be, for example, right second/right For the shape other than the circle, the polygon and the ellipse such as the square corner are applied. The shape of the lamp (4) Lin Guangxian hit + 'characterized by the upper discharge: the distance f of the surface of the glass substrate of the cylindrical tube with a curved shape and the object to be precisely washed - the weight of the body causes the lamp chamber to produce a curved, two = fruit 'Even if the light is used in the light room, the round ~ will not damage the lamp itself. That is, the effect of the present invention. Compared with the discharge lamp of the official, it can get more significant related benefits; set it to have the light that can be opened, JL feature ^: to medium, and square 4 The axis is I, the end continues on the bribe, and the lamp can be turned upside down and the outer two turns to rotate; the other end of the lamp is supported by the lamp room: an imaginary straight line parallel to the direction, and located at the lamp The center of gravity is to make the above and other aspects of the present invention understandable, and a preferred embodiment will be described below. The objects, features, and advantages will be more apparent and detailed with reference to the drawings. [Embodiment] This root ==, and the detailed description is a preferred embodiment of the present invention. An oblique view of the son-in-law structure of the sub-lights of the prince 1® shirt forest hair _- a real _ of the excited gas sub-distribution 12093pifl.doc 10 1282998. Fig. 2 is a longitudinal sectional front view showing the structure of an ultraviolet ray irradiation apparatus having an energetic gas molecular lamp for women in an embodiment of the present invention. Fig. 3 is a squint circle of an excited gas molecular lamp of another example having a different shape of the insert, showing an embodiment of the present invention. Fig. 4 is a perspective view showing an example of an excited gas molecular lamp using a square box-shaped discharge vessel. Fig. 5 is a perspective view showing the structure of an external and external line irradiation device using an excitation gas as a sub-unit. In the figure, '1 denotes an excited gas molecular lamp, 1 denotes a discharge vessel, 1 denotes an electrode, lb denotes an electrode, lc denotes an electrode, 2 denotes a lamp chamber, 5 denotes a fitting, a brother denotes a recess, 6 denotes a fitting, and 6a denotes a recess. 7 denotes a joint member, % denotes a convex portion, 8 denotes a joint member, and 8a denotes a convex portion. . . Here, the use of a purple material illuminating device using an exciting gas molecular lamp 具有 having a thin and elongated square box-shaped discharge capacitor la is taken as an example. This excited gas molecular lamp is a thin and elongated square box-shaped discharge capacitor n la as shown in Fig. 4. This discharge vessel ^ is formed by plugging both ends of a long square thin synthetic quartz glass tube having a wide cross section and filling the inside with air gas, which is in the form of a thin and elongated square box. The discharge capacitor H la is formed with a thin metal film on its flat upper and lower surfaces as electrodes lb, le, respectively. The upper (four) pole of the discharge vessel la is formed almost on the almost flat upper surface, but the lower electrode k is formed into a Wei-like pattern, and the material _ can be irradiated from the gap of the mesh to the lower surface. In such a discharge vessel, as shown in Fig. 1, the yoke members 5 and 6 of the ceramics are attached to both end portions. The opposite sides of the sacrificial members 5 and 6 are rectangular openings of π, and both ends of the excitation gas molecular lamp i 12093pifl.doc 11 1282998 are embedded in these openings. At the same time, the sacrificial member 5 on one side (the lower left side of the second figure) is formed with a circular hole-shaped recess 5a at both ends of the side opposite to the opening; the other side (upper right of the first figure) is a fitting member 6 A circular recessed portion 6a is formed in a central portion of the side surface opposite to the opening. Although the illustration of these fitting members 5 and 6 is omitted, the wires of the electrodes lb and lc which are fixedly connected to the excitation gas molecular lamp 1 inside are pulled out. At the same time, as shown in Fig. 2, the ultraviolet irradiation device is mounted on the lower portion of the lamp chamber 2 made of aluminum, and a plurality of excitation type gas molecular lamps 1 are mounted. The lamp chamber 2 is concealed in the lower portion of the elongated lamp chamber substrate 2b which is much longer than the energized gas molecule lamp 1, and is surrounded by the lower side wall 2C, and the upper portion of the lamp chamber substrate is covered by the upper side wall 2d. Further, a plurality of excitation type gas molecular lamps 1 are mounted inside the lower side wall ^ below the lamp chamber substrate 2b, and the upper unit 2d_ on the plate 2b is provided with the excitation type gas: the power supply unit of the knife k1 2e¥. Further, this lamp chamber 2 is attached to the conveyor belt 4 by a hinge (not shown) attached to the side end of the light source substrate 2b: the upper surface of the belt 4 can be opened and closed. Each of the above-described excitation gas is attached to the left by a pair of mounting members 7, 8 respectively: by means of the member 8 St9. The other (the right side of Fig. 2) is mounted on the right side below the light source substrate 2b, and is not 'wired toward the mounting member (e.g., below