TWI355371B - Coloured diamond - Google Patents
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- TWI355371B TWI355371B TW92125957A TW92125957A TWI355371B TW I355371 B TWI355371 B TW I355371B TW 92125957 A TW92125957 A TW 92125957A TW 92125957 A TW92125957 A TW 92125957A TW I355371 B TWI355371 B TW I355371B
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1355371 玖、發明說明: C發明所屬技術領威】 發明領域 本發明係有關一種製造有色鑽石之方法’特别係有關 5 例如適合用於裝飾目的之有色單晶化學氣相沉積(後文稱 作CVD)鑽石。 C先前技術】 發明背景 真正鑽石具有間接帶隙5.5 eV,且於光譜之可見光部分 10 為透明。導入具有該帶隙範圍内相關能階的缺陷或色彩中 心(後文將稱作為色彩中心),造成鑽石具有獨特顏色,該顏 色係依據色彩中心之類型及濃度決定。此種色彩係來自於 吸光或發光或二者的組合。存在於合成鑽石之常見色彩中 心範例為氮,氮以中性電荷態位於可取代晶格位置時,氮 15 具有比傳導頻帶低約1.7 eV之相關能階,結果導致吸光,讓 鑽石獲得特徵黃褐色。 眾所周知鑽石之生長後處理例如以充分激發之粒子或 輻射(電子、中子、珈瑪射線)照射,可產生晶格缺陷(裂縫 及空白)’隨後進行適當退火,導致形成色彩中心(例如氮-20 空白[N-V]色彩中心)讓鑽石具有所需色彩(例如參考EP 〇 615 954 A卜EP 0 326 856 A1及其中引用之參考文獻)。色 彩中心之其它特性以及人工製造細節由J〇hn Walker討論於 物理進展報告第42期1979年。此等報告中摘述形成色彩中 心之人工製造方法包含下列步驟,藉電子束照射於晶體形 5 1355371 成晶格缺陷,以及若有所需進行退火來讓該晶格缺陷組合 晶體所夾帶的氮原子。但由於競爭性缺陷的形成以及由於 其生長扇區域與鑽石中之缺陷(例如氮)濃度有強力相依 性,因此製造的色彩及均勻度有限。 5 利用生長後色彩中心形成方法著色的鑽石顏色為生長 後處理前粗鑽之色彩,組合於生長後處理期間修改或產生 的一或多個色彩中心對色彩的影響。為了獲得預定裝飾 值,如此達成高透明度與預定色彩的組合,尋常實務係使 用最初為無色或淺黃的鑽石。因此此種方法不易應用於褐 10 色單晶CVD鑽石。 EP 671482、US 5,672,395 及 US 5,451,430說明使用 HPHT處理來密化鑽石而讓多晶CVD鑽石更為透明之方法。 也已知褐色天然鑽之色彩可經由於高壓及高溫退火改 變。例如天然Ila型鑽經由於穩定壓力下於極高溫退火可變 15 成無色;或天然Ila型鑽經由於穩定壓力下於相對低溫退火 可轉成桃色。天然鑽之褐色相信係與塑性變形有關,但褐 色的真正起因以及褐色如何藉退火修改仍然未明。 色彩有三種視覺屬性:色調、明亮度及飽和度。色調係 讓色彩可被歸類為紅、綠、藍、黃、黑或白或介於毗鄰成 20 對基本色調或三連色調中間之色調的色彩屬性。 白、灰及黑物件由淺至深之明亮度標度有差異。明亮 度為以與中性無色標度類似程度定義的色彩屬性,明亮度 係始於白,進行通過灰之較深色色階,而終於黑。 飽和度為由相等明亮度之無色色彩之差異度所定義的 6 色彩屬性。飽和度也係對應色彩強度之描述術語。鑽石業 使用形容詞極強、強烈及鮮明來表示視覺評估的不同飽和 度。於CIE L*a*b色彩系統,飽和度為悖離中性色軸的程度 (定義為飽和度=[(a*)2+(b*)2],參見後文)。明亮度為與飽和 5 度分開覺察之視覺品質。1355371 BRIEF DESCRIPTION OF THE INVENTION The present invention relates to a method for producing colored diamonds, particularly relating to, for example, colored single crystal chemical vapor deposition suitable for decorative purposes (hereinafter referred to as CVD). )diamond. C Prior Art Background of the Invention True diamonds have an indirect band gap of 5.5 eV and are transparent in the visible portion 10 of the spectrum. A defect or color center (hereinafter referred to as a color center) having an associated energy level within the band gap is introduced, resulting in a unique color of the diamond, which is determined by the type and concentration of the color center. This color is derived from light absorption or illumination or a combination of both. An example of a common color center that exists in synthetic diamonds is nitrogen. When nitrogen is in a neutral charge state at a replaceable lattice position, nitrogen 15 has a relative energy level lower than the conduction band by about 1.7 eV, resulting in absorbance, giving the diamond a characteristic yellow. brown. It is well known that the post-growth treatment of diamonds, for example, by irradiation with sufficiently excited particles or radiation (electrons, neutrons, gamma rays), can produce lattice defects (cracks and voids), which are then appropriately annealed, resulting in the formation of a color center (eg nitrogen). 20 Blank [NV] color center) gives the diamond the desired color (see, for example, EP 〇 615 954 A EP 0 326 856 A1 and references cited therein). Other characteristics of the color center and details of the man-made manufacturing were discussed by J〇hn Walker in Physics Progress Report No. 42 1979. The manual manufacturing method for forming a color center in these reports includes the following steps: electron beam irradiation on the crystal form 5 1355371 into a lattice defect, and if necessary annealing is performed to allow the crystal of the lattice defect combination crystal to be entrained atom. However, due to the formation of competitive defects and the strong dependence of the growth fan area on the concentration of defects (such as nitrogen) in the diamond, the color and uniformity of manufacture is limited. 5 The color of the diamond colored by the post-growth color center formation method is the color of the rough diamond before post-treatment, combined with the effect of one or more color centers modified or produced during post-growth processing. In order to achieve a predetermined decorative value, a combination of high transparency and predetermined color is achieved, and the usual practice is to use a diamond that is initially colorless or pale yellow. Therefore, this method is not easy to apply to brown 10-color single crystal CVD diamonds. EP 671 482, US 5, 672, 395 and US 5, 451, 430 describe the use of HPHT treatment to densify diamonds to make polycrystalline CVD diamonds more transparent. It is also known that brown natural diamond color can be altered by high pressure and high temperature annealing. For example, a natural Ila type drill can be converted to a colorless color by annealing at a very high temperature under a stable pressure; or a natural Ila type drill can be converted into a peach color by annealing at a relatively low temperature under a stable pressure. The natural brown color is believed to be related to plastic deformation, but the true cause of brownness and how brown is modified by annealing remains unclear. Color has three visual attributes: hue, brightness, and saturation. Hue allows colors to be classified as red, green, blue, yellow, black, or white, or a color attribute that is adjacent to a tone of 20 pairs of basic tones or triplets. White, gray, and black objects vary in lightness to darkness. Brightness is a color attribute defined by a degree similar to a neutral colorless scale. Brightness begins with white, passes through the darker shades of gray, and is finally black. Saturation is a 6 color attribute defined by the degree of difference in colorless colors of equal brightness. Saturation is also a descriptive term for color intensity. The diamond industry uses adjectives that are extremely strong, strong and vivid to represent the different saturations of visual assessment. For the CIE L*a*b color system, the saturation is the degree of deviation from the neutral color axis (defined as saturation = [(a*)2+(b*)2], see below). Brightness is the visual quality that is perceived separately from saturation by 5 degrees.
藉CVD沉積材料例如鑽石於基材上之方法今曰已經明 破確立’於專利案以及其它參考文獻中已經有詳細說明。 當鑽石沉積於基材時,該方法通常涉及提供氣體混合物, 該氣體混合物解離時可提供原子形式之氫或鹵素(例如F、 10 C1),以及C或含碳基團及其它反應性物種如chx、CFX其中X 為1至4 °此外’可存在有含氧來源,也可存在有氮來源及 硼來源。氮可以多種形式被導入合成電漿;典型地由N2、 NH3、空氣及多種方法也存在有惰性氣體如氦、氖 或氬。典型來源氣體混合物含有烴類CxHy(其中X及y各自為 15 1至1〇)或鹵化碳類CxHyHalz(其中X及z各自為1至10,以及y 為0至10),以及選擇性為以下一或多者:COx(其中X為0.5 至2)、〇2、%、N2、NH3、B2H6及惰性氣體。各氣體可以其 天然同位素比例存在,或相對同位素比可經人工控制;例 如氫可呈氘或氚存在,碳可呈12C或13C存在。來源氣體混合 20 物之解離可因能源而造成解離,該等能源例如為微波、 RF(射頻)能、焰、基於熱長絲或基於噴射之技術;如此製 造之反應性氣體物種允許沉積於基材上而形成鑽石。 CVD鑽石可於多種基材上生產。依據基材性質以及處 理化學之細節而定,可製造多晶CVD鑽石或單晶CVD鑽石。 7 1355371 【發明内容】 發明概要 根據本發明,一種製造具有所需色彩之單晶CVD鑽石 之方法包括下列步驟,提供有色(偶爾該色彩之本身即為所 5 需色彩)之單晶CVD鑽石,以及於適合產生所需色彩之條件 下加熱處理該鑽石。 用作為起始物料之單晶CVD鑽石為有色,加熱處理係 於適合於鑽石中產生另一種所需色彩之經過控制的條件下 進行。 10 經常可於一顆鑽石看到多種色彩。主色為於標準照明 及觀視條件下,若觀察者被迫只最精確描述一種色彩,則 觀察者將會挑選出該主色。具有指定主色之鑽石可具有下 述色彩,該色彩係經由主色於三維色彩空間例如CIE L*a*b*色彩空間(容後詳述)邊界的其它色彩範圍所修改。例 15 如於三維色彩空間,桃色區係與白、灰、褐、橙、紫及紅 色區邊界交界。因此桃色鑽石原則上可顯示任一種色彩作 為修飾色彩至不等程度,且適合描述為例如灰桃色、褐桃 色或橙桃色。本發明及申請專利範圍,若述及個別色彩(例 如褐色鑽、綠鑽)時,表示此個別色彩表示主色,且可存在 20 有二次修改色彩。 通常鑽石被拋光,因此當以期望方式觀視時(面向上) 之色彩係與由側面觀視時所見鑽石的特有色彩相當不同。 部分原因在於鑽石小面被拋光因而當以期望方式觀視鑽石 時光線進入觀察者眼球,鑽石内部之光徑長度因一次或多 8 ~内。P反射而大增。光徑長度增加對色標的影響可以後述 方式被模式化。 、用作為起始物料之單晶CVD鑽石 之色彩典型為褐色。 5於適當加熱處理條件下,褐色可被轉成多種預定色彩之任 〜種’包括無色及接近無色,特別為特級色彩。「特級」一 4表不鑽石較為餘和色彩及較為滿意色彩之寶石交易分 類特別加熱處理可用來於鑽石產生特級綠色及特級桃色 範圍。 早晶CVD鑽石可呈—層或呈__層中的—片形式,例如 破切割成為寶石。本發明特別可應用於厚鑽石層厚鑽石 層之厚度大於1毫米,以及可應用於由此鑽石層製造的小 片。此外CVD鑽石層較佳於其厚度方向具有均勻晶體品 質,因此任何所需色彩不會於該層任何區域被低結晶品質 相關缺陷所淬熄或隱藏。使用此種鑽石層或鑽石層小片來 15產生桃色及綠色範圍特別特級桃色及特級綠色範圍,該色 彩範圍之性質無法由已知天然鑽石藉已知方法加熱處理、 或已知HPHT合成材料藉已知方法處理預期色彩本質。特別 厚度超則毫米之單晶CVD鑽石層可用於製造產品例如寶 石,其中二個正交維度皆超過1毫米。 20 ㈣於本發明條件下加減理或退*之單晶CVD鑽 石’產生所需色彩範圍’該色彩範圍可以⑽LW色彩 空間界定。特別發現單晶CVD鑽石於加熱處理後,對於由 該鑽石製造的厚1毫米平行邊層而言,具有CIELabb*座 標,該座標係位於下述範圍之一: 1355371 0<b*<8 0<b*<4 0<b*<2 0<b*<l 5 如前文說明,單晶CVD鑽石之加熱處理結果導致無色 或接近無色鑽石。接近無色鑽石可以CIE L*a*b*色彩空間 · 定義。特別此種經加熱處理之鑽石,對於由該鑽石製造之 厚1毫米平行邊層,具有飽和度(C*)小於10或小於5或小於 2。 · 10 加熱處理將依據所生長之CVD鑽石之本質以及欲於該 CVD鑽石產生之所需色彩而改變。舉例言之,發現褐色單 晶CVD鑽石厚層或由此鑽石層切下的小塊可於鑽石穩定壓 力下,於1600°C至1700°C範圍之溫度經歷一段時間,典型 為4小時時間,退火至所需桃色至綠色範圍。出乎意外地, 15 此種鑽石厚層以及由此鑽石層切割之小塊之色彩也可於石 墨穩定區之壓力,於惰性氣氛或穩定氣氛下,於1400°C至 1600°C範圍之溫度藉加熱處理經歷一段時間,典型為4小時 · 而改成桃色至綠色範圍之色彩。惰性氣氛之一實施例為氬 氣(Ar)。 20 於本發明之一種形式,單晶CVD鑽石係使用一種方法 製造,該方法係攙混氮氣於固體鑽石至0.05-50 ppm濃度。 此範圍之下限較佳為0.1 ppm,更佳為0·2 ppm及又更佳為 0.3 ppm。此範圍之上限較佳為30 ppm,更佳為20 ppm及又 更佳為10 ppm。例如可使用電聚方法達成,電聚方法中氣 10 氣存在於氣相(最初係呈N2、NH3或若干其它含氮分子形The method of depositing materials, such as diamonds, onto a substrate by CVD has now been established and is described in detail in the patent and other references. When a diamond is deposited on a substrate, the method generally involves providing a gas mixture that, upon dissociation, provides hydrogen or halogen in atomic form (eg, F, 10 C1), and C or carbon-containing groups and other reactive species such as Chx, CFX where X is 1 to 4 ° In addition, there may be an oxygen source, and there may be a source of nitrogen and a source of boron. Nitrogen can be introduced into the synthetic plasma in a variety of forms; inert gases such as helium, neon or argon are also typically present from N2, NH3, air and various methods. A typical source gas mixture contains a hydrocarbon CxHy (wherein X and y are each 15 1 to 1 Torr) or a halogenated carbon type CxHyHalz (wherein X and z are each 1 to 10, and y is 0 to 10), and the selectivity is as follows One or more: COx (where X is 0.5 to 2), 〇2, %, N2, NH3, B2H6, and an inert gas. Each gas may be present in its natural isotope ratio, or the relative isotope ratio may be manually controlled; for example, hydrogen may be present as ruthenium or osmium, and carbon may be present at 12C or 13C. Dissociation of source gas mixture 20 can be dissociated by energy sources such as microwave, RF (radio frequency) energy, flame, hot filament based or jet based technology; reactive gas species so produced are allowed to deposit on the base A diamond is formed on the material. CVD diamonds can be produced on a variety of substrates. Polycrystalline CVD diamonds or single crystal CVD diamonds can be made depending on the nature of the substrate and the details of the processing chemistry. SUMMARY OF THE INVENTION SUMMARY OF THE INVENTION In accordance with the present invention, a method of making a single crystal CVD diamond having a desired color includes the steps of providing a single crystal CVD diamond that is colored (occasionally the color itself is the desired color). And heat treating the diamond under conditions suitable to produce the desired color. The single crystal CVD diamond used as the starting material is colored, and the heat treatment is carried out under controlled conditions suitable for producing another desired color in the diamond. 10 You can often see multiple colors in one diamond. The primary color is under standard illumination and viewing conditions. If the observer is forced to describe only one color most accurately, the observer will pick the primary color. A diamond having a designated primary color may have a color that is modified via other color ranges of the primary color in a three-dimensional color space such as the CIE L*a*b* color space (described in detail later). Example 15 As in the three-dimensional color space, the peach color line borders the borders of white, gray, brown, orange, purple, and red. Therefore, peach-colored diamonds can in principle display any color as a modified color to an unequal degree, and are suitably described as, for example, gray peach, maroon or orange peach. The invention and the scope of the patent application, when referring to individual colors (e.g., brown diamonds, green diamonds), indicate that the individual colors represent primary colors, and there may be 20 secondary modified colors. Usually the diamond is polished, so the color that looks when viewed in the desired way (upward) is quite different from the characteristic color of the diamond seen when viewed from the side. Part of the reason is that the diamond facets are polished so that when the diamond is viewed in the desired way, the light enters the viewer's eye. The length of the light inside the diamond is one or more times. P reflection is greatly increased. The effect of the increase in the length of the optical path on the color code can be modeled in the manner described later. The color of the single crystal CVD diamond used as the starting material is typically brown. 