TWI342390B - Substrate inspecting apparatus - Google Patents

Substrate inspecting apparatus Download PDF

Info

Publication number
TWI342390B
TWI342390B TW096124669A TW96124669A TWI342390B TW I342390 B TWI342390 B TW I342390B TW 096124669 A TW096124669 A TW 096124669A TW 96124669 A TW96124669 A TW 96124669A TW I342390 B TWI342390 B TW I342390B
Authority
TW
Taiwan
Prior art keywords
substrate
detector
frame
chamber
load
Prior art date
Application number
TW096124669A
Other languages
English (en)
Chinese (zh)
Other versions
TW200819737A (en
Inventor
Hideki Okamoto
Junichirou Tanase
Shin-Ichi Kuroda
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of TW200819737A publication Critical patent/TW200819737A/zh
Application granted granted Critical
Publication of TWI342390B publication Critical patent/TWI342390B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136254—Checking; Testing

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Liquid Crystal (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW096124669A 2006-10-19 2007-07-06 Substrate inspecting apparatus TWI342390B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006284747A JP4941645B2 (ja) 2006-10-19 2006-10-19 基板検査装置

Publications (2)

Publication Number Publication Date
TW200819737A TW200819737A (en) 2008-05-01
TWI342390B true TWI342390B (en) 2011-05-21

Family

ID=39334297

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096124669A TWI342390B (en) 2006-10-19 2007-07-06 Substrate inspecting apparatus

Country Status (4)

Country Link
JP (1) JP4941645B2 (ja)
KR (1) KR100813868B1 (ja)
CN (1) CN101165546B (ja)
TW (1) TWI342390B (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010271655A (ja) * 2009-05-25 2010-12-02 Shimadzu Corp プローバフレーム搬送台車およびプローバフレームハンドリングシステム
CN103698630B (zh) * 2013-12-12 2016-04-06 合肥京东方光电科技有限公司 一种电学阵列检测设备
JP2016023939A (ja) * 2014-07-16 2016-02-08 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5982190A (en) * 1998-02-04 1999-11-09 Toro-Lira; Guillermo L. Method to determine pixel condition on flat panel displays using an electron beam
JP4042046B2 (ja) * 2003-01-29 2008-02-06 株式会社島津製作所 液晶基板検査装置
JP4676681B2 (ja) * 2003-06-10 2011-04-27 株式会社島津製作所 Ｔｆｔアレイ検査装置、及びｔｆｔアレイ検査方法
US6833717B1 (en) * 2004-02-12 2004-12-21 Applied Materials, Inc. Electron beam test system with integrated substrate transfer module
JP4241421B2 (ja) * 2004-02-17 2009-03-18 株式会社島津製作所 液晶基板検査装置
JP4147587B2 (ja) * 2004-03-22 2008-09-10 株式会社島津製作所 基板検査装置

Also Published As

Publication number Publication date
JP2008102017A (ja) 2008-05-01
KR100813868B1 (ko) 2008-03-17
JP4941645B2 (ja) 2012-05-30
CN101165546A (zh) 2008-04-23
CN101165546B (zh) 2010-09-29
TW200819737A (en) 2008-05-01

Similar Documents

Publication Publication Date Title
JP5490052B2 (ja) 表示装置の検査装置及び検査方法
CN110660693B (zh) 基板检查系统及检查方法、电子设备制造系统及制造方法
CN101819921B (zh) 基板处理装置
JP2020141121A (ja) アライメント装置、成膜装置、アライメント方法、成膜方法、電子デバイスの製造方法、記録媒体、及びプログラム
CN111009485B (zh) 基板仓库、基板处理系统和基板检查方法
TWI794507B (zh) 自動教示方法及控制裝置
JP2020105629A (ja) アライメントシステム、成膜装置、成膜方法、及び電子デバイスの製造方法
US12131933B2 (en) Load port
TW200915470A (en) Substrate processing apparatus
TWI342390B (en) Substrate inspecting apparatus
JP2024159823A (ja) ロードポート
TWI827572B (zh) 雷射處理裝置、雷射處理方法以及半導體裝置的製造方法
US8386064B2 (en) Control device and control method
TW200807596A (en) Probing apparatus and probing method
JP3845585B2 (ja) 処理装置
CN106935734B (zh) 检查装置、减压干燥装置和减压干燥装置的控制方法
KR101322164B1 (ko) 디스플레이 셀들을 검사하기 위한 장치
JP5384270B2 (ja) ローダ
TWI352197B (en) Edge measuring apparatus for glass substrate
KR20210078271A (ko) 얼라인먼트 시스템, 성막장치, 얼라인먼트 방법, 성막방법, 전자 디바이스의 제조방법 및 컴퓨터 프로그램 기록매체
WO2019054345A1 (ja) 検査装置
JP2014075397A (ja) 搬送機構の位置決め方法
JP4147587B2 (ja) 基板検査装置
TW201118973A (en) Adapter unit built-in type loader chamber
US20250105041A1 (en) Substrate transporting device and substrate processing device equipped with the same

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees