TWI708687B - Vibration device, vibration method and screen printing device - Google Patents

Abstract

The vibrating device (100) of the present invention includes: a screen (201); a vibration unit (40) that vibrates a plurality of opposite sides of the screen (201); and a controller (80) that controls Vibration of the above-mentioned vibration unit (40). The vibration unit (40) causes the ends of the screen (201) to simultaneously generate traveling waves of the same amplitude, the same wavelength, and the same frequency. From the outside of the screen (201), the traveling waves make the screen ( The end of 201) vibrates up and down to vibrate the screen plate (201) by the standing wave.

Description

Vibration device, vibration method and screen printing device

The present invention relates to a vibration device that vibrates a screen and a screen printing device.

There is a conventionally known screen printing device that vibrates a screen to print a workpiece.

[Prior Technical Literature]

[Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 63-199643

Patent Document 2: Japanese Patent Laid-Open No. 2005-238723

Patent Document 3: Japanese Patent Laid-Open No. 2010-221409

Patent Document 4: Japanese Patent Laid-Open No. 2009-126114

In the screen printing device, even if the screen is vibrated, there is still an uneven amount of paste entering the holes of the screen during hole filling printing, and there is a possibility that a fixed amount of paste is not filled in the holes.

The purpose of the embodiment of the present invention is to provide a vibrating device in which the amount of slurry entering the holes of the screen is not uneven.

The vibration device of the present invention is characterized by:

Screen version

A vibrating unit that vibrates a plurality of opposing side surfaces on the outer side of the screen; and

A controller, which controls the vibration of the above-mentioned vibration unit.

According to the present invention, the vibration unit applies vibration from a plurality of opposite side surfaces on the outer side of the screen, thereby stably vibrating the screen.

10: Base

11: upper surface

12: Bottom

13: wall

14: Space

20: Tablet

21: positive

22: back

23: side

24, 209: screw hole

25: Screw

26: Fulcrum

27: Corner

29: recess

40: Vibration unit

41, 42, 43, 44, 45: vibrator

46: Frame

47: Allocator

48: horizontal part

49: vertical part

50: spacer

51: Pillar

52: Slot

53: Slot

60: Traveling Wave

70: Standing Wave

80: Controller

81: Air compressor

82: Trachea

83: regulator

84: processor

100: Vibration device

200: Screen printing device

201: Screen

202: wire mesh

203: Scraper

204: Slurry

205: Through hole

206: Suction tube

207: Vacuum pump

208: Screen Frame

209: screw hole

210: support

211: base

212: Press plate

213: Fastening screws

214: Fixed part

220: Support Department

221: Thin Plate Section

222: Thick Plate Department

230: Scraper Department

231: side

240: adjust fixture

250: Roll

251: Roller

260: Printing Tools

270: Plate frame fixed part

300: Shearing device

301: Blade

400: Hole device

401: Drill

500: Vibration pressure feeding device

600: Printing Department

610: Lifting mechanism

620: fixed mechanism

900: Workpiece

901: parts

2081: front and rear frame

2082: side frame

P: Printing direction

X: front and back direction

Y: left and right direction

Z: Up and down direction

Fig. 1 is a perspective view of a vibrating device 100 according to the first embodiment.

Fig. 2 is a cross-sectional view taken along line A-A of the vibration device 100 of Fig. 1 in the first embodiment.

3(a) to (f) are explanatory diagrams of the vibration method of the first embodiment.

Fig. 4 is a diagram showing the structure of vibration measurement.

Fig. 5 is a distribution diagram of the up and down vibration of the flat plate 20 caused by the air pressure of 0.2 MPa.

Fig. 6 is a distribution diagram of the up and down vibration of the flat plate 20 caused by the air pressure of 0.3 MPa.

FIG. 7 is a distribution diagram of the up and down vibration of the plate 20 caused by the air pressure of 0.4 MPa.

FIG. 8 is a distribution diagram of the up and down vibration of the flat plate 20 caused by the air pressure of 0.5 MPa.

Figure 9 is a distribution diagram of vibration in the horizontal direction.

Fig. 10 is a diagram showing a comparative example of one-sided vibration.

Figure 11 is a distribution diagram of unilateral vibration.

Fig. 12 is a diagram showing a comparative example of lateral vibration on both sides.

Figure 13 is the distribution diagram of the upper and lower vibration of the lateral vibration on both sides.

FIG. 14 is a diagram showing a modification of the vibration device 100 of the first embodiment.

Fig. 15 is a diagram showing a modification of the vibration device 100 of the first embodiment.

FIG. 16 is a diagram showing a modification of the vibration device 100 of the first embodiment.

17(a) to (c) are diagrams showing modified examples of the vibrating device 100 of the first embodiment.

18(a) and (b) are diagrams showing modified examples of the vibrating device 100 of the first embodiment.

FIG. 19 is a diagram showing a modification example of the vibration device 100 of the first embodiment.

FIG. 20 is a diagram showing a modification example of the vibration device 100 of the first embodiment.

Fig. 21 is a diagram showing a screen printing apparatus 200 according to the second embodiment.

Fig. 22 is a diagram showing a cutting device 300 according to the third embodiment.

Fig. 23 is a diagram showing a hole drilling device 400 of the fourth embodiment.

FIG. 24 is a diagram showing a vibrating pressure feeding device 500 according to the fifth embodiment.

25(a) and (b) are explanatory diagrams of the vibration of the vibrating compression feeding device 500 of the fifth embodiment.

FIG. 26 is a diagram showing a modified example of the vibratory pressure feeding device 500 of the fifth embodiment.

FIG. 27 is a diagram showing a modified example of the vibratory pressure feeding device 500 of the fifth embodiment.

Figs. 28 (a) and (b) are diagrams showing modified examples of the vibrating compression feeding device 500 of the fifth embodiment.

Figs. 29 (a) and (b) are diagrams showing a modified example of the vibrating compression feeding device 500 of the fifth embodiment.

Figs. 30(a) and (b) are diagrams showing a modification example of the vibrating compression feeding device 500 of the fifth embodiment.

Figures 31 (a) and (b) are diagrams showing the dispenser 47 of the sixth embodiment.

32(a) to (c) are diagrams showing the flat plate 20 and the vibration unit 40 of the seventh embodiment.

33(a) to (d) are diagrams showing the planar shape of the flat plate 20 of the seventh embodiment.

Figs. 34(a) to (i) are diagrams showing the A-A cross-sectional shape of the flat plate 20 in the seventh embodiment.

Figures 35 (a) to (c) are three views of the printing section 600 of the screen printing apparatus of the ninth embodiment.

Fig. 36 is a perspective view of a vibrating device 100 according to the ninth embodiment.

Fig. 37 is a front view of a printing tool 260 according to the ninth embodiment.

Fig. 38 is a side view of the printing tool 260 of the ninth embodiment.

Fig. 39 is a plan view of a printing tool 260 according to the ninth embodiment.

Figs. 40 (a) and (b) are side views of the printing tool 260 of the ninth embodiment.

Fig. 41 is a graph showing the results of vibration measurement in the ninth embodiment.

Fig. 42 is a graph showing the results of vibration measurement in the ninth embodiment.

Fig. 43 is a side view of the printing tool 260 of the ninth embodiment.

Fig. 44 is a graph showing the results of vibration measurement in the ninth embodiment.

Fig. 45 is a graph showing the results of vibration measurement in the ninth embodiment.

Figs. 46(a) to (d) are 5-side views of the printing tool 260 of the ninth embodiment.

Figures 47 (a) to (d) are five-sided views of the printing tool 260 of the tenth embodiment.

Figures 48 (a) to (c) are three-sided views of the printing tool 260 of the tenth embodiment.

Figures 49 (a) to (c) are three-sided views of the printing tool 260 of the tenth embodiment.

Figures 50 (a) to (d) are five-sided views of the printing tool 260 of the tenth embodiment.

Figures 51(a) to (f) are diagrams showing modified examples of the printing tool 260 of the ninth and tenth embodiments.

Fig. 52 is a diagram showing a screen printing apparatus 200 according to the eleventh embodiment.

Fig. 53 is a perspective view of the vibration device 100 of the eleventh embodiment.

Fig. 54 is a perspective view of the vibration device 100 of the eleventh embodiment.

Fig. 55 is a perspective view of the vibrating device 100 of the eleventh embodiment.

Fig. 56 is a perspective view of the vibrating device 100 of the eleventh embodiment.

Figs. 57 (a) and (b) are diagrams showing modified examples of the vibration device 100 of the eleventh embodiment.

Fig. 58 is a diagram showing a modified example of the screen printing apparatus 200 of the eleventh embodiment.

Implementation mode 1.

Fig. 1 is a perspective view of a vibrating device 100 according to the first embodiment. Fig. 2 is an A-A cross-sectional view of the vibrating device 100 of Fig. 1 in the first embodiment. In Fig. 1, X represents the front-rear direction. In FIGS. 1 and 2, Y represents the left-right direction, and Z represents the up-down direction.

<<<Configuration of Vibration Device 100>>>

The vibration device 100 has a base 10, a flat plate 20, a vibration unit 40, and a controller 80.

<<<Explanation of base 10>>>

The base 10 has a box shape with an upper opening. The base 10 has an upper surface 11, a bottom surface 12 and a wall 13. The base 10 has a space 14 in the center. The upper surface 11 is formed by the top surface of the wall 13 and has a rectangular shape with an opening in the center. The bottom surface 12 has a rectangular shape. The wall 13 is a side wall of the base 10 erected around the bottom surface 12. The space 14 is a hexahedral space surrounded by the bottom surface 12 and the wall 13.

<<<Explanation of Tablet 20>>>

The plate 20 is preferably a material that can easily pass sound waves, and is preferably a metal. The material of the flat plate 20 is preferably aluminum, titanium, and stainless steel. Aluminum and titanium are more preferred, and aluminum is most preferred. The flat plate 20 is preferably rectangular, preferably square. The flat plate 20 has a front surface 21, a back surface 22 and four side surfaces 23. The surface 21 and the back surface 22 are parallel rectangular planes of the same shape. The side surface 23 is the surface located between the surface 21 and the back surface 22 of the plate 20. The side surface 23 is a plane orthogonal to the surface 21 and the back surface 22 of the plate 20. The plate 20 has a plurality of screw holes 24 around it. A total of 8 screw holes 24 are provided in the corners of the plate 20 and the center of each side. The plate 20 is firmly fixed to the base 10 by screws 25 inserted into the screw holes 24. Hereinafter, the position of the screw hole 24 is referred to as a fixed position.

The flat plate 20 is fixed on the base 10 at a fixed position arranged around the flat plate 20.

<<<Description of Vibration Unit 40>>>

The vibration unit 40 has a plurality of vibrators to vibrate the plurality of side surfaces 23 of the plate 20 at the same frequency. The vibration unit 40 vibrates the opposite side of the plate 20 up and down. The vibration unit 40 has two vibrators of a vibrator 41 and a vibrator 42. The vibration unit 40 vibrates the outer side of the fixed part having the screw hole 24 up and down. The two vibrators of the vibrator 41 and the vibrator 42 are of the same specification. The two vibrators of the vibrator 41 and the vibrator 42 are vibrators driven by air pressure.

As a vibrator driven by air pressure, the following vibrators can be used. (1) Turbine vibrator (2) Roller vibrator (3) Spherical vibrator (4) Piston vibrator

The above-mentioned (1), (2), (3) vibrators have less noise and can operate at high speed. Especially, the turbine vibrator with stable action is the best. Piston vibrators have the problems of loud noise and slow movement.

The vibration unit 40 has a distributor 47. The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the side surface 23 of the plate 20. The distributor 47 fixes the vibrator 41 and the vibrator 42 to the side surface 23 of the plate 20. The distributor 47 is a metal piece bent into an L-shape. The distributor 47 has a horizontal portion 48 and a vertical portion 49. The horizontal portion 48 fixes the top surface of the vibrator 41 or the vibrator 42. The horizontal portion 48 fixes the vibrator 41 or the vibrator 42 in such a way that the rotations of the vibrator 41 and the vibrator 42 are reversed. In FIG. 2, the vibrator 41 rotates counterclockwise, and the vibrator 42 rotates clockwise. The vertical portion 49 has a side surface 23 top and bottom width The width of the top and bottom is fixed to the side 23.

The distributor 47 has a front-rear width greater than the width of the front and back directions of the top surfaces of the vibrator 41 and the vibrator 42. The width in the front and back direction of the distributor 47 may be more than 2 times and less than 10 times the width in the front and back direction of the top surfaces of the vibrator 41 and the vibrator 42, preferably 5 times. The distributor 47 has a width less than 1/2 of the front and back direction of the flat plate 20 and greater than 1/8 of the front and back width, preferably 1/5. The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to a wide range of the side surface 23 of the plate 20.

<<<Description of Controller 80>>>

The controller 80 controls the vibration of the vibration unit 40. The controller 80 makes the vibrator vibrate at a frequency above 10 Hz and below 800 Hz. The controller 80 causes a plurality of vibrators to vibrate at the same frequency. The controller 80 has an air compressor 81, an air pipe 82, a regulator 83, and a processor 84.

The air compressor 81 generates compressed air. The air pipe 82 is connected to the air compressor 81 for the flow of compressed air. The air pipe 82 branches in a Y shape in the middle, and is connected to the vibrator 41 and the vibrator 42.

The regulator 83 is a control device that controls the pressure of the compressed air. The regulator 83 determines the vibration frequency of the vibrator 41 and the vibrator 42 by controlling the pressure of the compressed air.

The processor 84 has a central processing device and a program. The processor 84 can be realized by an integrated circuit, a circuit board, or the like. The processor 84 controls the operation of the vibration device 100. The processor 84 is connected to the air compressor 81 and controls the opening and closing actions and the action time of the air compressor 81.

<<<Explanation of Vibration Method>>>

The vibration method of the vibration device 100 will be described.

<Initial setting procedure>

With the periphery of the plate 20 fixed to the base 10 by screws 25, the operator turns on the power switch of the vibration device 100. The operator has a corresponding table of the pressure of the compressed air and the vibration frequency of the vibrator 41 and the vibrator 42. The operator refers to the correspondence table and sets the pressure of the compressed air corresponding to the vibration frequency of the vibrator 41 and the vibrator 42 through the regulator 83. The operator sets the pressure corresponding to any audible frequency between 10 Hz and 800 Hz.

<Progressive Wave Generation Step>

The air pipe 82 is branched in a Y shape and is connected to the vibrator 41 and the vibrator 42. Therefore, air of the same pressure is supplied to the vibrator 41 and the vibrator 42. As a result, the vibrator 41 and the vibrator 42 vibrate up and down at the same frequency. The vibration frequency of the vibrator 41 and the vibrator 42 is preferably an audible frequency. The vibrator 41 and the vibrator 42 are fixed to the left and right side surfaces 23 of the plate 20, and a traveling wave 60 of sine wave is applied to the left and right side surfaces 23 of the plate 20. The vibrator 41 and the vibrator 42 simultaneously generate a traveling wave 60 of the same amplitude, the same wavelength, and the same frequency.

<Standing Wave Generation Step>

If the traveling waves 60 are generated in opposite directions with the same amplitude, the same wavelength, and the same frequency at the same time, the traveling waves 60 from the left and right overlap in the plate 20 to generate a standing wave 70. A standing wave refers to a wave that does not move even if time passes. The flat plate 20 vibrates up and down at the same vibration frequency as the vibrator 41 and the vibrator 42 by the standing wave 70.

<Synchronization steps>

Even if the vibrator 41 and the vibrator 42 start to vibrate in a non-synchronized state where the phases of the vibrator 41 and 42 are shifted, the phases of the vibrator 41 and the vibrator 42 coincide in a short time due to the synchronization phenomenon, and the vibration of the vibrator 41 and the vibrator 42 becomes synchronized The state immediately shifts to the vibration of the standing wave.

<Up and down vibration steps>

Hereinafter, the up and down vibration by the vibration method will be described using FIG. 3. FIG. 3 is a schematic diagram of the up and down vibration viewed from the front and back directions of the center of the left and right direction of the plate 20. In FIG. 3, the fulcrum 26 refers to the point of the center of the upper and lower direction of the plate 20 and the center of the screw hole 24. (a) When the vibrator 41 and the vibrator 42 exert a downward force on the side surface 23 of the plate 20, an upward force is generated at the center of the plate 20 through the fulcrum 26. (b) When a greater downward force is applied to the side surface 23 of the plate 20 by the vibrator 41 and the vibrator 42, the center of the plate 20 rises. (c) When the downward force of the side 23 of the plate 20 caused by the vibrator 41 and the vibrator 42 becomes weak, the center of the plate 20 drops. (d) When the vibrator 41 and the vibrator 42 exert an upward force on the side surface 23 of the plate 20, a downward force is generated at the center of the plate 20 through the fulcrum 26. (e) When the vibrator 41 and the vibrator 42 exert a greater upward force on the side surface 23 of the plate 20, the center of the plate 20 drops. (f) When the upward force of the side 23 of the plate 20 caused by the vibrator 41 and the vibrator 42 becomes weak, the center of the plate 20 rises.

<Fluttering Phenomenon>

Taking (a) to (f) as one cycle, and by repeating the actions (a) to (f), the plate 20 vibrates up and down at the same frequency as the vibration frequency of the vibrator 41 and the vibrator 42. The flat plate 20 vibrates like flapping wings between the fulcrums 26. Therefore, this phenomenon is referred to as a flapping phenomenon below. Vibrate The fin phenomenon is a phenomenon in which air is supplied to vibrators fixed on the left and right sides of the plate 20 to cause the plate 20 to vibrate up and down centered on the fulcrum 26. In order to easily cause wing flapping, it is more desirable that the fixed positions of the vibrator 41 and the vibrator 42 and the positions of the two screw holes 24 are on a straight line. That is, it is preferable that a plurality of vibrators exist on the extension line of the line connecting the opposed fixed portions of the opposite sides of the flat plate 20. Even if the fixing positions of the vibrator 41 and the vibrator 42 and the positions of the two screw holes 24 are not on a straight line and are located at a staggered position, if the plate 20 is firmly fixed to the base 10, the phenomenon of wing flapping will occur. If the thickness of the wall 13 is increased, the flapping phenomenon may be hindered. Therefore, the thickness of the wall 13 is preferably thinner, and the opening of the space 14 is better. The thickness of the wall 13 is preferably greater than the diameter of the screw hole 24 and less than twice the diameter of the screw hole 24.

<<<Specific example>>>

Hereinafter, a specific example will be described. As the flat plate 20, a square aluminum plate with a side of about 0.5 m is used. Set the sound velocity V of aluminum to 6320 [m/s]. Among them, the temperature of aluminum is fixed, and the change in the speed of sound caused by temperature is not considered. As the vibrator 41 and the vibrator 42, a pneumatic vibrator manufactured by EXEN Corporation of the following specifications was used. Preferably, it is a pneumatic vibrator with a vibration frequency f of 119 Hz or more and 414 Hz or less when the air pressure is 0.2 or more and 0.6 MPa or less. Or, it is more desirable to use a pneumatic vibrator with a vibration frequency f of 110 Hz or more and 290 Hz or less when the air pressure is 0.3 or more and 0.6 MPa or less.

Here, a pneumatic vibrator whose vibration frequency f is the following value when the air pressure is the following is used.

Vibration frequency f when air pressure is 0.5MPa: 216.5Hz

Vibration frequency f when air pressure is 0.4MPa: 206.6Hz

Vibration frequency f when air pressure is 0.3MPa: 177.3Hz

Vibration frequency f when air pressure is 0.2MPa: 133.0Hz

The wavelength can be calculated by the following formula.

Wavelength λ[m]=Sound speed V[m/s]/Vibration frequency f[Hz]

The calculation of the wavelength of the traveling wave 60 is as follows.

When the air pressure is 0.5MPa:

Wavelength λ[m]=6320[m/s]/216.5[Hz]=29.19m

When the air pressure is 0.4MPa:

Wavelength λ[m]=6320[m/s]/206.6[Hz]=30.59m

When the air pressure is 0.3MPa:

Wavelength λ[m]=6320[m/s]/177.3[Hz]=35.65m

When the air pressure is 0.2MPa:

Wavelength λ[m]=6320[m/s]/133.0[Hz]=47.52m

The traveling wave 60 generated from the vibrator 41 and the vibrator 42 can be expressed by the following formula.

R(y,t)=A*sin2π((t/T)-(y/λ))

L(y,t)=A*sin2π((t/T)+(y/λ))

y[m]: the position of the plate in the Y direction

t[s]: time

R(y,t): Displacement of traveling wave 60 in Z direction at position y[m] and time t[s] [m]

L(y,t): Displacement of traveling wave 60 in Z direction at position y[m] and time t[s] [m]

A: Amplitude of traveling wave 60 [m]

T: The period of the traveling wave 60 [s]

λ: Wavelength of traveling wave 60 [m]

The standing wave 70 generated by the superposition of the traveling wave 60 generated from the vibrator 41 and the vibrator 42 can be expressed by the following formula representing a sine standing wave.

z(y,t)=R(y,t)+L(y,t)=2A*sin(2π(t/T))*cos(2π(y/λ))

y[m]: the position of the plate in the Y direction

t[s]: time

z(y,t): Displacement in Z direction of standing wave 70 at position y[m] and time t[s] [m]

A: Amplitude of traveling wave 60 [m]

T: The period of the traveling wave 60 [s]

λ: Wavelength of traveling wave 60 [m]

cos(2π(y/λ)) represents the amplitude of the standing wave 70. The position where the amplitude of the standing wave 70 is 0, that is, the position y where cos(2π(y/λ)) is 0, is called a "node". The position y where the amplitude of the standing wave 70 is the largest, that is, the position y where the absolute value of cos(2π(y/λ)) is 1 is called the "belly".

In order to make the plate 20 vibrate up and down, it is only necessary that no standing wave node is generated at any position y in the left and right direction between the support points 26. Since the node of the standing wave is generated at every half wavelength, if the distance between the fulcrums 26 is set to be less than half the wavelength of the standing wave, it can be made to be absent at any position y in the left and right direction of the plate 20 Standing Wave Festival. If the position of the "knot" of the standing wave 70 is used as the fixed position, and the fixed position is maintained (screw-fixed), the "knot" becomes the fulcrum of flapping wings.

If the distance between the fulcrums 26 is greater than half the wavelength of the standing wave, a node will be formed on the plate 20. Therefore, the distance between the fixed position of the plate 20 in the left-right direction must be less than the following length.

Half the wavelength when the air pressure is 0.5MPa: wavelength λ[m]/2=14.56m

Half the wavelength when the air pressure is 0.4MPa: wavelength λ[m]/2=15.29m

Half the wavelength when the air pressure is 0.3MPa: wavelength λ[m]/2=17.82m

Half the wavelength when the air pressure is 0.2MPa: wavelength λ[m]/2=23.766m

As described above, the frequency and wavelength of the standing wave are determined by the air pressure of the vibrator 41 and the vibrator 42 and the maximum length of the plate 20 is determined.

<<<Vibration measurement results>>>

A square aluminum plate with a side of about 0.5 m was used as the flat plate 20, and the vibration of the flat plate 20 was measured. As shown in FIG. 4, the base 10 is removed from the vibrating device 100 of FIG. 1, and the flat plate 20 is placed on an air cushion, the periphery of the flat plate 20 is freed to vibrate the flat plate 20, and the amplitude of the vibration is measured.

5 to 8 are graphs showing the measurement results of the vibration in the upper and lower directions at 49 points in the lower half of the flat plate 20. FIGS. 5 to 8 show the displacement in the Z direction (displacement in the upward direction) when the plate 20 is a plane and the displacement in the Z direction is set to 0 in the case of FIG. 3(b). Since the vibration of the upper half area of the flat plate 20 shown in FIGS. 5 to 8 can be considered to be symmetrical with the lower half area of the flat plate 20, it is not measured. FIG. 5 is a distribution diagram of the up and down vibration of the flat plate 20 caused by the air pressure of 0.2 MPa. FIG. 6 is a distribution diagram of the up and down vibration of the flat plate 20 caused by the air pressure of 0.3 MPa. FIG. 7 is a distribution diagram of the up and down vibration of the flat plate 20 caused by the air pressure of 0.4 MPa. FIG. 8 is a distribution diagram of the up and down vibration of the flat plate 20 caused by the air pressure of 0.5 MPa.

Observe the first row of Figure 5, the amplitude of the vertical vibration becomes 14.8μm>12.6μm>9.60μm>7.68μm<8.00μm<10.5μm<15.0μm, which is larger than the central part of the plate 20. . In other words, the central part of the flat plate 20 generates vibration unevenness like knots. It is believed that the reason is that the pressure under the air pressure of 0.2 MPa is relatively weak and the vibrator 41 and the vibrator 42 cannot be vibrated stably. Observe the first row of Figure 6, the amplitude of vertical vibration becomes 5.28μm<9.53μm<12.2μm<13.2μm>13.1μm>11.0μm>8.40 μm, compared with the end, the vibration amplitude of the central part of the plate 20 is larger. That is, it can be considered that an abdomen is formed in the central part of the plate 20. The same is true in the situation of FIGS. 7 and 8, the vibration amplitude of the central part of the plate 20 is larger than that of the end part. That is, it can be considered that an abdomen is formed in the central part of the plate 20. Therefore, under the air pressure of 0.2 MPa, the flat plate 20 cannot be reliably vibrated in the vertical direction. On the other hand, under the air pressure of 0.3 MPa or more and 0.5 MPa or less, the flat plate 20 can be reliably vibrated in the vertical direction.

Using FIG. 9, the measurement results of the vibration in the front, back, left, and right directions will be described. Fig. 9 is a table showing the measurement results of the horizontal vibration of the measurement points 1 to 12 on the two sides of the flat plate 20 in Figs. 5 to 8. Under the air pressure of 0.2MPa, the value exceeding 2 microns is displayed in measuring point 1 and measuring point 2. Under the air pressure above 0.3 MPa and below 0.5 MPa, a value less than 2 microns is displayed in all points. Under the air pressure above 0.3 MPa and below 0.5 MPa, the amplitude of the vibration in the front, rear, left and right directions is less than about 10% or less than 15% of the amplitude of the vibration in the up and down direction, and it can be regarded as there is no vibration in the horizontal direction.

The above measurement result is the measurement result in the case where the periphery of the plate 20 is freed and the plate 20 is vibrated. As shown in FIG. 1, since the periphery of the plate 20 of the vibrating device 100 is fixed to the base 10 by the screws 25, in fact, the periphery of the plate 20 (especially the part of the screw hole 24) is restricted from vertical vibration. When freeing the periphery of the plate 20 and vibrating the plate 20, the plate 20 vibrates up and down with the center as the belly. Therefore, even when the periphery of the flat plate 20 is fixed to a fixed position and the flat plate 20 is vibrated, the flat plate 20 also wants to vibrate up and down with the center as the belly. As a result, as shown in FIG. 3, it can be considered that the wing flapping phenomenon occurs with the fulcrum 26 being the center of the wing flapping. Then, it can be considered that when the periphery of the plate 20 is fixed to the base 10 and the plate 20 is vibrated, compared to the case where the periphery of the plate 20 is freed to vibrate the plate 20, the vibration in the lateral direction is further reduced. Furthermore, observing the above measurement results, it can be considered that if the distance between the fixed position of the plate 20 in the left and right direction is less than half a wavelength, Even if the position of the "node" of the standing wave 70 is not set as a fixed position, the fixed position will become the fulcrum of flapping wings. For example, when the air pressure is 0.4 MPa, the half-wavelength is 15 m, but even when the distance between the fixed position of the flat plate 20 in the left-right direction is about 0.5 m, "knots" will not appear. As a result, it can be considered that even when the distance to the fixed part is 10m, 5m, or 1m, the fixed part will become a fulcrum for flapping wings.

<<<Explanation of Comparative Example>>>

<One-sided vibration>

Fig. 10 shows the configuration of Fig. 4 with the vibrator 42 and the distributor 47 removed. The plate 20 is vibrated only by the vibrator 41 located on one side. The traveling wave 60 generated from the vibrator 41 located on one side 23 of the plate 20 is reflected on the other side 23 to generate a reflected wave. The traveling wave 60 overlaps with the reflected wave and becomes a standing wave. In the structure of FIG. 10, as shown in FIG. 11, it was confirmed that a knot-like vibration unevenness occurred on the right side of the center of the plate 20. In addition, as shown in Fig. 11, the horizontal vibration at the above 12 points has a portion where the amplitude of vibration exceeds 9 microns. It is considered that the reason is that the flat plate 20 generates elliptical vibration. Therefore, when the flat plate 20 is vibrated from one side, the flat plate 20 cannot be vibrated reliably.

<Vibration on both sides horizontally>

FIG. 12 shows a structure in which the fixing direction of the vibrator 41 and the vibrator 42 is rotated by 90 degrees from the configuration of FIG. 4, and the rotation direction of the vibrator 41 and the vibrator 42 is opposite to each other. In the structure of FIG. 12, as shown in FIG. 13, it was confirmed that the central part of the flat plate 20 produced the vibration unevenness like a knot. Therefore, when the rotation directions of the vibrator 41 and the vibrator 42 are kept opposite to each other and set to the lateral direction, the flat plate 20 cannot be reliably vibrated. Similarly, it can be considered that when the rotation direction of the vibrator 41 and the vibrator 42 are the same and set in the horizontal direction, The flat plate 20 cannot be reliably vibrated.

<Horizontal one-sided vibration>

Although not shown, it is confirmed that the removal of the vibrator 42 and the distributor 47 from the structure of FIG. 12 also produces a knuckle-like vibration unevenness in the center part of the plate 20. Therefore, in the case of lateral vibration on one side, the flat plate 20 cannot be reliably vibrated.

<<<Summary>>>

The vibration device 100 of the present embodiment uses the audible frequency vibration source, namely, the vibrator 41 and the vibrator 42 to generate the traveling wave 60 with the same amplitude, the same wavelength, and the same frequency from the left and right sides of the plate 20 simultaneously. As a result, in the plate 20, a standing wave is generated by the superposition of the backward traveling waves.

The vibration generation process in the upper and lower directions of the vibrating device 100 of this embodiment is from the audible frequency vibration source to the plate 20, and the plate 20 generates a traveling wave 60 at the same frequency from the left and right at the same time. The plate 20 vibrates by a standing wave, but due to the vibration of the standing wave, it only vibrates in the up and down direction. Also, it does not vibrate in the front, back, left, and right directions. The vibration device 100 uses this vibration only in the up and down direction.

The vibration device 100 can change the frequency of the audible area by the controller 80 when vibrating. The audible area frequency refers to the range above 10 Hz and below 20000 Hz, but the audible area frequency used in this embodiment is set to the range above 10 Hz and below 800 Hz. The vibration unit 40 may have a voice coil motor type vibration source, an electromagnetic type vibration source, or a piezoelectric type vibration source as the vibration source. The vibration unit 40 can appropriately replace the vibration sources such as the vibrator 41 and the vibrator 42 with other sonic vibration sources, namely, a voice coil motor type vibration source, an electromagnetic type vibration source, or a piezoelectric vibration source according to the required frequency range. The controller 80 can also have arbitrary waves Shape generator, or bipolar power supply as the control part. Since the controller 80 vibrates the vibration source at an arbitrary frequency, it can be replaced with an arbitrary waveform generator, or a bipolar power source, etc., as a control component corresponding to the sonic vibration source.

The vibration unit 40 makes a pair of vibrators installed on the center outside of two opposite sides of the plate 20 to vibrate the plate 20 up and down. The vibrating unit 40 simultaneously generates traveling waves of the same amplitude, the same wavelength, and the same frequency by installing a pair of vibrators on the center outer sides of the two opposite sides of the plate 20, and uses the standing waves to vibrate the plate 20. In the vibration device 100 of this embodiment, the vibrator 41 and the vibrator 42 are fixed to the outer side of the plate 20. That is, in a plan view, the vibrator 41 and the vibrator 42 do not overlap the flat plate 20. Therefore, the vibrator 41 and the vibrator 42 do not prevent the flat plate 20 from vibrating up and down.

In the vibration device 100 of this embodiment, the vibrator 41 and the vibrator 42 are fixed to the side surface 23 of the plate 20. The vibrator 41 and the vibrator 42 are not fixed to the front surface 21 and the back surface 22 of the plate 20. Therefore, the traveling wave 60 is generated from both ends of the plate 20 in the left and right direction, and the entire area of the plate 20 in the left and right direction vibrates up and down.

The vibrating device 100 of this embodiment is not intended to vibrate the entire plate 20 up and down uniformly. The central part of the plate 20 has the largest amplitude, and the amplitude decreases from the central part of the plate 20 to the periphery in the left-right direction. The reason why the amplitude decreases toward the periphery in the left-right direction is that the right and left ends of the plate 20 are fixed and the standing wave is generated on the plate 20. In addition, the central part of the plate 20 has the largest amplitude, and the amplitude decreases from the central part of the plate 20 to the periphery in the forward and backward directions. The reason why the amplitude decreases in the front and rear directions is that the front and back ends of the plate 20 are fixed. It is also possible to make the front and back ends of the plate 20 become free ends that can freely vibrate up and down. If the front and back ends of the flat plate 20 are free ends, the amplitude of the flat plate 20 in the front and back directions becomes uniform. Or, the amplitude of the front and back directions of the plate 20 is nearly uniform.

The vibration device 100 of this embodiment combines a vibrator 41, a vibrator 42 and The two fixing parts (screw holes 24) are arranged on a straight line. The vibrator 41 and the vibrator 42 are located outside of the two fixing parts (screw holes 24). The vibrator 41 and the vibrator 42 are not located inside the two fixing parts (screw holes 24). The flat plate 20 vibrates up and down by the phenomenon of wing flapping centered between the two fixed positions (fulcrum 26).

<<<Effects of Embodiment 1>>>

According to this embodiment, the vibrator 41 and the vibrator 42 simultaneously generate a traveling wave 60 at the same frequency from the left and right of the plate 20, thereby generating a standing wave, and the plate 20 only vibrates in the up and down direction. Even when it vibrates in the forward, backward, left and right directions, it can be ignored compared with the up and down vibration. By placing the workpiece on the flat plate 20 of the vibration device 100, the workpiece can be vibrated only in the up and down direction.

<<<Change example>>>

Modification example 1.

The vibrating device 100 shown in FIG. 14 removes the distributor 47 from the structure of FIG. 1, and directly fixes the vibrator 41 and the vibrator 42 of the vibrating unit 40 to the side surface 23 of the plate 20.

Modification example 2.

The vibration device 100 shown in FIG. 15 has the size of the flat plate 20 larger than the base 10 in a plan view, and the vibrator 41 and the vibrator 42 of the vibration unit 40 are directly fixed to the outer edge of the back 22 of the flat plate 20.

Modification example 3.

The vibration device 100 shown in FIG. 16 is sandwiched between the base 10 and the plate 20 with a distributor 47 and fix the vibrator 41 and the vibrator 42. The dispenser 47 may also be a flat plate.

Modification example 4.

In Fig. 2, the vibrator 41 can also be rotated clockwise and the vibrator 42 can be installed counterclockwise. In FIG. 2, instead of rotating the vibrator 41 and the vibrator 42 in the same direction, it is more desirable to make the rotation direction of the vibrator 41 and the vibrator 42 opposite. Even when the rotation directions of the vibrator 41 and the vibrator 42 are reversed, it is preferable to rotate the vibrator 41 counterclockwise and the vibrator 42 clockwise as shown in FIG. 2.

Modification example 5.

The vibration unit 40 may also have more than two even and plural audible frequency vibration sources. The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 may also be mounted on the flat plate 20 as shown in FIG. In (a), the vibrator 41 and the vibrator 42 are opposed to each other, and the vibrator 43 and the vibrator 44 are opposed to each other. The vibrator 41 and the vibrator 43 are fixed to the same side surface 23, and the vibrator 42 and the vibrator 44 are fixed to the other side surface 23. Standing waves are generated in parallel. In (b), the vibrator 41 and the vibrator 42 are opposed to each other, and the vibrator 43 and the vibrator 44 are opposed to each other. The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are fixed to the respective side surfaces 23, respectively. Standing waves are generated orthogonally. In (c), the vibrator 41 is opposed to the vibrator 44, and the vibrator 42 is opposed to the vibrator 43. The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are respectively fixed to the corners of the plate 20. Standing waves are generated orthogonally. Although not shown, the shape of the flat plate 20 may also be a circle, an ellipse, and other shapes in a plan view.

Modification example 6.

The shape of the flat plate 20 only needs to be polygonal in plan view. Vibration unit 40 can also be It has an odd number of audible frequency vibration sources. As shown in FIG. 18, the flat plate 20 may also be a triangular or hexagonal flat plate 20. (a) shows the triangular flat plate 20. The vibrator 41, the vibrator 42, and the vibrator 43 are respectively fixed to each side surface 23. (b) shows the hexagonal flat plate 20. The vibrator 41, the vibrator 42, and the vibrator 43 are each fixed to each side surface 23 one by one. Although not shown, it is also possible to fix the vibrator on all sides 23 of the hexagonal plate 20. Although not shown, the shape of the flat plate 20 may also be a circle, an ellipse, and other shapes in a plan view. The vibration unit 40 only needs to have one or more pneumatic vibrators fixed on one side or the outer side of the plurality of sides of the plate 20. Specifically, the vibration unit 40 may also be equipped with a pneumatic vibrator in the following manner.

Only one pneumatic vibrator is placed outside of one side of the plate 20

Only install multiple pneumatic vibrators on the outside of 1 side of the plate 20

A pneumatic vibrator is arranged outside each side of a part of the plurality of sides of the plate 20 (Figure 18(b))

A plurality of pneumatic vibrators are arranged outside each side of a part of the plurality of sides of the plate 20 (Figure 17(a))

A pneumatic vibrator is arranged outside of all sides of the plate 20 (Figure 17(b) and Figure 18(a))

A plurality of pneumatic vibrators are arranged outside of all sides of the plate 20

The controller 80 makes all the pneumatic vibrators vibrate at the same frequency. Other forms of vibrators can also be used instead of pneumatic vibrators.

Modification example 7.

The vibration unit 40 may also have one audible frequency vibration source. The vibration device 100 of FIG. 19 has a vibrator 45 and a frame 46. The frame 46 is a U-shaped metal part. The frame 46 fixes the vibrator 45 at the center of the bottom, and the upper parts of the two front ends are fixed to the distributor 47. The vibrator 45 vibrates up and down. The vibration of the vibrator 45 is transmitted to the two distributors 47, and the two distributors 47 are vibrated up and down. In this way, there is no need to install multiple vibrators on both sides of the plate 20, as long as the vibration unit 40 has a mechanism that simultaneously generates the traveling waves 60 of the same amplitude, the same wavelength, and the same frequency from the multiple sides of the plate 20. .

Modification example 8.

The vibration device 100 of FIG. 20 has a spacer 50 between the plate 20 and the distributor 47. The spacer 50 is a metal rod of a four-corner column fixed by being clamped between the side surface 23 of the plate 20 and the vertical portion 49 of the distributor 47. The spacer 50 is a part that keeps the generating position of the traveling wave 60 away from the fulcrum 26 of the flapping phenomenon. By changing the length of the spacer 50 in the left-right direction, the distance between the audible frequency vibration source and the fixed part can be changed. Even if the traveling wave 60 has the same amplitude, the same wavelength, and the same frequency, the greater the length of the spacer 50 in the left-right direction, the more intense the wing phenomenon appears. Through the spacer 50, the amplitude of the upper and lower vibration of the plate 20 can be adjusted.

Modification example 9.

To fix the base 10 and the plate 20, other fixing metal parts or other fixing mechanisms may be used instead of the screw holes 24 and the screws 25.

Implementation form 2.

In the second embodiment, differences from the first embodiment will be described.

<<<Composition Description>>>

Fig. 21 is a configuration diagram of a screen printing apparatus 200 according to the second embodiment. Screen printing device 200 has the vibration device 100 described in the first embodiment. The screen printing device 200 is a device for printing on the workpiece 900. The workpiece 900 is a substrate of an electronic device or a substrate of a circuit.

The screen printing device 200 has a screen 201 formed by stretching a screen 202 on a frame. The wire mesh 202 is a perforated screen, a metal mesh or other wire meshes. The screen 202 has printed patterns such as electrode terminals, electrodes, and wiring. The slurry 204 exists on the surface of the screen 202.

The screen printing apparatus 200 has a squeegee 203.

The squeegee 203 moves on the surface of the screen 202 to print electrode terminals, electrodes, wiring, etc. on the workpiece 900 with the paste 204.

The plate 20 of the vibration device 100 is a platform on which the workpiece 900 is placed. The flat plate 20 functions as a suction plate for sucking the workpiece 900. The flat plate 20 has a plurality of through holes 205 penetrating the top and bottom. The base 10 functions as a suction box that sucks air.

The screen printing apparatus 200 has a suction pipe 206 and a vacuum pump 207.

The suction pipe 206 is connected to the substrate 10 and the vacuum pump 207 and sucks air from the space 14. As shown in FIG. 21, it is preferable that the vibrator 41 and the vibrator 42 are arranged in the same direction as the printing direction of the squeegee 203. That is, it is more desirable that the printing direction of the squeegee 203 coincides with the direction in which the standing wave is generated.

<<<Description of Action>>>

The processor 84 of the screen printing device 200 operates the vibration device 100 to vibrate the plate 20 during printing. The vibration of the flat plate 20 is transmitted to the workpiece 900 and the screen 201 to cause the slurry 204 to vibrate. By vibrating the paste 204, the paste 204 easily passes through the printing pattern of the screen 202. In the case of filling the hole or groove of the workpiece 900 with slurry, the slurry 204 is easily filled into the hole or groove of the workpiece 900 due to the vibration of the workpiece 900. In the case of hole-filling printing, the processor 84 also operates the vibrating device 100 after printing to vibrate the plate 20 move. The plate 20 is also vibrated after printing, so that the paste 204 can be filled to the bottom of the hole or groove.

<<<Effects of Embodiment 2>>>

According to this embodiment, the vibration device 100 can be used for the screen printing device 200. According to this embodiment, when the holes are filled by screen printing, the unevenness of the filling amount of the paste entering the holes can be reduced. Especially when the hard paste is used for hole filling printing, the filling amount is increased. According to this embodiment, since the flat plate 20 only vibrates in the vertical direction and does not vibrate in the front, rear, left, and right directions, the workpiece 900 and the screen 201 are not shifted in the front, back, left, and right directions. Therefore, the printed pattern of the workpiece 900 will not be blurred.

Implementation mode 3.

In the third embodiment, differences from the first embodiment will be described. Fig. 22 is a perspective view of a cutting device 300 according to the third embodiment. The shearing device 300 includes the vibrating device 100 described in the first embodiment. The cutting device 300 is a device for cutting the workpiece 900. The cutting device 300 has a blade 301 for cutting the workpiece 900. The plate 20 of the vibration device 100 is a platform on which the workpiece 900 is placed.

The processor 84 of the shearing device 300 operates the vibrating device 100 during operation to vibrate the plate 20 in the vertical direction. The vibration of the flat plate 20 is transmitted to the workpiece 900 and the workpiece 900 is vibrated. As the workpiece 900 vibrates in the up and down direction, the pressure from the blade 301 to the workpiece 900 becomes intermittent.

<<<Effects of Embodiment 3>>>

According to this embodiment, the vibration device 100 can be used for the shearing device 300. According to the reality In the construction form, since the pressure from the blade 301 to the workpiece 900 becomes intermittent, the durability time of the blade 301 is extended.

Implementation mode 4.

In the fourth embodiment, differences from the first embodiment will be described. Fig. 23 is a perspective view of a hole-opening device 400 of the fourth embodiment. The hole-opening device 400 includes the vibration device 100 described in the first embodiment. The hole-opening device 400 is a device for forming holes on the workpiece 900. The hole-opening device 400 has a drill 401 for forming a hole in the workpiece 900. The plate 20 of the vibration device 100 is a platform on which the workpiece 900 is placed.

The processor 84 of the hole-opening device 400 operates the vibrating device 100 during operation to vibrate the plate 20 in the vertical direction. The vibration of the flat plate 20 is transmitted to the workpiece 900 and the workpiece 900 is vibrated. As the workpiece 900 vibrates in the vertical direction, the pressure from the drill 401 to the workpiece 900 becomes intermittent.

<<<Effects of Embodiment 4>>>

According to this embodiment, the vibration device 100 can be used for the hole-opening device 400. According to this embodiment, since the pressure from the drill 401 to the workpiece 900 becomes intermittent, the durability time of the drill 401 is extended.

Implementation mode 5.

In the fifth embodiment, differences from the first embodiment will be described.

<<<Constitution of Vibration Compression Device 500>>>

Fig. 24 is a perspective view of a vibrating pressure feeding device 500 according to the fifth embodiment. Vibration pressure feeding device 500 is a device that inserts multiple parts into multiple recesses by vibration. The plate 20 is a square plate. There are a plurality of recesses 29 arranged on the flat plate .20. A plurality of parts 901 are randomly put into the tablet 20. Although not shown, there is a frame around the outside of the plate 20 that prevents the parts 901 from being scattered from the plate 20.

The vibration pressing device 500 has a flat base 10, a flat plate 20 and a vibration unit 40. The flat plate 20 is fixed to the base 10 via four vibrators. The side surface 23 of the plate 20 is not fixed but becomes a free end. The vibration unit 40 has a plurality of vibrators fixed on the outer side of the four corners of the plate 20. The vibration unit 40 in FIG. 24 has four vibrators and four distributors 47. The four vibrators are inclined at 45 degrees with respect to the front-rear direction and the left-right direction and are fixed to the base 10 of the plate. The four vibrators are respectively fixed to the plate 20 4 corners 27 outside. The vibrator is arranged on the extension line of the diagonal of the plate 20. The vibrator 41 and the vibrator 44 are fixed to two corners located at the end of a diagonal line of the plate 20 opposite to each other. The vibrator 43 and the vibrator 42 are fixed to two corners located at the end of the other diagonal of the plate 20 opposite to each other.

The distributor 47 is a rectangular plate. The distributor 47 fixes the corner 27 of the plate 20 on the upper surface. The distributor 47 fixes the upper surface of the vibrator to the lower surface.

The four corners 27 of the plate 20 are fixed to the distributor 47 by screws inserted into the screw holes 24. The four corners 27 of the flat plate 20 become the four fixed positions of the flat plate 20. In a plan view, the vibrator is fixed on the outer side of the corner 27 of the plate 20. That is, in a plan view, the four vibrators do not overlap the flat plate 20.

The four vibrators used in the vibration compression device 500 are preferably electromagnetic vibration sources such as electromagnetic vibrators. The electromagnetic vibration source can control the frequency more finely than the pneumatic vibrator.

<<<Operation of Vibration Compression Device 500>>>

The controller 80 makes the two vibrators fixed on the two corners located at the ends of the diagonal of the plate 20 vibrate at the same frequency. The four vibrators are connected to the processor 84, and the processor 84 controls the vibration of the four vibrators. The traveling waves from the 4 vibrators travel from the 4 corners of the plate 20 to the middle of the plate 20. The vibrator 41 and the vibrator 44 simultaneously generate traveling waves with the same amplitude, the same wavelength, and the same frequency in one diagonal direction, so that the traveling waves overlap. The vibrator 43 and the vibrator 42 cause the traveling waves to be generated in another diagonal direction with the same amplitude, the same wavelength, and the same frequency at the same time. The four orthogonal traveling waves overlap, so that the standing waves overlap and go up and down on the plate. vibration.

The processor 84 can change the vibration generated on the plate 20 by changing the phase, amplitude, wavelength and frequency of the four traveling waves. In particular, the processor 84 uses the traveling waves of the same amplitude, the same wavelength, and the same frequency to generate a standing wave formed by superimposing 4 traveling waves that only change the phase on the flat plate, and the standing wave vibrates up and down to make the parts 901 rotates on the plate 20, or moves left, right, forward, and backward or jumps. The processor 84 can only shift the phase by 90 degrees, 180 degrees, 270 degrees, or any angle to generate 4 traveling waves.

Hereinafter, the up and down vibration of the vibrating pressure feeding device 500 will be described using FIG. 25. FIG. 25 shows the up and down vibration state of the plate 20 when traveling waves with the same phase, amplitude, wavelength, and frequency overlap and standing waves overlap. (A) of FIG. 25 is a schematic diagram of the vertical vibration of the center of the left and right direction of the plate 20 in the front and rear directions. Fig. 25(b) is a schematic diagram of the vertical vibration of a diagonal line connecting the corner 27 of the plate 20. Since the side surface 23 is a free end, as shown in FIG. 25(a), while the side surface 23 is moved up and down, the flat plate 20 is vibrated. On the other hand, since the corner 27 is fixed and the corner 27 serves as the fulcrum 26, the flat plate 20 is vibrated while keeping the corner 27 without moving up and down as shown in FIG. 25(b).

The processor 84 vibrates the plate 20 up and down. The vibration of the plate 20 is transmitted to the part 901 and the part 901 vibrates. The part 901 is on the table of the plate 20 by vibrating up and down The surface moves and fits into the recess 29.

Modification example 1.

The vibrating pressure feeding device 500 in FIG. 26 is a device that cuts the corner 27 of the flat plate 20 and fixes the vibrator on the cutting surface. The vibrating pressure feeding device 500 of FIG. 26 does not require a distributor 47. In a plan view, the vibrator is fixed on the outer side of the corner 27 of the plate 20. That is, in a plan view, the four vibrators do not overlap the flat plate 20.

Modification example 2.

The vibration device 100 of the above-mentioned embodiment can also be used for the vibration pressure feeding device 500. It is more desirable to use a vibrating device capable of generating standing waves by making four traveling waves orthogonal or crossing several traveling waves in the vibrating press-feeding device 500. In addition, when the vibrating device crosses the traveling waves, it is preferable to make the cross angles of the traveling waves equal to overlap the traveling waves to generate a stable standing wave.

Modification example 3.

The vibrating and compressing device 500 of FIG. 27 is provided with pillars 51 on the corner 27 of the plate 20, and the plate 20 is fixed to the base 10 by four pillars 51. The pillar 51 fixes the plate 20 by screws inserted into the screw holes 24. The vibrator is only fixed on the cut surface of the corner 27 of the plate 20, and the vibrator is mounted on the plate 20 in a suspended state. In the case of FIG. 27, the fixed part located in the screw hole 24 is used as a fulcrum, and the plate 20 is vibrated by the above-mentioned wing phenomenon. In the case of Fig. 27, the plate 20 is fixed by four pillars 51, but since the pillars 51 are thinner pillars, the plate 20 can not only go up and down but also vibrate back and forth, left and right.

Modification example 4.

The shape of the flat plate 20 only needs to be polygonal in plan view. As shown in FIG. 28, the flat plate 20 may also be a triangular or hexagonal flat plate 20. (a) shows the triangular flat plate 20. The vibrator 41, the vibrator 42, and the vibrator 43 are fixed to each corner 27, respectively. (b) shows the hexagonal flat plate 20. The vibrator is fixed to each corner 27 respectively. Although not shown, the shape of the flat plate 20 may also be a circle, an ellipse, and other shapes in a plan view.

Modification example 5.

As shown in Figure 29, the vibrator may not be located in all corners. (a) shows a situation where a vibrator is arranged on one diagonal of the quadrilateral flat plate 20. The vibrator 41 and the vibrator 42 are fixed to the corner 27 one by one. (b) shows a situation where vibrators are arranged on two diagonals of the hexagonal plate 20. Although not shown, the shape of the flat plate 20 may also be a circle, an ellipse, and other shapes in a plan view.

Modification example 6.

As shown in Figure 30, the vibrator may have a plurality of corners. (a) shows a situation where two vibrators are arranged in each of the four corners of the quadrilateral plate 20. (b) shows a situation where two vibrators are arranged on each of the four corners of the quadrilateral flat plate 20, and further, the vibrators are arranged outside the center of the opposite side surface. Although not shown, the shape of the flat plate 20 may also be octagonal, decagonal, and other polygons when viewed from above.

The vibration unit 40 only needs to have one or a plurality of pneumatic vibrators fixed on the outside of one corner or a plurality of corners of the plate 20. Specifically, the vibration unit 40 may also be equipped with a pneumatic vibrator in the following manner.

A pneumatic vibrator is placed on the outside of only one corner of the plate 20

Place 1 gas on the outside of each corner of one of the plural corners of the plate 20 Dynamic vibrator (Figure 29 (a) and (b))

Place a pneumatic vibrator on the outside of each corner of the multiple corners of the plate 20 (Figure 28 (a) and (b))

Arrange 2 pneumatic vibrators on the outside of each corner of the plurality of corners of the plate 20 (Figure 30 (a) and (b))

The controller 80 makes all the pneumatic vibrators vibrate at the same frequency. Other types of vibrators can also be used instead of pneumatic vibrators.

Embodiment 6.

In the sixth embodiment, differences from the first embodiment will be described.

<<<Composition of Distributor 47>>>

FIG. 31 is a diagram showing the distributor 47. The dispenser 47 of FIG. 31 sandwiches the surface 21 and the back surface 22 of the plate 20 and is fixed to the plate 20. (a) shows a situation where a vibrator is arranged outside the center of one side of the quadrilateral flat plate 20. The distributor 47 has a U-shaped groove 52 viewed from the front and rear direction on the side surface, and the central outer edge of the plate 20 is inserted into the groove 52. The flat plate 20 has three screw holes 24 on the two sides where the vibrator is fixed. The plate 20 fixes the distributor 47 with screws in the central screw hole. The plate 20 does not have a screw hole 24 on the side where the vibrator is not fixed. As shown in (a), there is no need to install the fixed parts on all sides, and it can also be set on only two opposite sides.

(b) shows the situation where vibrators are arranged on the four corners of the quadrilateral plate 20. The distributor 47 has a V-shaped groove 53 viewed from the top and bottom on the side surface, and the corner of the plate 20 is inserted into the groove 53. The straight bottom of the V-shaped groove 53 is in surface contact with the two orthogonal ends of the two side surfaces. V-shaped groove 53 on the triangular side and corner 27 on the table Face and back face contact. The plate 20 has screw holes 24 on the outer edge of the corner. The flat plate 20 fixes the distributor 47 by screws of screw holes.

<<<Effect of Distributor 47>>>

Since the distributor 47 is fixed to the flat plate 20 with the flat plate 20 sandwiched therebetween, even when the flat plate 20 is thin and the height of the side surface is small, the vibration of the vibrator can be transmitted from the side surface of the flat plate 20.

Modification 1.

The shape of the distributor 47 may be any shape capable of transmitting the vibration of the vibrator to the side surface of the flat plate 20. The dispenser 47 can only be fixed to the side or corner of the plate 20, but the dispenser 47 can also be fixed to the following locations.

Side and surface of plate 20

Side and back of tablet 20

The side, surface and back of the tablet 20

Only the side surface of the tablet 20

Only the back of the side of the tablet 20

The surface and back of the side of the tablet 20

Corner and surface of plate 20

Corner and back of Tablet 20

Corner, surface and back of the tablet 20

Only the surface of the corner of the plate 20

Only the back of the corner of the tablet 20

The surface and back of the corners of the tablet 20

In any of the above cases, the same effect as the case where the distributor 47 is fixed only to the side or corner of the plate 20 can be obtained. In any of the above cases, it can also be said that the side surface of the plate is vibrated.

Implementation mode 7.

In the seventh embodiment, differences from the first embodiment will be described.

<<<Composition of plate 20 and vibration unit 40>>>

FIG. 32 is a diagram showing the plate 20 and the vibration unit 40. FIG. 32 shows a vibration unit 40 that vibrates a plurality of locations on the outer periphery of the flat plate 20 from the outer side of the flat plate 20. The outer circumference of the flat plate 20 refers to the outline of the flat plate 20 when viewed from above. The outer side of the plate 20 refers to the outer side of the contour of the plate 20. The vibration unit 40 simultaneously generates a traveling wave of the same wavelength from the center of the peripheral plate outside the plate 20. (a) shows a situation where the vibrator 41 is arranged on the corner 27 of the triangular plate 20, and the vibrator 42 is arranged on the center outside of the side surface 23 facing the corner 27. (b) shows a situation where the vibrator 41 is arranged on the corner 27 of the pentagonal flat plate 20, and the vibrator 42 is arranged on the outside of the center of the side surface 23 facing the corner 27.

The vibration unit 40 vibrates a plurality of parts of the flat plate 20. The plural parts may be plural parts including only the plural side faces 23 of the flat plate 20 as described in the first embodiment. The plural parts may be plural parts including only the plural corners 27 of the flat plate 20 as explained in the fifth embodiment. The plural parts may be plural parts including the side surface 23 and the corner 27 of the flat plate 20 as illustrated in (a) and (b) of FIG. 32. In the case of including a plurality of parts of the side surface 23 and the corner corner 27, it may be any of the following.

1 side 23 and 1 corner

23 sides and 1 corner

1 side 23 and multiple corners

Plural sides 23 and plural corners

Typical examples of the plurality of sides 23 and the plurality of corners are all the sides 23 and all the corners. Preferably, a plurality of parts are arranged in pairs on a straight line passing through the center or center of gravity of the flat plate 20 such as the diagonal or the diameter of the flat plate 20.

The side surface 23 need not be flat. (c) shows a situation in which the vibrator 41 and the vibrator 42 are arranged in the diameter direction of the circular plate 20, and the vibrator 43 and the vibrator 44 are arranged in the orthogonal diameter direction. The case (c) indicates the case where the side surface 23 is a cylindrical outer peripheral curved surface. The side surface 23 can be other curved surfaces, or a combination of curved surfaces and flat surfaces. In (c), the vibrator 43 and the vibrator 44 may not exist. In (c), the number of vibrators can also be increased.

<<<Plane Shape of Tablet 20>>>

FIG. 33 is a diagram showing the planar shape of the flat plate 20. FIG. The planar shape of the plate 20 is not limited to a regular polygon or a circle. (a) shows the case where the planar shape of the flat plate 20 is a cross. (b) shows the case where the planar shape of the plate 20 is a star. (c) shows the case where the planar shape of the flat plate 20 is a long quadrilateral with rounded corners. (d) shows the case where the planar shape of the flat plate 20 is an ellipse. Although not shown, the planar shape of the flat plate 20 can also be trapezoidal, cloud-shaped, mountain-shaped, irregular or other shapes.

<<<Cross-section shape of plate 20>>>

FIG. 34 is a diagram showing the shape of the A-A section of the plate 20 in FIG. 1. The cross-sectional shape of the flat plate 20 is not limited to a rectangle. (a), (c), and (e) show that the lower center of the plate 20 is recessed to the upper side. (a) shows the situation of concave depression. (b) shows the situation of a V-shaped depression. (c) shows the situation of arc-shaped depression. (b), (d) and (f) indicate that the upper central part of the plate 20 swells to the lower side The situation. (b) indicates the situation of convex bulging. (d) indicates a situation where it swells in a V shape. (f) indicates the situation of bulging in an arc shape.

(g) shows a situation where the central part of the flat plate 20 is concave in the upper and lower sides. (h) shows the convex shape of the central part of the plate 20 bulging upward and downward. Although not shown, the cross-sectional shape of the flat plate 20 may be uneven, corrugated, or other shapes. (i) shows the situation where the side surface 23 is inclined. When the side surface 23 is inclined, only the inclined surface of the distributor 47 is provided to install the vibrator 41 and the vibrator 42. The cross section of the distributor 47 is triangular. The inclined surface of the distributor 47 and the side surface 23 have the same inclination angle. The vibrator 41 and the vibrator 42 can vibrate the outer periphery of the plate 20 up and down via the distributor 47.

Embodiment 8.

The vibration device 100 can be used for devices that are not suitable for horizontal vibration. The vibration device 100 can be used as a processing device for a workpiece. The vibration device 100 can be used in a processing device, a conveying device, a screening device, an assembling device, a manufacturing device, a vibration pressure conveying device, or other material handling devices. Materials refer to substances, materials, raw materials, materials, materials, utensils, appliances, or tools, etc. The shape, material, nature and quantity of materials are not limited. The material can be a block, a board, or a granule or powder. The material can be solid, liquid, or elastomer.

Embodiment 9.

In the ninth embodiment, differences from the above-mentioned embodiment will be described.

<<<Explanation of the composition of the printing department 600>>>

Fig. 35 is a three-sided view of the printing section 600 of the screen printing apparatus 200 of the ninth embodiment. The printing unit 600 moves in the printing direction P by the drive mechanism (not shown) of the screen printing device 200 mobile. The printing unit 600 has a fixing mechanism 620, and the printing tool 260 of the vibration device 100 is fixed by the fixing mechanism 620. The printing unit 600 has a lifting mechanism 610. The lifting mechanism 610 lifts and lowers the printing tool 260 of the vibration device 100, and generates a downward printing pressure during printing. As shown in FIG. 35, the printing tool 260 is obliquely fixed to the printing unit 600, and moves in the printing direction P while keeping the oblique during printing.

<<<Description of the composition of the vibration device 100>>>

Fig. 36 is a perspective view of a vibrating device 100 according to the ninth embodiment. Fig. 37 is a front view of a printing tool 260 according to the ninth embodiment. Fig. 38 is a side view of the printing tool 260 of the ninth embodiment. Fig. 39 is a plan view of a printing tool 260 according to the ninth embodiment. In Fig. 36, X represents the front-rear direction. The printing direction P coincides with the front-rear direction X. In FIGS. 36 and 37, Y represents the left-right direction, and Z represents the vertical direction. As shown in FIG. 35, the printing tool 260 is used obliquely during printing, but the Z direction shown in FIGS. 36 and 37 is referred to as the up-down direction Z in the following for convenience of description.

The vibration device 100 has a printing tool 260, a vibration unit 40 and a controller 80. The printing tool 260 is used for printing by a screen printing device. The printing tool 260 prints the workpiece by the printing pressure. The vibration unit 40 vibrates a plurality of opposite sides of the outer side of the printing tool 260. The controller 80 controls the vibration of the vibration unit 40.

<<Explanation of Printing Tool 260>>

The printing tool 260 has: a support 210; and a squeegee 203, which is installed on the support 210. As shown in FIG. 39, the printing tool 260 (support 210) has a long side W in a direction orthogonal to the printing direction P and a short side V in the same direction as the printing direction P.

<<Description of support 210>>

The support 210 is made of metal such as aluminum. As shown in FIG. 35, the support 210 has a base 211 and a pressing plate 212. The support 210 is fixed to the lifting mechanism 610 of the printing part 600 by the fixing mechanism 620 of the printing part 600. The squeegee 203 is clamped and fixed by the base 211 and the pressing plate 212 by fastening screws 213. The base 211 has screw holes for fixing the vibrator 41 and the vibrator 42 at the upper part of both ends. The base portion 211 has a fixing portion 214 at the upper central portion. The fixing portion 214 is disposed inside the screw hole for fixing the vibrator 41 and the vibrator 42 of the base 211. The fixing portion 214 is fixed by the fixing mechanism 620.

<<Description of squeegee 203>>

The squeegee 203 has a supporting portion 220 and a squeegee portion 230. The squeegee section 230 is made of urethane rubber or elastomer. The supporting portion 220 is made of glass epoxy resin containing glass fiber. The supporting portion 220 is provided with rough cutting portions on both sides, and the urethane rubber is welded to the rough cutting portions on both sides of the glass epoxy resin to be fixed.

<<<Description of Vibration Unit 40>>>

The vibration unit 40 has a plurality of vibrators, so that the plurality of side surfaces 23 of the support 210 vibrate at the same frequency. The vibration unit 40 vibrates the side surface in the left-right direction of the support 210 located on the opposite side surface 23 of the support 210 up and down. The vibration unit 40 has two vibrators, namely a vibrator 41 and a vibrator 42. The vibrating unit 40 vibrates the outer side of the fixed portion (fulcrum 26) of the support 210 with the screw hole 24 up and down. The vibrator 41 and the vibrator 42 are of the same specifications. The vibrator 41 and the vibrator 42 are vibrators driven by air pressure.

<<Description of Distributor 47>>

The vibration unit 40 has a distributor 47. The distributor 47 transmits the vibration of the vibrator 41 and the vibrator 42 to the side surface 23 of the support 210 or its vicinity. The distributor 47 fixes the vibrator 41 and the vibrator 42 on the side surface 23 of the support 210. The distributor 47 has a screw hole 24 at the end, and is fixed to both ends of the support 210 by screws. The distributor 47 is a rectangular metal plate. The distributor 47 arranges the vibrator 41 and the vibrator 42 on the outer side of the side surface 23 of the support 210. The distributor 47 transmits the vibration of the vibrator 41 and the vibrator 42 to the side surface or the vicinity of the side surface forming the short side V of the support 210. The distributor 47 increases the fins of the vibrator 41 and the vibrator 42. Extend the length of the distributor 47 in the left-right direction Y, and the farther away the vibrator 41 and the vibrator 42 are from the side of the support 210, due to the elastic force of the distributor 47, the more the distributor 47 bends, the larger the flap becomes . As the thickness of the distributor 47 in the upper and lower direction Z becomes thinner, due to the elastic force of the distributor 47, the more the distributor 47 bends, the larger the flaps become.

<<Description of Vibrator 41 and Vibrator 42>>

The vibrator 41 and the vibrator 42 are installed on the outside of the side surface 23 of the support 210 like wings. The vibrator 41 and the vibrator 42 are installed in parallel with respect to the support 210. The vibrator 41 and the vibrator 42 are installed such that the air supply port is inside. The rotation axis J of the vibrator 41 and the vibrator 42 is parallel to the front-rear direction X. The rotation surface K of the vibrator 41 and the vibrator 42 is parallel to the left-right direction Y.

<<<Description of the action of the vibration unit 40>>>

The controller 80 makes the vibrator 41 and the vibrator 42 vibrate at a frequency above 10 Hz and below 800 Hz. The vibration unit 40 vibrates the wings on both sides of the fulcrum 26 to vibrate the printing tool 260. The vibration unit 40 vibrates two places on both sides of the long side W of the printing tool 260. The vibration unit 40 vibrates the opposite side surfaces 23 on the outer side of the printing tool 260 at the same amplitude, the same wavelength, and the same frequency, and vibrates the printing tool 260 using a standing wave. The vibration unit 40 at the end of the printing tool 260 simultaneously generates a traveling wave with the same amplitude, the same wavelength, and the same frequency. The vibration unit 40 vibrates the end of the printing tool 260 from the outer side of the printing tool 260 by a traveling wave, and vibrates the printing tool 260 by a standing wave. The vibration unit 40 vibrates the support 210 in the vertical direction due to the wing flapping phenomenon described in the above embodiment.

<<<Vibration measurement results>>>

The vibration measurement results are shown below.

During the vibration measurement, the controller 80 supplies each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa to the vibrator 41 and the vibrator 42 to vibrate the vibrators with the same amplitude, the same wavelength, and the same frequency.

<<Measurement result 1>>

The vibration of the printing tool 260 shown in FIG. 40 was measured using a support 210 made of aluminum. The printing tool 260 shown in FIG. 40 has the same structure as the printing tool 260 of FIG. 37 except that the adjustment jig 240 is added to the support portion 220 and the squeegee 203 is fixed to the support 210. The adjusting jig 240 is a rectangular metal plate, made of stainless steel, and made of a metal stronger than the support 210. The adjusting jig 240 is sandwiched between the support part 220 and the base part 211. The printing tool 260 shown in FIG. 40 is placed horizontally on the air cushion to free the circumference of the printing tool 260 to vibrate the support 210 to measure the vibration amplitude. The vibrator 41 and the vibrator 42 have the same specifications as in the first embodiment. The rotation direction of the vibrator 41 and the vibrator 42 is as shown by the arrow in FIG. 37, and is set to rotate from the inside to the outside. That is, as shown in Figure 37, vibration The rotation direction of the actuator 41 is clockwise, and the rotation direction of the vibrator 42 is counterclockwise. The length of the squeegee 203 in the left-right direction Y is 185 mm. As shown in FIG. 37, the measurement points are the measurement points 1-17, the left side surface, and the right side surface of the bottom surface of the squeegee part 230. Measuring points 1-17 are 10mm apart.

FIG. 41 is a diagram showing the measurement results of the vibration in the up-down direction Z of the bottom surface of the squeegee portion 230 of the support 210 and the lateral direction Y of the side surface. FIG. 42 is a diagram showing the measurement result of the vibration in the front and back direction X of the bottom surface of the squeegee portion 230 of the support 210. FIG. The vertical axis represents the vibration distance. "P-P" means "Peak to Peak", which means vibration distance. As shown in FIG. 37, the horizontal axis represents the measurement points 1 to 17, and the right side of the left side surface, the bottom surface of the squeegee portion 230. As shown in Fig. 41, in each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances in the upper and lower directions Z of the measuring points 1-17 of the bottom surface of the squeegee section 230 are approximately equal. As shown in FIG. 41, in each of the air pressures of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distance of the left and right sides of the squeegee 230 in the left and right direction Y is substantially zero. Especially, when the air pressure is 0.4Mpa and 0.5Mpa, the vibration distance in the left-right direction Y is zero, which is suitable for printing. As shown in FIG. 42, the vibration distances in the front and back directions X from the measurement points 1-17 on the bottom surface of the squeegee section 230 are approximately equal in each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. Therefore, the printing tool 260 as a whole vibrates up and down, front and rear, and does not vibrate left and right.

<<Measurement result 2>>

Furthermore, the vibration of the printing tool 260 shown in FIG. 43 was measured. The printing tool 260 shown in FIG. 43 has the same configuration as the printing tool 260 of FIG. 40 except that the support portion 220 has a thin plate portion 221 and a thick plate portion 222. The thickness of the thick plate portion 222 is the thickness of the support portion 220, and the thin plate portion 221 is the portion where the surface of the support portion 220 is shaved and thinned Minute.

As shown in Fig. 44, the vibration distances in the upper and lower directions Z of the measuring points 1-17 on the bottom surface of the squeegee section 230 are approximately equal in each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. As shown in FIG. 44, in each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distance of the left and right sides of the squeegee section 230 in the left-right direction Y is substantially zero. Especially, when the air pressure is 0.4Mpa and 0.5Mpa, the vibration distance in the left-right direction Y is zero, which is suitable for printing. As shown in Fig. 45, the vibration distance in the X direction before and after the measurement points 1-17 of the bottom surface of the squeegee 230 is approximately equal in each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. Therefore, the printing tool 260 as a whole vibrates up and down, front and rear, and does not vibrate left and right.

<Comparison of measurement result 1 and measurement result 2>

When the support portion 220 has the thin plate portion 221 and the thick plate portion 222, the vibration distance in the front-rear direction X becomes larger, and there is unevenness. It is considered that the reason why the vibration distance in the front-rear direction X becomes larger is that the thin plate portion 221 exists. In screen printing, when the vibration in the front-rear direction X is to be utilized, it is preferable to use the support portion 220 having the thin plate portion 221.

<<Measurement result 3>>

Using the aluminum support 210 without using the adjusting jig 240, the vibration of the printing tool 260 shown in FIG. 37 was measured. Although not shown, the vibration distance in the upper and lower direction Z from the measurement points 1 to 17 on the bottom surface of the squeegee 230 is approximately the same at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. The vibration distance in the left-right direction Y on the right side is approximately zero. Under the air pressures of 0.2MPa, 0.3MPa, 0.4MPa, and 0.5MPa, the vibration distance in the X direction before and after the measurement points 1-17 of the bottom surface of the squeegee 230 is uneven, The vibration distance of the central part becomes larger than the end part. In the case of screen printing, since the distance that can be moved up and down like the center of the screen of the screen increases, even if the vibration distance of the center portion of the bottom surface of the squeegee portion 230 becomes larger than the end portion When, it can also be used.

<<Measurement result 4>>

In the configuration of FIG. 37, the air supply ports of the vibrator 41 and the vibrator 42 are installed outside. When the rotation direction of the vibrator 41 and the vibrator 42 is set to be opposite to the arrow in FIG. 37, although Vibration in the left-right direction Y occurs slightly, but the vibration distance in the up-down direction Z is roughly equal.

<<Measurement result 5>>

In the configuration of FIG. 37, when the rotation directions of the vibrator 41 and the vibrator 42 are set to the same direction, the vibration distance in the vertical direction Z and the vibration distance in the front and rear direction X are not uniform. The vibration in the left and right direction Y is generated at the same degree as the vibration distance in the up and down direction Z. In screen printing, it is effective when the vibration in the left and right direction Y is to be used.

<<Measurement result 6>>

In the configuration of Fig. 37, if the thickness of the distributor 47 in the upper and lower direction X is set to 10.9mm and 1.9mm and measured, the pressure is 0.2MPa, 0.3MPa, 0.4MPa, and 0.5MPa. The vibration distance of Z is approximately the same, or slightly reduced when the thickness of the distributor 47 is thicker. In addition, when the thickness of the distributor 47 is thick, the vibration distance in the front-rear direction X becomes about half in each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa.

<<Measurement result 7>>

Furthermore, the vibration of the printing tool 260 shown in FIG. 46 was measured. The printing tool 260 shown in FIG. 46 has the same configuration as the printing tool 260 of FIG. 37 except that vibrators 43 and 44 are added. As shown in FIG. 46, the vibrators 43, 44 are arranged on the front side in the printing direction P. The rotation axis J of the vibrators 43 and 44 is the same axis. The rotation axis J of the vibrators 43 and 44 is parallel to the left-right direction Y. As a result of the measurement, due to the presence of the vibrators 43 and 44, vibrations in the left-right direction Y occurred. The printing tool 260 shown in FIG. 46 is effective when the vibration in the left-right direction Y is to be used in screen printing.

<<Comparative example>>

In the configuration of FIG. 37, when only the vibrator 41 or only the vibrator 42 is used, the vibration distance in the vertical direction Z and the vibration distance in the front and rear direction X are not uniform. In the configuration of FIG. 37, when only the rotation axis J of the vibrator 42 is parallel to the left and right direction Y, the vibration distance in the up and down direction Z is not uniform. In addition, a vibration in the left-right direction Y occurs. In the configuration of FIG. 37, the vibrator 41 and the rotation axis J of the vibrator 42 are set parallel to the left and right direction Y, and the vibrator 41 and the vibrator 42 are arranged on the front side of the printing direction P or in the printing direction P. In the case of the side, the vibration distance in the vertical direction Z and the vibration distance in the front and rear direction X are not uniform.

<<Inspection based on vibration measurement>>

Since the support 210 is a metal block with a thickness in the vertical direction X, even if traveling waves are input from the two side surfaces 23 of the support 210 and a standing wave is generated inside the support 210, the support 210 will not bend. Therefore, when a standing wave is generated inside the support 210, it can be considered that the support 210 as a whole vibrates stably without any left-right difference. Therefore, the bottom surface of the squeegee 203 It should also vibrate stably without any left-right difference. Furthermore, when there is no vibration in the left-right direction Y, it can be considered that the vibration is generated by the standing wave.

As shown in Fig. 37, when the rotating surfaces K of the two vibrators are installed in parallel with the squeegee plate and the air supply port is inside, it can be considered that a standing wave is generated inside the support 210, and the squeegee 203 The vibration of the bottom surface is the most stable, and the vibration in the left and right direction Y is also suppressed.

When only one vibrator is vibrated, a traveling wave is generated and reflected on the other side to generate a reflected wave. The generated reflected wave overlaps with the traveling wave and becomes a standing wave. In one vibrator, the vibration of the bottom surface of the squeegee is unstable, and vibration in the left-right direction Y is also generated. It can be confirmed that the standing wave generation node formed by the overlapping of the traveling wave and the reflected wave. The standing wave from the reflected wave that can generate the knot with one vibrator is not practical.

The printing tool 260 is used in an environment different from the measurement state in which the printing tool 260 is placed on an air cushion to free the surrounding and vibrate. Specifically, the printing tool 260 is fixed to the lifting mechanism 610 by the fixing mechanism 620, and is used in a state where the workpiece is pressurized during printing. In the vibration measurement, it vibrates in the form of left and right flaps between the fulcrums 26 shown in FIG. 37, but even when the printing tool 260 is fixed to the lifting mechanism 610 by the fixing mechanism 620, the elasticity of the distributor 47 The force can also be vibrated in the way of flapping the wings between the fulcrum 26. In this way, even when the use environment is different, a standing wave is generated in the printing tool 260.

<<<Effects of Implementation Mode>>>

According to this embodiment, since the entire printing tool 260 vibrates uniformly in the vertical direction Z and does not vibrate horizontally, it is effective for hole filling printing. According to this embodiment, since the entire printing tool 260 vibrates uniformly in the front-rear direction X, it is further effective for hole-filling printing. Especially, since the printing tool 260 is used obliquely during printing, it is Both directions X vibrate, this system is suitable for hole-filling printing. According to this embodiment, the printing tool 260 can also be vibrated in the left-right direction Y by changing the rotation direction or adding a vibration source, which is effective for screen printing using vibration in the left-right direction Y.

<<<Change example>>>

Modification example 1.

The vibration frequency of the vibrator can be changed by air pressure, and the vibration frequency in the audible frequency range above 10Hz and below 800Hz is effective. When wavelength λ[m]=sound speed V[m/s]/vibration frequency f[Hz], f=800Hz,

Wavelength λ[m]=6320[m/s]/800[Hz]=7.9m

Half wavelength λ/2[m]=7.9m/2=3.95m

Therefore, it can be considered that if it is below 800 Hz, it is a practical value that does not produce knots.

Modification example 2.

The material of the squeegee 230 may not be urethane, but may also be rubber or elastomer containing silicone resin. The material of the squeegee section 230 may also be metal, as long as it is an individual object. The squeegee 203 may not have the support portion 220, or may be composed of only the squeegee portion 230.

In addition, the squeegee 203 may also be a metal squeegee.

Modification example 3.

The adjustment jig 240 may also be sandwiched between the supporting portion 220 and the pressing plate 212 instead of between the supporting portion 220 and the base 211. It is also possible to prepare two adjustment jigs 240 and sandwich them between the support 220 and the base 211 and between the support 220 and the pressing plate 212. The support 220 may be made of metal. At this time, the supporting portion 220 is formed of a metal stronger than the support 210.

Modification example 4.

The vibration unit 40 may be a pneumatic vibrator driven by air pressure, a vibrator driven by a voice coil motor, or the vibrator described in the above embodiment.

Embodiment 10.

In the tenth embodiment, differences from the above-mentioned embodiment will be described. In the tenth embodiment, the printing tool 260 with the squeegee 203 as the roller 250 will be described.

Fig. 47 is a five-sided view of the printing tool 260 of the vibration device 100 of the tenth embodiment. FIG. 47 is a case where the squeegee 203 of FIG. 36 is changed to a roller 250.

The roller 250 is mounted on the support 210. The roller 250 is made of metal and rotates around the roller shaft 251 in the left-right direction Y. The vibration unit 40 vibrates two parts of the two side surfaces 231 of the short side V of the printing tool 260. The printing tool 260 of FIG. 47 is mounted on the rotating surface K of the vibrator 41 and the vibrator 42 in such a way that the vibrator 41 and the vibrator 42 are installed in parallel with the roller 250 and the air supply port is inside.

The printing tool 260 of FIG. 48 makes the rotation axis J of the vibrator 41 and the vibrator 42 parallel to the left and right direction Y, and is installed in the center of the support 210 in the left and right direction Y. The printing tool 260 mounts the vibrator 42 on the front side in the printing direction P, and mounts the vibrator 41 on the back side in the printing direction P. The rotation direction of the vibrator 41 is shown by the arrow in FIG. The rotation direction of the vibrator 42 is shown by the arrow in FIG. 48, and is set to rotate from the front side to the back side in the printing direction P.

The printing tool 260 of FIG. 49 sets the rotation direction of the vibrator 42 of the printing tool 260 of FIG. 47 to rotate from the back side to the front side.

<<<Investigation based on vibration measurement>>>

The vibration measurement was carried out in the same manner as in the ninth embodiment. When the vibration measurement is performed in the same manner as in the ninth embodiment, the controller 80 supplies each air pressure of 0.2MPa, 0.3MPa, 0.4MPa, and 0.5MPa to the vibrators so that the vibrators have the same amplitude, the same wavelength, and The same frequency makes it vibrate.

In the printing tool 260 shown in Fig. 47, when the rotating surface K of the vibrator is installed parallel to the roller 250 and the air supply port is inside, the vibration of the bottom surface of the squeegee is stable, and the vibration in the left and right directions is also possible. inhibition. The printing tool 260 of FIG. 47 has a pressing effect of a certain standing wave against the vibration of the workpiece, and suppresses the vibration of the left and right direction Y, which is suitable for printing.

As shown in FIG. 48, when the rotation axis J of the vibrator 41 and the vibrator 42 are installed in the center of the support 210 in the left and right direction Y parallel to the left and right direction Y, the two vibrations originate from the front side 231 of the support 210 A traveling wave is input to the rear side 231, so a standing wave is generated and becomes a standing wave vibration. The printing tool 260 of FIG. 48 has a pressing effect of a certain standing wave against the vibration of the workpiece, and the vibration of the left and right direction Y is suppressed, which is suitable for printing.

As shown in FIG. 49, even when the rotation directions of the vibrator 41 and the vibrator 42 are the same, since there are two vibration sources, it becomes a standing wave vibration. In the case of Fig. 49, since the vibrator 41 and the vibrator 42 are pneumatic vibrators of the rotary vibration method, and the rotation direction is the same, the vibration of the rotation direction of the vibrator 41 and the vibrator 42 is added, and it becomes a circular vibration. In the direction X, vibration in the same direction as the printing direction P, which becomes the pressing aid of the roller 250, is added.

<<Comparative example>>

In FIG. 48, when only one vibrator is vibrated, if a traveling wave is generated and reaches the side to be reflected, a reflected wave is generated. The generated reflected wave overlaps the traveling wave For standing waves. In one vibrator, the vibration of the bottom surface of the squeegee is unstable, and vibration in the left-right direction Y is also generated. It can be confirmed that the standing wave generation node is formed by overlapping the traveling wave and the reflected wave. The standing wave from the reflected wave generated by one vibrator is not practical.

<<<Effects of Implementation Mode>>>

According to this embodiment, even when the printing tool 260 has the roller 250, the same effect as the ninth embodiment can be obtained, and vibration can be added to the roller 250 in the vertical direction Z and the front-rear direction X. According to this embodiment, it is possible to add vibration in the same direction as the printing direction P, which serves as a pressing aid of the roller 250.

<<<Change example>>>

Modification example 1.

The printing tool 260 can be used as a printing tool of a screen printing device.

The printing tool 260 using the roller 250 can also be used as a pressing tool, and can be used as a rolling device for stretching products. When the lifting mechanism 610 mounts the printing tool 260 with an angle relative to the product, the roller 250 performs friction-like movement relative to the product.

Modification example 2.

The material of the roller 250 may not be metal, and may be rubber, urethane or elastomer containing silicone resin. The material of the roller 250 may also be resin, as long as it is an object.

Modification example 3.

The printing tool 260 shown in FIG. 50 has vibrators 43 and 44 attached to the printing tool 260 shown in FIG. 47. The rotation axis J of the vibrator 43, 44 is parallel to the left and right direction Y, which will vibrate The devices 43 and 44 are arranged on the rear side in the printing direction P. The printing tool 260 shown in FIG. 50 is effective when the vibration in the left-right direction Y is to be used.

<<<Other components>>>.

Fig. 51 is a diagram showing a modification of the printing tool 260 of the ninth and tenth embodiments. Fig. 51 is a case of changing the installation method or installation position of the vibrator 41 and the vibrator 42.

(a) The installation position of the vibrator 41 and the vibrator 42 is set to the center of the support 210 in the upper and lower direction Z. There are slits in the upper and lower center of the side surface 23 of the support 210, and the distributor 47 is inserted into the upper and lower center slits of the side surface 23 of the support 210 to be fixed.

(b) The distributor 47 is L-shaped, and the distributor 47 is fixed on the side surface 23 of the support 210 in the upper and lower direction Z as a whole.

(c) shows the case where the installation position of the vibrator 41 and the vibrator 42 is set to the side surface 23 of the support portion 220 of the squeegee 203 instead of the support 210. The vibration of the vibrator 41 and the vibrator 42 is easily transmitted to the squeegee 203.

(d) shows a case where the installation position of the vibrator 41 and the vibrator 42 is set to the side surface 23 of the squeegee portion 230 of the squeegee 203 instead of the support 210. The squeegee 203 does not have the support portion 220 but is composed of only the squeegee portion 230.

(e) shows the case where the installation position of the vibrator 41 and the vibrator 42 is the side surface 23 of the roller shaft 251. The distributor 47 has a cylindrical shape and is fixed to the roller shaft 251. The distributor 47 transmits the vibration of the vibrator 41 and the vibrator 42 to the roller shaft 251.

(f) shows the situation where the vibrator 41 and the vibrator 42 are directly fixed to the side surfaces 23 of the two ends of the support 210 without the distributor 47. Although not shown, the vibrator 41 and the vibrator 42 and the two ends of the support 210 may be partially overlapped and installed. For example, one half of the lower surface of the vibrator 41 and the vibrator 42 can be used without the distributor 47. Fixed on the upper surface of the two ends of the support 210.

Implementation mode 11.

In the eleventh embodiment, differences from the above-mentioned embodiment will be described. In the eleventh embodiment, the case where the screen 201 of the screen printing apparatus 200 is vibrated will be described.

<<<Description of the composition of the vibration device 100>>>

Fig. 52 is a diagram showing a screen printing apparatus 200 according to the eleventh embodiment. Fig. 53 is a perspective view of the vibration device 100 of the eleventh embodiment. In FIG. 52 and FIG. 53, X represents the front-rear direction. The printing direction P coincides with the front-rear direction X. In FIGS. 52 and 53, Y represents the left-right direction, and Z represents the vertical direction.

