TWI292814B - - Google Patents

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Info

Publication number: TWI292814B
Authority: TW; Taiwan
Prior art keywords: objective lens; measured; light; displacement; unit
Prior art date: 2003-03-20

Application number

TW093107503A

Other languages

English (en)

Chinese (zh)

Other versions

TW200506316A (en

Inventor

Yuji Akishiba

Original Assignee

Keyence Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-03-20

Filing date

2004-03-19

Publication date

2008-01-21

2004-03-19 Application filed by Keyence Co Ltd filed Critical Keyence Co Ltd

2005-02-16 Publication of TW200506316A publication Critical patent/TW200506316A/zh

2008-01-21 Application granted granted Critical

2008-01-21 Publication of TWI292814B publication Critical patent/TWI292814B/zh

Links

238000006073 displacement reaction Methods 0.000 claims description 126
238000005259 measurement Methods 0.000 claims description 89
230000003287 optical effect Effects 0.000 claims description 22
238000000034 method Methods 0.000 claims description 21
235000013399 edible fruits Nutrition 0.000 claims description 2
244000145845 chattering Species 0.000 claims 1
125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 claims 1
239000011295 pitch Substances 0.000 claims 1
238000010586 diagram Methods 0.000 description 5
235000014676 Phragmites communis Nutrition 0.000 description 4
238000006243 chemical reaction Methods 0.000 description 4
239000000463 material Substances 0.000 description 4
BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 3
230000007246 mechanism Effects 0.000 description 3
239000002184 metal Substances 0.000 description 3
239000000919 ceramic Substances 0.000 description 2
235000011389 fruit/vegetable juice Nutrition 0.000 description 2
230000006870 function Effects 0.000 description 2
239000011521 glass Substances 0.000 description 2
238000003384 imaging method Methods 0.000 description 2
238000000691 measurement method Methods 0.000 description 2
239000000203 mixture Substances 0.000 description 2
239000011347 resin Substances 0.000 description 2
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210000003128 head Anatomy 0.000 description 1
WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
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XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
229910000859 α-Fe Inorganic materials 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Length Measuring Devices By Optical Means (AREA)
Measurement Of Optical Distance (AREA)

TW093107503A 2003-03-20 2004-03-19 Displacement gauge and displacement measuring method TW200506316A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2003079122A JP4209709B2 (ja)	2003-03-20	2003-03-20	変位計

Publications (2)

Publication Number	Publication Date
TW200506316A TW200506316A (en)	2005-02-16
TWI292814B true TWI292814B (2)	2008-01-21

Family

ID=33293332

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW093107503A TW200506316A (en)	2003-03-20	2004-03-19	Displacement gauge and displacement measuring method

Country Status (5)

Country	Link
US (1)	US7242485B2 (2)
JP (1)	JP4209709B2 (2)
KR (1)	KR100890986B1 (2)
CN (1)	CN100401013C (2)
TW (1)	TW200506316A (2)