5 Under appropriate heat treatment conditions, the brown color can be converted into a variety of predetermined colors, including 'colorless and nearly colorless, especially for special colors. "Special grades" 4 The classification of gemstones with more diamonds and more colors and more satisfactory colors can be used to produce special green and extra peach colors in diamonds. Early-crystal CVD diamonds can be in the form of layers or in the form of sheets in the __ layer, for example, cut into gems. The invention is particularly applicable to thick diamond layer thick diamond layers having a thickness greater than 1 mm and for application to the diamond layer. In addition, the CVD diamond layer preferably has a uniform crystal quality in its thickness direction, so that any desired color is not quenched or hidden by any defect in the low crystal quality in any region of the layer. Use this diamond layer or diamond layer to create a special peach color and a special green range in the peach and green range. The nature of this color range cannot be heat treated by known natural diamonds by known methods, or known as HPHT synthetic materials. Know the method to handle the expected color essence. Specially single-crystal CVD diamond layers with a thickness of over a millimeter can be used to make products such as precious stones, both of which have an orthogonal dimension of more than 1 mm. 20 (d) A single crystal CVD diamond added or subtracted or retracted under the conditions of the present invention produces a desired color range. The color range can be defined by a (10) LW color space. It has been found that after the heat treatment, the single crystal CVD diamond has a CIELabb* coordinate for a 1 mm thick parallel layer made of the diamond, and the coordinate system is located in one of the following ranges: 1355371 0<b*<8 0<;b*<40<b*<20<b*<l 5 As explained above, the heat treatment of the single crystal CVD diamond results in a colorless or nearly colorless diamond. Close to colorless diamonds can be defined in CIE L*a*b* color space. Particularly such heat treated diamonds have a saturation (C*) of less than 10 or less than 5 or less than 2 for a 1 mm thick parallel layer made of the diamond. · 10 Heat treatment will vary depending on the nature of the CVD diamond being grown and the desired color desired for the CVD diamond. For example, it has been found that a thick layer of brown single crystal CVD diamond or a small piece cut from the diamond layer can be subjected to a period of time, typically 4 hours, at a temperature ranging from 1600 ° C to 1700 ° C under a stable pressure of the diamond. Anneal to the desired peach to green range. Unexpectedly, 15 the thick layer of diamond and the color of the small piece cut by the diamond layer can also be in the pressure of the graphite stable zone, in the inert atmosphere or stable atmosphere, in the temperature range of 1400 ° C to 1600 ° C The heat treatment is carried out for a period of time, typically 4 hours, and is changed to a peach to green color. An example of an inert atmosphere is argon (Ar). In one form of the invention, a single crystal CVD diamond is produced by a method of mixing nitrogen with a solid diamond to a concentration of 0.05-50 ppm. The lower limit of this range is preferably 0.1 ppm, more preferably 0. 2 ppm and still more preferably 0.3 ppm. The upper limit of this range is preferably 30 ppm, more preferably 20 ppm and still more preferably 10 ppm. For example, it can be achieved by an electropolymerization method in which gas 10 gas is present in the gas phase (initially in the form of N2, NH3 or several other nitrogen-containing molecular forms).
式)。為了達成可再現性結果以及調整終產物,製成中之N 須加以控制。於氣相之典型濃度(本說明書中全部氮氣相濃 度係以N2之當量表示,例如一個分子相當於兩個ΝΉ3分 子)為0.5 ppm-500 ppm,更佳為i ppm_1〇〇 ppm及又更佳為2formula). In order to achieve reproducible results and to adjust the final product, the N in the preparation must be controlled. Typical concentrations in the gas phase (all nitrogen phase concentrations in this specification are expressed as equivalents of N2, such as one molecule equivalent to two ΝΉ3 molecules) of 0.5 ppm to 500 ppm, more preferably i ppm_1 〇〇 ppm and more preferably For 2
Ppm-30 ppm,但熟諳技藝人士 了解氮氣之攝取對製程條件 如溫度、壓力及氣相組成等極為敏感,故本發明非僅囿限 於此等極限。 可使用氮之不同同位素,例如14N或15n。不同同位素 對生長化學以及最終結果之影響通常不顯著,但部分由N 所形成之缺陷其相關光學頻帶可能因原子量之差異而遷 移。除了於實施例8,14N用來導出本說明書提供的資料, 但本發明之範圍涵蓋全部N同位素。 雜質(例如氮)之攝取也對生長扇區敏感,較佳最終層主 要為或大致全部為一個生長扇區或具有對稱關係之生長屬 區類型。可使用例如{100}、{1U}、{11〇}、{111}之生長扇 區,更佳為生長扇區{100}及{113}及最佳為生長扇區 {100}。鑽石可額外含有低濃度其它攙雜劑例如p、8及8, 但較佳方法排除包含其它攙雜劑。 加熱處理(退火)通常係於丨2〇〇它-2500。(:範圍之溫度進 行。此種溫度範圍之下限通常係經由於退火處理所需處理 過輕達成可接受的動力學速率設定,此外係經由選擇動力 學前進之平衡缺陷濃度設定。此種溫度範圍之上限係由實 際考量設定,原因在於難以於高於25〇〇〇c操作HpHT方法, 但經由於高於此溫度適當退火可促進退火而形成特別為近 無色鑽石。此範圍之下限較佳為125〇。(:,更佳為i3〇〇ec及 又更佳為1400°C。此範圍之上限較佳為2〇〇〇°C,更佳為1900 °C及又更佳為1800。(:。此種退火進行一段3-3 X 1〇6秒之時 5間。此範圍之下限較佳為30秒,更佳為100秒及又更佳為3〇〇 秒。此範圍之上限較佳為3 X 1〇5秒,更佳為1 X 1〇5秒,又 更佳為2 X 104秒及又更佳為7 X 1〇3秒。 退火可於鑽石穩定壓力下進行,或例如可於惰性氣氛 或穩定氣氛於接近或低於大氣壓下進行。熟諳技藝人士了 10解此等變數間有交互相依性,較低溫需要的退火時間較 長;或於同溫施用穩定壓力時之退火時間較長。如此特定 溫度範圍較為適合特定時間範圍,根據是否使用穩定壓力 而定,二者可有不同。不含鑽石穩定壓力之退火處理之溫 度上限通常為1600°C,特別於退火時間長或處理未經小心 15控制時造成石墨化問題。但於未使用鑽石穩定壓力時可達 成高達1800°c之退火,於極端案例中可達到i 9〇(rc之退火。 用於本說明書之目的,壓力領域可分成二領域,亦即 鑽石穩疋區’俗稱作鑽石穩定壓力,以及石墨穩定區。石 墨穩疋區中最易得的區域為大氣壓附近區域(1.01 X 105 20帕)’但於經過控制之氣體環境下,通常相當容易達成較低 壓’例如1 X 1〇2帕、1 X 1〇5帕,以及達成較高壓例如1.02 X 105帕-5 X 1〇5帕。低於$ X 1〇5帕之壓力範圍通常對鑽石容積 内部之缺陷退火並無可分辨的影響°進-步-般了解於5 X 105帕至鑽石穩定壓力之壓力並未導致任何個別缺陷,該種 12 1355371 表現之基本性質與於鑽石穩定區退火或接近大氣壓退火所 得的基本性質並無差異,但例如反應速率可能呈某種平滑 之壓力之函數介於兩個極端間改變,因此缺陷間的平衡以 及缺陷間的交互作用可能改變至某種程度。本發明方法於 5 石墨穩定區之退火通常係於大氣壓完成以求簡單,但如此 並未限制本發明方法涵蓋於石墨穩定區之其它壓力進行退 火。 習知用於高壓壓機的壓力係以千巴表示。為求一致, 本說明書的全部壓力皆以帕表示,選用之高壓使用轉換因 10 數1巴=1.Ox 1〇5帕而被轉成巴或千巴。 本發明之有色CVD鑽石晶體較佳具有所需色調。特定 之色調之色調角可將a*b*色圖上該色調表示之點之直線向 後延伸而找出,容後詳述,且顯示於第4圖。於加熱處理後 CVD鑽石之色調角典型為小於65度或小於60度,或小於55 15 度或小於50度。眾所周知桃色鑽石由於公認為最美且稀 罕,因此為珠寶商、收集家及消費者所最喜好且價格高(桃 色鑽石,John M. King等人,寶石及珠寶學,2002年夏季)。 於鑽石業,綠鑽石的價值也高,且獲得眾人的鑑賞(彩色鑽 石之收集與分類,Stephen C. Hofer,1998,艾許蘭(Ashland) 20 出版公司,紐約)。通常桃色鑽石及綠色鑽石比純色鑽石之 價位更高,二次修飾色彩的影響較弱。本發明之加熱處理 條件或退火條件可經由增加、去除、減少或修改促成色彩 修飾之吸收,俾提升色彩純度。同時退火或加熱處理經由 降低缺陷濃度,減少於光譜寬廣範圍之吸收,而增加明亮 13 1355371 度。 若干促成褐色CVD鑽石之色彩之色彩中心為單晶CVD 鑽石、或對由單晶CVD鑽石切割或製造的小塊而言為獨特 色彩中心,特別影響厚層被覺察的色彩。其與促成天然鑽 5 石色彩之色彩中心不同極為清晰,原因在於前者造成之吸 收帶未出現於天然鑽石之吸收帶。相信部分色彩中心係與 單晶CVD鑽石内部鑽石鍵結的極為局部化摧毁有關。其證 據係來自於使用紅外光激光源(例如785奈米或1064奈米)由 非鑽石碳觀察得之雷蒙(Raman)散射。對褐色天然鑽未見此 10 種雷蒙散射。褐色單晶CVD鑽石於光譜可見光區之吸收帶 之相對吸收強度可藉退火而改變,且同時改變雷蒙光譜。 吸收光譜之變化溫度遠比改變褐色天然鑽色彩需要的改變 溫度更低。即使於無氧氣存在下,於遠低於鑽石石墨化之 溫度,例如1600°C或以下,經由於大氣壓於惰性氣氛退火, 15 仍然可達成顯著色彩改變。由於非鑽石碳轉成鑽石通常需 要於鑽石穩定區,於高壓及高溫條件下處理,因此此項發 現乃出人意表。 CVD鑽石生長機轉之相關特性可能導致吸收帶,該吸 收帶取中於約350奈米及約510奈米,以及一吸收帶,其取 20 中於近紅外光且延伸入可見光譜的紅區。負責此等吸收帶 之色彩中心對所生長之CVD鑽石之色彩有重大影響。該色 彩中心不存在於天然鑽或其它合成鑽。由如所生長之CVD 鑽石拋光所得寶石可具有期望色彩,包括橙褐色及桃褐 色。當此鑽石於本發明條件下加熱處理或退火時,吸收帶 14 1355371 的相對強度可以可加強色彩之方式變更,例如去除或減少 或增加。對色彩改變的貢獻也係來自於透過存在於如所生 長鑽石之缺陷的崩潰而形成色彩中心,或色彩變化係來自 於電荷移轉過程的變化,改變了缺陷的主電荷態所致。因 5 此退火步驟或加熱處理步驟可變更色彩中心的組合成為於 如所生長之CVD鑽石所無法產生的組合,獲得具有來自於 新穎色彩中心組合之滿意色彩之單晶CVD鑽石。如熟諳技 藝人士已知,如350奈米至510奈米之寬廣吸收帶於最大強 度位置可有小量變化,但並不改變其身分。 10 圖式簡單說明 第1圖於2400°C,於約8.0x 109帕(80千巴)壓力下退火4 小時,(a)於退火前以及(b)於退火後記錄得之樣本Ex-4之紫 外光-可見光吸收光譜。 第2圖於1900°C,於約7.0x 109帕(70千巴)壓力下退火4 15 小時,(a)於退火前以及(b)於退火後記錄得之樣本Ex-5之紫 外光-可見光吸收光譜。 第3圖於1600°C,於約6.5 X 109帕(65千巴)壓力下退火4 小時,(a)於退火前以及(b)於退火後記錄得之樣本Ex-6之紫 外光-可見光吸收光譜。 20 第4圖於1600°C,於約6.5 X 109帕(65千巴)壓力下退火4 小時,(a)於退火前以及(b)於退火後記錄得之樣本Ex-6之紫 外光-可見光吸收光譜導出之CIELAB a*值及b*值之作圖。 第5圖於1600°C,於約6.5 X 109帕(65千巴)壓力下退火4 小時,(a)於退火前以及(b)於退火後記錄得之樣本Ex-6之紫 15 5 外光-可見光°及收光譜導出之CIELAB L*值及c*值之 C實施方式】 。 較佳實施例之詳細說明 10 本發月於適當且經過控制之加熱處理條件下可達 色單晶CVD鑽石以經過控制之方式轉成另—種顏色。翠晶 CVD鑽石㈣係呈厚層形式、或由此種厚層切割或製造的 小塊形式。厚層單晶CVD鑽石係具有高品f,較佳其製法 係經由提供—鑽石基材,《材具有實質不含晶體缺陷之 表面,提$種來源氣體;解離該來源氣體;以及允許於 該實質不含晶體缺陷之表面上進行同質磊晶鑽石生長。藉 此方式之CVD鑽石生長不含包涵體,此乃HPH1^石之典 1特別為色彩非由單一取代氮所優勢的HPHT鑽石。 15 通常該方法係於氮氣存在下進行,氮氣被添加至合成 電漿。氮氣的存在可於鑽石產生褐色彩中心。當氮氣係以 控制方式添加時,氮氣充分摧毀鑽石的生長,造成結合色 才> 中心,該色彩中心涉及以非鑽石方式鍵結之碳,同時獲 得具有良好單晶品質之鑽石,該鑽石使用X光技術如X光拓 樸學判定具有良好單晶品質。 20 要緊地為了製造具有高結晶品質,厚單晶CVD鑽係於 貫質不含晶體缺陷之鑽石表面上進行生長。於本上下文 中缺&主要表示差排(dislocations)及微裂紋,但缺陷也包 括擎晶邊界、本質上非關聯攙雜劑N原子之點缺陷、低角度 邊界以及任何其它對晶格的延伸破壞。較佳基材為低雙折 射型^天然鑽、lb或11a高壓/高溫合成鑽、或CVD合成單晶 16 1355371 鐵石。 、、^充分不含缺陷之基材上的生長品f,隨著層厚 度生長增厚’品質快速劣化,以及隨著缺陷結構的倍增, 造成全面晶體劣化、孿晶以及再孕核。 缺陷密度最易藉光學評比來特徵化,使用例如後述類 裂之間短電襞敍刻,於使用最佳化電漿或化學钮刻來揭露 缺陷(後文稱作為揭露性電⑽刻)後最容㈣光學評比而 決定缺陷密度。可揭露兩型缺陷: 10 1)基材材料品質特有缺陷。於選用之天然鑽石,此種 缺陷密度低抵50/平方毫米,更為典型數值為奶平方毫 米,而其它鑽石則為1〇6/平方毫米或以上。 )由I光導致的缺陷,包括差排結構以及微裂縫形成 沿拋光線的顫動軌跡。缺陷密度於樣本可有相當大變化, 典型值由約102/平方奎半,5 ή 毫水至不良拋先區或不良拋光樣本之 15 大於10/平方毫米。 缺陷之較佳低密度為(如前述)缺陷相關之表面敍刻社 構密度係低於5 X 1〇3/平方毫米及更佳低於1〇2/平方毫米;。 如此經由小心準備紐’可將欲進行CVD生長之基材 表面以及表面下方之缺陷含量最小化。此處含括於準 20 .包括任一種應用至得自採礦(天然鑽石的情況)或合成 (合成材料的情況)之材料之處理,原因在於各個階段皆可能 影響當準備作為基材完成時將形成為基材表面之該平面之 材料内部的缺陷密度。特殊處理步驟包括習知鑽石處理例 如機械鑛開、輕拍及拋光(本用途特別對低含量缺陷為最佳 17 1355371 化);以及铰非習知技術例如雷射處理或離子植入及剝離技 術、化學/機械拋光以及液相及電聚化學加工技術。此外, 表面RQ(藉標線片側繪計測量,表面側繪之均方根與平面的 偏差,較佳測量0.08毫米長度)須最小化,任何電漿蝕刻前 5之典型值不大於數奈米 ,亦即小於10奈米。 最j化基材之表面毀損之特定方法係包括原位電漿蝕 - 刻於欲進仃同質磊晶鑽石生長表面。原則上此種蝕刻無須 原4進行也無須恰於生長之前即刻進行,但若此種姓刻 為原位進行則可獲得最大效果,原因在於如此可避免進一 鲁 10步物理傷害或化學污染的風險。當生長過程也以電衆為主 時,通常以原位蝕刻為最方便。電漿蝕刻可使用類似沉積 過程或鑽石生長過程的條件,但不存在有任何含碳來源氣 體,且通常於略低溫度,俾對蝕刻速率獲得較佳控制。例 如電聚_條件係由下列-S多項條件組成: 15 (i)氧餘刻主要使用氫,選擇性含有小量氬以及要求小 莖氧。典型氧蚀刻條件為50-450 X 102帕壓力,钱刻氣體含 有1至4%氧含量,〇至3〇%氯含量以及差額為氮,全部百分 φ 比皆為以容積表示’基材溫度為600-1100。(:(更典型為800 °C),以及典型時間為3-60分鐘。 20 (ϋ)氫姓刻係類似(丨),但不存在有氧。 (m)另一種蝕刻方法不單純基於氬也可使用氫及氧, 例如利用鹵素'其它情性氣體或氮氣之餘刻方法。 典型ϋ刻為氧钱刻’接著為氯姓刻,然後經由導入碳 體ml接進人合成H彳時間/溫度經選擇讓處理造成 18 的其它表面毁損可被去除,為了去除任何表面污染物,但 未形成咼度粗化表面’且未順著延伸之缺陷(例如差排)全面 姓刻,該缺陷係與表面交又,因❿造成>果的小坑穴。由於 蝕刻相當激烈,故特別重要地,於此階段,反應室的設計 5以及成分材料之選擇須為無任何材料由電漿移轉至氣相、 或移轉至基材表面。氧蝕刻後之氫蝕刻對晶體缺陷較無特 異性,圓化經由積極攻擊缺陷之氧蝕刻造成的稜角,以及 提供較為平滑且較佳之隨後生長用的表面。 進行CVD鑽石生長之鑽石基材表面較佳為{1〇〇}、 ίο (110丨、{113丨或U11}表面。由於處理限制,實際樣本表面 方向性與其理想方向性可差異達5度,某些情況下可高達1〇 度,但較不佳,差異高達1〇度可能對再現性造成不良影響。 重要地,於本發明方法,進行CVD生長之條件雜質含 量須經過適當控制。特別鑽石生長須於一種氣氛下進行, I5或氣氣除了蓄意添加之氮或其它攙雜劑之外實質上不含任 何污染物。氮;辰度須控制為大於500 ppm(以總氣體容積之 分子分量表示)或氣相目標濃度之5%(視何者較大決定);或 較佳大於300 ppm(以總氣體容積之分子分量表示)或氣相目 標濃度之3°/。(視何者較大決定);以及更佳大於1〇〇 ppm(以 20總氣體容積之分子分量表示)或氣相目標濃度之1%(視何者 較大決定)。於低抵100 ppb濃度,測量於氣相之絕對氮濃度 及相對氮濃度需要複雜的監視設備,例如可藉氣相層析術 達成。現在說明此種方法範例。 標準氣相層析術(GC)包含:使用窄鏜孔樣本管線,由感 19 1355371 興,點提取氣體樣本流,最佳化獲得最大流速以及最小無 效容積’通過GC樣本盤管,隨後送至廢棄。Gc樣本盤管為 -&盤曲之管’具有gj定且已知之容積(典型供標準大氣壓 /主入為1立方厘米),該沉樣本盤管可由其於樣本管線之位 5置切換至載氣(高純度氦氣)管線,饋進氣相層析術管柱。如 此將具有已知容積之氣體樣本置於進入管柱之氣流;業界 將此種程序稱作為樣本注入。 被左入的樣本藉載氣攜帶通過第—GC管柱(填裝用於 刀離单純無機氣體為最佳化的分子篩),經過部分分離,但 10冋/辰度一次氣體(例如氫氣、氩氣)造成管柱飽和,管柱飽和 造成例如氮氣的分離困難。然後來自第一管柱之流出流之 相關區段切換入第二管柱之進料,如此可避免大部分其它 氣體進入第二管柱,防止管柱的飽和,因而可完全分離目 標氣體(氮氣)。此種程序稱作為「心餾」。 15 第二管柱之輸出流通過放電游離偵測器(DID),DID偵 測由於存在有樣本造成通過載氣之漏電流增高。化學結構 式係以氣體停駐時間識別’氣體停駐時間係由標準氣體混 合物校準。DID之反應於大於5次羃幅度為線性,且使用含 有欲偵測之物種之經過特殊校準的氣體混合物校準,典型 2〇藉重量分析係於1〇-1〇〇 Ppm之範圍,然後由供應商證實。 DID之線性度可經由小心稀釋實驗加以證實。目標含氮物種 包括用作為蓄意攙雜劑之氣體類別(例如N2、NH3);以及來 自於大氣污染的N2 ’任何其它含氮物種皆可能與測量條件 有關。 20 1355371 此種已知氣相層析術進一步經修改及發展供本應用使 用,如後:此處分析之方法典型係於50_500 χ 1〇2帕操作。 正常氣相層析操作使用大於大氣壓之來源氣體壓力來推進 氣體通過樣本管線。此處樣本之推進方式係於管線之廢料 5端接上真空幫浦,樣本於低於大氣壓被抽取通過管線。當 氣體流動時,管線阻抗可能造成管線的顯著壓降,影響校 準及靈敏度。因此於樣本盤管與真空幫浦間設置—閥,該 閥於樣本注入前關閉一段短時間,來確保樣本盤管的壓力 穩定,藉壓力錶測量壓力。為了確保注入足夠量的樣本氣 10體,樣本盤管容積放大至約5立方厘米。依據樣本管線之設 計決定’此項技術於低抵約70xl〇2帕之壓力時仍然可有效 操作。氣相層析儀之校準係依據注入之樣本質量決定,經 由使用與接文分析來源之相等樣本壓力來校準氣相層析 儀,可獲得最大準確度。必須遵守高標準真空及氣體處理 15 規範,俾確保測量正確。 