TWI397602B - 氣相沉積塗層中心 - Google Patents

氣相沉積塗層中心 Download PDF

Info

Publication number: TWI397602B
Authority: TW; Taiwan
Prior art keywords: module; vapor deposition; center; coating; transport
Prior art date: 2004-05-07

Application number

TW94114523A

Other languages

English (en)

Chinese (zh)

Other versions

TW200600604A (en

Inventor

David Franz

Udo Rauch

Hans Eggenberger

Christoph Bischof

Franco Chiani

Hans Schulz

Valentin Buehler

Original Assignee

Oerlikon Trading Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2004-05-07

Filing date

2005-05-05

Publication date

2013-06-01

2005-05-05 Application filed by Oerlikon Trading Ag filed Critical Oerlikon Trading Ag

2006-01-01 Publication of TW200600604A publication Critical patent/TW200600604A/zh

2013-06-01 Application granted granted Critical

2013-06-01 Publication of TWI397602B publication Critical patent/TWI397602B/zh

Links

238000007740 vapor deposition Methods 0.000 title claims 8
238000004519 manufacturing process Methods 0.000 claims description 46
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 15
238000007664 blowing Methods 0.000 claims description 14
238000000034 method Methods 0.000 claims description 11
238000004140 cleaning Methods 0.000 claims description 10
238000009826 distribution Methods 0.000 claims description 10
238000002360 preparation method Methods 0.000 claims description 8
230000006835 compression Effects 0.000 claims description 3
238000007906 compression Methods 0.000 claims description 3
230000001681 protective effect Effects 0.000 claims description 2
238000006243 chemical reaction Methods 0.000 claims 2
230000001680 brushing effect Effects 0.000 claims 1
238000005229 chemical vapour deposition Methods 0.000 claims 1
238000005240 physical vapour deposition Methods 0.000 claims 1
238000000576 coating method Methods 0.000 description 36
239000011248 coating agent Substances 0.000 description 35
239000007789 gas Substances 0.000 description 19
238000009434 installation Methods 0.000 description 7
238000012423 maintenance Methods 0.000 description 6
238000013461 design Methods 0.000 description 4
239000011229 interlayer Substances 0.000 description 4
230000008901 benefit Effects 0.000 description 3
230000005611 electricity Effects 0.000 description 3
238000003860 storage Methods 0.000 description 3
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
229910000831 Steel Inorganic materials 0.000 description 2
DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 2
238000005516 engineering process Methods 0.000 description 2
239000000463 material Substances 0.000 description 2
VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
238000012544 monitoring process Methods 0.000 description 2
230000036961 partial effect Effects 0.000 description 2
230000002093 peripheral effect Effects 0.000 description 2
238000012545 processing Methods 0.000 description 2
230000003068 static effect Effects 0.000 description 2
239000010959 steel Substances 0.000 description 2
OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
239000005977 Ethylene Substances 0.000 description 1
238000004378 air conditioning Methods 0.000 description 1
HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
229910052786 argon Inorganic materials 0.000 description 1
238000005422 blasting Methods 0.000 description 1
230000003749 cleanliness Effects 0.000 description 1
230000002860 competitive effect Effects 0.000 description 1
238000010276 construction Methods 0.000 description 1
238000007872 degassing Methods 0.000 description 1
239000000428 dust Substances 0.000 description 1
230000000694 effects Effects 0.000 description 1
229920001971 elastomer Polymers 0.000 description 1
239000000806 elastomer Substances 0.000 description 1
230000007613 environmental effect Effects 0.000 description 1
125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
239000010931 gold Substances 0.000 description 1
229910052737 gold Inorganic materials 0.000 description 1
230000005484 gravity Effects 0.000 description 1
239000001257 hydrogen Substances 0.000 description 1
229910052739 hydrogen Inorganic materials 0.000 description 1
125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
239000011261 inert gas Substances 0.000 description 1
230000010354 integration Effects 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
238000005192 partition Methods 0.000 description 1
229920001084 poly(chloroprene) Polymers 0.000 description 1
238000002203 pretreatment Methods 0.000 description 1
238000005086 pumping Methods 0.000 description 1
238000003908 quality control method Methods 0.000 description 1
230000002441 reversible effect Effects 0.000 description 1
238000005096 rolling process Methods 0.000 description 1
238000000926 separation method Methods 0.000 description 1
239000007921 spray Substances 0.000 description 1
238000005507 spraying Methods 0.000 description 1
239000003381 stabilizer Substances 0.000 description 1
230000029305 taxis Effects 0.000 description 1
238000012546 transfer Methods 0.000 description 1
230000001131 transforming effect Effects 0.000 description 1
239000002918 waste heat Substances 0.000 description 1
239000002351 wastewater Substances 0.000 description 1

