TWI366247B - Interconnection structure and fabricating method thereof - Google Patents

Interconnection structure and fabricating method thereof

Info

Publication number
TWI366247B
TWI366247B TW097127936A TW97127936A TWI366247B TW I366247 B TWI366247 B TW I366247B TW 097127936 A TW097127936 A TW 097127936A TW 97127936 A TW97127936 A TW 97127936A TW I366247 B TWI366247 B TW I366247B
Authority
TW
Taiwan
Prior art keywords
interconnection structure
fabricating method
fabricating
interconnection
Prior art date
Application number
TW097127936A
Other languages
Chinese (zh)
Other versions
TW201005877A (en
Inventor
Chiu Te Lee
Original Assignee
Hejian Tech Suzhou Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hejian Tech Suzhou Co Ltd filed Critical Hejian Tech Suzhou Co Ltd
Priority to TW097127936A priority Critical patent/TWI366247B/en
Publication of TW201005877A publication Critical patent/TW201005877A/en
Application granted granted Critical
Publication of TWI366247B publication Critical patent/TWI366247B/en

Links

TW097127936A 2008-07-23 2008-07-23 Interconnection structure and fabricating method thereof TWI366247B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097127936A TWI366247B (en) 2008-07-23 2008-07-23 Interconnection structure and fabricating method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097127936A TWI366247B (en) 2008-07-23 2008-07-23 Interconnection structure and fabricating method thereof

Publications (2)

Publication Number Publication Date
TW201005877A TW201005877A (en) 2010-02-01
TWI366247B true TWI366247B (en) 2012-06-11

Family

ID=44826461

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097127936A TWI366247B (en) 2008-07-23 2008-07-23 Interconnection structure and fabricating method thereof

Country Status (1)

Country Link
TW (1) TWI366247B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI701768B (en) * 2019-08-28 2020-08-11 力晶積成電子製造股份有限公司 Method of manufacturing interconnect structure

Also Published As

Publication number Publication date
TW201005877A (en) 2010-02-01

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