TWI323040B - - Google Patents

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Publication number
TWI323040B
TWI323040B TW094140463A TW94140463A TWI323040B TW I323040 B TWI323040 B TW I323040B TW 094140463 A TW094140463 A TW 094140463A TW 94140463 A TW94140463 A TW 94140463A TW I323040 B TWI323040 B TW I323040B
Authority
TW
Taiwan
Prior art keywords
diffusion layer
type diffusion
type
semiconductor substrate
impurity
Prior art date
Application number
TW094140463A
Other languages
English (en)
Chinese (zh)
Other versions
TW200635058A (en
Inventor
Tsutomu Onishi
Takeshi Akatsuka
Shunichi Igarashi
Original Assignee
Naoetsu Electronics Co Ltd
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Naoetsu Electronics Co Ltd, Shinetsu Chemical Co filed Critical Naoetsu Electronics Co Ltd
Publication of TW200635058A publication Critical patent/TW200635058A/zh
Application granted granted Critical
Publication of TWI323040B publication Critical patent/TWI323040B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
    • H10F77/148—Shapes of potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
    • H10F10/146—Back-junction photovoltaic cells, e.g. having interdigitated base-emitter regions on the back side
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
    • H10F77/219—Arrangements for electrodes of back-contact photovoltaic cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells

Landscapes

  • Photovoltaic Devices (AREA)
TW094140463A 2004-12-27 2005-11-17 Back junction solar cell and process for producing the same TW200635058A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004376603 2004-12-27

Publications (2)

Publication Number Publication Date
TW200635058A TW200635058A (en) 2006-10-01
TWI323040B true TWI323040B (fr) 2010-04-01

Family

ID=36677460

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094140463A TW200635058A (en) 2004-12-27 2005-11-17 Back junction solar cell and process for producing the same

Country Status (5)

Country Link
US (1) US7700400B2 (fr)
EP (1) EP1835548B1 (fr)
JP (1) JP3962086B2 (fr)
TW (1) TW200635058A (fr)
WO (1) WO2006075426A1 (fr)

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* Cited by examiner, † Cited by third party
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US7790574B2 (en) 2004-12-20 2010-09-07 Georgia Tech Research Corporation Boron diffusion in silicon devices
US7820460B2 (en) * 2007-09-07 2010-10-26 Varian Semiconductor Equipment Associates, Inc. Patterned assembly for manufacturing a solar cell and a method thereof
JP5236914B2 (ja) * 2007-09-19 2013-07-17 シャープ株式会社 太陽電池の製造方法
DE112009000788T5 (de) * 2008-04-25 2011-04-21 ULVAC, Inc., Chigasaki-shi Herstellungsverfahren für Solarzellen, Herstellungsvorrichtung für Solarzellen sowie Solarzelle
KR101099480B1 (ko) * 2009-02-13 2011-12-27 엘지전자 주식회사 태양전지 및 그의 제조방법과 기판 식각 방법
JP2010283339A (ja) * 2009-05-02 2010-12-16 Semiconductor Energy Lab Co Ltd 光電変換装置及びその作製方法
US20110132445A1 (en) * 2009-05-29 2011-06-09 Pitera Arthur J High-efficiency multi-junction solar cell structures
DE102009024598A1 (de) * 2009-06-10 2011-01-05 Institut Für Solarenergieforschung Gmbh Solarzelle mit Kontaktstruktur mit geringen Rekombinationsverlusten sowie Herstellungsverfahren für solche Solarzellen
US20110041910A1 (en) * 2009-08-18 2011-02-24 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion device and manufacturing method thereof
MY166305A (en) 2009-12-09 2018-06-25 Solexel Inc High-efficiency photovoltaic back-contact solar cell structures and manufacturing methods using thin planar semiconductor absorbers
KR20110071374A (ko) * 2009-12-21 2011-06-29 현대중공업 주식회사 후면전계형 이종접합 태양전지 및 그 제조방법
EP2601687A4 (fr) 2010-08-05 2018-03-07 Solexel, Inc. Renforcement de plan arrière et interconnexions pour cellules solaires
US8633379B2 (en) 2010-08-17 2014-01-21 Lg Electronics Inc. Solar cell
CN102569495B (zh) * 2010-12-17 2014-03-19 上海凯世通半导体有限公司 太阳能晶片的掺杂方法
CN102569493B (zh) * 2010-12-17 2014-04-30 上海凯世通半导体有限公司 太阳能晶片的掺杂方法以及掺杂晶片
CN102738265A (zh) * 2011-04-15 2012-10-17 上海凯世通半导体有限公司 掺杂单元、掺杂晶片、掺杂方法、太阳能电池及制作方法
US20150171230A1 (en) * 2011-08-09 2015-06-18 Solexel, Inc. Fabrication methods for back contact solar cells
KR101225019B1 (ko) * 2011-08-31 2013-01-22 한화케미칼 주식회사 선택적 펀치 쓰루를 이용한 후면 전극 태양전지의 제조방법
JP6357102B2 (ja) * 2011-11-20 2018-07-11 ソレクセル、インコーポレイテッド スマート光電池およびモジュール
CN103208556A (zh) * 2012-01-13 2013-07-17 上海凯世通半导体有限公司 太阳能电池的制作方法及太阳能电池
TWI501292B (zh) 2012-09-26 2015-09-21 財團法人工業技術研究院 形成圖案化摻雜區的方法
US9379258B2 (en) * 2012-11-05 2016-06-28 Solexel, Inc. Fabrication methods for monolithically isled back contact back junction solar cells
US9515217B2 (en) 2012-11-05 2016-12-06 Solexel, Inc. Monolithically isled back contact back junction solar cells
CN103594532B (zh) * 2013-11-21 2016-03-23 苏州阿特斯阳光电力科技有限公司 一种n型晶体硅太阳能电池的制备方法
KR101627204B1 (ko) 2013-11-28 2016-06-03 엘지전자 주식회사 태양 전지 및 이의 제조 방법
US11201253B2 (en) * 2016-11-15 2021-12-14 Shin-Etsu Chemical Co., Ltd. High photovoltaic-conversion efficiency solar cell, method for manufacturing the same, solar cell module, and photovoltaic power generation system

