TWI466930B - 多孔板之製造方法及使用該方法製得之多孔板 - Google Patents

多孔板之製造方法及使用該方法製得之多孔板 Download PDF

Info

Publication number: TWI466930B
Authority: TW; Taiwan
Prior art keywords: polymer resin; supercritical fluid; supercritical; resin sheet; fluid extraction
Prior art date: 2009-06-10

Application number

TW99118909A

Other languages

English (en)

Chinese (zh)

Other versions

TW201109375A (en

Inventor

Seong-Uk Jeong

Byeong-In Ahn

Young-Ji Tae

Keong-Yeon Yoon

Original Assignee

Lg Chemical Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2009-06-10

Filing date

2010-06-10

Publication date

2015-01-01

2010-06-10 Application filed by Lg Chemical Ltd filed Critical Lg Chemical Ltd

2011-03-16 Publication of TW201109375A publication Critical patent/TW201109375A/zh

2015-01-01 Application granted granted Critical

2015-01-01 Publication of TWI466930B publication Critical patent/TWI466930B/zh

Links

238000000034 method Methods 0.000 title claims description 60
238000004519 manufacturing process Methods 0.000 title claims description 15
239000002952 polymeric resin Substances 0.000 claims description 35
229920003002 synthetic resin Polymers 0.000 claims description 35
238000005498 polishing Methods 0.000 claims description 32
229920002635 polyurethane Polymers 0.000 claims description 29
239000004814 polyurethane Substances 0.000 claims description 29
238000000194 supercritical-fluid extraction Methods 0.000 claims description 29
239000000203 mixture Substances 0.000 claims description 24
239000012530 fluid Substances 0.000 claims description 22
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 20
-1 polyethylene Polymers 0.000 claims description 17
150000001875 compounds Chemical class 0.000 claims description 16
239000011148 porous material Substances 0.000 claims description 12
238000002156 mixing Methods 0.000 claims description 11
239000001569 carbon dioxide Substances 0.000 claims description 10
229910002092 carbon dioxide Inorganic materials 0.000 claims description 10
239000004970 Chain extender Substances 0.000 claims description 9
IBOFVQJTBBUKMU-UHFFFAOYSA-N 4,4'-methylene-bis-(2-chloroaniline) Chemical compound C1=C(Cl)C(N)=CC=C1CC1=CC=C(N)C(Cl)=C1 IBOFVQJTBBUKMU-UHFFFAOYSA-N 0.000 claims description 8
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 8
WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 claims description 6
OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 claims description 6
229920000642 polymer Polymers 0.000 claims description 6
DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 claims description 5
150000001338 aliphatic hydrocarbons Chemical class 0.000 claims description 5
229920001971 elastomer Polymers 0.000 claims description 5
QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 claims description 4
ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 claims description 4
PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 4
IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims description 4
PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 claims description 4
229920001577 copolymer Polymers 0.000 claims description 4
NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 claims description 4
229910052757 nitrogen Inorganic materials 0.000 claims description 4
229920000098 polyolefin Polymers 0.000 claims description 4
239000004721 Polyphenylene oxide Substances 0.000 claims description 3
239000000806 elastomer Substances 0.000 claims description 3
229920000515 polycarbonate Polymers 0.000 claims description 3
239000004417 polycarbonate Substances 0.000 claims description 3
229920000728 polyester Polymers 0.000 claims description 3
229920000570 polyether Polymers 0.000 claims description 3
239000002243 precursor Substances 0.000 claims description 3
DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 claims description 2
YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 claims description 2
IUYYVMKHUXDWEU-UHFFFAOYSA-N 2,2,4-trimethylpentane-1,1-diol Chemical compound CC(C)CC(C)(C)C(O)O IUYYVMKHUXDWEU-UHFFFAOYSA-N 0.000 claims description 2
CVFRFSNPBJUQMG-UHFFFAOYSA-N 2,3-bis(2-hydroxyethyl)benzene-1,4-diol Chemical compound OCCC1=C(O)C=CC(O)=C1CCO CVFRFSNPBJUQMG-UHFFFAOYSA-N 0.000 claims description 2
239000004677 Nylon Substances 0.000 claims description 2
239000004698 Polyethylene Substances 0.000 claims description 2
239000004793 Polystyrene Substances 0.000 claims description 2
239000004372 Polyvinyl alcohol Substances 0.000 claims description 2
YIMQCDZDWXUDCA-UHFFFAOYSA-N [4-(hydroxymethyl)cyclohexyl]methanol Chemical compound OCC1CCC(CO)CC1 YIMQCDZDWXUDCA-UHFFFAOYSA-N 0.000 claims description 2
229920001400 block copolymer Polymers 0.000 claims description 2
239000001273 butane Substances 0.000 claims description 2
BMRWNKZVCUKKSR-UHFFFAOYSA-N butane-1,2-diol Chemical compound CCC(O)CO BMRWNKZVCUKKSR-UHFFFAOYSA-N 0.000 claims description 2
PMMYEEVYMWASQN-IMJSIDKUSA-N cis-4-Hydroxy-L-proline Chemical compound O[C@@H]1CN[C@H](C(O)=O)C1 PMMYEEVYMWASQN-IMJSIDKUSA-N 0.000 claims description 2
229920002313 fluoropolymer Polymers 0.000 claims description 2
239000004811 fluoropolymer Substances 0.000 claims description 2
XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 claims description 2
239000001282 iso-butane Substances 0.000 claims description 2
DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims description 2
IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 claims description 2
229920001778 nylon Polymers 0.000 claims description 2
229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 2
229920000058 polyacrylate Polymers 0.000 claims description 2
229920000412 polyarylene Polymers 0.000 claims description 2
229920000573 polyethylene Polymers 0.000 claims description 2
229920000139 polyethylene terephthalate Polymers 0.000 claims description 2
239000005020 polyethylene terephthalate Substances 0.000 claims description 2
239000004926 polymethyl methacrylate Substances 0.000 claims description 2
229920002223 polystyrene Polymers 0.000 claims description 2
229920001343 polytetrafluoroethylene Polymers 0.000 claims description 2
239000004810 polytetrafluoroethylene Substances 0.000 claims description 2
229920000166 polytrimethylene carbonate Polymers 0.000 claims description 2
229920002451 polyvinyl alcohol Polymers 0.000 claims description 2
239000001294 propane Substances 0.000 claims description 2
235000013772 propylene glycol Nutrition 0.000 claims description 2
229920002725 thermoplastic elastomer Polymers 0.000 claims description 2
125000003118 aryl group Chemical group 0.000 claims 1
WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims 1
229940070721 polyacrylate Drugs 0.000 claims 1
229920005989 resin Polymers 0.000 claims 1
239000011347 resin Substances 0.000 claims 1
239000011800 void material Substances 0.000 claims 1
239000007789 gas Substances 0.000 description 18
229920005862 polyol Polymers 0.000 description 12
239000005056 polyisocyanate Substances 0.000 description 11
229920001228 polyisocyanate Polymers 0.000 description 11
235000012431 wafers Nutrition 0.000 description 11
CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 10
TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 10
UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 description 9
239000000463 material Substances 0.000 description 9
238000005187 foaming Methods 0.000 description 7
229920005749 polyurethane resin Polymers 0.000 description 7
UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 6
239000012948 isocyanate Substances 0.000 description 6
QBYNWJVTTUAPCT-UHFFFAOYSA-N n,n'-bis(2-chlorophenyl)methanediamine Chemical compound ClC1=CC=CC=C1NCNC1=CC=CC=C1Cl QBYNWJVTTUAPCT-UHFFFAOYSA-N 0.000 description 6
239000000126 substance Substances 0.000 description 6
150000005846 sugar alcohols Polymers 0.000 description 6
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
241001112258 Moca Species 0.000 description 5
150000002513 isocyanates Chemical class 0.000 description 5
SNRUBQQJIBEYMU-UHFFFAOYSA-N dodecane Chemical compound CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 4
238000002474 experimental method Methods 0.000 description 4
239000011159 matrix material Substances 0.000 description 4
238000007517 polishing process Methods 0.000 description 4
150000003077 polyols Chemical class 0.000 description 4
230000008021 deposition Effects 0.000 description 3
125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
238000002347 injection Methods 0.000 description 3
239000007924 injection Substances 0.000 description 3
VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
230000000704 physical effect Effects 0.000 description 3
239000004065 semiconductor Substances 0.000 description 3
239000002904 solvent Substances 0.000 description 3
239000000758 substrate Substances 0.000 description 3
RTTZISZSHSCFRH-UHFFFAOYSA-N 1,3-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC(CN=C=O)=C1 RTTZISZSHSCFRH-UHFFFAOYSA-N 0.000 description 2
BBMCTIGTTCKYKF-UHFFFAOYSA-N 1-heptanol Chemical compound CCCCCCCO BBMCTIGTTCKYKF-UHFFFAOYSA-N 0.000 description 2
JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
229920001730 Moisture cure polyurethane Polymers 0.000 description 2
MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
150000001491 aromatic compounds Chemical class 0.000 description 2
KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 2
230000000052 comparative effect Effects 0.000 description 2
MWKFXSUHUHTGQN-UHFFFAOYSA-N decan-1-ol Chemical compound CCCCCCCCCCO MWKFXSUHUHTGQN-UHFFFAOYSA-N 0.000 description 2
DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 2
125000005442 diisocyanate group Chemical group 0.000 description 2
LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 description 2
238000000605 extraction Methods 0.000 description 2
239000004744 fabric Substances 0.000 description 2
239000006260 foam Substances 0.000 description 2
IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 2
239000007788 liquid Substances 0.000 description 2
238000004377 microelectronic Methods 0.000 description 2
239000011259 mixed solution Substances 0.000 description 2
239000002002 slurry Substances 0.000 description 2
239000000243 solution Substances 0.000 description 2
DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 2
ZTNJGMFHJYGMDR-UHFFFAOYSA-N 1,2-diisocyanatoethane Chemical compound O=C=NCCN=C=O ZTNJGMFHJYGMDR-UHFFFAOYSA-N 0.000 description 1
VGHSXKTVMPXHNG-UHFFFAOYSA-N 1,3-diisocyanatobenzene Chemical compound O=C=NC1=CC=CC(N=C=O)=C1 VGHSXKTVMPXHNG-UHFFFAOYSA-N 0.000 description 1
ALQLPWJFHRMHIU-UHFFFAOYSA-N 1,4-diisocyanatobenzene Chemical compound O=C=NC1=CC=C(N=C=O)C=C1 ALQLPWJFHRMHIU-UHFFFAOYSA-N 0.000 description 1
CDMDQYCEEKCBGR-UHFFFAOYSA-N 1,4-diisocyanatocyclohexane Chemical compound O=C=NC1CCC(N=C=O)CC1 CDMDQYCEEKCBGR-UHFFFAOYSA-N 0.000 description 1
SBJCUZQNHOLYMD-UHFFFAOYSA-N 1,5-Naphthalene diisocyanate Chemical compound C1=CC=C2C(N=C=O)=CC=CC2=C1N=C=O SBJCUZQNHOLYMD-UHFFFAOYSA-N 0.000 description 1
ATOUXIOKEJWULN-UHFFFAOYSA-N 1,6-diisocyanato-2,2,4-trimethylhexane Chemical compound O=C=NCCC(C)CC(C)(C)CN=C=O ATOUXIOKEJWULN-UHFFFAOYSA-N 0.000 description 1
229940008841 1,6-hexamethylene diisocyanate Drugs 0.000 description 1
LFSYUSUFCBOHGU-UHFFFAOYSA-N 1-isocyanato-2-[(4-isocyanatophenyl)methyl]benzene Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=CC=C1N=C=O LFSYUSUFCBOHGU-UHFFFAOYSA-N 0.000 description 1
OHMHBGPWCHTMQE-UHFFFAOYSA-N 2,2-dichloro-1,1,1-trifluoroethane Chemical compound FC(F)(F)C(Cl)Cl OHMHBGPWCHTMQE-UHFFFAOYSA-N 0.000 description 1
239000004215 Carbon black (E152) Substances 0.000 description 1
UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
239000005058 Isophorone diisocyanate Substances 0.000 description 1
238000005299 abrasion Methods 0.000 description 1
239000003082 abrasive agent Substances 0.000 description 1
239000000654 additive Substances 0.000 description 1
125000003277 amino group Chemical group 0.000 description 1
239000003963 antioxidant agent Substances 0.000 description 1
239000002216 antistatic agent Substances 0.000 description 1
JGCWKVKYRNXTMD-UHFFFAOYSA-N bicyclo[2.2.1]heptane;isocyanic acid Chemical compound N=C=O.N=C=O.C1CC2CCC1C2 JGCWKVKYRNXTMD-UHFFFAOYSA-N 0.000 description 1
230000015572 biosynthetic process Effects 0.000 description 1
VCCBEIPGXKNHFW-UHFFFAOYSA-N biphenyl-4,4'-diol Chemical group C1=CC(O)=CC=C1C1=CC=C(O)C=C1 VCCBEIPGXKNHFW-UHFFFAOYSA-N 0.000 description 1
229910002091 carbon monoxide Inorganic materials 0.000 description 1
230000001413 cellular effect Effects 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
239000004020 conductor Substances 0.000 description 1
239000013078 crystal Substances 0.000 description 1
238000010586 diagram Methods 0.000 description 1
239000000284 extract Substances 0.000 description 1
239000000945 filler Substances 0.000 description 1
235000021323 fish oil Nutrition 0.000 description 1
125000000524 functional group Chemical group 0.000 description 1
239000011521 glass Substances 0.000 description 1
238000000227 grinding Methods 0.000 description 1
RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
229930195733 hydrocarbon Natural products 0.000 description 1
150000002430 hydrocarbons Chemical class 0.000 description 1
125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
239000011810 insulating material Substances 0.000 description 1
NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
239000000314 lubricant Substances 0.000 description 1
238000000691 measurement method Methods 0.000 description 1
239000000155 melt Substances 0.000 description 1
238000002844 melting Methods 0.000 description 1
230000008018 melting Effects 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
239000002480 mineral oil Substances 0.000 description 1
235000010446 mineral oil Nutrition 0.000 description 1
SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
239000004745 nonwoven fabric Substances 0.000 description 1
239000002245 particle Substances 0.000 description 1
238000000059 patterning Methods 0.000 description 1
SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 1
239000000049 pigment Substances 0.000 description 1
229920005906 polyester polyol Polymers 0.000 description 1
239000004848 polyfunctional curative Substances 0.000 description 1
239000003361 porogen Substances 0.000 description 1
229960004063 propylene glycol Drugs 0.000 description 1
239000002994 raw material Substances 0.000 description 1
239000003381 stabilizer Substances 0.000 description 1
239000004094 surface-active agent Substances 0.000 description 1
229920001169 thermoplastic Polymers 0.000 description 1
239000004416 thermosoftening plastic Substances 0.000 description 1
RUELTTOHQODFPA-UHFFFAOYSA-N toluene 2,6-diisocyanate Chemical compound CC1=C(N=C=O)C=CC=C1N=C=O RUELTTOHQODFPA-UHFFFAOYSA-N 0.000 description 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C44/00—Shaping by internal pressure generated in the material, e.g. swelling or foaming ; Producing porous or cellular expanded plastics articles
- B29C44/34—Auxiliary operations
- B29C44/3469—Cell or pore nucleation
- B29C44/348—Cell or pore nucleation by regulating the temperature and/or the pressure, e.g. suppression of foaming until the pressure is rapidly decreased
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J9/00—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
- C08J9/26—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof by elimination of a solid phase from a macromolecular composition or article, e.g. leaching out
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2201/00—Foams characterised by the foaming process
- C08J2201/04—Foams characterised by the foaming process characterised by the elimination of a liquid or solid component, e.g. precipitation, leaching out, evaporation
- C08J2201/042—Elimination of an organic solid phase
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2203/00—Foams characterized by the expanding agent
- C08J2203/08—Supercritical fluid
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
- Y02P20/54—Improvements relating to the production of bulk chemicals using solvents, e.g. supercritical solvents or ionic liquids