抽樣點可位在合成室上游來決定輸入氣體的特徵;於 合成室内來決定室内環境特徵;或位於合成室下游。 來源氣體可為業界已知之任-種來源氣體,將含有含 碳材料,含碳材料解離而產生自由基或其它反應性物種。 20氣體濃合物通常也含有適合提供原子形式之氯或齒素之氣 體。 來源氣體的解離較佳於業界已知之反應器範例,係使 用微波此進行。但來自反應器的任何雜質的移轉須最小 化。微波系統用來確保電毁遠離全部表面,但欲作鑽石生 21 1355371 長之基材表面以及其安裝表面除外。較佳安裝材料例如為: 钥、鎢、碎及碳化妙。較佳反應室材料例如為不錄鋼、紹、 銅、金及始。 須使用高電漿功率密度,該高電聚功率密度係來自於 5高微波功率(典型用於25_300毫米基材直徑為3 6〇千瓦)、及 高氣體壓力(50-500 X 1〇2帕以及較佳1〇〇 χ 45〇2帕)。 · 使用前述條件,可使用添加H5〇〇 ppm範圍之氛至 氣體流,製造褐色高品質單晶CVD鑽石厚層。 該高品質單晶CVD鑽石厚層或其小塊隨後接受加減 · 10 理。小塊例如可呈寶石形式。 現在說明本發明之具體實施例。下表⑼舉於如所生長 之褐色單晶CVD鑽石所見吸收頻帶之七種不同組合(標示 為案例1-7)。褐CVD鑽石光譜分解成為此等吸收帶之細節討 論於WO 03/052177A1。 15 於各案例皆存在有於270奈米的特徵,該特徵係與鑽石 晶格内部取代位置之氣雜質有關。眾所周知相關吸收擴展 於吸收光譜之可見光區,獲得_鑽石之獨特黃色調。 · 案例1:斜坡特徵表示由紅至紫外光之概略吸收增加。 此項特徵可見於多種單晶CVD鑽石層光譜其本身為不合 2〇所需,或組合個別取代氮,產生無光澤褐色調。 案例2:於約35〇奈米及M〇奈米之寬頻帶相信關Ppm-30 ppm, but skilled artisans understand that nitrogen uptake is extremely sensitive to process conditions such as temperature, pressure and gas phase composition, so the invention is not limited to these limits. Different isotopes of nitrogen can be used, such as 14N or 15n. The effects of different isotopes on growth chemistry and final results are usually not significant, but some of the defects formed by N may have their associated optical bands shifted by atomic weight differences. In addition to Example 8, 14N is used to derive the information provided in this specification, but the scope of the invention covers all N isotopes. The uptake of impurities (e.g., nitrogen) is also sensitive to the growth sector, and preferably the final layer is predominantly or substantially entirely a growth sector or a growth region type having a symmetric relationship. Growth sectors such as {100}, {1U}, {11〇}, {111} may be used, and more preferably growth sectors {100} and {113} and optimal growth sectors {100}. Diamonds may additionally contain low concentrations of other dopants such as p, 8 and 8, but preferred methods exclude other dopants. The heat treatment (annealing) is usually carried out at 丨2〇〇-2500. (: The temperature of the range is carried out. The lower limit of such a temperature range is usually set by the treatment required to be lightly annealed to achieve an acceptable kinetic rate setting, in addition to the equilibrium defect concentration set by the selection of the kinetic progression. The upper limit is set by practical considerations because it is difficult to operate the HpHT method above 25 ° C, but an appropriate annealing above this temperature can promote annealing to form a particularly near-colorless diamond. The lower limit of this range is preferably 125 〇. (:, more preferably i3 〇〇 ec and more preferably 1400 ° C. The upper limit of this range is preferably 2 〇〇〇 ° C, more preferably 1900 ° C and still more preferably 1800. The annealing is carried out for a period of 3-3 X 1 〇 6 seconds. The lower limit of the range is preferably 30 seconds, more preferably 100 seconds and more preferably 3 sec seconds. Preferably, it is 3 X 1 〇 5 seconds, more preferably 1 X 1 〇 5 seconds, still more preferably 2 X 104 seconds and more preferably 7 X 1 〇 3 seconds. Annealing can be carried out under stable pressure of the diamond, or for example It can be carried out in an inert atmosphere or a stable atmosphere at or near atmospheric pressure. There is an interdependence between the equal variables, and the annealing time required for lower temperature is longer; or the annealing time is longer when the steady pressure is applied at the same temperature. Such a specific temperature range is suitable for a specific time range, depending on whether or not stable pressure is used, The temperature limit for annealing without diamond-stabilized pressure is usually 1600 ° C, which is particularly problematic when the annealing time is long or the treatment is not carefully controlled. However, it can be achieved without using the diamond to stabilize the pressure. Annealing up to 1800 °c, in the extreme case can reach i 9 〇 (r anneal. For the purposes of this specification, the pressure field can be divided into two areas, that is, the diamond stable area 'commonly known as diamond stable pressure, and graphite Stable zone. The most easily available region in the graphite stabilization zone is the region near atmospheric pressure (1.01 X 105 20 Pa). However, in a controlled gas environment, it is usually quite easy to achieve a lower pressure 'for example, 1 X 1〇2 Pa, 1 X 1 〇 5 Pa, and achieve a higher pressure such as 1.02 X 105 Pa - 5 X 1 〇 5 Pa. The pressure range below $ X 1 〇 5 Pa is usually annealed to defects inside the diamond volume and Unresolved effects. Step-by-step understanding of the pressure from 5 X 105 Pa to the stable pressure of the diamond did not result in any individual defects. The basic properties of this 12 1355371 are the same as those obtained by annealing at or near atmospheric pressure. There is no difference in the basic properties, but for example, the reaction rate may be a function of some smooth pressure between the two extremes, so the balance between defects and the interaction between defects may change to some extent. The method of the present invention is 5 Annealing of the graphite stabilizing zone is typically done at atmospheric pressure for simplicity, but this does not limit the annealing of the process of the present invention to other pressures in the graphite stabilizing zone. Conventional pressures for high pressure presses are expressed in kilobars. For the sake of consistency, all the pressures in this specification are expressed in Pascals. The high-pressure conversion used is converted to Pakistan or kilobars due to the number of 1 bar = 1.Ox 1〇5 Pa. The colored CVD diamond crystal of the present invention preferably has a desired hue. The hue angle of a particular hue can be found by extending the line of the point indicated by the hue on the a*b* color map, as detailed later, and shown in Fig. 4. The hue angle of the CVD diamond after heat treatment is typically less than 65 degrees or less than 60 degrees, or less than 55 15 degrees or less than 50 degrees. Peach-colored diamonds are known to be the most beautiful and rare, and are therefore preferred and priced by jewelers, collectors and consumers (peach diamonds, John M. King et al., Gems and Jewelry, Summer 2002). In the diamond industry, the value of green diamonds is also high and is appreciated by everyone (collection and classification of colored diamonds, Stephen C. Hofer, 1998, Ashland 20 Publishing Company, New York). Usually peach-colored and green diamonds are more expensive than solid-colored diamonds, and secondary-modified colors have a weaker effect. The heat treatment conditions or annealing conditions of the present invention can enhance the color purity by increasing, removing, reducing or modifying the absorption of the color modification. Simultaneous annealing or heat treatment reduces the concentration of defects and reduces the absorption over a wide range of spectra, increasing the brightness by 13 1355371 degrees. Some of the color centers that contribute to the color of brown CVD diamonds are single crystal CVD diamonds, or unique color centers for small pieces cut or fabricated from single crystal CVD diamonds, particularly affecting thick layers of perceived color. It is very different from the color center that contributes to the natural color of the stone. The reason is that the absorption belt caused by the former does not appear in the absorption band of natural diamonds. It is believed that some of the color centers are associated with the extremely localized destruction of diamond bonds within the single crystal CVD diamond. The evidence is derived from Raman scattering observed from non-diamond carbon using an infrared laser source (eg 785 nm or 1064 nm). There are no 10 Raymond scatterings on brown natural diamonds. The relative absorption intensity of the brown single crystal CVD diamond in the absorption band of the visible region of the spectrum can be varied by annealing and simultaneously changing the Raymond spectrum. The temperature at which the absorption spectrum changes is much lower than the temperature required to change the color of the brown natural diamond. Even in the absence of oxygen, at temperatures well below the graphitization of the diamond, such as 1600 ° C or below, a significant color change can still be achieved by annealing at atmospheric pressure in an inert atmosphere. Since the conversion of non-diamond carbon into diamonds usually requires a stable zone of diamonds and is handled under high pressure and high temperature conditions, this finding is unexpected. The relevant characteristics of the CVD diamond growth machine may result in an absorption band taken at about 350 nm and about 510 nm, and an absorption band, which takes 20 in near-infrared light and extends into the red region of the visible spectrum. . The color centers responsible for these absorption bands have a significant impact on the color of the CVD diamond being grown. This color center does not exist in natural diamonds or other synthetic drills. Gemstones polished from CVD diamonds as grown may have desirable colors, including orange-brown and peach-brown. When the diamond is heat treated or annealed under the conditions of the present invention, the relative strength of the absorbent strip 14 1355371 can be altered in a manner that enhances color, such as removal or reduction or increase. The contribution to color change also comes from the formation of a color center through the collapse of a defect such as a diamond produced, or the change in color from the charge transfer process, which changes the main charge state of the defect. Because the annealing step or the heat treatment step can change the combination of color centers to a combination that cannot be produced by the grown CVD diamond, a single crystal CVD diamond having a satisfactory color from a novel color center combination is obtained. As is known to those skilled in the art, a wide absorption band, such as from 350 nm to 510 nm, can vary slightly in maximum strength, but does not change its identity. 10 Schematic diagram 1 is annealed at 2400 ° C for 4 hours at a pressure of approximately 8.0 x 109 Pa (80 kbar), (a) pre-annealed and (b) sample Ex-4 recorded after annealing Ultraviolet-visible absorption spectrum. Figure 2 is annealed at 1900 ° C for about 45 hours at a pressure of about 7.0 x 109 Pa (70 kbar), (a) before annealing and (b) after annealing, the sample Ex-5 is UV- Visible light absorption spectrum. Figure 3 is annealed at 1600 ° C for 4 hours at a pressure of about 6.5 X 109 Pa (65 kbar), (a) before the annealing and (b) after annealing, the sample Ex-6 UV-visible Absorption spectrum. 20 Figure 4 is annealed at 1600 ° C for 4 hours at a pressure of approximately 6.5 X 109 Pa (65 kbar), (a) before annealing and (b) after annealing an ex-violet of sample Ex-6 - The CIELAB a* value and b* value derived from the visible light absorption spectrum are plotted. Figure 5 is annealed at 1600 ° C for 4 hours at a pressure of about 6.5 X 109 Pa (65 kbar), (a) before annealing and (b) after recording the sample Ex-6 violet 15 5 C-implementation of the CIELAB L* value and C* value derived from the light-visible light and the received spectrum]. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT 10 The present invention is capable of being converted to another color in a controlled manner under suitable and controlled heat treatment conditions. The CVD diamond (4) is in the form of a thick layer or a small piece cut or manufactured from such a thick layer. The thick single crystal CVD diamond has a high quality f, preferably by providing a diamond substrate, the material having a surface substantially free of crystal defects, extracting a source gas, dissociating the source gas, and allowing the The growth of homogenous epitaxial diamonds is carried out on the surface substantially free of crystal defects. In this way, CVD diamond growth does not contain inclusion bodies, which is a HPH1^ stone formula 1 especially for HPHT diamonds whose color is not dominated by a single substituted nitrogen. 15 Typically the process is carried out in the presence of nitrogen and nitrogen is added to the synthetic plasma. The presence of nitrogen creates a brown colored center in the diamond. When nitrogen is added in a controlled manner, nitrogen completely destroys the growth of the diamond, resulting in a combined color. The center of the color involves carbon bonded in a non-diamond manner, while obtaining a diamond with good single crystal quality. X-ray technology, such as X-ray topology, has good single crystal quality. 20 In order to produce a high crystalline quality, a thick single crystal CVD drill is grown on the surface of a diamond that does not contain crystal defects. In this context, the absence & mainly represents dislocations and microcracks, but the defects also include the boundary of the crystal, the point defects of the N-atoms of the essentially unrelated dopants, the low-angle boundary and any other extension damage to the crystal lattice. . Preferred substrates are low birefringence type natural drill, lb or 11a high pressure/high temperature synthetic drill, or CVD synthetic single crystal 16 1355371 iron. The growth product f on the substrate which is sufficiently free of defects, which grows thicker with the thickness of the layer, the quality deteriorates rapidly, and as the defect structure multiplies, the overall crystal is degraded, twinned, and re-pregnant. The defect density is most easily characterized by optical grading, using, for example, a short electric smear between the cracks described later, after using the optimized plasma or chemical button to reveal the defect (hereinafter referred to as the exposing electricity (10)) The most accurate (iv) optical evaluation determines the defect density. Two types of defects can be revealed: 10 1) Defective quality of the substrate material. For natural diamonds selected, the defect density is less than 50/mm2, with a typical value of square millimeters of milk and other diamonds of 1〇6/mm2 or more. Defects caused by I light, including the poor row structure and microcrack formation, along the trajectory of the polishing line. The defect density can vary considerably from sample to sample, with a typical value of about 102/sq. ft., 5 ή 水 水 to the poor throwing area or 15 of the poorly polished sample being greater than 10/mm 2 . The preferred low density of the defect is (as described above) the defect-related surface lithography density is less than 5 X 1 〇 3 / square mm and more preferably less than 1 〇 2 / mm 2 ; Thus, by carefully preparing the button, the surface of the substrate to be subjected to CVD growth and the content of defects under the surface can be minimized. Included here is 20. Includes any application to materials derived from mining (in the case of natural diamonds) or synthetic (in the case of synthetic materials), as each stage may affect when prepared as a substrate. The density of defects formed inside the material of the plane of the surface of the substrate. Special processing steps include conventional diamond processing such as mechanical mining, tapping and polishing (this is especially best for low-level defects); and non-known techniques such as laser processing or ion implantation and stripping techniques , chemical / mechanical polishing and liquid and electropolymer chemical processing technology. In addition, the surface RQ (measured by the side line of the reticle, the deviation of the root mean square from the plane on the surface side, preferably measuring 0.08 mm length) must be minimized, and the typical value of 5 before any plasma etching is not more than a few nanometers. , that is, less than 10 nm. The specific method of surface damage of the most j-substrate includes in-situ plasma etching - engraved on the growth surface of the homogenous epitaxial diamond. In principle, this etching does not have to be carried out in the original 4 or immediately before the growth, but if the surname is in situ, the maximum effect can be obtained, because the risk of physical damage or chemical contamination of the 10 steps can be avoided. When the growth process is also dominated by electricity, it is usually most convenient to etch in situ. Plasma etching can use conditions similar to the deposition process or the diamond growth process, but there is no carbon source gas present, and typically at a slightly lower temperature, the etch rate is better controlled. For example, the electropolymerization _ condition consists of the following -S multiple conditions: 15 (i) The oxygen residue is mainly hydrogen, selectively containing a small amount of argon and requires small stem oxygen. Typical oxygen etching conditions are 50-450 X 102 Pa pressure, the gas engraved gas contains 1 to 4% oxygen content, 〇 to 3〇% chlorine content and the difference is nitrogen, all percentage φ ratio is expressed by volume 'substrate temperature It is 600-1100. (: (more typically 800 °C), and typical time is 3-60 minutes. 20 (ϋ) Hydrogen name is similar (丨), but there is no oxygen. (m) Another etching method is not based solely on argon. It is also possible to use hydrogen and oxygen, for example, by using a halogen 'other erotic gas or a residual method of nitrogen. A typical engraving is an oxygen engraving' followed by a chlorine engraving, and then a human carbon synthesis time is introduced via the introduction of the carbon body ml/ The temperature is selected such that the other surface damage caused by the treatment can be removed, in order to remove any surface contaminants, but does not form a roughened surface 'and does not follow the extended defects (such as the difference), the defect is It is especially important to make a small pit with a surface because of the etch. Because of the intense etching, it is particularly important that at this stage, the design of the reaction chamber 5 and the composition of the materials must be such that no material is transferred from the plasma. To the gas phase, or to the surface of the substrate. Hydrogen etching after oxygen etching is less specific to crystal defects, rounding the edges and corners caused by oxygen etching of aggressive attack defects, and providing smoother and better subsequent growth. Surface. CVD The surface of the stone-grown diamond substrate is preferably {1〇〇}, ίο (110丨, {113丨 or U11} surface. Due to processing limitations, the actual sample surface directionality can differ from its ideal directionality by 5 degrees, some In the case of up to 1 degree, but less preferred, a difference of up to 1 degree may adversely affect reproducibility. Importantly, in the method of the present invention, the content of impurities for CVD growth must be appropriately controlled. In an atmosphere, I5 or gas is substantially free of any contaminants other than deliberately added nitrogen or other dopants. Nitrogen; the elongation must be controlled to be greater than 500 ppm (expressed as the molecular component of the total gas volume) or 5% of the gas phase target concentration (depending on which is larger); or preferably greater than 300 ppm (expressed as the molecular component of the total gas volume) or 3 °/ of the gas phase target concentration (depending on which is larger); More preferably greater than 1 〇〇 ppm (expressed as the molecular component of the total gas volume of 20) or 1% of the gas phase target concentration (as determined by the larger one). Measured in the gas phase by measuring the absolute nitrogen concentration in the gas phase at a concentration as low as 100 ppb Relative nitrogen concentration needs to be complexed Miscellaneous monitoring equipment, for example, can be achieved by gas chromatography. An example of this method is now described. Standard gas chromatography (GC) consists of: using a narrow bore sample line, by sensing 19 1355371, extracting gas samples Flow, optimized to obtain maximum flow rate and minimum ineffective volume 'passed through the GC sample coil and then sent to waste. The Gc sample coil is -&the coiled tube' has a gj-defined and known volume (typically for standard atmospheric pressure / The main input coil is 1 cubic centimeter), and the sink sample coil can be switched to the carrier gas (high purity helium) line at the position of the sample line 5, feeding the intake phase chromatography column. This will have a known volume. The gas sample is placed in the gas stream entering the column; the process is referred to as a sample injection by the industry. The left-injected sample is carried by a carrier gas through a GC-column (filled with a molecular sieve optimized for the separation of pure inorganic gases), and is partially separated, but a gas of 10 冋/min (such as hydrogen, Argon gas causes saturation of the column, and saturation of the column causes difficulty in separation of, for example, nitrogen. Then the relevant section of the effluent stream from the first column is switched into the feed of the second column, thus avoiding most of the other gases entering the second column, preventing saturation of the column, and thus completely separating the target gas (nitrogen gas) ). This procedure is called "heart distillation." 15 The output of the second column passes through the Discharge Free Detector (DID), and the DID detects an increase in leakage current through the carrier gas due to the presence of a sample. The chemical structure is identified by the gas residence time. The gas residence time is calibrated by the standard gas mixture. The DID reacts more than 5 times in a linear range and is calibrated using a specially calibrated gas mixture containing the species to be detected. Typical weight analysis is in the range of 1〇-1〇〇Ppm and then supplied Confirmed by the business. The linearity of the DID can be confirmed by careful dilution experiments. Target nitrogenous species include gas classes used as deliberate dopants (eg, N2, NH3); and N2' from any air pollution may be related to measurement conditions. 