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US5538564A (en) * 1994-03-18 1996-07-23 Regents Of The University Of California Three dimensional amorphous silicon/microcrystalline silicon solar cells
US5641362A (en) * 1995-11-22 1997-06-24 Ebara Solar, Inc. Structure and fabrication process for an aluminum alloy junction self-aligned back contact silicon solar cell
US6262359B1 (en) * 1999-03-17 2001-07-17 Ebara Solar, Inc. Aluminum alloy back junction solar cell and a process for fabrication thereof
JP2002057352A (ja) * 2000-06-02 2002-02-22 Honda Motor Co Ltd 太陽電池およびその製造方法
DE10045249A1 (de) * 2000-09-13 2002-04-04 Siemens Ag Photovoltaisches Bauelement und Verfahren zum Herstellen des Bauelements
JP2002164556A (ja) 2000-11-27 2002-06-07 Kyocera Corp 裏面電極型太陽電池素子
JP2003124483A (ja) 2001-10-17 2003-04-25 Toyota Motor Corp 光起電力素子
JP4074763B2 (ja) * 2002-01-22 2008-04-09 シャープ株式会社 太陽電池の製造方法
JP2004071763A (ja) * 2002-08-05 2004-03-04 Toyota Motor Corp 光起電力素子
JP2004071828A (ja) 2002-08-06 2004-03-04 Toyota Motor Corp 太陽電池
US7339110B1 (en) * 2003-04-10 2008-03-04 Sunpower Corporation Solar cell and method of manufacture
US7144751B2 (en) * 2004-02-05 2006-12-05 Advent Solar, Inc. Back-contact solar cells and methods for fabrication
US7704352B2 (en) * 2006-12-01 2010-04-27 Applied Materials, Inc. High-aspect ratio anode and apparatus for high-speed electroplating on a solar cell substrate
US7638438B2 (en) * 2006-12-12 2009-12-29 Palo Alto Research Center Incorporated Solar cell fabrication using extrusion mask

Also Published As

Publication number Publication date
WO2006075426A1 (fr) 2006-07-20
US7700400B2 (en) 2010-04-20
EP1835548A1 (fr) 2007-09-19
TW200635058A (en) 2006-10-01
EP1835548B1 (fr) 2012-11-28
JP3962086B2 (ja) 2007-08-22
JPWO2006075426A1 (ja) 2008-08-07
EP1835548A4 (fr) 2010-12-01
US20070264746A1 (en) 2007-11-15

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