TWI407015B - 具有螺旋轉子及螺紋轉子之複合乾真空泵 - Google Patents

具有螺旋轉子及螺紋轉子之複合乾真空泵 Download PDF

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Publication number
TWI407015B
TWI407015B TW094134438A TW94134438A TWI407015B TW I407015 B TWI407015 B TW I407015B TW 094134438 A TW094134438 A TW 094134438A TW 94134438 A TW94134438 A TW 94134438A TW I407015 B TWI407015 B TW I407015B
Authority
TW
Taiwan
Prior art keywords
rotor
spiral
threaded
inlet
vacuum pump
Prior art date
Application number
TW094134438A
Other languages
English (en)
Chinese (zh)
Other versions
TW200628700A (en
Inventor
Moon Gi Lim
Original Assignee
Lot Vacuum Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020040078423A external-priority patent/KR100624982B1/ko
Priority claimed from KR1020040078431A external-priority patent/KR100591079B1/ko
Priority claimed from KR1020040078422A external-priority patent/KR100497982B1/ko
Application filed by Lot Vacuum Co Ltd filed Critical Lot Vacuum Co Ltd
Publication of TW200628700A publication Critical patent/TW200628700A/zh
Application granted granted Critical
Publication of TWI407015B publication Critical patent/TWI407015B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/10—Stators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/52—Bearings for assemblies with supports on both sides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
TW094134438A 2004-10-01 2005-10-03 具有螺旋轉子及螺紋轉子之複合乾真空泵 TWI407015B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020040078423A KR100624982B1 (ko) 2004-10-01 2004-10-01 복수 단의 루츠형 로터와 스크루형 로터를 지닌 복합드라이 진공 펌프
KR1020040078431A KR100591079B1 (ko) 2004-10-01 2004-10-01 루츠로터와 스크류로터 복합건식 진공펌프
KR1020040078422A KR100497982B1 (ko) 2004-10-01 2004-10-01 루츠형 로터와 스크루형 로터를 지닌 복합 드라이 진공펌프

Publications (2)

Publication Number Publication Date
TW200628700A TW200628700A (en) 2006-08-16
TWI407015B true TWI407015B (zh) 2013-09-01

Family

ID=36180969

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094134438A TWI407015B (zh) 2004-10-01 2005-10-03 具有螺旋轉子及螺紋轉子之複合乾真空泵

Country Status (5)

Country Link
US (1) US7722332B2 (de)
EP (1) EP1643129B1 (de)
AT (1) ATE395515T1 (de)
DE (1) DE602005006694D1 (de)
TW (1) TWI407015B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250297609A1 (en) * 2020-09-02 2025-09-25 Eaton Intelligent Power Limited Rear drive egr pump

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI438342B (zh) * 2006-07-28 2014-05-21 Lot Vacuum Co Ltd 具有魯式與螺旋轉子之複合型乾式真空幫浦
GB0705971D0 (en) * 2007-03-28 2007-05-09 Boc Group Plc Vacuum pump
GB0707753D0 (en) * 2007-04-23 2007-05-30 Boc Group Plc Vacuum pump
EP2180188B1 (de) * 2008-10-24 2016-09-07 Edwards Limited Verbesserungen bei und in Zusammenhang mit Drehkolbenpumpen
DE102010014884A1 (de) * 2010-04-14 2011-10-20 Baratti Engineering Gmbh Vakuumpumpe
CN101985938A (zh) * 2010-11-30 2011-03-16 东北大学 一种具有螺杆和罗茨转子的三轴复合干泵
EP2532895B1 (de) * 2011-06-06 2014-02-26 Vacuubrand Gmbh + Co Kg Vakuumpumpe mit einseitiger Lagerung der Pumpenrotoren
KR101926658B1 (ko) * 2017-03-15 2018-12-07 이인철 반도체 챔버용 펌프 시스템
JP7061618B2 (ja) 2017-04-07 2022-04-28 スタックポール インターナショナル エンジニアード プロダクツ，リミテッド． エピトロコイド真空ポンプ
CN106949074A (zh) * 2017-04-20 2017-07-14 中山联速集成电路有限公司 一种静音空压机
CN112780563A (zh) * 2019-11-07 2021-05-11 中国石油化工股份有限公司 双级干式真空泵
CN114607609A (zh) * 2020-12-04 2022-06-10 中国科学院沈阳科学仪器股份有限公司 一种新组合形式的干式真空泵
CN114607600B (zh) * 2020-12-09 2023-03-21 东北大学 一种新型多级罗茨真空泵
CN114909292A (zh) * 2022-06-13 2022-08-16 济南黎明风机制造有限公司 一种罗茨风机消除噪音和粉尘装置
CN118582387A (zh) * 2024-06-05 2024-09-03 苏州新大陆精密科技股份有限公司 一种集成式真空系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4762469A (en) * 1986-03-03 1988-08-09 American Standard Inc. Rotor anti-reverse rotation arrangement in a screw compressor
US5836754A (en) * 1994-08-19 1998-11-17 Diavac Limited Screw fluid machine and screw gear used in the same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3146723A (en) * 1959-04-13 1964-09-01 Wildhaber Ernest Screw pump unit
US3108739A (en) * 1960-06-17 1963-10-29 Svenska Rotor Maskiner Ab Regulating means for rotary piston compressor
JPH0757297B2 (ja) * 1987-04-22 1995-06-21 日本真空技術株式会社 真空排気系用微粒子トラツプ
JP3497661B2 (ja) 1995-04-19 2004-02-16 株式会社荏原製作所 多段容積式真空ポンプ
JP2922181B1 (ja) * 1998-01-26 1999-07-19 株式会社宇野澤組鐵工所 粉体捕集機能を有する真空ポンプ装置
JP2003343469A (ja) * 2002-03-20 2003-12-03 Toyota Industries Corp 真空ポンプ
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4762469A (en) * 1986-03-03 1988-08-09 American Standard Inc. Rotor anti-reverse rotation arrangement in a screw compressor
US5836754A (en) * 1994-08-19 1998-11-17 Diavac Limited Screw fluid machine and screw gear used in the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250297609A1 (en) * 2020-09-02 2025-09-25 Eaton Intelligent Power Limited Rear drive egr pump

Also Published As

Publication number Publication date
ATE395515T1 (de) 2008-05-15
TW200628700A (en) 2006-08-16
EP1643129B1 (de) 2008-05-14
DE602005006694D1 (de) 2008-06-26
US20060083651A1 (en) 2006-04-20
EP1643129A1 (de) 2006-04-05
US7722332B2 (en) 2010-05-25

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