The vibration device 100 has a screen 201, a vibration unit 40 and a controller 80. The screen 201 is used for printing by the screen printing device 200. The screen 201 prints the work 900 by the printing pressure of the squeegee 203. The vibration unit 40 vibrates a plurality of opposite side surfaces on the outer side of the screen 201. The controller 80 controls the vibration of the vibration unit 40.

<<Explanation of Screen 201>>

The screen plate 201 has: a screen 202; and a screen frame 208 on which the screen 202 is installed. As shown in FIG. 53, the screen 201 has a rectangular screen frame 208.

<<Description of Screen 202>>

The screen 202 is a film with a printed pattern formed in the center. The screen 202 is stretched on the screen frame 208 by tension. The wire mesh 202 is a metal mask wire mesh, a perforated screen, or the like.

<<Screen frame 208>>

The screen frame 208 is a rectangular frame including 4 straight lines. The screen frame 208 is made of metal such as aluminum, stainless steel, iron, alloy, etc., and has rigidity without deformation. The screen frame 208 stretches the screen 202 on the frame. The screen frame 208 has two parallel front and rear frames 2081 in a direction orthogonal to the printing direction P, and two parallel side frames 2082 in the same direction as the printing direction P. The two front and rear frames 2081 are the ones of the screen 201 Opposite frame. The two side frames 2082 are the opposite frames of the screen 201. The screen frame 208 has a plurality of screw holes 209 around it. The screw hole 209 is located at the corner of the screen frame 208. The screw holes 209 are located at the two ends of each frame of the two front and rear frames 2081 and the two side frames 2082, and a total of eight are provided. The screen frame 208 is firmly fixed to the frame fixing portion 270 of the screen printing apparatus 200 by screws inserted into the screw holes 209. The screen printing apparatus 200 fixes the frame fixing portion 270 to the frame. Hereinafter, the position of the screw hole 209 is referred to as a fixed position. The screen frame 208 is fixed on the plate frame fixing portion 270 at a fixed position arranged around the screen frame 208. The fixing method of the fixed part of the fixed screen frame 208 may not be a screwing method using screw holes 209 and screws, or a clamping method.

<<<Description of Vibration Unit 40>>>

The vibration unit 40 has a plurality of vibrators, so that the frame facing the screen frame 208 vibrates at the same frequency. The vibration unit 40 vibrates the frame facing the screen frame 208 up and down. The vibration unit 40 has two vibrators, namely a vibrator 41 and a vibrator 42. The vibrator 41 and the vibrator 42 are located on the outer side of the fixed part and on the outer side of the frame. The vibration unit 40 only vibrates the front and rear frames 2081 of the screen frame 208 up and down. The vibrator 41 and the vibrator 42 are of the same specifications. The vibrator 41 and the vibrator 42 are vibrators driven by air pressure.

<<Description of Distributor 47>>

The vibration unit 40 has a distributor 47. The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the front and rear frames 2081 of the screen frame 208. The distributor 47 fixes the vibrator 41 and the vibrator 42 on the upper surface of the front and rear frames 2081 of the screen frame 208. The distributor 47 has screw holes at the end, and is fixed to the front and rear frames 2081 of the screen frame 208 by screws. The distributor 47 is a rectangular metal plate. The distributor 47 arranges the vibrator 41 and the vibrator 42 on the outside of the screen frame 208. The distributor 47 increases the fins of the vibrator 41 and the vibrator 42. Extending the length of the distributor 47 in the front and rear direction X, and the farther away the vibrator 41 and the vibrator 42 are from the screen frame 208, due to the elastic force of the distributor 47, the more the distributor 47 bends, the greater the flaps. The more the thickness of the distributor 47 in the upper and lower direction Z becomes thinner, the more the distributor 47 bends, the larger the flaps are due to the elastic force of the distributor 47.

<<Description of Vibrator 41 and Vibrator 42>>

The vibrator 41 and the vibrator 42 are installed on the outside of the side surface 23 of the screen frame 208 like wings. The vibrator 41 and the vibrator 42 are installed orthogonally to the frame. The vibrator 41 and the vibrator 42 are installed in the center of the frame. The vibrator 41 and the vibrator 42 are located on the extension line of the straight line connecting the center of the front and rear frames 2081, and are installed at a symmetrical part on the outer circumference of the screen frame 208. The vibrator 41 and the vibrator 42 are installed such that the air supply port is inside. The rotation axes of the vibrator 41 and the vibrator 42 are parallel to the left-right direction Y. The rotating surfaces of the vibrator 41 and the vibrator 42 are parallel to the front-rear direction X.

<<<Description of the action of the vibration unit 40>>>

The controller 80 makes the vibrator 41 and the vibrator 42 vibrate at a frequency above 10 Hz and below 800 Hz. During printing, the vibration unit 40 vibrates the wings on both sides of the front and rear frames 2081 to vibrate the screen 201. The vibration unit 40 vibrates the front and rear frames 2081 of the screen 201. Vibration unit 40 The opposing frames of the screen 201 are vibrated with the same amplitude, the same wavelength, and the same frequency, and the screen 202 is vibrated by the standing wave. The vibration unit 40 causes the ends of the screen 202 to simultaneously generate a traveling wave with the same amplitude, the same wavelength, and the same frequency through the frame. The vibrating unit 40 vibrates the end of the screen 202 from the outer side of the screen 201 by a traveling wave, and vibrates the screen 202 by a standing wave. The vibration unit 40 causes the screen 202 to vibrate only in the up and down direction due to the wing flapping phenomenon described in the above embodiment. The fixing position of the vibrator 41 and the vibrator 42 is located in the center of the two screw holes 209, but since the screen frame 208 has rigidity, the screen plate 201 is reliably fixed to the frame fixing portion 270, so wing flapping occurs.

<<<Features of Implementation Mode>>>

The vibrating unit 40 of the vibrating device 100 of this embodiment simultaneously generates a traveling wave with the same amplitude, the same wavelength, and the same frequency from a symmetrical part on the outer periphery of the screen frame 208. The traveling wave from the symmetrical part on the outer circumference of the screen frame 208 changes to a standing wave, and the screen frame 208 only vibrates up and down, thereby causing the screen 202 in the screen frame to also only vibrate up and down.

<<<Effects of Implementation Mode>>>

According to this embodiment, the screen 202 as a whole vibrates uniformly in the vertical direction Z, and does not vibrate in the front, back, left, and right directions, so it is effective for hole filling printing. According to this embodiment, the traveling wave can be made to travel in the same direction as the printing direction P of the squeegee 203.

<<<Change example>>>

Modification example 1.

As shown in FIG. 54, two vibration units 40 can also be installed at both ends of each frame of the front and rear frames 2081. The vibration unit 40 is fixed beside the two screw holes 209 of the front and rear frame 2081 Or nearby. In order to easily cause the phenomenon of wing flapping, it is preferable that the fixed positions of the vibrator 41 and the vibrator 42 and the positions (fixed positions) of the two screw holes 209 are on a straight line. That is, it is preferable that a plurality of vibrators exist on the extension line of the line connecting the opposite fixed parts of the opposite sides of the plate 20. In the case of FIG. 54, since the screw holes 209 are used by the frame fixing portion 270, two vibration units 40 are installed inside the two screw holes 209 so as not to collide with the frame fixing portion 270.

Modification example 2.

As shown in Fig. 55, one or more vibration units 40 can also be installed on all four frames. In FIG. 55, the vibrator 43 and the vibrator 44 are orthogonal to the side frame 2082 and are installed at the center of the side frame 2082. Although not shown, when the screen frame 208 is a pentagon, a hexagon, an octagon, or other polygons, a vibrator may be provided in each frame. Although not shown, when the screen frame 208 is round or elliptical, a vibrator can also be provided at a position opposite to the frame. Although not shown, the vibrator may not be attached to the front and rear frames 2081, and the vibrator may be attached only to the side frame 2082.

Modification example 3.

As shown in FIG. 56, the distributor 47 can also be a T-shape. The distributor 47 exists on the upper surface of the front and rear frames 2081 to the front of the screw hole 209. In FIG. 56, the vibrations of the vibrator 41 and the vibrator 42 are transmitted over substantially the entire length of the front and rear frames 2081. Although not shown, if the distributor 47 is configured to transmit vibration to the frame with a width greater than the width of the vibrator, the shape of the distributor 47 may not be T-shaped, but may also be triangular, trapezoidal, mountain-shaped, or semicircular. Shape and other shapes.

Modification example 4.

As shown in Figure 57, the fixed position of the vibrator relative to the frame can be the lower surface of the frame as shown in (a), or the outer side of the frame as shown in (b). In either case, the vibrator is also located on the outside of the fixed part and on the outside of the frame, so that the frames facing the screen frame 208 vibrate with the same amplitude, the same wavelength, and the same frequency. On the outside, the end of the screen 202 is vibrated up and down by the traveling wave, and the screen 202 is vibrated by the standing wave. Although not shown, the fixed position of the vibrator relative to the frame can also be the inner side of the frame.

***Supplementary description of implementation form***

The above-mentioned embodiment is an illustration of a more ideal form, and is not intended to limit the technical scope of the present invention.

The embodiment can be implemented partially, or can be combined with other forms.

In addition, the above-mentioned embodiments may be combined.

For example, FIG. 58 shows a situation where the vibrator is installed on the plate 20, the squeegee 203, and the screen 201, respectively.

Although not shown in the figure, a vibrator may be installed on any two of the flat plate 20, the squeegee 203, and the screen 201.

10: Base

14: Space

20: Tablet

40: Vibration unit

41, 42: vibrator

47: Allocator

80: Controller

81: Air compressor

82: Trachea

83: regulator

84: processor

100: Vibration device

200: Screen printing device

201: Screen

202: wire mesh

203: Scraper

204: Slurry

205: Through hole

206: Suction tube

207: Vacuum pump

208: Screen Frame

209: screw hole

270: Plate frame fixed part

900: Workpiece

P: Printing direction

X: front and back direction

Z: Up and down direction

Claims (12)

A vibration device comprising: a screen plate having a screen; a vibration unit that vibrates a plurality of frames opposed to the screen plate; and a controller that controls the vibration of the vibration unit; the vibration unit has separate installations The plurality of vibrators on the outer side of the plurality of frames, through the above-mentioned plurality of vibrators, make the opposing frames of the screen plate vibrate with the same amplitude, the same wavelength, and the same frequency, and the wire is made by standing waves The net vibrates. The vibration device of claim 1, wherein the vibration unit causes the ends of the screen of the screen plate to simultaneously generate a traveling wave with the same amplitude, the same wavelength, and the same frequency, and from the outside of the screen, by the traveling wave The end of the above-mentioned screen is vibrated up and down, and the screen is vibrated by the standing wave. The vibration device according to claim 1, wherein the screen plate has a screen frame in which the screen is mounted, and the vibration unit vibrates the screen frame. The vibration device of claim 2, wherein the screen plate has a screen frame on which the screen is mounted, and the vibration unit vibrates the screen frame. The vibration device of claim 3, wherein the screen frame has front and rear frames in a direction orthogonal to the printing direction, and the vibration unit vibrates the center or both ends of the front and rear frames of the screen. The vibrating device of claim 4, wherein the screen frame has front and rear frames in a direction orthogonal to the printing direction, and the vibration unit vibrates the center or both ends of the front and rear frames of the screen. The vibration device of claim 3, wherein the screen frame has a side frame in the same direction as the printing direction, and the vibration unit vibrates the center or both ends of the side frame of the screen. The vibration device of claim 4, wherein the screen frame has a side frame in the same direction as the printing direction, and the vibration unit vibrates the center or both ends of the side frame of the screen. The vibration device according to any one of claims 1 to 8, wherein the controller causes the vibrator to vibrate at a frequency of 10 Hz or more and 800 Hz or less. The vibration device according to any one of claims 1 to 8, wherein the vibration unit has a pneumatic vibrator driven by air pressure or a vibrator driven by a voice coil motor. A screen printing device is provided with the vibration device of any one of claims 1 to 10. A vibration method, which uses a vibration unit with a plurality of vibrators installed on the outer sides of the opposing frames of the screen, so that the opposing frames of the screen have the same amplitude, the same wavelength, and the same Frequency vibration, the screen vibrates by standing waves.

Images