TWI676737B - 微型氣壓動力裝置 - Google Patents
微型氣壓動力裝置 Download PDFInfo
- Publication number
- TWI676737B TWI676737B TW105136553A TW105136553A TWI676737B TW I676737 B TWI676737 B TW I676737B TW 105136553 A TW105136553 A TW 105136553A TW 105136553 A TW105136553 A TW 105136553A TW I676737 B TWI676737 B TW I676737B
- Authority
- TW
- Taiwan
- Prior art keywords
- plate
- hole
- valve
- chamber
- gas
- Prior art date
Links
- 239000012530 fluid Substances 0.000 claims abstract description 80
- 239000000725 suspension Substances 0.000 claims description 106
- 238000004891 communication Methods 0.000 claims description 20
- 239000000919 ceramic Substances 0.000 claims description 19
- 230000000694 effects Effects 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 230000009286 beneficial effect Effects 0.000 claims description 3
- 210000000214 mouth Anatomy 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 24
- 238000013461 design Methods 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 5
- 238000007639 printing Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 210000000887 face Anatomy 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Compressor (AREA)
- Lift Valve (AREA)
- Check Valves (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105136553A TWI676737B (zh) | 2016-11-10 | 2016-11-10 | 微型氣壓動力裝置 |
| EP17200850.0A EP3321505B1 (fr) | 2016-11-10 | 2017-11-09 | Dispositif pneumatique miniature |
| US15/808,021 US10683861B2 (en) | 2016-11-10 | 2017-11-09 | Miniature pneumatic device |
| JP2017216110A JP6829676B2 (ja) | 2016-11-10 | 2017-11-09 | 小型空気圧動力装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105136553A TWI676737B (zh) | 2016-11-10 | 2016-11-10 | 微型氣壓動力裝置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201817968A TW201817968A (zh) | 2018-05-16 |
| TWI676737B true TWI676737B (zh) | 2019-11-11 |
Family
ID=60293887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105136553A TWI676737B (zh) | 2016-11-10 | 2016-11-10 | 微型氣壓動力裝置 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP3321505B1 (fr) |
| JP (1) | JP6829676B2 (fr) |
| TW (1) | TWI676737B (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI698583B (zh) * | 2019-07-17 | 2020-07-11 | 研能科技股份有限公司 | 微型泵浦 |
| CN114810561A (zh) * | 2021-01-29 | 2022-07-29 | 研能科技股份有限公司 | 薄型气体传输装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM529794U (zh) * | 2016-01-29 | 2016-10-01 | Microjet Technology Co Ltd | 微型氣壓動力裝置 |
| TWM530883U (zh) * | 2016-06-24 | 2016-10-21 | Microjet Technology Co Ltd | 壓電致動器結構 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008054367A (ja) * | 2006-08-22 | 2008-03-06 | Ritsumeikan | 圧電アクチュエータ及びこれを用いたポンプ |
| CN104364526B (zh) * | 2012-06-11 | 2016-08-24 | 株式会社村田制作所 | 鼓风机 |
| TWI552838B (zh) * | 2013-06-24 | 2016-10-11 | 研能科技股份有限公司 | 微型氣壓動力裝置 |
| GB201322103D0 (en) * | 2013-12-13 | 2014-01-29 | The Technology Partnership Plc | Fluid pump |
| TWI553230B (zh) * | 2014-09-15 | 2016-10-11 | 研能科技股份有限公司 | 微型氣壓動力裝置 |
| EP3203080B1 (fr) * | 2016-01-29 | 2021-09-22 | Microjet Technology Co., Ltd | Dispositif pneumatique miniature |
-
2016
- 2016-11-10 TW TW105136553A patent/TWI676737B/zh active
-
2017
- 2017-11-09 JP JP2017216110A patent/JP6829676B2/ja active Active
- 2017-11-09 EP EP17200850.0A patent/EP3321505B1/fr active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM529794U (zh) * | 2016-01-29 | 2016-10-01 | Microjet Technology Co Ltd | 微型氣壓動力裝置 |
| TWM530883U (zh) * | 2016-06-24 | 2016-10-21 | Microjet Technology Co Ltd | 壓電致動器結構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6829676B2 (ja) | 2021-02-10 |
| EP3321505B1 (fr) | 2021-04-07 |
| JP2018076865A (ja) | 2018-05-17 |
| EP3321505A1 (fr) | 2018-05-16 |
| TW201817968A (zh) | 2018-05-16 |
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