TWI363882B - High fill ratio reflective spatial light modulator with hidden hinge - Google Patents

High fill ratio reflective spatial light modulator with hidden hinge Download PDF

Info

Publication number: TWI363882B
Authority: TW; Taiwan
Prior art keywords: micromirror; mirror plate; hinge; mirror; array
Prior art date: 2003-06-02

Application number

TW93115857A

Other languages

English (en)

Chinese (zh)

Other versions

TW200528752A (en

Inventor

Shaoher X Pan

Xiao Yang

Original Assignee

Miradia Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-06-02

Filing date

2004-06-02

Publication date

2012-05-11

2004-06-02 Application filed by Miradia Inc filed Critical Miradia Inc

2005-09-01 Publication of TW200528752A publication Critical patent/TW200528752A/zh

2012-05-11 Application granted granted Critical

2012-05-11 Publication of TWI363882B publication Critical patent/TWI363882B/zh

Links

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Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Mechanical Light Control Or Optical Switches (AREA)
Engineering & Computer Science (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Micromachines (AREA)

TW93115857A 2003-06-02 2004-06-02 High fill ratio reflective spatial light modulator with hidden hinge TWI363882B (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US47540403P	2003-06-02	2003-06-02
US61112103A	2003-06-30	2003-06-30

Publications (2)

Publication Number	Publication Date
TW200528752A TW200528752A (en)	2005-09-01
TWI363882B true TWI363882B (en)	2012-05-11

Family

ID=33514052

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
TW93115857A TWI363882B (en)	2003-06-02	2004-06-02	High fill ratio reflective spatial light modulator with hidden hinge
TW100124813A TWI467231B (zh)	2003-06-02	2004-06-02	操作微鏡陣列之方法

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
TW100124813A TWI467231B (zh)	2003-06-02	2004-06-02	操作微鏡陣列之方法

Country Status (5)

Country	Link
EP (1)	EP1636628A4 (de)
JP (1)	JP2006526805A (de)
KR (1)	KR20060014434A (de)
TW (2)	TWI363882B (de)
WO (1)	WO2004109363A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7483198B2 (en)	2003-02-12	2009-01-27	Texas Instruments Incorporated	Micromirror device and method for making the same
US7113322B2 (en)	2004-06-23	2006-09-26	Reflectivity, Inc	Micromirror having offset addressing electrode
US7215459B2 (en)	2004-08-25	2007-05-08	Reflectivity, Inc.	Micromirror devices with in-plane deformable hinge
US7019880B1 (en)	2004-08-25	2006-03-28	Reflectivity, Inc	Micromirrors and hinge structures for micromirror arrays in projection displays
US7119944B2 (en)	2004-08-25	2006-10-10	Reflectivity, Inc.	Micromirror device and method for making the same
US7436572B2 (en)	2004-08-25	2008-10-14	Texas Instruments Incorporated	Micromirrors and hinge structures for micromirror arrays in projection displays
US6980349B1 (en)	2004-08-25	2005-12-27	Reflectivity, Inc	Micromirrors with novel mirror plates
JP5509912B2 (ja) *	2010-02-22	2014-06-04	株式会社ニコン	空間光変調器、照明装置、露光装置およびそれらの製造方法
US10916448B2 (en)	2018-07-05	2021-02-09	Texas Instruments Incorporated	Method for creating a wettable surface for improved reliability in QFN packages
US11109004B2 (en)	2018-07-31	2021-08-31	Texas Instruments Incorporated	Display with increased pixel count
US11131796B2 (en)	2018-09-10	2021-09-28	Texas Instruments Incorporated	Optical display with spatial light modulator
US12160084B2 (en) *	2019-10-15	2024-12-03	Texas Instruments Incorporated	MEMS-based phase spatial light modulating architecture