Classifications

- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
- E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
- E04B1/348—Structures composed of units comprising at least considerable parts of two sides of a room, e.g. box-like or cell-like units closed or in skeleton form
- E04B1/34815—Elements not integrated in a skeleton
- E04B1/3483—Elements not integrated in a skeleton the supporting structure consisting of metal
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
- E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
- E04H5/02—Buildings or groups of buildings for industrial purposes, e.g. for power-plants or factories

Landscapes

Engineering & Computer Science (AREA)
Chemical & Material Sciences (AREA)
Architecture (AREA)
Structural Engineering (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Civil Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Electromagnetism (AREA)
Physics & Mathematics (AREA)
General Chemical & Material Sciences (AREA)
Refuse Collection And Transfer (AREA)
Application Of Or Painting With Fluid Materials (AREA)
Ventilation (AREA)
Coating Apparatus (AREA)

TW94114523A 2004-05-07 2005-05-05 氣相沉積塗層中心 TWI397602B (zh)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
EP04010880		2004-05-07

Publications (2)

Publication Number	Publication Date
TW200600604A TW200600604A (en)	2006-01-01
TWI397602B true TWI397602B (zh)	2013-06-01

Family

ID=35320909

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW94114523A TWI397602B (zh)	2004-05-07	2005-05-05	氣相沉積塗層中心

Country Status (4)

Country	Link
CN (1)	CN201080493Y (fr)
DE (1)	DE212005000023U1 (fr)
TW (1)	TWI397602B (fr)
WO (1)	WO2005109472A2 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
SE532261C2 (sv) *	2007-04-12	2009-11-24	Bau How As	Transporterande arrangemang
MX2011006850A (es)	2008-12-23	2011-08-15	Xoma Technology Ltd	Sistema de fabricacion flexible.
CN102287061B (zh) *	2011-06-21	2014-12-24	赣州澳克泰工具技术有限公司	硬质合金厂的总平面布置
FR2992011B1 (fr) *	2012-06-15	2015-01-23	Jean Louis Baal	Assemblage des lots techniques et architecturaux
DE102017120649A1 (de) *	2017-09-07	2019-03-07	Khs Corpoplast Gmbh	Vorrichtung zum Beschichten von Behältern
FI20175979A1 (en) *	2017-11-03	2019-05-04	Metsi Oy	Technology unit and method for providing a building
DE102018008774A1 (de)	2017-12-05	2019-06-06	Sew-Eurodrive Gmbh & Co Kg	Anlage, aufweisend ein Gebäude mit Hallenboden
CN113174581B (zh) *	2021-04-15	2022-11-18	散裂中子源科学中心	真空管道用的磁场移动式镀膜设备及方法
EP4136296B1 (fr)	2021-05-20	2023-10-25	Sano Development Limited	Système de bâtiment hybride, bâtiment et procédé

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0366559A1 (fr) *	1988-10-26	1990-05-02	B.E.T.E.N.	Procédé et dispositif de construction modulaire d'édifices industriels
WO2001090436A2 (fr) *	2000-05-22	2001-11-29	Basic Resources, Inc.	Systeme mobile de placage et procede associe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
IT1258959B (it) *	1992-06-09	1996-03-11		Impianto a moduli mobili per lo sviluppo e la produzione di prodotti biotecnologici su scala pilota
US6312525B1 (en) *	1997-07-11	2001-11-06	Applied Materials, Inc.	Modular architecture for semiconductor wafer fabrication equipment

2005
- 2005-03-24 WO PCT/CH2005/000172 patent/WO2005109472A2/fr not_active Ceased
- 2005-03-24 CN CNU2005900000665U patent/CN201080493Y/zh not_active Expired - Lifetime
- 2005-03-24 DE DE212005000023U patent/DE212005000023U1/de not_active Expired - Lifetime
- 2005-05-05 TW TW94114523A patent/TWI397602B/zh not_active IP Right Cessation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0366559A1 (fr) *	1988-10-26	1990-05-02	B.E.T.E.N.	Procédé et dispositif de construction modulaire d'édifices industriels
WO2001090436A2 (fr) *	2000-05-22	2001-11-29	Basic Resources, Inc.	Systeme mobile de placage et procede associe

Also Published As

Publication number	Publication date
WO2005109472A2 (fr)	2005-11-17
DE212005000023U1 (de)	2007-01-04
WO2005109472A3 (fr)	2006-04-27
TW200600604A (en)	2006-01-01
CN201080493Y (zh)	2008-07-02

Legal Events

Date	Code	Title	Description
2016-03-01	MM4A	Annulment or lapse of patent due to non-payment of fees

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