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RU2009119425A (ru) *	2006-10-24	2010-11-27	Конинклейке Филипс Электроникс Н.В. (Nl)	Система для формирования изображения объекта
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JP5307459B2 (ja) *	2008-06-30	2013-10-02	株式会社デクシス	透明容器内粉末中の異物検査方法及び異物検査装置
HUP0800433A2 (en) *	2008-07-15	2010-03-01	Femtonics Kft	Laser scanning microscope for scanning along a 3d trajectory
JP2010216880A (ja)	2009-03-13	2010-09-30	Omron Corp	変位センサ
TWI404921B (zh) *	2009-07-29	2013-08-11	Metal Ind Res & Dev Ct	A tuning fork contact sensing device and its sensing method
DE102010007729A1 (de) *	2010-02-12	2011-08-18	Leica Microsystems CMS GmbH, 35578	Vorrichtung zum Scannen eines Objekts, Verfahren zum Betreiben der Vorrichtung und Scanmikroskop
JP5637836B2 (ja) *	2010-12-17	2014-12-10	株式会社キーエンス	光学式変位計
TWI452296B (zh) *	2011-07-28	2014-09-11	Chroma Ate Inc	The Operation System and Operation Method of LED Grain Scanning and Spotting
CN102324395B (zh) *	2011-08-09	2013-06-19	致茂电子(苏州)有限公司	Led晶粒扫描与点测的运作系统及运作方法
EP2865003A1 (en) *	2012-06-26	2015-04-29	Kla-Tencor Corporation	Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
JP5674050B2 (ja) *	2012-08-28	2015-02-18	横河電機株式会社	光学式変位計
CN103592454B (zh) *	2013-11-20	2016-07-06	沈阳工业大学	光栅速度测量方法及装置
JP6335495B2 (ja) *	2013-12-09	2018-05-30	パナソニックデバイスＳｕｎｘ株式会社	変位センサ
JP2015125177A (ja)	2013-12-25	2015-07-06	ソニー株式会社	顕微鏡システムおよびその画像データ転送方法
US9689892B2 (en) *	2014-03-20	2017-06-27	Shimadzu Corporation	Scanning probe microscope
CN103940334B (zh) *	2014-04-08	2016-09-21	天津大学	动态二维光电显微镜
KR101692152B1 (ko) *	2015-05-22	2017-01-04	안동대학교 산학협력단	비점수차를 이용한 변위 센서 및 그 변위 측정방법
TWI563240B (en) *	2015-08-06	2016-12-21		Optical inspection apparatus
JP6588278B2 (ja) *	2015-09-01	2019-10-09	株式会社日立ハイテクサイエンス	走査プローブ顕微鏡および走査プローブ顕微鏡の光軸調整方法
WO2017110837A1 (ja) *	2015-12-25	2017-06-29	株式会社キーエンス	共焦点変位計
US10341550B2 (en)	2016-11-28	2019-07-02	Anritsu Corporation	End face inspection apparatus and focused image data acquisition method
JP6600292B2 (ja) *	2016-11-28	2019-10-30	アンリツ株式会社	端面検査装置とその合焦画像データ取得方法
JP6829992B2 (ja)	2016-12-28	2021-02-17	株式会社キーエンス	光走査高さ測定装置
JP6829993B2 (ja)	2016-12-28	2021-02-17	株式会社キーエンス	光走査高さ測定装置
JP7143057B2 (ja)	2016-12-28	2022-09-28	株式会社キーエンス	三次元測定装置
JP6859098B2 (ja) *	2016-12-28	2021-04-14	株式会社キーエンス	光走査高さ測定装置
CN108663353B (zh)	2017-03-31	2020-10-30	苏州星帆华镭光电科技有限公司	振动光路组件及具有该组件的激光诱导击穿光谱仪
JP6380622B2 (ja) *	2017-07-05	2018-08-29	ソニー株式会社	制御装置および制御方法
CN109211130B (zh) *	2018-09-18	2020-03-31	昆明北方红外技术股份有限公司	透镜中心厚度及透镜间隔的测量装置及方法
JP7219059B2 (ja) *	2018-11-09	2023-02-07	株式会社キーエンス	変位測定装置
JP7219057B2 (ja) *	2018-11-09	2023-02-07	株式会社キーエンス	変位測定装置
JP7219058B2 (ja) *	2018-11-09	2023-02-07	株式会社キーエンス	変位測定装置
CN109974832B (zh) *	2019-04-03	2021-04-02	浙江华章科技有限公司	一种高速摇振系统振幅的算法
JP7799983B2 (ja) *	2021-02-17	2026-01-16	株式会社島津製作所	フーリエ変換赤外分光光度計

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2003
- 2003-03-20 JP JP2003079122A patent/JP4209709B2/ja not_active Expired - Fee Related
2004
- 2004-03-19 TW TW093107503A patent/TW200506316A/zh not_active IP Right Cessation
- 2004-03-19 US US10/804,183 patent/US7242485B2/en not_active Expired - Fee Related
- 2004-03-20 KR KR1020040019095A patent/KR100890986B1/ko not_active Expired - Fee Related
- 2004-03-20 CN CNB2004100595136A patent/CN100401013C/zh not_active Expired - Fee Related

Also Published As

Publication number	Publication date
CN100401013C (zh)	2008-07-09
KR100890986B1 (ko)	2009-03-27
CN1550754A (zh)	2004-12-01
JP4209709B2 (ja)	2009-01-14
TW200506316A (en)	2005-02-16
US20050030553A1 (en)	2005-02-10
US7242485B2 (en)	2007-07-10
KR20040083012A (ko)	2004-09-30
JP2004286598A (ja)	2004-10-14

Legal Events

Date	Code	Title	Description
2015-10-21	MM4A	Annulment or lapse of patent due to non-payment of fees

Publication	Publication Date	Title
TWI292814B (2)	2008-01-21
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JP2005195338A (ja)	2005-07-21	変位測定装置
JPH01158302A (ja)	1989-06-21	オートフオーカス機構付光学測定機
JP2000121534A (ja)	2000-04-28	走査型プローブ顕微鏡
JP2007139557A (ja)	2007-06-07	複合型顕微鏡
JP2005077446A (ja)	2005-03-24	合焦装置及び変位センサ、並びに共焦点顕微鏡
JPH02271214A (ja)	1990-11-06	遠隔メジャー
JPH0886792A (ja)	1996-04-02	走査型プローブ顕微鏡