TWI610075B - 薄膜檢查裝置及薄膜檢查方法 - Google Patents

薄膜檢查裝置及薄膜檢查方法 Download PDF

Info

Publication number: TWI610075B
Authority: TW; Taiwan
Prior art keywords: light; film; lens; convex lens; circular aperture
Prior art date: 2016-01-29

Application number

TW105128956A

Other languages

English (en)

Chinese (zh)

Other versions

TW201727219A (zh

Inventor

Yasushi Takenaka

Daiki Sawai

Original Assignee

Ayaha Engineering Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2016-01-29

Filing date

2016-09-07

Publication date

2018-01-01

2016-09-07 Application filed by Ayaha Engineering Co Ltd filed Critical Ayaha Engineering Co Ltd

2017-08-01 Publication of TW201727219A publication Critical patent/TW201727219A/zh

2018-01-01 Application granted granted Critical

2018-01-01 Publication of TWI610075B publication Critical patent/TWI610075B/zh

Links

238000007689 inspection Methods 0.000 title claims abstract description 49
238000000034 method Methods 0.000 title claims abstract description 13
239000010409 thin film Substances 0.000 claims abstract description 27
239000010408 film Substances 0.000 claims abstract description 18
238000003384 imaging method Methods 0.000 claims abstract description 10
238000004519 manufacturing process Methods 0.000 claims description 9
239000012141 concentrate Substances 0.000 claims 1
230000007547 defect Effects 0.000 description 19
230000003287 optical effect Effects 0.000 description 13
230000005540 biological transmission Effects 0.000 description 4
239000000463 material Substances 0.000 description 4
NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
230000002950 deficient Effects 0.000 description 3
239000011521 glass Substances 0.000 description 3
241000238631 Hexapoda Species 0.000 description 2
230000000052 comparative effect Effects 0.000 description 2
230000000694 effects Effects 0.000 description 2
239000000499 gel Substances 0.000 description 2
229910052736 halogen Inorganic materials 0.000 description 2
150000002367 halogens Chemical class 0.000 description 2
230000001678 irradiating effect Effects 0.000 description 2
229910001507 metal halide Inorganic materials 0.000 description 2
150000005309 metal halides Chemical class 0.000 description 2
241000251468 Actinopterygii Species 0.000 description 1
238000003705 background correction Methods 0.000 description 1
230000000903 blocking effect Effects 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
239000012467 final product Substances 0.000 description 1
238000005286 illumination Methods 0.000 description 1
239000004973 liquid crystal related substance Substances 0.000 description 1
239000013307 optical fiber Substances 0.000 description 1
239000012788 optical film Substances 0.000 description 1
239000002994 raw material Substances 0.000 description 1
239000011347 resin Substances 0.000 description 1
229920005989 resin Polymers 0.000 description 1
-1 that is Substances 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8803—Visual inspection
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0087—Simple or compound lenses with index gradient
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/02—Simple or compound lenses with non-spherical faces
- G02B3/08—Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B2003/0093—Simple or compound lenses characterised by the shape

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
Immunology (AREA)
Pathology (AREA)
Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Testing Of Optical Devices Or Fibers (AREA)

TW105128956A 2016-01-29 2016-09-07 薄膜檢查裝置及薄膜檢查方法 TWI610075B (zh)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2016015739A JP6241897B2 (ja)	2016-01-29	2016-01-29	フィルム検査装置及びフィルム検査方法

Publications (2)

Publication Number	Publication Date
TW201727219A TW201727219A (zh)	2017-08-01
TWI610075B true TWI610075B (zh)	2018-01-01

Family

ID=59502577

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW105128956A TWI610075B (zh)	2016-01-29	2016-09-07	薄膜檢查裝置及薄膜檢查方法

Country Status (3)

Country	Link
JP (1)	JP6241897B2 (ko)
KR (1)	KR101860733B1 (ko)
TW (1)	TWI610075B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN111220544A (zh) *	2020-01-19	2020-06-02	河海大学	一种镜片质量检测装置及检测方法
JP7554064B2 (ja) *	2020-06-30	2024-09-19	株式会社ヴィーネックス	異物・欠陥検査装置、異物・欠陥検査における画像生成装置、及び異物・欠陥検査方法
KR20230034023A (ko)	2021-09-02	2023-03-09	박노진	광학 이미지 추출장치 및 광학 이미지 추출장치용 사선방향광학기기 그리고 광학 이미지 추출장치용 직선방향광학기기
CN114812425B (zh) *	2022-06-30	2022-09-16	江苏康辉新材料科技有限公司	一种薄膜表面微变形的观测方法

Citations (4)

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US4188117A (en) *	1977-04-28	1980-02-12	Kuraray Co., Ltd.	Method and apparatus for detecting leaks in hollow fiber membrane modules
US4812039A (en) *	1986-10-16	1989-03-14	Olympus Optical Co., Ltd.	Schlieren optical device
US5619373A (en) *	1995-06-07	1997-04-08	Hasbro, Inc.	Optical system for a head mounted display
TW201219772A (en) *	2010-11-05	2012-05-16	Univ Chang Gung	The schlieren type ultrasonic wave observer system

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GB2202627A (en) *	1987-03-23	1988-09-28	Sick Optik Elektronik Erwin	Optical arrangement in web monitoring device
JPH02216437A (ja) *	1989-02-17	1990-08-29	Konica Corp	シート状物の欠陥検出方法とその装置
JP3325095B2 (ja) *	1993-09-17	2002-09-17	株式会社ニュークリエイション	検査装置
US5428452A (en) *	1994-01-31	1995-06-27	The United States Of America As Represented By The Secretary Of The Air Force	Optical fourier transform method for detecting irregularities upon two-dimensional sheet material such as film or tape
JP3583012B2 (ja) *	1999-03-29	2004-10-27	富士写真光機株式会社	フィルム傷検出装置
JP2003121385A (ja) *	2001-10-18	2003-04-23	Tosoh Corp	石英ガラス材内部の欠陥検査方法および検査装置
JP2005233695A (ja) *	2004-02-17	2005-09-02	Sumitomo Osaka Cement Co Ltd	透明板欠陥検査装置
JP2015079009A (ja) *	2014-12-25	2015-04-23	株式会社日立ハイテクノロジーズ	欠陥検査方法およびその装置

2016
- 2016-01-29 JP JP2016015739A patent/JP6241897B2/ja active Active
- 2016-09-02 KR KR1020160113056A patent/KR101860733B1/ko active Active
- 2016-09-07 TW TW105128956A patent/TWI610075B/zh active

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4188117A (en) *	1977-04-28	1980-02-12	Kuraray Co., Ltd.	Method and apparatus for detecting leaks in hollow fiber membrane modules
US4812039A (en) *	1986-10-16	1989-03-14	Olympus Optical Co., Ltd.	Schlieren optical device
US5619373A (en) *	1995-06-07	1997-04-08	Hasbro, Inc.	Optical system for a head mounted display
TW201219772A (en) *	2010-11-05	2012-05-16	Univ Chang Gung	The schlieren type ultrasonic wave observer system

Also Published As

Publication number	Publication date
JP2017134004A (ja)	2017-08-03
KR101860733B1 (ko)	2018-05-24
TW201727219A (zh)	2017-08-01
KR20170090979A (ko)	2017-08-08
JP6241897B2 (ja)	2017-12-06

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