TWI616708B - 積層體的製造方法 - Google Patents

積層體的製造方法 Download PDF

Info

Publication number: TWI616708B
Authority: TW; Taiwan
Prior art keywords: layer; forming; laminated body; light control; manufacturing
Prior art date: 2016-03-25

Application number

TW106105284A

Other languages

English (en)

Chinese (zh)

Other versions

TW201800821A (zh

Inventor

尾崎一人

吉村和記

山田保誠

Original Assignee

斯庫林集團股份有限公司

國立研究開發法人產業技術綜合研究所

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2016-03-25

Filing date

2017-02-17

Publication date

2018-03-01

2017-02-17 Application filed by 斯庫林集團股份有限公司, 國立研究開發法人產業技術綜合研究所 filed Critical 斯庫林集團股份有限公司

2018-01-01 Publication of TW201800821A publication Critical patent/TW201800821A/zh

2018-03-01 Application granted granted Critical

2018-03-01 Publication of TWI616708B publication Critical patent/TWI616708B/zh

Links

238000004519 manufacturing process Methods 0.000 title claims abstract description 41
238000000034 method Methods 0.000 claims abstract description 39
239000001257 hydrogen Substances 0.000 claims abstract description 38
229910052739 hydrogen Inorganic materials 0.000 claims abstract description 38
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 37
229910052751 metal Inorganic materials 0.000 claims abstract description 28
239000002184 metal Substances 0.000 claims abstract description 28
229910044991 metal oxide Inorganic materials 0.000 claims abstract description 19
150000004706 metal oxides Chemical class 0.000 claims abstract description 19
238000005984 hydrogenation reaction Methods 0.000 claims abstract description 15
238000006356 dehydrogenation reaction Methods 0.000 claims abstract description 11
239000000758 substrate Substances 0.000 claims abstract description 9
239000010410 layer Substances 0.000 claims description 217
239000011241 protective layer Substances 0.000 claims description 28
230000003197 catalytic effect Effects 0.000 claims description 24
239000007789 gas Substances 0.000 claims description 24
239000001301 oxygen Substances 0.000 claims description 15
229910052760 oxygen Inorganic materials 0.000 claims description 15
230000008569 process Effects 0.000 claims description 15
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 14
238000004544 sputter deposition Methods 0.000 claims description 13
230000000149 penetrating effect Effects 0.000 claims description 9
238000005546 reactive sputtering Methods 0.000 claims description 4
238000010030 laminating Methods 0.000 claims description 3
230000002265 prevention Effects 0.000 claims description 2
230000001737 promoting effect Effects 0.000 claims description 2
230000003647 oxidation Effects 0.000 abstract description 5
238000007254 oxidation reaction Methods 0.000 abstract description 5
239000010408 film Substances 0.000 description 41
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 27
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 25
229910052719 titanium Inorganic materials 0.000 description 25
239000010936 titanium Substances 0.000 description 25
239000000543 intermediate Substances 0.000 description 19
239000011800 void material Substances 0.000 description 19
239000000463 material Substances 0.000 description 18
238000002834 transmittance Methods 0.000 description 18
239000011521 glass Substances 0.000 description 15
239000004408 titanium dioxide Substances 0.000 description 13
238000006243 chemical reaction Methods 0.000 description 12
238000010586 diagram Methods 0.000 description 12
FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 9
229910052749 magnesium Inorganic materials 0.000 description 9
239000011777 magnesium Substances 0.000 description 9
230000015572 biosynthetic process Effects 0.000 description 8
VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 8
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
229910000861 Mg alloy Inorganic materials 0.000 description 6
238000002845 discoloration Methods 0.000 description 6
229910045601 alloy Inorganic materials 0.000 description 5
239000000956 alloy Substances 0.000 description 5
KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
229910000946 Y alloy Inorganic materials 0.000 description 4
239000002245 particle Substances 0.000 description 4
230000004044 response Effects 0.000 description 4
229910052727 yttrium Inorganic materials 0.000 description 4
229910052786 argon Inorganic materials 0.000 description 3
230000008859 change Effects 0.000 description 3
239000000470 constituent Substances 0.000 description 3
230000006866 deterioration Effects 0.000 description 3
230000036632 reaction speed Effects 0.000 description 3
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
230000008033 biological extinction Effects 0.000 description 2
230000004907 flux Effects 0.000 description 2
230000001678 irradiating effect Effects 0.000 description 2
239000007769 metal material Substances 0.000 description 2
-1 oxygen ions Chemical class 0.000 description 2
229910052763 palladium Inorganic materials 0.000 description 2
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
229920000642 polymer Polymers 0.000 description 2
230000009257 reactivity Effects 0.000 description 2
229910052715 tantalum Inorganic materials 0.000 description 2
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
239000010409 thin film Substances 0.000 description 2
229910052724 xenon Inorganic materials 0.000 description 2
FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
229910052688 Gadolinium Inorganic materials 0.000 description 1
PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
229910052772 Samarium Inorganic materials 0.000 description 1
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
229910010413 TiO 2 Inorganic materials 0.000 description 1
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
239000003054 catalyst Substances 0.000 description 1
229910000420 cerium oxide Inorganic materials 0.000 description 1
238000005229 chemical vapour deposition Methods 0.000 description 1
229910017052 cobalt Inorganic materials 0.000 description 1
239000010941 cobalt Substances 0.000 description 1
GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
238000005034 decoration Methods 0.000 description 1
238000001514 detection method Methods 0.000 description 1
230000002542 deteriorative effect Effects 0.000 description 1
229910001882 dioxygen Inorganic materials 0.000 description 1
238000005868 electrolysis reaction Methods 0.000 description 1
238000005566 electron beam evaporation Methods 0.000 description 1
UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
229910000449 hafnium oxide Inorganic materials 0.000 description 1
WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
150000004678 hydrides Chemical class 0.000 description 1
150000002431 hydrogen Chemical class 0.000 description 1
239000012535 impurity Substances 0.000 description 1
239000004615 ingredient Substances 0.000 description 1
229910052742 iron Inorganic materials 0.000 description 1
229910052746 lanthanum Inorganic materials 0.000 description 1
FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
239000002346 layers by function Substances 0.000 description 1
229910001092 metal group alloy Inorganic materials 0.000 description 1
230000004048 modification Effects 0.000 description 1
238000012986 modification Methods 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
229910052758 niobium Inorganic materials 0.000 description 1
239000010955 niobium Substances 0.000 description 1
GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 1
URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
230000035515 penetration Effects 0.000 description 1
229910052697 platinum Inorganic materials 0.000 description 1
239000011148 porous material Substances 0.000 description 1
229910052761 rare earth metal Inorganic materials 0.000 description 1
238000006479 redox reaction Methods 0.000 description 1
KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
238000007789 sealing Methods 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000004332 silver Substances 0.000 description 1
238000000391 spectroscopic ellipsometry Methods 0.000 description 1
239000000126 substance Substances 0.000 description 1
PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
229910052721 tungsten Inorganic materials 0.000 description 1
239000010937 tungsten Substances 0.000 description 1
229910001930 tungsten oxide Inorganic materials 0.000 description 1
238000001771 vacuum deposition Methods 0.000 description 1
229910052720 vanadium Inorganic materials 0.000 description 1
LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1
239000011787 zinc oxide Substances 0.000 description 1
229910052726 zirconium Inorganic materials 0.000 description 1

Classifications

- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/19—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on variable-reflection or variable-refraction elements not provided for in groups G02F1/015 - G02F1/169

Landscapes

Physics & Mathematics (AREA)
Nonlinear Science (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

TW106105284A 2016-03-25 2017-02-17 積層體的製造方法 TWI616708B (zh)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2016-061263		2016-03-25
JP2016061263		2016-03-25

Publications (2)

Publication Number	Publication Date
TW201800821A TW201800821A (zh)	2018-01-01
TWI616708B true TWI616708B (zh)	2018-03-01

Family

ID=59901065

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW106105284A TWI616708B (zh)	2016-03-25	2017-02-17	積層體的製造方法

Country Status (2)

Country	Link
TW (1)	TWI616708B (fr)
WO (1)	WO2017163577A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TW201029838A (en) *	2008-12-12	2010-08-16	Applied Materials Inc	Laminated electrically tintable windows
CN102193129A (zh) *	2010-03-02	2011-09-21	索尼公司	光学元件、窗材料、房屋隔断构件及日照遮蔽装置
JP2014026262A (ja) *	2012-06-20	2014-02-06	National Institute Of Advanced Industrial & Technology	反射型調光素子。
CN103842900A (zh) *	2011-09-30	2014-06-04	独立行政法人产业技术总合研究所	反射型调光元件、反射型调光部件、及多层玻璃
TW201439371A (zh) *	2013-01-21	2014-10-16	Kinestral Technologies Inc	多層電致變色結構之製備方法
TW201546235A (zh) *	2014-04-11	2015-12-16	特薩股份有限公司	用於封裝有機電子元件的膠帶

2017
- 2017-01-23 WO PCT/JP2017/002149 patent/WO2017163577A1/fr not_active Ceased
- 2017-02-17 TW TW106105284A patent/TWI616708B/zh not_active IP Right Cessation

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TW201029838A (en) *	2008-12-12	2010-08-16	Applied Materials Inc	Laminated electrically tintable windows
CN102193129A (zh) *	2010-03-02	2011-09-21	索尼公司	光学元件、窗材料、房屋隔断构件及日照遮蔽装置
CN103842900A (zh) *	2011-09-30	2014-06-04	独立行政法人产业技术总合研究所	反射型调光元件、反射型调光部件、及多层玻璃
JP2014026262A (ja) *	2012-06-20	2014-02-06	National Institute Of Advanced Industrial & Technology	反射型調光素子。
TW201439371A (zh) *	2013-01-21	2014-10-16	Kinestral Technologies Inc	多層電致變色結構之製備方法
TW201546235A (zh) *	2014-04-11	2015-12-16	特薩股份有限公司	用於封裝有機電子元件的膠帶

Also Published As

Publication number	Publication date
TW201800821A (zh)	2018-01-01
WO2017163577A1 (fr)	2017-09-28

Legal Events

Date	Code	Title	Description
2023-12-01	MM4A	Annulment or lapse of patent due to non-payment of fees

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