TWI296558B - - Google Patents

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Info

Publication number: TWI296558B
Authority: TW; Taiwan
Prior art keywords: ultraviolet; adhesive; dresser; substrate; abrasive
Prior art date: 2006-05-26

Application number

TW95118879A

Other languages

English (en)

Chinese (zh)

Other versions

TW200743551A (en

Inventor

Wey Hwang

Cheng Hsiang Chou

Chih Chung Chou

Original Assignee

Kinik Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2006-05-26

Filing date

2006-05-26

Publication date

2008-05-11

2006-05-26 Application filed by Kinik Co filed Critical Kinik Co

2006-05-26 Priority to TW095118879A priority Critical patent/TW200743551A/zh

2007-12-01 Publication of TW200743551A publication Critical patent/TW200743551A/zh

2008-05-11 Application granted granted Critical

2008-05-11 Publication of TWI296558B publication Critical patent/TWI296558B/zh

Links

239000002245 particle Substances 0.000 claims description 44
239000000853 adhesive Substances 0.000 claims description 33
238000000034 method Methods 0.000 claims description 32
230000001070 adhesive effect Effects 0.000 claims description 31
239000000758 substrate Substances 0.000 claims description 28
238000004519 manufacturing process Methods 0.000 claims description 22
239000010432 diamond Substances 0.000 claims description 21
239000003292 glue Substances 0.000 claims description 21
229910003460 diamond Inorganic materials 0.000 claims description 18
238000000227 grinding Methods 0.000 claims description 11
239000000463 material Substances 0.000 claims description 11
229920002635 polyurethane Polymers 0.000 claims description 6
239000004814 polyurethane Substances 0.000 claims description 6
229920000642 polymer Polymers 0.000 claims description 5
239000003795 chemical substances by application Substances 0.000 claims description 4
229920002972 Acrylic fiber Polymers 0.000 claims description 3
239000002390 adhesive tape Substances 0.000 claims description 3
238000009966 trimming Methods 0.000 claims description 3
239000011248 coating agent Substances 0.000 claims 4
238000000576 coating method Methods 0.000 claims 4
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
229910052782 aluminium Inorganic materials 0.000 claims 2
206010011469 Crying Diseases 0.000 claims 1
238000005498 polishing Methods 0.000 description 9
230000000694 effects Effects 0.000 description 4
229910052751 metal Inorganic materials 0.000 description 4
239000002184 metal Substances 0.000 description 4
238000004528 spin coating Methods 0.000 description 4
239000006061 abrasive grain Substances 0.000 description 3
230000002411 adverse Effects 0.000 description 3
238000009826 distribution Methods 0.000 description 3
238000010438 heat treatment Methods 0.000 description 3
238000007517 polishing process Methods 0.000 description 3
238000005245 sintering Methods 0.000 description 3
238000005476 soldering Methods 0.000 description 3
239000000126 substance Substances 0.000 description 3
QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
238000005219 brazing Methods 0.000 description 2
238000010586 diagram Methods 0.000 description 2
238000002360 preparation method Methods 0.000 description 2
241000283690 Bos taurus Species 0.000 description 1
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
241000282376 Panthera tigris Species 0.000 description 1
206010039740 Screaming Diseases 0.000 description 1
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
229910021529 ammonia Inorganic materials 0.000 description 1
239000010953 base metal Substances 0.000 description 1
229910052804 chromium Inorganic materials 0.000 description 1
239000011651 chromium Substances 0.000 description 1
230000003750 conditioning effect Effects 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
238000005553 drilling Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
-1 for example Substances 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
239000010931 gold Substances 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
239000007943 implant Substances 0.000 description 1
239000012535 impurity Substances 0.000 description 1
239000007791 liquid phase Substances 0.000 description 1
150000001247 metal acetylides Chemical class 0.000 description 1
239000002985 plastic film Substances 0.000 description 1
229920003225 polyurethane elastomer Polymers 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
238000005496 tempering Methods 0.000 description 1
229910052719 titanium Inorganic materials 0.000 description 1
239000010936 titanium Substances 0.000 description 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
229910052721 tungsten Inorganic materials 0.000 description 1
239000010937 tungsten Substances 0.000 description 1
235000012431 wafers Nutrition 0.000 description 1
239000002023 wood Substances 0.000 description 1

Landscapes

Polishing Bodies And Polishing Tools (AREA)
Adhesives Or Adhesive Processes (AREA)

TW095118879A 2006-05-26 2006-05-26 Method for making conditioners by means of ultraviolet curing process TW200743551A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
TW095118879A TW200743551A (en)	2006-05-26	2006-05-26	Method for making conditioners by means of ultraviolet curing process

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
TW095118879A TW200743551A (en)	2006-05-26	2006-05-26	Method for making conditioners by means of ultraviolet curing process

Publications (2)

Publication Number	Publication Date
TW200743551A TW200743551A (en)	2007-12-01
TWI296558B true TWI296558B (de)	2008-05-11

Family

ID=45068813

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW095118879A TW200743551A (en)	2006-05-26	2006-05-26	Method for making conditioners by means of ultraviolet curing process

Country Status (1)

Country	Link
TW (1)	TW200743551A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US9254548B2 (en)	2012-04-25	2016-02-09	Taiwan Semiconductor Manufacturing Co., Ltd.	Method of forming diamond conditioners for CMP process
TWI755069B (zh) *	2020-09-21	2022-02-11	合晶科技股份有限公司	修整拋光墊的方法

2006
- 2006-05-26 TW TW095118879A patent/TW200743551A/zh not_active IP Right Cessation

Also Published As

Publication number	Publication date
TW200743551A (en)	2007-12-01

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Legal Events

Date	Code	Title	Description
2020-02-21	MM4A	Annulment or lapse of patent due to non-payment of fees