TWI333431B - Liquid material applying apparatus - Google Patents

Liquid material applying apparatus Download PDF

Info

Publication number: TWI333431B
Authority: TW; Taiwan
Prior art keywords: nozzle; nozzles; substrate; sub; movable
Prior art date: 2006-12-25

Application number

TW096139447A

Other languages

English (en)

Chinese (zh)

Other versions

TW200831194A (en

Inventor

Oze Hirokazu

Ueno Masatoshi

Yamamoto Satoshi

Original Assignee

Dainippon Screen Mfg

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2006-12-25

Filing date

2007-10-22

Publication date

2010-11-21

2007-10-22 Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg

2008-08-01 Publication of TW200831194A publication Critical patent/TW200831194A/zh

2010-11-21 Application granted granted Critical

2010-11-21 Publication of TWI333431B publication Critical patent/TWI333431B/zh

Links

239000011344 liquid material Substances 0.000 title description 2
230000007246 mechanism Effects 0.000 claims description 170
239000011248 coating agent Substances 0.000 claims description 135
238000000576 coating method Methods 0.000 claims description 135
239000000758 substrate Substances 0.000 claims description 90
239000007788 liquid Substances 0.000 claims description 72
239000000463 material Substances 0.000 claims description 49
239000013589 supplement Substances 0.000 claims description 34
239000012530 fluid Substances 0.000 claims description 23
238000003384 imaging method Methods 0.000 claims description 15
238000001514 detection method Methods 0.000 claims description 10
230000003287 optical effect Effects 0.000 claims description 10
239000007921 spray Substances 0.000 claims description 8
238000003825 pressing Methods 0.000 claims description 7
241000894006 Bacteria Species 0.000 claims 1
206010041232 sneezing Diseases 0.000 claims 1
229910052715 tantalum Inorganic materials 0.000 claims 1
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
238000005401 electroluminescence Methods 0.000 description 54
238000005192 partition Methods 0.000 description 12
239000007787 solid Substances 0.000 description 9
230000005525 hole transport Effects 0.000 description 7
239000010410 layer Substances 0.000 description 6
238000000034 method Methods 0.000 description 5
238000010408 sweeping Methods 0.000 description 5
239000004744 fabric Substances 0.000 description 4
238000012360 testing method Methods 0.000 description 4
230000032258 transport Effects 0.000 description 4
206010036790 Productive cough Diseases 0.000 description 3
238000010438 heat treatment Methods 0.000 description 3
238000004519 manufacturing process Methods 0.000 description 3
239000002689 soil Substances 0.000 description 3
238000005507 spraying Methods 0.000 description 3
210000003802 sputum Anatomy 0.000 description 3
208000024794 sputum Diseases 0.000 description 3
210000000078 claw Anatomy 0.000 description 2
238000010586 diagram Methods 0.000 description 2
239000011521 glass Substances 0.000 description 2
239000011159 matrix material Substances 0.000 description 2
230000008569 process Effects 0.000 description 2
238000012545 processing Methods 0.000 description 2
239000000047 product Substances 0.000 description 2
241000251468 Actinopterygii Species 0.000 description 1
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
241000209140 Triticum Species 0.000 description 1
235000021307 Triticum Nutrition 0.000 description 1
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
239000003708 ampul Substances 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
239000003086 colorant Substances 0.000 description 1
238000004040 coloring Methods 0.000 description 1
238000012790 confirmation Methods 0.000 description 1
238000010276 construction Methods 0.000 description 1
238000007599 discharging Methods 0.000 description 1
239000010408 film Substances 0.000 description 1
229910052732 germanium Inorganic materials 0.000 description 1
GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
238000002347 injection Methods 0.000 description 1
239000007924 injection Substances 0.000 description 1
238000009434 installation Methods 0.000 description 1
230000002452 interceptive effect Effects 0.000 description 1
239000004973 liquid crystal related substance Substances 0.000 description 1
238000005259 measurement Methods 0.000 description 1
AUHZEENZYGFFBQ-UHFFFAOYSA-N mesitylene Substances CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 description 1
125000001827 mesitylenyl group Chemical group [H]C1=C(C(*)=C(C([H])=C1C([H])([H])[H])C([H])([H])[H])C([H])([H])[H] 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
239000012044 organic layer Substances 0.000 description 1
231100000614 poison Toxicity 0.000 description 1
230000007096 poisonous effect Effects 0.000 description 1
229920000642 polymer Polymers 0.000 description 1
231100000241 scar Toxicity 0.000 description 1
239000002904 solvent Substances 0.000 description 1
210000002784 stomach Anatomy 0.000 description 1
230000001629 suppression Effects 0.000 description 1
239000010409 thin film Substances 0.000 description 1
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Classifications

- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges

Landscapes

Engineering & Computer Science (AREA)
Coating Apparatus (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Computer Vision & Pattern Recognition (AREA)
Signal Processing (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Manufacturing & Machinery (AREA)
Electroluminescent Light Sources (AREA)

TW096139447A 2006-12-25 2007-10-22 Liquid material applying apparatus TWI333431B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2006347291A JP4737685B2 (ja)	2006-12-25	2006-12-25	塗布装置

Publications (2)

Publication Number	Publication Date
TW200831194A TW200831194A (en)	2008-08-01
TWI333431B true TWI333431B (en)	2010-11-21

Family

ID=39656642

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW096139447A TWI333431B (en)	2006-12-25	2007-10-22	Liquid material applying apparatus

Country Status (3)

Country	Link
JP (1)	JP4737685B2 (ko)
KR (1)	KR100891780B1 (ko)
TW (1)	TWI333431B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP6026362B2 (ja)	2013-07-09	2016-11-16	東京エレクトロン株式会社	基板処理システム、基板処理システムの制御方法、及び記憶媒体
JP6232239B2 (ja) *	2013-09-30	2017-11-15	株式会社Ｓｃｒｅｅｎホールディングス	塗布装置
JP6220693B2 (ja) *	2014-02-14	2017-10-25	株式会社Ｓｃｒｅｅｎホールディングス	塗布装置
CN115985206B (zh) *	2022-11-28	2023-11-03	江苏卓高广告器材有限公司	一种墙面广告清理安装设备

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2002119908A (ja)	2000-10-13	2002-04-23	Toray Ind Inc	ペースト塗布装置
JP3491155B2 (ja)	2000-11-21	2004-01-26	セイコーエプソン株式会社	材料の吐出方法、及び吐出装置、カラーフィルタの製造方法及び製造装置、液晶装置の製造方法及び製造装置、ｅｌ装置の製造方法及び製造装置
JP2002273869A (ja)	2001-01-15	2002-09-25	Seiko Epson Corp	吐出方法およびその装置、電気光学装置、その製造方法およびその製造装置、カラーフィルタ、その製造方法およびその製造装置、ならびに基材を有するデバイス、その製造方法およびその製造装置
KR100540633B1 (ko) *	2003-06-20	2006-01-11	주식회사 탑 엔지니어링	페이스트 도포기 및 그 제어 방법
JP4506118B2 (ja)	2003-07-02	2010-07-21	セイコーエプソン株式会社	吐出装置、カラーフィルタ基板の製造装置、エレクトロルミネッセンス表示装置の製造装置、プラズマ表示装置の製造装置、配線製造装置、および塗布方法。
JP4679895B2 (ja) *	2003-12-17	2011-05-11	大日本印刷株式会社	パターン形成装置、ヘッドユニット
JP4587816B2 (ja) *	2005-01-27	2010-11-24	大日本スクリーン製造株式会社	基板処理装置
JP2007152164A (ja) *	2005-12-01	2007-06-21	Dainippon Screen Mfg Co Ltd	塗布装置および塗布装置における複数のノズルのピッチの調整方法

2006
- 2006-12-25 JP JP2006347291A patent/JP4737685B2/ja not_active Expired - Fee Related
2007
- 2007-10-22 TW TW096139447A patent/TWI333431B/zh not_active IP Right Cessation
- 2007-11-01 KR KR1020070110900A patent/KR100891780B1/ko not_active Expired - Fee Related

Also Published As

Publication number	Publication date
KR20080059500A (ko)	2008-06-30
JP2008155138A (ja)	2008-07-10
KR100891780B1 (ko)	2009-04-07
TW200831194A (en)	2008-08-01
JP4737685B2 (ja)	2011-08-03

Legal Events

Date	Code	Title	Description
2023-08-21	MM4A	Annulment or lapse of patent due to non-payment of fees

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