TWI466217B - - Google Patents
Info
- Publication number
- TWI466217B TWI466217B TW100103424A TW100103424A TWI466217B TW I466217 B TWI466217 B TW I466217B TW 100103424 A TW100103424 A TW 100103424A TW 100103424 A TW100103424 A TW 100103424A TW I466217 B TWI466217 B TW I466217B
- Authority
- TW
- Taiwan
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100103424A TW201232691A (en) | 2011-01-28 | 2011-01-28 | Equipment and operation method for enhancing throughput of wafer rapid thermal processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100103424A TW201232691A (en) | 2011-01-28 | 2011-01-28 | Equipment and operation method for enhancing throughput of wafer rapid thermal processing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201232691A TW201232691A (en) | 2012-08-01 |
| TWI466217B true TWI466217B (de) | 2014-12-21 |
Family
ID=47069677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100103424A TW201232691A (en) | 2011-01-28 | 2011-01-28 | Equipment and operation method for enhancing throughput of wafer rapid thermal processing |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201232691A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118231307B (zh) * | 2024-05-22 | 2024-10-15 | 瑶光半导体(浙江)有限公司 | 一种晶片传送系统及方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI223679B (en) * | 1997-07-17 | 2004-11-11 | Memc Electronic Materials | Method and system for controlling growth of a silicon crystal |
| TW200805553A (en) * | 2006-05-26 | 2008-01-16 | Brooks Automation Inc | Linearly distributed semiconductor workpiece processing tool |
-
2011
- 2011-01-28 TW TW100103424A patent/TW201232691A/zh unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI223679B (en) * | 1997-07-17 | 2004-11-11 | Memc Electronic Materials | Method and system for controlling growth of a silicon crystal |
| TW200805553A (en) * | 2006-05-26 | 2008-01-16 | Brooks Automation Inc | Linearly distributed semiconductor workpiece processing tool |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201232691A (en) | 2012-08-01 |