the mounting member 7^), and has the above-mentioned embedded π member 5 (4)" The holder 1 has a concavity 5a attached at one end thereof, and at two places 12093pifid〇c 12 fitted to the recess 5a, the protrusions 7a and 7 of the '10' 98 are protruded from the mounting member 8; on the other side (the The upper right part of the figure 1 is provided with a convex portion % of the excitation gas type, which can be combined with the recessed portion 6a. And the tlirr portion of the above-mentioned fitting member β and the mounting member H, the fitting member 6 and the mounting member 8 and the fitting structure 8 which are engaged with the lamp chamber. The mounting member 7 includes a facing support portion and, at the same time, an installation support portion. (10) The Ammonite part of the springs 9 and 9 constitute another molecule '1', the lamp is mounted on the a-shooting device, and the fitting member 5H of the excitation gas end is attached to the lamp room. 2 Gradually tilt, put the convex part 7a toward the concave molecular light on the concave 胄 5 7! Push to H y;;, put the excited gas 9 . Further, the wire member springs 9, 1 and 6 are arranged in the front two of the mounting member 8: two: end:: the muffle gas molecule lamp 1 is turned to the other side / (four) summer 9 ' and the excitation type 8a is made The mounting member 6 is mounted on the power supply portion 2e on the convex portion 2b of the anti-shock member 8, and the mounting is completed. The tail-to-substrate molecules are excited by the respective emitters lb, 1C Η, and the high-frequency high-power is applied to the bottom of the device: the bottom of the device 13 is radiated straight to the outside of the line. Yahe, the glass substrate 3 that is transported on the ultraviolet green knives, and the engineering belt 4: enables the lower surface to be placed on the surface of the glass slab 3 to illuminate 12093 pifl.doc 13 1282998 Precision rinsing is done by vacuum UV. At this time, the excited gas molecular lamp 1 emits a face-to-face vacuum ultraviolet ray having a wavelength of 172 nm. Since it immediately sag in the air, it is necessary to control the interval between the bottom of the discharge capacitor la and the surface of the glass substrate 3 to be 3 mm. The following is a very short interval. That is, if the glass substrate 3 is horizontally conveyed, the bottom of the discharge vessel 1a of the excited gas molecular lamp 1 needs to be maintained at a predetermined height position, so that either end of the rain end of the excited gas molecular lamp 1 is not deviated from the horizontal state. Or to produce a rotation, the excited gas molecular lamp 1 must be supported on the lamp chamber. Therefore, 'the horizontal deviation from the both end portions of the excited gas molecular lamp 1' is embedded by the concave portions 5a, 6a of the rear port members 5, 6 and the convex portions 7a, 8a of the intended members 7, 8. In combination, the upper and lower positions are restricted, and the rotation along the center of the long axis of the exciting gas molecular lamp 1 is restricted by the fitting of the two concave portions 5a of the fitting member 5 and the two convex portions of the fitting member 7 at one place. Rotate. In the lamp chamber 2, since the switch is slidable on the conveyor belt 4 by the hinge, the switch is operated with the long and relatively thin lamp chamber substrate 2b, sometimes at both ends due to the weight of the lamp chamber 2 itself. There is a distortion between them. Because the distortion is transmitted to a certain engaging member 7, by the fitting of the convex portion 7a at two places and the concave portion 45a, even if the exciting gas molecular lamp is twisted at one end, the other side is 嵌Since the engagement member 8 can be rotated only by the circular fitting of the concave portion such as the portion 8a at the weir portion, the excited gas-knife lamp 1 itself rotates only at a small angle around the center of the long axis, not at both ends. New Zealand. On the contrary, if the twisting force is transmitted to the engaging member 8 on the other side 12093pifl.doc 14 1282998, the circular fitting member 8 is joined to the fitting member 6 at only one portion by the convex portion 8a and the concave portion lamp 1 'It can be rotated, so the excited gas is not taken up. Therefore, even if the switching operation of the lamp chamber 2 causes the lamp chamber to be accessed by the Φ ^ 发 轧 轧 轧 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Crying 1 In the above-described embodiment 11, a discharge-capacitance-type gas molecular lamp 1 having a time-shaped box shape is described. However, for the discharge capacitor 2 of the present invention, H may be of any shape. For example, a double-structured cylindrical tube or the like ', 11 uses a discharge vessel 1& which is composed of a rotary body at the center of the shaft, and after being attached to the lamp chamber 2, even if it is rotated along the axis, the vacuum ultraviolet rays are directed to the circle. The two directions are radiated with a uniform intensity. Even in such a discharge vessel la: an electrode such as a semi-cylindrical shape may have a change in the radiation distribution of the vacuum ultraviolet ray due to the difference in shape and arrangement of the electrodes. At this time, it is necessary to restrict the support of the discharge vessel la to generate rotation. At the same time, the discharge capacitor la is not limited to a linear shape like a cylindrical shape and a square shape, and may be a curved shape like a U-shaped tube. However, the more the long discharge