TWI372111B - Structural material of diamond like carbon complex films and method of manufacturing the same - Google Patents

Structural material of diamond like carbon complex films and method of manufacturing the same

Info

Publication number
TWI372111B
TWI372111B TW096151043A TW96151043A TWI372111B TW I372111 B TWI372111 B TW I372111B TW 096151043 A TW096151043 A TW 096151043A TW 96151043 A TW96151043 A TW 96151043A TW I372111 B TWI372111 B TW I372111B
Authority
TW
Taiwan
Prior art keywords
diamond
manufacturing
same
structural material
carbon complex
Prior art date
Application number
TW096151043A
Other languages
Chinese (zh)
Other versions
TW200927479A (en
Inventor
Ming Sheng Leu
jin bao Wu
Chia Jen Chang
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW096151043A priority Critical patent/TWI372111B/en
Priority to US12/046,455 priority patent/US7816011B2/en
Publication of TW200927479A publication Critical patent/TW200927479A/en
Application granted granted Critical
Publication of TWI372111B publication Critical patent/TWI372111B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/11—Making amorphous alloys
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
TW096151043A 2007-12-28 2007-12-28 Structural material of diamond like carbon complex films and method of manufacturing the same TWI372111B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW096151043A TWI372111B (en) 2007-12-28 2007-12-28 Structural material of diamond like carbon complex films and method of manufacturing the same
US12/046,455 US7816011B2 (en) 2007-12-28 2008-03-12 Structural material of diamond like carbon composite layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096151043A TWI372111B (en) 2007-12-28 2007-12-28 Structural material of diamond like carbon complex films and method of manufacturing the same

Publications (2)

Publication Number Publication Date
TW200927479A TW200927479A (en) 2009-07-01
TWI372111B true TWI372111B (en) 2012-09-11

Family

ID=40798818

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096151043A TWI372111B (en) 2007-12-28 2007-12-28 Structural material of diamond like carbon complex films and method of manufacturing the same

Country Status (2)

Country Link
US (1) US7816011B2 (en)
TW (1) TWI372111B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10508342B2 (en) 2016-08-29 2019-12-17 Creating Nano Technologies, Inc. Method for manufacturing diamond-like carbon film

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* Cited by examiner, † Cited by third party
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WO2009124034A1 (en) 2008-04-01 2009-10-08 The Government Of The United States Of America, As Represented By The Secretary Of The Air Force Layers durably bonded to surfaces
JP5049358B2 (en) * 2010-01-25 2012-10-17 株式会社神戸製鋼所 Method for producing a tungsten-containing diamond-like carbon film on a base material of a contact probe pin for a semiconductor inspection apparatus
US8368146B2 (en) 2010-06-15 2013-02-05 International Business Machines Corporation FinFET devices
TW201213101A (en) * 2010-09-29 2012-04-01 Hon Hai Prec Ind Co Ltd Roller
JP5595519B2 (en) * 2010-11-30 2014-09-24 京セラ株式会社 Ceramic blade
AU2012308352A1 (en) * 2011-09-15 2014-03-13 Amedica Corporation Coated implants and related methods
CN102337508B (en) * 2011-10-24 2013-01-02 沈阳大学 Preparation method of titanium nitride/aluminum nitride/nickel nano multilayer film
AT511605B1 (en) * 2011-12-12 2013-01-15 High Tech Coatings Gmbh CARBON COATING COATING
CN102593294B (en) * 2012-03-15 2016-08-03 安徽三安光电有限公司 Composite GaN-based semiconductor growth substrate and manufacturing method thereof
TWI478405B (en) * 2012-12-13 2015-03-21 Ind Tech Res Inst Structure of thermoelectric film
CN104480443B (en) * 2014-12-08 2017-06-13 中国人民解放军装甲兵工程学院 A kind of hard tough nano combined ZrAlCuN coatings and preparation method thereof
GB201521658D0 (en) * 2015-12-09 2016-01-20 Rolls Royce Plc Apparatus and methods of coating substrates
CN105779965B (en) * 2016-01-21 2019-08-20 北京师范大学 A method of porous doped diamond film is prepared using particle beams control technique
CN106571173B (en) * 2016-11-04 2018-10-12 郑州新世纪材料基因组工程研究院有限公司 High temperature resistant composite transparent conductive film, preparation method and application
CN106521435B (en) * 2016-11-17 2019-04-09 中奥汇成科技股份有限公司 A kind of film with novel nano-multilayer structure and preparation method thereof
TWI648876B (en) * 2018-06-08 2019-01-21 進化光學有限公司 Electronic device, and light emitting element and method of manufacturing same
CN111455311A (en) * 2020-04-12 2020-07-28 江苏利宇剃须刀有限公司 Preparation process of multilayer nano composite tetrahedral amorphous carbon film
CN113699486A (en) * 2021-07-26 2021-11-26 北京航天控制仪器研究所 Beryllium material surface hard composite film and preparation method thereof
CN113957393B (en) * 2021-09-28 2022-10-25 西安交通大学 Method for improving wear performance and service life of nitride coating cutter surface

Family Cites Families (4)

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Publication number Priority date Publication date Assignee Title
US6083570A (en) * 1987-03-31 2000-07-04 Lemelson; Jerome H. Synthetic diamond coatings with intermediate amorphous metal bonding layers and methods of applying such coatings
US5031029A (en) * 1990-04-04 1991-07-09 International Business Machines Corporation Copper device and use thereof with semiconductor devices
US6197438B1 (en) * 1998-03-11 2001-03-06 Roger Faulkner Foodware with ceramic food contacting surface
CN1982020A (en) * 2005-12-16 2007-06-20 鸿富锦精密工业（深圳）有限公司 Mould core and its production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10508342B2 (en) 2016-08-29 2019-12-17 Creating Nano Technologies, Inc. Method for manufacturing diamond-like carbon film

Also Published As

Publication number Publication date
TW200927479A (en) 2009-07-01
US20090169845A1 (en) 2009-07-02
US7816011B2 (en) 2010-10-19

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