TWI367523B - Method for lift off a thick metal film - Google Patents

Method for lift off a thick metal film

Info

Publication number
TWI367523B
TWI367523B TW097134591A TW97134591A TWI367523B TW I367523 B TWI367523 B TW I367523B TW 097134591 A TW097134591 A TW 097134591A TW 97134591 A TW97134591 A TW 97134591A TW I367523 B TWI367523 B TW I367523B
Authority
TW
Taiwan
Prior art keywords
lift
metal film
thick metal
thick
film
Prior art date
Application number
TW097134591A
Other languages
Chinese (zh)
Other versions
TW201011819A (en
Inventor
Cheyi Chen
Chunwen Kuo
Chengta Wu
Original Assignee
Advanced Wireless Semiconductor Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Wireless Semiconductor Company filed Critical Advanced Wireless Semiconductor Company
Priority to TW097134591A priority Critical patent/TWI367523B/en
Publication of TW201011819A publication Critical patent/TW201011819A/en
Application granted granted Critical
Publication of TWI367523B publication Critical patent/TWI367523B/en

Links

TW097134591A 2008-09-09 2008-09-09 Method for lift off a thick metal film TWI367523B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097134591A TWI367523B (en) 2008-09-09 2008-09-09 Method for lift off a thick metal film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097134591A TWI367523B (en) 2008-09-09 2008-09-09 Method for lift off a thick metal film

Publications (2)

Publication Number Publication Date
TW201011819A TW201011819A (en) 2010-03-16
TWI367523B true TWI367523B (en) 2012-07-01

Family

ID=44828755

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097134591A TWI367523B (en) 2008-09-09 2008-09-09 Method for lift off a thick metal film

Country Status (1)

Country Link
TW (1) TWI367523B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114253067B (en) * 2022-01-18 2025-12-16 厦门高光半导体材料有限公司 Technology for separating metal carrier from mother plate for folding screen

Also Published As

Publication number Publication date
TW201011819A (en) 2010-03-16

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