vessel u which is easily broken by the twisting force applied to both ends, the present invention is more effectively implemented. In the meantime, the above-described embodiment shows an open type ultraviolet irradiation device in which the excitation type gas molecular lamp 1 is disposed in the air. However, even when an ultraviolet irradiation device filled with nitrogen gas is used around the excitation type gas molecular lamp, the installation is performed. After the upper lamp chamber 2, the exciting gas molecular lamp 1 is rotated along the center of the shaft, and if the ultraviolet radiation of the vacuum ultraviolet light is changed, the vacuum ultraviolet rays actually irradiated on the glass substrate 3 may also be uneven. In the case of 15 12093pifl.doc 1282998, it is also necessary to limit the rotation of the discharge vessel la. In the above embodiment, the periphery of both ends of the excitation gas molecular lamp 1 is surrounded by the fitting members 5 and 6. However, as shown in Fig. 3, it is also possible to apply a shape in which the longitudinal section is U-shaped and narrower than the width of the discharge vessel la. Port members 5, 6. By using such fitting members 5, 6, it is possible to prevent the above-mentioned fitting members 5, 6 from excessively protruding in the width direction of the discharge vessel ia, so that the excitation type gas molecular lamp i can be arranged without gaps in this width direction. In the above-described embodiment, only the recessed portions 5a and 6a having the circular hole shape are provided in the port members 5 and 6 of the excitation type gas molecular lamp 1, and the convex portions 7a and 8_ are provided on the engaging members 7 and 8. In other cases, it is also possible to provide these recesses and projections in reverse, and to fit them. Further, the fitting and the engaging member 7 are particularly useful as long as it can restrict the excitation of the molecular molecular lamp 1: even if it is provided with a concave portion and a convex portion 5 or an elliptical concave portion and convex portion at three or more places. The limitation of the : 嵌 嵌 嵌 嵌 和 和 和 和 和 和 和 衔 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌 嵌" s the engagement member 8 enables the excitation gas molecule lamp = rotation = the fitting member 6 and the engagement of the concave portion and the convex portion can be used, so that the fitting member on one side can also be used; can. The fitting member 6 and the engaging member 7 which are restricted to the other side can be rotated, and the spring 9 can be rotated in addition to one of the engaging members 7. Further, the engaging member 8 on the elastic side, or at the same time, can be attached to the outer joint member 7, 8 or 12093pifl.doc 16 1282998. Moreover, it is not necessary to use a mountain molecular lamp, or to support an excited gas support. At the same time, the so-called mineral gas molecules 7 and 8 are used. It is limited to the two ends of the foot 1 at both ends of the lamp in the longer direction, not the only floor 'because of the excited gas; the twisting force of the lamp i at both ends in the longer direction is more able to show Ultraviolet irradiation is a so-called rotation that restricts rotation and movement, a gap within a predetermined range, and the like; movement and movement through this range. In the case of the above-mentioned implementation, the singer of the singer of the singer and the singer of the singer of the singer and the singer of the singer ^ The nine lines of the outer line...the clothes are placed, but what kinds of lamps are used, such as the other lamps that emit light from the excited gas molecules, and the water-fired fabric line lamps that are excited by the gas molecules. Can be implemented. Further, in the above embodiment, ultraviolet rays emitted by the ultraviolet lamp are used as the precision rinsing means. However, even when the lamp is used for other purposes, the same can be applied. Industrial Applicability: According to the present invention, it is possible to manufacture an ultraviolet ray irradiation device which can suppress lamp breakage accompanying switching of the lamp chamber. At the same time, the mounting position of the lamp can also be made relatively constant with respect to the lamp chamber. Such an ultraviolet ray irradiation device is used industrially as an ultraviolet ray irradiation device that performs precision rinsing such as a glass substrate and a semiconductor integrated circuit. Although the present invention has been disclosed in the preferred embodiments as above, it is not intended to limit the invention of any of the above-mentioned four (4), and it is possible to make some changes and 溷^月Arsenic and dryness are defined as the scope of protection defined by the scope of the patent application [Simplified illustration of the drawings] / Fig. 1 is a slant showing the mounting structure of the lamp of the present invention. The body molecular distribution port is an oblique view showing an excited gas molecular lamp having an example of a different shape embedded in an embodiment of the present invention. Sub-second is an excited gas distribution of a square box-shaped discharge vessel; and a cross-sectional view of a conventional example. The ultraviolet ray irradiation device using the excitation gas molecular lamp is constructed [Main component symbol description] 1 · Excited gas molecular lamp la • The discharge vessel lb ' le: Electrode 2 : Lamp chamber 5, 6 : The fitting members 5a, 6a: Concave portion 7, 8: engaging member 7a ' 8a : convex portion 18 12093pifl.doc