20 1355371 This known gas chromatography is further modified and developed for use in this application, as follows: The method of analysis here is typically performed at 50_500 χ 1〇2 Pa. Normal gas chromatography operations use source gas pressures greater than atmospheric pressure to propel gas through the sample line. Here, the sample is propelled in a way that the waste 5 of the pipeline is connected to a vacuum pump, and the sample is drawn through the pipeline at subatmospheric pressure. When the gas flows, the line impedance can cause significant pressure drop in the line, affecting calibration and sensitivity. Therefore, a valve is provided between the sample coil and the vacuum pump. The valve is closed for a short period of time before the sample is injected to ensure the pressure of the sample coil is stable, and the pressure is measured by a pressure gauge. To ensure that a sufficient amount of sample gas 10 is injected, the sample coil volume is enlarged to approximately 5 cubic centimeters. Based on the design of the sample line, this technology can still operate effectively at pressures as low as approximately 70xl〇2 Pa. The calibration of the gas chromatograph is based on the quality of the injected sample, and the gas chromatograph is calibrated using the same sample pressure as the source of the analysis, for maximum accuracy. The high standard vacuum and gas treatment 15 specifications must be observed to ensure that the measurements are correct. The sampling point can be located upstream of the synthesis chamber to determine the characteristics of the input gas; to determine the indoor environmental characteristics in the synthesis chamber; or to be located downstream of the synthesis chamber. The source gas can be any source gas known to the industry that will contain carbonaceous materials and dissociate the carbonaceous material to produce free radicals or other reactive species. The 20 gas concentrate typically also contains a gas suitable for providing chlorine or dentate in atomic form. The dissociation of the source gas is preferred to the reactor examples known in the art and is carried out using microwaves. However, the transfer of any impurities from the reactor must be minimized. The microwave system is used to ensure that the electrical damage is away from the entire surface, except for the surface of the substrate that is intended to be a diamond 21 21355371 and its mounting surface. Preferred mounting materials are, for example, key, tungsten, broken and carbonized. The preferred reaction chamber materials are, for example, no steel, slag, copper, gold and the beginning. High plasma power density must be used, which is derived from 5 high microwave power (typically used for 25-300 mm substrate diameter of 36 kW) and high gas pressure (50-500 X 1 〇 2 Pa) And preferably 1〇〇χ 45〇2 Pa). • Using the above conditions, a thick layer of brown high quality single crystal CVD diamond can be produced by adding an atmosphere of H5 〇〇 ppm to the gas stream. The high quality single crystal CVD diamond thick layer or its small pieces are then subjected to addition and subtraction. The small pieces may for example be in the form of stones. Specific embodiments of the invention are now described. The following table (9) shows seven different combinations of absorption bands as shown by the grown brown single crystal CVD diamond (labeled as Cases 1-7). The details of the spectral decomposition of brown CVD diamonds into such absorption bands are discussed in WO 03/052177 A1. 15 In each case there is a feature of 270 nm, which is related to the gas impurities in the diamond lattice replacement position. It is well known that the absorption is extended in the visible region of the absorption spectrum to obtain a unique yellow tone of the diamond. · Case 1: The slope feature indicates an increase in the approximate absorption from red to ultraviolet light. This feature can be found in a variety of single crystal CVD diamond layer spectra that are themselves incompatible, or combined with individual substituted nitrogen to produce a matt brown tone. Case 2: Believe in the wide band of about 35 〇 nano and M 〇 nano
聯CVD 鑽石結構之局部破壞,而產生鮮間隙狀態。於單晶CVD 鑽石之生長樣本’此等特徵共同出現^結合個別取:氣, 可獲得由橙褐色至桃褐色範圍之色調,該色調係依據三種 22 1355371 顏色貢獻之相對強度決定。 案例3:褐色單晶CVD鑽石也顯示寬廣頻帶,取中於光 譜之腿區,當___,頻帶之_長簡於可見光 諸之紅端產生顯著吸收。其本身將產生藍色調。當連同個 5別取代氮-起觀視時,於光譜兩端形成的吸收讓鑽石具有 綠色調。 案例4:多層褐色單晶CVD鑽石層之光罐可重新組構為 個別取代氮、斜坡式及350/510奈米頻帶貢獻之總和。此種 組合可獲得橙褐色色調。 10 案例5、6及7涵蓋前文討論之吸收特徵之其它組合。依 據各種組成吸收特徵之相對強度決定,此等組合可獲得某 個範圍之不同褐色調。 表1 270奈米 斜坡 350奈米 51〇奈米 NIR賴帶 案例1 是 否 — 否 否 rii忖巴衫 無光澤褐 案例2 是 否 是 是 否 桃褐 案例3 是 否 否 否 是 綠 案例4 是 是 是 是 否 橙褐 案例5 是 否 否 是 褐 案例6 是 否 是 是 是 褐 案例7 是 是 是 是 褐 褐色單晶CVD鑽石於多種不同條件下退火,觀察其效 15 果。 發現斜坡及3 50奈米頻帶可藉下述處理實質去除,該項 處理係於1400-1600°C於周圍壓力之惰性氣氛下處理4小 時。經由於鑽石穩定壓力下,於16〇〇_i7〇〇°c退火4小時, 23 1355371 可達成類似效果。此等處理之本身於例如表2所示案例1、 2、4、5、6及7對鑽石色彩有顯著影響。 表2 初色彩 終色彩 案例1 無光澤褐 淺褐/接近無色 案例2 桃褐 桃褐至褐桃 案例4 橙褐 桃褐至褐桃 案例5 褐 綠 案例6 褐 淺褐 案例7 褐 淺褐 於此溫度範圍相關於帶負電荷之氮-空白中心(具有零 5 聲子線於637奈米)之吸收顯著增高。吸收的增高(尖峰於約 550奈米)傾向於讓樣本看來較為桃色。此種吸收的增加可 由電荷移轉變化所造成,該電荷移轉變化造成較多氮-空白 中心呈負電荷態。吸收增加可由於捕捉於個別氮釋放的空 白或較為複雜的缺陷解離,結果形成額外氮-空白中心所引 10 起。也可為負電荷氮-空白中心激發之發光增加,於極端案 例,如此影響鑽石的外觀色彩。 如此經由選擇適當加熱處理條件,可製造具有桃色至 綠色之特級色彩的有色單晶CVD鑽石。 發現於鑽石穩定壓力條件下,於1800°C退火4小時,造 15 成510奈米頻帶以及NIR頻帶的略降,於考慮之案例產生表3 所示色彩變化。 24 1355371 表3 初色彩 終色彩 案例1 無光澤褐 接近無色 案例2 桃褐 桃褐至褐桃 案例3 綠 較淡綠色 案例4 橙褐 桃色 案例5 褐 綠色 案例6 褐 淺褐 案例7 褐 淺褐 發現於鑽石穩定壓力下,於1900°C或更高溫度退火4 小時,可去除510奈米頻帶及NIR頻帶,於所考慮之案例獲 得表4所示色彩變化。 5 表4 初色彩 終色彩 案例1 無光澤褐 接近無色 案例2 桃褐 接近無色 案例3 綠 接近無色 案例4 橙褐 接近無色 案例5 褐 接近無色 案例6 褐 接近無色 案例7 ' 褐 接近無色 於此等退火條件下,氮-空白中心可解離成為個別取代 氮以及一個空白,該空白遷移離開氮。因此於此種或較高 溫度進行退火處理後,氮-空白中心較不可能影響(先前為褐 色)鑽石色衫。此項處理後,此種鑽石確實顯示強烈綠光, 10 因此於某種觀視條件與照明條件下確實讓鑽石具有綠色 調。 當以325奈米HeCd雷射光激發時,已經於夠高溫退 25 1355371 火,因而實質解離於生長過程中形成的氮-空白缺陷,該種 褐色CVD鑽石之發光光譜傾向於由光譜區域450奈米至550 奈米之頻帶所優勢。可觀察得H3發光(零-光子線於503奈 米);於最高溫退火後,也偵測得N3發光(零-光子線於415 5 奈米)。使用前述帶隙紫外光或電子束激發,隨著最高溫退 火之退火時間的增加,優勢可見光具有由綠轉藍的傾向。 於已經退火之(先前為褐色之)單晶CVD鑽石光譜有其 它發光線。例如於約851奈米之發光線已經以785奈米雷射 激發。雖然由如生長之褐色CVD鑽石未顯示,但對於於低 10 抵12〇〇°C溫度退火之褐CVD鑽石觀察得此發光線。此發光 線未見於其它鑽石種類,因此顯然為於可改變色彩之條件 下退火之褐色CVD鑽石所特有。 使用Nd:YAG雷射激發(1064奈米),可於1263奈米、1274 奈米及1281奈米觀察得其它發光線。也只對已經於可改變 15其色彩條件下退火之單晶褐色CVD鑽石觀察得該發光線。 其色彩可藉退火處理而顯著改善之如所生長之褐單晶 CVD鑽石,顯示於光譜2800-3000厘米“區之與碳·氫鍵之伸 展模相關的紅外光吸收帶。此等帶通常可改變,但不會完 全被尚溫退火處理所去除,通常未見於天然或HPHT合成鑽 20 石之吸收光譜。 某些天然鑽石顯示氫相關吸收線於31〇7厘米-1,該吸收 線未見於未經處理的CVD鑽石光譜。褐單晶CVD鑽石於高 於約1800t溫度退火,造成於3107厘米·ι之吸收線之H相關 缺陷形成。此種缺陷極端穩定,可見於極高溫退火之樣本 26 1355371 光。曰。如此於已知為CVD材料觀察得3107厘米.1,指示該材 ;斗祀據本發Θ方法已經退火。此外觀察得3⑴7厘米」吸收線 組合⑽展特徵,特別指示鑽石為CVD鑽石,該CVD鑽石 已經以此處所述方式接受生長後高溫退火處理而改變色 5 彩。 除了可產生色彩之任何修改之外,前述光學特徵對於 f供鑽石樣本先収證射用。㈣技藝人士了解可決定 疋否存在有本說明書呈現的光學特徵。 用於多晶cvd鑽;ε,空隙可能造朗較短波長之光透 10射減J。本發明之單晶CVD鑽石於退火前或退火後不含空 隙。此種鑽石樣本經過密切研究,包括於剖面圖及平面圖 使用高倍放大(1GGG倍)光學紐鏡研究。並未㈣觀察得空 隙。因此光學顯微鏡將空隙尺寸上限限於約2〇〇奈米。 透射電子顯微鏡(TEM)允許鑽石的薄切片以次奈米尺 15寸之解析度觀視。若干未經退火之褐CVD鑽石之TEM切片 使用TEM成像,俾研究因存在有延伸缺陷造成的色彩。 為了產生均勻色彩,此種缺陷需要徹底分散於鑽石且 有顯著密度,因而可使用TEM測量。此種分布與藉χ光拓樸 繪圖術等技術觀察得的差排或差排束之分布明顯有別,差 20排線係於生長方向,差排線係來自於基材缺陷,或來自於 用於CVD生長之粒子或其它表面缺陷。數百平方微米未經 退火之褐CVD鑽石成像並未顯示任何對應於空隙之影像。 唯有於極深褐色鑽石試樣才能發現有差排形式以及疊差缺 陷形式的延伸缺陷。於微弱褐色或中等褐色鑽石樣本,藉 27 1355371 TEM於研究區絲毫也未觀察得此種延伸缺陷。 色標可用作為說明藉本發明方法製造之單晶CVD鑽石 特級色彩比較其它類型或其它形式鑽石之色彩間之差異的 測量值或手段。 5 觀察得之色彩對本發明之經過退火或加熱處理之單晶 鑽石極為重要、且因色標與觀察得之色彩比起與透射光譜 有更直接關係,因此使用色標來輔助顯示鑽石的新穎特 徵。本發明CVD鑽石之吸收光譜差異可獲得觀察得之色 彩,該色彩係與先前對其它CVD鑽石或ΗΡΗΤ合成鑽石驗證 10 的色彩不同。 確實美感係因人而異,色調可能只是個人偏好問題。 另一方面,鑽石產業認可桃色及綠色鑽石比褐鑽價格更高 且隨著修飾色彩的影響減少,價位更增高。於經過熟練技 巧拋光的寶石若具有指定飽和度之高亮度,則桃鑽或綠鑽 15 更可產生滿意的色彩。有相同色調及飽和度之拋光鑽石若 有低亮度,則較不可能產生滿意的色彩。 此外於光學裝置及電磁傳輸應用需要窗具有某種吸光 特性。該吸光特性可能單純為低總吸光,或某個頻帶的低 吸光,或用於測量熱量計輻射應用時需要有特定吸收尖 20 峰。如此本發明鑽石特別可用於光學用途。光學用途非僅 限於可見光,也可應用於紫外光以及紅外光及紅外光以外 之頻譜。特別預期此種材料可應用於微波區。 CIE L*a*b色標導出 物件之觀察得之色彩係依據物件之透光/吸光光譜決 28 1355371 定、以及依據照明來源之頻譜功率分布以及觀察得眼睛的 反應曲線決定。本專利案引述之CIE L*a*b色標係以此處所 述方式導出。使用標準D65發光頻譜以及眼睛標準(紅、綠 及藍)反應曲線(G. Wyszecki及W.S. Stiles,約输威力,紐約 5 -倫敦-雪梨,1967年),鑽石平行邊板之CIEL*a*b色標係使 用下述關係式由其透射頻譜導出,介於350奈米至800奈 米,資料間隔1奈米: 於波長λ之透射比 1>λ=發光之光譜功率分布 1〇 Χλ=眼睛之紅反應函數 Υλ=眼睛之綠反應函數 ζλ=眼睛之藍反應函數 Χ=Σλ[8λχλίλ]/Υ〇 Υ= Σ x[SkYkLk]/Y〇 15 Z= Σ x[Sx.zx.L^]/Y〇 此處Y〇= Σ λΥλ.Ιλ L* = 116(Y/Y0)1/3 - 16=明亮度(用於Y/Y0>0.008856) a*=5O0[(X/Xo)1/3-(Y/Yo)1/3] (用於X/X〇>0.008856, Y/Y〇>0.008856) 20 b*=200[(Y/Y〇)1/3-(Z/Z〇)1/3] (用於Z/Z〇>0.008856) C*=(a*2+b*2)1/2=飽和度 hab=arctan(b*/a*)=色調角 此等方程式之修改版本可用於Y/Y〇、X/X〇及Z/Z〇之限 度以外。修改版本示於Commission Internationale de 29 1355371 L’Eclairage委員會之技術報告(比色法(1986年))。 通常係將a*及b*座標繪圖於線圖上,a*係對應於χ軸, 以及b*係對應於y轴。正a*及b*值分別係對應於色調之紅及 黃成分。負a*及b*值分別係對應於色調之綠及藍成分。線 5 圖之正象限涵蓋由黃經橙至紅的色調,飽和度(C*)係以距 離原點的距離表示。 可預測具有指定吸收係數光譜之鑽石之a*b*座標如何 隨著光徑長度的變更而改變。為了達成此項目的,反射損 失首先係由測量得之吸收光譜扣除。然後定比縮放吸收用 10 於不同的光徑長度,隨後將反應損失加回。吸收光譜隨後 被轉成透射光譜,透射光譜用來導出新厚度的CIELAB座 標。藉此方式,可模式化色調、飽和度以及明亮度對光徑 長度之相依性,了解每單位厚度具有指定吸收性質之鑽石 色彩如何係依據光徑長度而決定。 15 L*為明亮度,L*形成CIELAB色彩空間之第三度空 間。重要地須了解對於有特定光學吸收性質之鑽石而言, 明亮度及飽和度係隨著光徑長度的改變而變更《可舉例說 明於色調圖,其中L*係沿y轴作圖,C*係沿X軸作圖(例如第 4圖)。前段所述方法也可用來預測具有指定吸收係數光譜 20 之鑽石之L*C*座標如何依據光徑長度決定。 明亮度之標度可以下述方式定義:亮:95>L*>65、中 等:65>L*>35、暗:35>L*>05。 C*(飽和度)可被平分為1〇c*單位之飽和度範圍分別具 有§兒明性術語如後。 30 1355371 0-10 弱 10-20 中弱 20-30 中等 30-40 中強 40-50 強 50-60 強-極強 60-70 極強 70-80+ 極極強 實施例1 10 厚3.2毫米之CVD層生長於HPHT合成鑽石基材。欲生 長之基材表面係根據WO 01/96634所述方法製備。 此種基材係使用適合用於鑽石之高溫鋼焊而安裝於鎢 基材上。引進微波反應器内,使用蝕刻及生長週期來準備 基材表面,然後開始生長。更特別:Partial destruction of the CVD diamond structure results in a fresh gap state. In the case of single crystal CVD diamond growth samples, these features are combined to obtain a color tone ranging from orange-brown to peach-brown depending on the relative intensity of the three 22 1355371 color contributions. Case 3: The brown single crystal CVD diamond also shows a wide frequency band, taken in the leg region of the spectrum. When ___, the band's length is reduced to visible light, and the red end produces significant absorption. It will itself produce a blue hue. When combined with nitrogen-based viewing, the absorption formed at both ends of the spectrum gives the diamond a green tint. Case 4: The multi-layer brown single crystal CVD diamond layer can be reconfigured as a sum of individual replacement nitrogen, ramp and 350/510 nm bands. This combination gives an orange-brown hue. 10 Cases 5, 6 and 7 cover other combinations of absorption features discussed above. Depending on the relative intensities of the various composition absorption characteristics, these combinations can be obtained in different shades of a range. Table 1 270 nm slope 350 nm 51 〇 nano NIR Lai case 1 Whether or not - no no rii 忖 无 无 褐 案例 2 Case 2 Whether it is peach brown case 3 Whether it is green or not 4 is orange or not Brown Case 5 Whether it is brown Case 6 Whether it is brown Case 7 It is a brown-brown single crystal CVD diamond that is annealed under various conditions to observe its effect. The slope and the 3 50 nm band were found to be substantially removed by the following treatment, which was treated at 1400-1600 ° C for 4 hours under an inert atmosphere of ambient pressure. A similar effect can be achieved by annealing at 16〇〇_i7〇〇°c for 4 hours due to the stable pressure of the diamond. These treatments themselves have a significant effect on the color of the diamond, for example, in Cases 1, 2, 4, 5, 6 and 7 shown in Table 2. Table 2 Initial color final color case 1 Matte brown light brown / close to colorless case 2 peach brown peach to brown peach case 4 orange brown peach brown to brown peach case 5 brown green case 6 brown light brown case 7 brown light brown The temperature range is significantly increased with respect to the negatively charged nitrogen-blank center (with zero phonon line at 637 nm). The increase in absorption (spikes at about 550 nm) tends to make the sample appear peachy. This increase in absorption can be caused by a change in charge transfer that causes more nitrogen-blank centers to be negatively charged. The increase in absorption can be dissociated by vacancies or more complex defects captured by individual nitrogen releases, resulting in an additional nitrogen-blank center. It is also possible to increase the luminescence of the negatively charged nitrogen-blank center excitation, which in extreme cases affects the appearance color of the diamond. Thus, by selecting appropriate heat treatment conditions, a colored single crystal CVD diamond having a peach-to-green color can be produced. It was found that under diamond stable pressure conditions, it was annealed at 1800 °C for 4 hours to make a slight drop in the 510 nm band and the NIR band. The color change shown in Table 3 was produced in the case considered. 24 1355371 Table 3 Initial color final color case 1 Matte brown close to colorless case 2 Peach brown peach to brown peach case 3 Green light green case 4 Orange brown peach case 5 Brown green case 6 Brown light brown case 7 Brown light brown found Under the stable pressure of diamond, annealing at 1900 ° C or higher for 4 hours, the 510 nm band and the NIR band can be removed, and the color change shown in Table 4 is obtained in the case considered. 