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5312513A (en) *	1992-04-03	1994-05-17	Texas Instruments Incorporated	Methods of forming multiple phase light modulators
US5535047A (en) *	1995-04-18	1996-07-09	Texas Instruments Incorporated	Active yoke hidden hinge digital micromirror device
US5629794A (en) *	1995-05-31	1997-05-13	Texas Instruments Incorporated	Spatial light modulator having an analog beam for steering light
US6046840A (en) *	1995-06-19	2000-04-04	Reflectivity, Inc.	Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
DE19757197A1 (de) *	1997-12-22	1999-06-24	Bosch Gmbh Robert	Herstellungsverfahren für mikromechanische Vorrichtung
KR100313851B1 (ko) *	1998-04-10	2001-12-12	윤종용	화상표시장치용마이크로미러디바이스
US6323982B1 (en) *	1998-05-22	2001-11-27	Texas Instruments Incorporated	Yield superstructure for digital micromirror device
WO2002012116A2 (en) *	2000-08-03	2002-02-14	Analog Devices, Inc.	Bonded wafer optical mems process
US6867897B2 (en) *	2003-01-29	2005-03-15	Reflectivity, Inc	Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
US6873450B2 (en) *	2000-08-11	2005-03-29	Reflectivity, Inc	Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
US6906850B2 (en) *	2000-12-28	2005-06-14	Texas Instruments Incorporated	Capacitively coupled micromirror
EP1315016B1 (de) *	2001-11-21	2006-08-23	Texas Instruments Incorporated	Jochlose digitale Mikrospiegel-Vorrichtung mit verdecktem Gelenk
US6856446B2 (en) *	2001-12-12	2005-02-15	Texas Instruments Incorporated	Digital micromirror device having mirror-attached spring tips
US20040004753A1 (en) *	2002-06-19	2004-01-08	Pan Shaoher X.	Architecture of a reflective spatial light modulator
US7009745B2 (en) *	2002-10-31	2006-03-07	Texas Instruments Incorporated	Coating for optical MEMS devices
US6900922B2 (en) *	2003-02-24	2005-05-31	Exajoule, Llc	Multi-tilt micromirror systems with concealed hinge structures
TW591778B (en) *	2003-03-18	2004-06-11	Advanced Semiconductor Eng	Package structure for a microsystem

2004
- 2004-02-12 EP EP04710674A patent/EP1636628A4/de not_active Withdrawn
- 2004-02-12 KR KR1020057023135A patent/KR20060014434A/ko not_active Ceased
- 2004-02-12 WO PCT/US2004/004279 patent/WO2004109363A1/en not_active Ceased
- 2004-02-12 JP JP2006508734A patent/JP2006526805A/ja active Pending
- 2004-06-02 TW TW93115857A patent/TWI363882B/zh not_active IP Right Cessation
- 2004-06-02 TW TW100124813A patent/TWI467231B/zh not_active IP Right Cessation

Also Published As

Publication number	Publication date
TW201144860A (en)	2011-12-16
KR20060014434A (ko)	2006-02-15
EP1636628A1 (de)	2006-03-22
TWI467231B (zh)	2015-01-01
JP2006526805A (ja)	2006-11-24
WO2004109363A1 (en)	2004-12-16
EP1636628A4 (de)	2009-04-15
TW200528752A (en)	2005-09-01

Legal Events

Date	Code	Title	Description
2019-02-11	MM4A	Annulment or lapse of patent due to non-payment of fees

Publication	Publication Date	Title
US6992810B2 (en)	2006-01-31	High fill ratio reflective spatial light modulator with hidden hinge
US7245416B2 (en)	2007-07-17	Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
US7092140B2 (en)	2006-08-15	Architecture of a reflective spatial light modulator
TWI267667B (en)	2006-12-01	Fabrication of a reflective spatial light modulator
US6046840A (en)	2000-04-04	Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US7118234B2 (en)	2006-10-10	Reflective spatial light modulator
CN1232858C (zh)	2005-12-21	带有自限制微型机械元件的双层介质反射空间光调制器
US7538932B2 (en)	2009-05-26	High contrast spatial light modulator
TWI363882B (en)	2012-05-11	High fill ratio reflective spatial light modulator with hidden hinge
TWI356912B (en)	2012-01-21	Fabrication of a high fill ratio reflective spatia
CN100378496C (zh)	2008-04-02	具有隐藏铰链的高填充率反射式空间光调制器
CN101316790A (zh)	2008-12-03	制造具有高对比率的反射空间光调制器的方法
JP2008539455A (ja)	2008-11-13	相互に直角の偏向可能な反射面と電極面とを有する超小型電気機械装置