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Polymers & Plastics (AREA)
Health & Medical Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Medicinal Chemistry (AREA)
Materials Engineering (AREA)
Organic Chemistry (AREA)
Manufacturing & Machinery (AREA)
Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
Mechanical Treatment Of Semiconductor (AREA)
Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

TW99118909A 2009-06-10 2010-06-10 多孔板之製造方法及使用該方法製得之多孔板 TWI466930B (zh)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
KR20090051598		2009-06-10

Publications (2)

Publication Number	Publication Date
TW201109375A TW201109375A (en)	2011-03-16
TWI466930B true TWI466930B (zh)	2015-01-01

Family

ID=43309376

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW99118909A TWI466930B (zh)	2009-06-10	2010-06-10	多孔板之製造方法及使用該方法製得之多孔板

Country Status (5)

Country	Link
US (1)	US20120085038A1 (ko)
JP (1)	JP5748747B2 (ko)
KR (1)	KR101234313B1 (ko)
TW (1)	TWI466930B (ko)
WO (1)	WO2010143899A2 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2015026614A1 (en) *	2013-08-22	2015-02-26	Cabot Microelectronics Corporation	Polishing pad with porous interface and solid core, and related apparatus and methods
KR102398130B1 (ko) *	2014-10-31	2022-05-13	주식회사 쿠라레	연마층용 비다공성 성형체, 연마 패드 및 연마 방법
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Publication number	Publication date
WO2010143899A2 (ko)	2010-12-16
TW201109375A (en)	2011-03-16
JP5748747B2 (ja)	2015-07-15
JP2012529553A (ja)	2012-11-22
US20120085038A1 (en)	2012-04-12
WO2010143899A3 (ko)	2011-03-31
WO2010143899A9 (ko)	2011-05-19
KR101234313B1 (ko)	2013-02-18
KR20100132933A (ko)	2010-12-20

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