5 Table 4 Initial color final color case 1 Matte brown close to colorless case 2 Peach brown close to colorless case 3 Green close to colorless case 4 Orange brown close to colorless case 5 Brown close to colorless case 6 Brown close to colorless case 7 'Brown close to colorless Under annealing conditions, the nitrogen-blank center can be dissociated into individual substituted nitrogen and a blank that migrates away from the nitrogen. Therefore, after annealing at this or higher temperatures, the nitrogen-blank center is less likely to affect the (previously brown) diamond jersey. After this treatment, the diamond does show strong green light, 10 so it does give the diamond a green tone under certain viewing conditions and lighting conditions. When excited by 325 nm HeCd laser light, it has already ignited 25 1355371 fire at a high temperature, thus substantially dissociating the nitrogen-blank defect formed during the growth process. The luminescence spectrum of the brown CVD diamond tends to be 450 nm from the spectral region. The advantage of the 550 nm band. H3 luminescence was observed (zero-photon line at 503 nm); after annealing at the highest temperature, N3 luminescence was also detected (zero-photon line at 415 5 nm). Using the aforementioned band gap ultraviolet light or electron beam excitation, the dominant visible light has a tendency to turn from green to blue as the annealing time of the highest temperature annealing is increased. The single crystal CVD diamond spectrum that has been annealed (previously brown) has other illuminating lines. For example, a line of about 851 nm has been excited by a 785 nm laser. Although not shown by a brown CVD diamond such as growth, this illuminating line was observed for a brown CVD diamond annealed at a temperature of 10 to 12 °C. This illuminating line is not found in other diamond types and is therefore unique to brown CVD diamonds that are annealed under conditions that can change color. Other illuminating lines were observed at 1263 nm, 1274 nm, and 1281 nm using Nd:YAG laser excitation (1064 nm). The illuminating line was also observed only for the single crystal brown CVD diamond which had been annealed under the color condition of the changeable color. The color can be significantly improved by annealing, such as the grown brown single crystal CVD diamond, which is shown in the infrared light absorption band associated with the carbon/hydrogen bond stretching mode in the region of 2800-3000 cm. These bands are usually Change, but not completely removed by the annealing process, usually not found in the absorption spectrum of natural or HPHT synthetic diamonds. Some natural diamonds show a hydrogen-related absorption line at 31〇7 cm-1, which is not found in Untreated CVD diamond spectrum. Brown single crystal CVD diamond is annealed at temperatures above about 1800t, resulting in the formation of H-related defects at the absorption line of 3107 cm·ι. This defect is extremely stable and can be found in very high temperature annealed samples 26 1355371 light. 如此. Thus known as CVD material observed 3107 cm.1, indicating the material; the bucket has been annealed according to the hairpin method. In addition, the 3 (1) 7 cm" absorption line combination (10) is observed, especially indicating that the diamond is CVD diamonds, which have been subjected to post-growth high temperature annealing treatment in the manner described herein to change color. In addition to any modifications that can produce color, the aforementioned optical features are for the diamond sample to be used for the first time. (4) The skilled person understands whether or not there is an optical feature presented in this specification. For polycrystalline cvd drills; ε, the gap may create a shorter wavelength of light transmission 10 minus J. The single crystal CVD diamond of the present invention does not contain voids before or after annealing. This diamond sample has been closely studied and included in the profile and plan using a high magnification (1GGG) optical luminescence study. There is no (4) observation of the gap. Therefore, the optical microscope limits the upper limit of the void size to about 2 nanometers. Transmission electron microscopy (TEM) allows thin sections of diamonds to be viewed at a resolution of 15 inches. TEM sections of several unannealed brown CVD diamonds were imaged using TEM to investigate the presence of color due to extended defects. In order to produce a uniform color, such defects need to be thoroughly dispersed in the diamond and have a significant density, so that TEM measurement can be used. This kind of distribution is obviously different from the distribution of the poor or poorly arranged bundles observed by techniques such as Twilight Topography. The difference 20 lines are in the growth direction, and the difference line is from the substrate defect, or from the defect. Particles or other surface defects used in CVD growth. Imaging of hundreds of square micrometers of unannealed brown CVD diamonds did not show any image corresponding to the void. Only the extremely dark brown diamond samples can be found in the form of differential rows and extended defects in the form of laminar defects. For the sample of weak brown or medium brown diamonds, this extension defect was not observed in the study area by 27 1355371 TEM. The color scale can be used as a measure or means for describing the difference between the color of a single crystal CVD diamond produced by the method of the present invention compared to the color of other types or other forms of diamond. 5 The observed color is extremely important for the annealed or heat treated single crystal diamond of the present invention, and because the color code and the observed color are more directly related to the transmission spectrum, the color mark is used to assist in displaying the novel characteristics of the diamond. . The difference in absorption spectra of the CVD diamonds of the present invention results in an observed color that is different from the color previously verified for other CVD diamonds or enamel synthetic diamonds. It's true that beauty is different from person to person, and the color tone may be just a matter of personal preference. On the other hand, the diamond industry recognizes that peach and green diamonds are more expensive than brown diamonds and that the price is higher as the effect of the modified color is reduced. If the gemstones that have been skillfully polished have a high brightness with a specified saturation, the peach or green diamond 15 can produce a satisfactory color. Polished diamonds with the same hue and saturation are less likely to produce satisfactory color if they have low brightness. In addition, the optical window and the electromagnetic transmission application require a certain absorption characteristic. This absorbance characteristic may simply be low total absorbance, or low absorbance in a certain frequency band, or a specific absorption tip 20 peak for use in measuring calorimeter radiation applications. The diamond of the invention is thus particularly useful for optical applications. Optical applications are not limited to visible light, but can also be applied to ultraviolet light as well as to infrared and infrared light. It is specifically contemplated that such materials can be applied to the microwave region. The color of the CIE L*a*b color-coded object is determined by the light transmission/absorption spectrum of the object according to the spectral power distribution of the illumination source and the observed response curve of the eye. The CIE L*a*b color code cited in this patent is derived in the manner described herein. Use standard D65 luminescence spectrum and eye standard (red, green and blue) response curves (G. Wyszecki and WS Stiles, about power, New York 5 - London-Sydney, 1967), CIEL*a*b of diamond parallel side panels The color scale is derived from its transmission spectrum using the following relationship, ranging from 350 nm to 800 nm, data interval 1 nm: transmittance at wavelength λ 1 > λ = spectral power distribution of luminescence 1 〇Χ λ = eyes Red reaction function Υλ=green response function of the eye ζλ=blue response function of the eye Χ=Σλ[8λχλίλ]/Υ〇Υ= Σ x[SkYkLk]/Y〇15 Z= Σ x[Sx.zx.L^] /Y〇 where Y〇= Σ λΥλ.Ιλ L* = 116(Y/Y0)1/3 - 16=brightness (for Y/Y0>0.008856) a*=5O0[(X/Xo)1/ 3-(Y/Yo)1/3] (for X/X〇>0.008856, Y/Y〇> 0.008856) 20 b*=200[(Y/Y〇)1/3-(Z/Z 〇)1/3] (for Z/Z〇> 0.008856) C*=(a*2+b*2)1/2=saturation hab=arctan(b*/a*)=hue angles A modified version of the equation can be used outside of the limits of Y/Y〇, X/X〇, and Z/Z〇. The revised version is shown in the Technical Report of the Commission Internationale de 29 1355371 L’Eclairage Committee (Colorimetric Act (1986)). Usually, the a* and b* coordinates are plotted on the line graph, a* corresponds to the x-axis, and b* corresponds to the y-axis. The positive a* and b* values correspond to the red and yellow components of the hue, respectively. The negative a* and b* values correspond to the green and blue components of the hue, respectively. The positive quadrant of line 5 covers the hue from yellow to orange, and the saturation (C*) is expressed as the distance from the origin. It is predicted how the a*b* coordinate of a diamond with a specified absorption coefficient spectrum changes as the length of the optical path changes. In order to achieve this, the reflection loss is first deducted from the measured absorption spectrum. The scaling is then absorbed by 10 different optical path lengths, and the reaction loss is then added back. The absorption spectrum is then converted to a transmission spectrum which is used to derive a new thickness of CIELAB coordinates. In this way, the dependence of the hue, saturation, and brightness on the length of the optical path can be modeled, and it is determined how the color of the diamond having the specified absorption property per unit thickness is determined by the length of the optical path. 15 L* is the brightness and L* forms the third degree of space in the CIELAB color space. It is important to understand that for diamonds with specific optical absorption properties, the brightness and saturation change with the change in the length of the light path. This can be exemplified in the tone map, where L* is plotted along the y-axis, C* It is plotted along the X axis (for example, Figure 4). The method described in the previous paragraph can also be used to predict how the L*C* coordinates of a diamond with a specified absorption coefficient spectrum 20 are determined by the length of the optical path. The brightness scale can be defined in the following manner: bright: 95 > L* > 65, medium: 65 > L * > 35, dark: 35 > L * > C* (saturation) can be divided into 1〇c* units of saturation range with § explicit terms as follows. 30 1355371 0-10 Weak 10-20 Medium Weak 20-30 Medium 30-40 Medium Strong 40-50 Strong 50-60 Strong - Extremely Strong 60-70 Extremely Strong 70-80+ Extremely Strong Example 1 10 Thick 3.2 mm The CVD layer is grown on a HPHT synthetic diamond substrate. The surface of the substrate to be grown was prepared according to the method described in WO 01/96634. Such a substrate is mounted on a tungsten substrate using high temperature steel welding suitable for use in diamonds. In the microwave reactor, etching and growth cycles are used to prepare the surface of the substrate and then start to grow. More special:
15 1)反應器預先嵌合使用點純化器,如前述經修改之GC 方法測定,將輸入氣流(氮氣攙雜劑管線除外)之氮氣濃度降 至80 ppb以下。 2)於235 X 1〇2帕以及基材溫度840°C,使用3〇八50/1200 sccm(標準立方厘米/秒)〇2/Ar/H2進行原位氧電漿钱刻。 20 3)此步驟未經岔斷而被導入於850Ό之氫蝕刻,伴以由 氣流去除氧氣。 4) 此步驟移動至生長階段,添加碳源而生長,本例之 碳源為32 seem之CH4。本階段之生長溫度為980 C ° 5) 氮氣(N2)係於10 ppm濃度被導入生長過程° 31 135537115 1) The reactor was pre-fitted using a spot purifier and the nitrogen concentration of the input gas stream (except for the nitrogen dopant line) was reduced to below 80 ppb as determined by the modified GC method described above. 2) In situ oxygen plasma etching was performed at 235 X 1〇2 Pa and substrate temperature 840 ° C using 3〇8 50/1200 sccm (standard cubic centimeters per second) 〇2/Ar/H2. 20 3) This step was introduced into the 850 Torr hydrogen etch without breaking, with the removal of oxygen from the gas stream. 4) This step moves to the growth stage and is grown by adding a carbon source. The carbon source of this example is 32 seem CH4. The growth temperature at this stage is 980 C ° 5) Nitrogen (N2) is introduced into the growth process at a concentration of 10 ppm. 31 1355371
6)生長期完成時,基材由反應ϋ内去除,cvd層由基 材離型。 S _由吸收光譜之270奈米吸收特徵,估計此層之單一取代 氮濃度約為0.40 ppm。吸收光譜也含有寬頻帶取中於約 5 360奈米及520奈米’吸收係數概略升高(斜坡式升高泊紅光 至紫外光。 該層被拋光為0.55克拉之圓多面形切割鑽石被評級 為特級淺褐色VS1。然後於約6.5 x 109帕(65千巴)之鑽石穩 疋壓力下,於1700 C退火4小時。未經任何進一步處理,隨 10 後被評級為特級淺粉紅褐色VS1。 圓多面形切割鑽石底面經放大來記錄定量吸收光谱。 指示單一取代氮濃度並無顯著變化,於36〇奈米頻帶之強度 以及吸收光s眷之斜坡式升尚貫質上降低,但於約52〇奈米的 頻帶大致維持不變。 15 於77 K記錄之吸收光譜顯示來自負氮-空白中心的弱 吸收線於637奈米(有關聯的振動頻帶)。發光光譜係以來自 氮-空白缺陷之發光為主’零-聲子線位於575奈米及637奈 米》於退火前及退火後於77 K且使用514奈米激發記錄所得 雷蒙規度化發光光譜’指示退火處理造成來自氮-空白中心 20 之發光增加,如此耦合相關吸收的增高,也促成觀察得之 色彩的改變。 實施例2 使用類似實施例1列舉之方法’厚3.1毫米之CVD層生 長於HPHT合成鑽石基材上。本樣本之單一取代氮濃度由吸 32 1355371 收光譜之270奈米特徵強度,估計為約0.5 ppm。 該層被拋光為0.49克拉圓多面形切割鑽石,被評級為 淺褐色VS1。然後於約7.5 X 109帕(65千巴)之鑽石穩定壓力 下’於210〇°C退火24小時《重新拋光至〇·44克拉後,被評 5 級為特級淺灰綠色鑽石VS1 » 然後圓多面形切割鑽石的底面被放大,俾記錄吸收光 譜。吸收光譜的本身不足以說明鑽石的綠色調。發光光譜 (使用HeCd雷射或Xe燈來激發),顯示由退火過程形成之缺 陷(H3以及其它未被識別的缺陷)之強綠光。此種情況下, 10 觀察得的綠色調主要係由於綠發光結果,其於觀視條件之 相依性符合此項推論。於退火前及退火後於77 K且使用514 奈米激發記錄所得雷蒙規度化發光光譜’指示退火處理造 成來自氮-空白中心之發光降低’如此搞合相關吸收的降 低,也促成觀察得之色彩的改變。 15 實施例3 以類似實施例1陳述之方法,於HPHT合成鑽石基材上 生長3.10毫米厚度CVD層。本樣本之單一取代氮濃度由吸 收光譜之270奈米特徵強度’估計為約〇.5 PPm。吸收光譜 也含有寬頻帶,取中於約360奈米及515奈米’吸收係數概 20略升高(斜坡式升高)由紅光至紫外光。 該層被拋光為0.51克拉之圓多面形切割鑽石,被評級 為特級淺褐色13。然後於約6.5 x 1〇9帕(65千巴)之鑽石穩定 壓力下,於1700°C退火24小時。未經任何進一步處理,鑽 石被評級為淺橙桃色13 ° 33 1355371 然後放大圓多面形切割纘石底面,俾記錄吸收光譜。 指示單-取代氮濃度並無顯著變化。於挪奈米之頻帶強度 以及吸收光譜之斜坡式升高(由紅光至紫外光)實質降低,但 於約515奈米之頻帶大致維持不變。發光光譜係由來自氮· 5空白缺陷之發光優勢’具有零_聲子線於5乃奈米及637奈 米。於退火前以及退火後’使用515奈米激發,於77Κ記錄 之雷蒙隨機發光光譜指示気4白發光強度未大為受到退 火處理的影響。觀察得之色彩變化主要係由於吸收光譜改 變的結果。 10 實施例4 於類似貫施例1敘述之方法,單晶CVD鑽石於{1〇〇)鑽 石基材上生長至2毫米厚度。氣體混合物包括25 ppm氮 氣。取出基材’製造4.5毫米Χ4·〇_χ2〇毫米尺寸之經拋 光之CVD樣本Εχ-4。 15 Λ樣本為褐色。其紫外光/可見光吸收光譜於第1圖標 示為0)。除了單一取代氮相關之吸收特徵外,光譜含有於 約奈米及祕奈米的寬頻帶。吸收係數通常也朝向較短 φ 波長概略升高。 然後CVD鑽石樣本於約8.0 x 1〇9帕(8〇千巴)之鑽石穩 20定壓力下,於2400°C退火4小時。此項處理後鑽石為淨無 色。其紫外光/可見光吸收光譜於第丨圖標示為(b)。其餘吸 收配合含有約丨.1 PPm氮於單一取代位置之lb型光譜形 狀。退火處理去除由如所生長樣本顯示的額外吸收。 由退火前及退火後測量得此樣本之吸收光譜,以前文 34 1355371 討論之方式,導出鑽石之CIELAB座標。列表如後。退火處 理可大減b*座標及飽和度,而增加明亮度。 退火前 退火後 a* 2.8 -0.9 b* 12.0 1.9 C* 12.3 2.1 L* 72 86 實施例56) When the growth period is completed, the substrate is removed from the reaction crucible and the cvd layer is released from the substrate. S _ is estimated by the 270 nm absorption characteristic of the absorption spectrum, and the single substituted nitrogen concentration of this layer is estimated to be about 0.40 ppm. The absorption spectrum also contains a broad band taken at approximately 5 360 nm and 520 nm. The absorption coefficient is roughly increased (slope-like elevation of red light to ultraviolet light. The layer is polished to a 0.55 carat round multi-faceted cut diamond The rating is super light brown VS1. It is then annealed at 1700 C for 4 hours at a steady pressure of about 6.5 x 109 Pa (65 kbar). No further treatment is followed by a rating of Super Light Pink Brown VS1. The bottom surface of the round faceted diamond is magnified to record the quantitative absorption spectrum. It indicates that there is no significant change in the concentration of single substituted nitrogen, and the intensity of the 36 〇 nanometer band and the slope of the absorption light s眷 are lower, but The band of approximately 52 〇 nanometers remained approximately unchanged. 15 The absorption spectrum recorded at 77 K showed a weak absorption line from the negative nitrogen-blank center at 637 nm (with associated vibration band). The luminescence spectrum was derived from nitrogen- The luminescence of the blank defect is dominated by the 'zero-phonon line at 575 nm and 637 nm' before annealing and after annealing at 77 K and using 514 nm excitation recording to obtain Raymond's regularized luminescence spectrum' indicating annealing treatment The increase in luminescence from the nitrogen-blank center 20, such an increase in coupling-related absorption, also contributes to the observed change in color. Example 2 Using a method similar to that described in Example 1, a CVD layer having a thickness of 3.1 mm was grown on a HPHT synthetic diamond base. The single-substituted nitrogen concentration of this sample is estimated to be about 0.5 ppm by the characteristic intensity of 270 nm of the absorbance of 32 1355371. The layer is polished to a 0.49-carat round faceted cut diamond, rated as light brown VS1. Annealed at 210 °C for 24 hours at a steady pressure of approximately 7.5 X 109 Pa (65 kbar). After re-polishing to 〇·44 ct, it was rated as a super light gray-green diamond VS1 » then multi-faceted The underside of the cut diamond is magnified and the absorption spectrum is recorded. The absorption spectrum itself is not sufficient to account for the green color of the diamond. The luminescence spectrum (excited with HeCd laser or Xe lamp) shows defects formed by the annealing process (H3 and others) Strong green light with unrecognized defects. In this case, the observed green tone is mainly due to the green luminescence result, and its dependence on the viewing conditions is consistent with this Before the annealing and after annealing at 77 K and using 514 nm excitation recording, the Raymond gauge luminescence spectrum 'indicates the annealing treatment to reduce the luminescence from the nitrogen-blank center', thus facilitating the reduction of the relevant absorption, and also facilitates observation. A change in color. 15 Example 3 A CVD layer of 3.10 mm thickness was grown on a HPHT synthetic diamond substrate in a manner similar to that described in Example 1. The single substituted nitrogen concentration of this sample was determined by the 270 nm characteristic intensity of the absorption spectrum. It is estimated to be about 55 pm. The absorption spectrum also contains a broad band, taking about 360 nm and 515 nm. The absorption coefficient is slightly higher (slope-increasing) from red to ultraviolet. The layer was polished to a 0.51 carat round faceted cut diamond and rated as a premium light brown 13. It is then annealed at 1700 ° C for 24 hours at a steady pressure of about 6.5 x 1 〇 9 Pa (65 kPa). Without any further processing, the diamond was rated as light orange peach 13 ° 33 1355371 and then enlarged to the bottom of the round polyhedral cut vermiculite, and the absorption spectrum was recorded. There was no significant change in the indicated mono-substituted nitrogen concentration. The ramp-up intensity (from red to ultraviolet) in the band intensity and absorption spectrum of Nornami is substantially reduced, but the band around 515 nm remains substantially unchanged. The luminescence spectrum is dominated by the luminescence advantage from the nitrogen 5 blank defect' with a zero phonon line at 5 nanometers and 637 nm. Before and after annealing, 515 nm excitation was used, and the Raymond random luminescence spectrum recorded at 77 Å indicates that the 気4 white luminescence intensity is not greatly affected by the annealing treatment. The observed color change is mainly due to the change in absorption spectrum. 10 Example 4 In a method similar to that described in Example 1, a single crystal CVD diamond was grown to a thickness of 2 mm on a {1〇〇) diamond substrate. The gas mixture included 25 ppm nitrogen. The substrate was taken out to produce a polished CVD sample Εχ-4 of 4.5 mm Χ4·〇_χ2 〇 mm size. 15 Λ The sample is brown. The ultraviolet/visible absorption spectrum is shown as 0 in the first icon. In addition to the single-substituted nitrogen-related absorption characteristics, the spectrum is contained in the broad band of about nm and the secret nanometer. The absorption coefficient is also generally raised toward a shorter φ wavelength. The CVD diamond sample was then annealed at 2400 ° C for 4 hours at a pressure of about 8.0 x 1 〇 9 Pa (8 kPa). The diamond is net colorless after this treatment. Its ultraviolet/visible absorption spectrum is shown as (b) in the second icon. The remaining absorption blended with a lb-type spectral shape containing about 丨1.1 PPm of nitrogen at a single substitution position. Annealing removes the extra absorption exhibited by the sample as grown. The absorption spectrum of this sample was measured before and after annealing, and the CIELAB coordinates of the diamond were derived in the manner discussed in the previous section 34 1355371. The list is as follows. Annealing can reduce b* coordinates and saturation while increasing brightness. Before annealing After annealing a* 2.8 -0.9 b* 12.0 1.9 C* 12.3 2.1 L* 72 86 Example 5
於類似實施例1敘述之方法,單晶CVD鑽石於{100}鑽 5 石基材上生長至3毫米厚度。壓力為250 X 102帕,基材溫度 為815°C及氣體混合物包括7.5 ppm氮氣。取出基材,製造3 毫米X 2毫米X 0.86毫米尺寸之經拋光之CVD樣本Ex-5。 此樣本為褐色。其紫外光/可見光吸收光譜於第2圖標 示為(a)。除了單一取代氮相關之吸收特徵外,光譜含有於 10 約515奈米及365奈米的寬頻帶。吸收係數通常也朝向較短 波長概略升高。In a manner similar to that described in Example 1, a single crystal CVD diamond was grown to a thickness of 3 mm on a {100} drilled 5 stone substrate. The pressure was 250 X 102 Pa, the substrate temperature was 815 ° C and the gas mixture included 7.5 ppm nitrogen. The substrate was taken out to produce a polished CVD sample Ex-5 of 3 mm X 2 mm x 0.86 mm size. This sample is brown. The ultraviolet/visible absorption spectrum is shown as (a) in the second icon. In addition to the single-substituted nitrogen-related absorption characteristics, the spectrum contains a broad band of about 10 515 nm and 365 nm. The absorption coefficient also generally rises roughly toward shorter wavelengths.
然後CVD鑽石樣本於約7.0 X 109帕(70千巴)之鑽石穩 定壓力下,於1900°C退火4小時。此項處理後鑽石為淨無 色。其紫外光/可見光吸收光譜於第2圖標示為(b)。其餘吸 15 收合理匹配含有約2.2 ppm氮於單一取代位置之lb型光譜 形狀。退火處理去除由如所生長樣本顯示的額外吸收。 由退火前及退火後測量得此樣本之吸收光譜,以前文 討論之方式,導出鑽石之CIELAB座標。列表如後。退火處 理可大減b*座標及飽和度,而增加明亮度。 35 20 1355371 退火前 退火後 a* 4.6 -0.5 b* 16.8 3.0 C* 17.4 3.0 L* 58.9 87 實施例6The CVD diamond sample was then annealed at 1900 ° C for 4 hours at a steady pressure of about 7.0 X 109 Pa (70 kbar). The diamond is net colorless after this treatment. The ultraviolet/visible absorption spectrum is shown as (b) in the second icon. The remaining absorbances are reasonably matched to a lb-type spectral shape containing approximately 2.2 ppm nitrogen at a single substitution position. Annealing removes the extra absorption exhibited by the sample as grown. The absorption spectrum of this sample was measured before and after annealing, and the CIELAB coordinates of the diamond were derived in the manner discussed previously. The list is as follows. Annealing can reduce b* coordinates and saturation while increasing brightness. 35 20 1355371 Before annealing After annealing a* 4.6 -0.5 b* 16.8 3.0 C* 17.4 3.0 L* 58.9 87 Example 6
單晶CVD鑽石以類似實施例1陳述之方法,於{100}鑽 石基材上生長至1.8毫米厚度。壓力為257 X 102帕,基材溫 5度為812<t ’氣體混合物含有3.8 ppm氮氣。基材經取出, 測定所得褐鑽石板E X - 6之紫外光/可見光吸收光譜(於第3圖 標不為(a))。Single crystal CVD diamond was grown to a thickness of 1.8 mm on a {100} diamond substrate in a manner similar to that set forth in Example 1. The pressure was 257 X 102 Pa, the substrate temperature was 5 degrees and the 812<t' gas mixture contained 3.8 ppm nitrogen. The substrate was taken out, and the ultraviolet/visible absorption spectrum of the obtained brown diamond plate E X-6 (not shown as (a) in the third image) was measured.
