TWI600105B - 用於支撐基板之皿具及使用該皿具之支撐單元（一） - Google Patents
用於支撐基板之皿具及使用該皿具之支撐單元（一） Download PDFInfo
- Publication number
- TWI600105B TWI600105B TW101103044A TW101103044A TWI600105B TW I600105 B TWI600105 B TW I600105B TW 101103044 A TW101103044 A TW 101103044A TW 101103044 A TW101103044 A TW 101103044A TW I600105 B TWI600105 B TW I600105B
- Authority
- TW
- Taiwan
- Prior art keywords
- support
- supporting
- rod
- substrate
- substrate according
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
- H10P72/127—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterised by the substrate support
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/17—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] specially adapted for supporting large square shaped substrates
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20110010132 | 2011-02-01 | ||
| KR1020110030216A KR101284105B1 (ko) | 2011-04-01 | 2011-04-01 | 기판 지지용 보트 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201243984A TW201243984A (en) | 2012-11-01 |
| TWI600105B true TWI600105B (zh) | 2017-09-21 |
Family
ID=46603197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101103044A TWI600105B (zh) | 2011-02-01 | 2012-01-31 | 用於支撐基板之皿具及使用該皿具之支撐單元（一） |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6006734B2 (fr) |
| CN (1) | CN103392228B (fr) |
| TW (1) | TWI600105B (fr) |
| WO (1) | WO2012105785A2 (fr) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6362278B2 (ja) * | 2014-06-30 | 2018-07-25 | ウォンイク テラセミコン カンパニー リミテッド | ボート |
| CN205608389U (zh) * | 2016-05-11 | 2016-09-28 | 重庆京东方光电科技有限公司 | 一种缓存装置及设有该缓存装置的涂胶显影机 |
| CN106216317A (zh) * | 2016-08-10 | 2016-12-14 | 宁夏高创特能源科技有限公司 | 一种平面靶材清洗防护用模块化组合插片花篮 |
| CN108103481B (zh) * | 2018-01-25 | 2023-07-18 | 无锡盈芯半导体科技有限公司 | 衬底自动挟式石英舟 |
| CN208157378U (zh) * | 2018-04-09 | 2018-11-27 | 深圳市捷佳伟创新能源装备股份有限公司 | 一种pevcd卧式石墨舟结构 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3977481B2 (ja) * | 1997-04-11 | 2007-09-19 | 淀川ヒューテック株式会社 | 基板用トレイカセット |
| JP3977491B2 (ja) * | 1997-07-16 | 2007-09-19 | 淀川ヒューテック株式会社 | 基板用カセット |
| JP2001127147A (ja) * | 1999-10-27 | 2001-05-11 | Kanegafuchi Chem Ind Co Ltd | 熱処理用キャリア |
| JP2001223262A (ja) * | 2000-02-07 | 2001-08-17 | Kanegafuchi Chem Ind Co Ltd | 熱処理用キャリア |
| TWI242830B (en) * | 2002-07-15 | 2005-11-01 | Sharp Kk | Cartridge for substrate |
| KR100600515B1 (ko) * | 2005-01-20 | 2006-07-13 | (주)상아프론테크 | 크로스바 설치용 연결구가 구비된 기판 적재용 카세트 |
| CN100344513C (zh) * | 2005-03-04 | 2007-10-24 | 友达光电股份有限公司 | 基板搬运架 |
| US7822324B2 (en) * | 2006-08-14 | 2010-10-26 | Applied Materials, Inc. | Load lock chamber with heater in tube |
| JP4317883B2 (ja) * | 2007-04-18 | 2009-08-19 | 国立大学法人東北大学 | 支持ピンの製造方法、支持ピン、熱処理装置および基板焼成炉 |
| KR101058187B1 (ko) * | 2008-12-05 | 2011-08-22 | 주식회사 에스에프에이 | 기판 보관용 카세트 시스템 |
-
2012
- 2012-01-31 JP JP2013551915A patent/JP6006734B2/ja active Active
- 2012-01-31 WO PCT/KR2012/000714 patent/WO2012105785A2/fr not_active Ceased
- 2012-01-31 CN CN201280010669.8A patent/CN103392228B/zh active Active
- 2012-01-31 TW TW101103044A patent/TWI600105B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2012105785A2 (fr) | 2012-08-09 |
| JP6006734B2 (ja) | 2016-10-12 |
| TW201243984A (en) | 2012-11-01 |
| JP2014511558A (ja) | 2014-05-15 |
| CN103392228B (zh) | 2016-09-21 |
| WO2012105785A3 (fr) | 2012-11-29 |
| CN103392228A (zh) | 2013-11-13 |
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