然後樣本於1600。(:於約6.5 X 109帕(65千巴)之鑽石穩 定壓力下退火4小時時間。此項處理後,色彩的優勢成分為 10 桃色。退火後樣本Ex-6之紫外光/可見光吸收光譜於第3圖標 示為(b)。光譜係由單一取代氮之相關吸收組成,氮濃度約 1.2 ppm,頻帶取中於約515奈米,以及於紫外光略有殘餘 吸收。退火處理去除取中於約365奈米之頻帶,顯著減少概 略朝向較短波長的吸收增加。 15 使用具有CCD偵測器、且裝配有奥林帕斯 (01ympus)BH-2顯微鏡(1〇倍物鏡)之雷尼蕭(Renishaw)雷蒙 顯微鏡,於室溫,於退火處理前及退火處理後’記錄使用 785奈米雷射激發的雷蒙/發光光譜。發現退火處理將一系 列發光線導入光譜的近紅外光區,如此包括於約851奈米之 20 一吸收線以及於約816奈米及825奈米之二較寬的吸收線。 由退火前及退火後測得此樣本之吸收光谱’以前文討 36 1355371 退火前 ---if火後 a* 4.0 ------^^4.4 b* 14.5 --4^8 c* 15.0 -^^6.5 L* 72 -----*^81 _____^ __^調角(度) 75 ---47 論方式導出鑽石之CIELAB座標。列表如後《色調、飽和度 及明亮度對光徑長度之相依性係以前文討論之方式模式 化,俾了解以不同光徑長度對如所生長鑽石以及退火後之 鑽石所能達成之色彩。結果顯示於第4圖及第5圖,如所生 長鑽石及退火後鑽石分別標示為。第4圖光譜(a)也 顯示對曲線的任意點(a*b*)測量色調角之裝f。_ 貫施例7 厚度2.84毫米CVD鑽石層係以實施例1陳述之方法’生 長於lb型HPHT合成鑽石基材上。生長條件包括42/25/600 10 sccm(標準立方厘米/秒)CH4/Ar/H2,於330 x 1〇2帕以及基材 溫度880°C,添加24ppmN2。 基材經去除,所得CVD層被拋光至1.04克拉之矩形切 割CVD寶石,由鑽石分級專家評級為具有特級深橙褐色, 具有品質等級SI1。 15 寶石於1600°C ’於約6·5 X 1〇9帕(65千巴)之鑽石穩定壓 力下退火4小時。此項退火處理後,寶石再度由同一位鑽石 分級專家評級,判定該鑽石有特級極強烈之褐桃色且具 有品質等級SI1。 實施例8 20 具有極深褐色之厚L3毫米CVD層以類似實施W陳述 37 1355371 之方法生長於{100}ΗΡΗΤ合成基材上。生長條件包含 30/25/300 sccm(標準立方厘米/秒)CH4/Ar/H2,於330 X 1〇2 帕以及基材溫度780°C,含添加46 ppm 15N2。使用的氮同位 素為15N,由於此種質量影響,15N可具有於正常使用所 5 得值易位之含氮缺陷相關的吸收線。基材經取出,由CVD 層製造退火實驗用之拋光片。 處理條件列舉如後。 切片 溫度(°C) 時間 壓力 終色彩 1 1800 4小時 6·5 X 109帕 綠色 2 1700 4小時 6_5 X 109帕 橙桃色 3 1500 4小時 大氣壓 橙褐色 4 1400 4小時 大氣壓 褐色 5 1200 4小時 大氣壓 褐色Then the sample is at 1600. (: Annealed for 4 hours at a steady pressure of about 6.5 X 109 Pa (65 kbar). After this treatment, the dominant component of the color is 10 peach. The UV/Vis absorption spectrum of the sample Ex-6 after annealing is The third icon is shown as (b). The spectrum consists of the absorption of a single substituted nitrogen with a nitrogen concentration of about 1.2 ppm, a band of about 515 nm, and a slight residual absorption in the UV light. Annealing removes The band of approximately 365 nm significantly reduces the absorption of the profile toward shorter wavelengths. 15 Using Renee Shaw with a CCD detector and equipped with an Olympus (01ympus) BH-2 microscope (1〇 objective lens) (Renishaw) Raymond microscope, at room temperature, before annealing and after annealing, recorded the Raymond/luminescence spectrum excited by 785 nm laser. It was found that annealing treatment introduced a series of illuminating lines into the near-infrared region of the spectrum. This includes a 20-absorption line of approximately 851 nm and a broad absorption line of approximately 816 nm and 825 nm. The absorption spectrum of this sample was measured before and after annealing. [1, 36 1355371 Before annealing---if after fire a* 4.0 ------^^4.4 b* 14.5 --4^8 c* 15.0 -^^6.5 L* 72 -----*^81 _____^ __^ Angle adjustment (degrees) 75 -- -47 The method of deriving the CIELAB coordinates of diamonds. The list follows: "The dependence of hue, saturation and brightness on the length of the path is modeled in the way discussed above, and it is understood that the length of the path is different for the diameter of the diamond and The color of the annealed diamond can be achieved. The results are shown in Figures 4 and 5, as the diamonds grown and the annealed diamonds are labeled as follows. Figure 4 spectrum (a) also shows any point on the curve (a* b*) Measurement of hue angle loading f. _ Example 7 Thickness 2.84 mm CVD diamond layer was grown on lb-type HPHT synthetic diamond substrate by the method described in Example 1. Growth conditions included 42/25/600 10 Sccm (standard cubic centimeters per second) CH4/Ar/H2 at 330 x 1〇2 Pa and substrate temperature 880 ° C, adding 24 ppm N2. The substrate was removed and the resulting CVD layer was polished to 1.04 carats of rectangular cut CVD gemstones. , rated by the Diamond Grading Expert as having a special dark orange brown with a quality rating of SI1. 15 Gems at 1600 ° C 'at about 6.5 X 1 〇 9 Pa (65 kPa) The stone was annealed under steady pressure for 4 hours. After the annealing treatment, the gemstone was again rated by the same diamond grading expert, and it was judged that the diamond had a very strong brown peach color and had a quality grade of SI1. Example 8 20 has a very dark brown thickness The L3 mm CVD layer was grown on a {100} ΗΡΗΤ synthetic substrate in a manner similar to that described in Statement W 37 1355371. Growth conditions included 30/25/300 sccm (standard cubic centimeters per second) CH4/Ar/H2 at 330 X 1〇2 Pa and a substrate temperature of 780 °C with the addition of 46 ppm 15N2. The nitrogen isotopes used are 15N, and due to this quality effect, 15N may have an absorption line associated with nitrogen-containing defects that are normally used for the translocation of the value. The substrate was taken out, and a polishing sheet for an annealing test was produced from the CVD layer. The processing conditions are listed below. Slice Temperature (°C) Time Pressure Final Color 1 1800 4 hours 6·5 X 109 Pa Green 2 1700 4 hours 6_5 X 109 Pa Orange 3 1500 4 hours Atmospheric Orange Brown 4 1400 4 hours Atmospheric Brown 5 1200 4 hours Atmospheric Brown
全部退火後之切片,即使於1200°C、140〇t及1500°C 於大氣壓(於氬氣)退火之切片也顯示光譜可見光區之透射 10 增加’對應明亮度增高。樣本之吸收光譜顯示有多條線, 詳細列表如後。第一表中敘述(強、中、弱、極弱)對光譜中 各個特徵的相對大小有個約略概念。當未說明時,表示未 觀察得相關特徵。第二表中,「是」指示觀察得相關特徵。 由此表可知藉本發明方法生長及退火之鑽石顯示如所 15 生長之CVD鑽石未見的吸收線。多種吸收線未出現於先前 以任何其它方式製造的鑽石,此等吸收線顯然為藉本發明 方法製造之鑽石之獨特吸收線。最顯著範例於表中以星號 標示。其中多條線也出現於發光。 38 1355371 波長(奈米) 如所生長 1200°C 1400。。 1500°C 1700°C 1800°C 270奈米頻帶 強 強 強 強 強 強 365奈米頻帶 強 強 503 弱 弱 弱 弱 510奈米頻帶 中 中 中 中 中 中 512 極弱 中 弱 553 弱 強 中 極弱 597 中 中 極弱 624 中 中 637 弱 弱 中 弱 中 極弱 667* 極弱 中 弱 弱 極弱 684* 弱 弱 弱 極弱 713 極弱 中 中 中 弱 781* 中 中 中 弱 851* 極弱 弱 中 強 強 1000頻帶 強 強 強 強 強 中 1263* 中 中 中 1281* 中 中 中 1359 強 強 強 中 弱 弱 1556 中 中 中 弱 弱 極弱 39 波數(厘米’ 如所生長 1200°C 1400°C 1500°C 1700。。 1800°C 1332 是 是 是 是 是 是 1340* 是 是 是 是 1344 是 是 是 是 是 是 1353 是 是 是 是 是 是 1362 是 是 是 是 是 1371 是 是 是 是 是 是 1374* 1378* 是 是 1384* 是 是 1396* 是 是 是 1405 是 是 1453* 是 是 2695 是 是 是 是 是 是 2727 是 是 是 是 是 是 2807 是 是 是 是 是 是 普通CH模 是 是 是 是 是 是 2949 是 是 是 是 是 3031 是 是 是 是 是 3054 是 是 是 是 是 3107 是 3124 是 是 是 是 3310* 是 是 是 3323 是 4677* 是 是 是 1355371 【圖式簡單說明】 第1圖於2400°C,於約8.0 X 109帕(80千巴)壓力下退火4 小時,(a)於退火前以及(b)於退火後記錄得之樣本Ex-4之紫 Γ光-可見光吸收光譜。 40 1355371 第2圖於1900°C,於約7.0 x 109帕(70千巴)壓力下退火4 小時,(a)於退火前以及(b)於退火後記錄得之樣本Ex-5之紫 外光-可見光吸收光譜。 第3圖於1600°C,於約6.5 X 109帕(65千巴)壓力下退火4 5 小時,(a)於退火前以及(b)於退火後記錄得之樣本Ex-6之紫 外光-可見光吸收光譜。 第4圖於1600°C,於約6.5 X 109帕(65千巴)壓力下退火4 小時,(a)於退火前以及(b)於退火後記錄得之樣本Ex-6之紫 外光-可見光吸收光譜導出之CIELAB a*值及b*值之作圖。 10 第5圖於1600°C,於約6.5 X 109帕(65千巴)壓力下退火4 小時,(a)於退火前以及(b)於退火後記錄得之樣本Ex-6之紫 外光-可見光吸收光譜導出之CIELAB L*值及C*值之作圖。 【圖式之主要元件代表符號表】 (無) 41After all the annealed sections, the sections annealed at atmospheric pressure (under argon) at 1200 ° C, 140 〇t, and 1500 °C showed an increase in the transmission of the visible light region by 10' corresponding to an increase in brightness. The absorption spectrum of the sample shows multiple lines, and the detailed list is as follows. The first table (strong, medium, weak, and very weak) has an approximate concept for the relative size of each feature in the spectrum. When not stated, it indicates that the relevant features are not observed. In the second table, "Yes" indicates that the relevant features are observed. From this table, it can be seen that the diamond grown and annealed by the method of the present invention exhibits an absorption line which is not seen in the CVD diamond grown by the fifteenth. A variety of absorbent lines have not appeared in diamonds previously made in any other manner, and such absorbent lines are clearly the unique absorption lines of the diamonds produced by the method of the present invention. The most notable examples are marked with an asterisk in the table. Many of these lines also appear in the light. 38 1355371 Wavelength (nano) If grown 1200 ° C 1400. . 1500 °C 1700 °C 1800 °C 270 nm band strong and strong 365 nm band strong 503 weak and weak 510 nm band in the middle and middle 512 weak and weak 553 weak strong pole Weak 597 Medium and Very Weak 624 Middle 637 Weak Weak Medium Weak Medium Weak 667* Very Weak Medium Weak Weak Weakness 684* Weak Weak Weakness Weakness 713 Very Weak Medium, Medium, Weak, 781* Medium, Medium, Weak, 851* Very Weak Weak medium strong and strong 1000 band strong strong and strong 1263* Middle middle 1281* Middle middle 1359 Strong strong weak 1556 Medium and medium weak °C 1500°C 1700. 1800°C 1332 Yes Yes Yes Yes Yes 1340* Yes Yes Yes 1344 Yes Yes Yes Yes Yes 1353 Yes Yes Yes Yes Yes 1362 Yes Yes Yes Yes 1371 Yes Yes Yes Yes Yes Yes 1374* 1378* Yes Yes 1384* Yes Yes 1396* Yes Yes 1405 Yes Yes 1453* Yes Yes 2695 Yes Yes Yes Yes Yes 2727 Yes Yes Yes Yes Yes 2807 Yes Yes Is it normal CH mode is yes or yes is 2949 Yes Yes Yes Yes 3031 Yes Yes Yes Yes 3054 Yes Yes Yes Yes 3107 Yes 3124 Yes Yes Yes 3310* Yes Yes 3323 Yes 4677* Yes Yes 1355771 [Simple description of the diagram] Figure 1 is annealed at 2400 ° C for 4 hours at a pressure of about 8.0 X 109 Pa (80 kbar), (a) before annealing and (b) after recording after annealing. 4 Aster ray-visible absorption spectrum. 40 1355371 Figure 2 is annealed at 1900 ° C for about 4 hours at a pressure of about 7.0 x 109 Pa (70 kbar), (a) before annealing and (b) after annealing The ultraviolet-visible absorption spectrum of the sample Ex-5 was recorded. Figure 3 was annealed at 1600 ° C for about 45 hours at a pressure of about 6.5 X 109 Pa (65 kbar), (a) before annealing and (b) The ultraviolet-visible absorption spectrum of the sample Ex-6 recorded after annealing. Figure 4 is annealed at 1600 ° C for 4 hours at a pressure of about 6.5 X 109 Pa (65 kbar), (a) before the annealing and (b) after annealing, the sample Ex-6 is UV-visible. The CIELAB a* value and the b* value derived from the absorption spectrum are plotted. 10 Figure 5 is annealed at 1600 ° C for 4 hours at a pressure of approximately 6.5 X 109 Pa (65 kbar), (a) before annealing and (b) after annealing an ex-violet of sample Ex-6 - A plot of CIELAB L* values and C* values derived from visible light absorption spectroscopy. [The main components of the diagram represent the symbol table] (none) 41
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