TWI714563B - 研磨墊 - Google Patents

研磨墊 Download PDF

Info

Publication number
TWI714563B
TWI714563B TW105108869A TW105108869A TWI714563B TW I714563 B TWI714563 B TW I714563B TW 105108869 A TW105108869 A TW 105108869A TW 105108869 A TW105108869 A TW 105108869A TW I714563 B TWI714563 B TW I714563B
Authority
TW
Taiwan
Prior art keywords
phase
foamed polyurethane
polishing pad
diisocyanate
content ratio
Prior art date
Application number
TW105108869A
Other languages
English (en)
Other versions
TW201641545A (zh
Inventor
村上陽平
大嶋伸之
中野裕之
Original Assignee
日商霓塔杜邦股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商霓塔杜邦股份有限公司 filed Critical 日商霓塔杜邦股份有限公司
Publication of TW201641545A publication Critical patent/TW201641545A/zh
Application granted granted Critical
Publication of TWI714563B publication Critical patent/TWI714563B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/08—Processes
    • C08G18/14—Manufacture of cellular products
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/30—Low-molecular-weight compounds
    • C08G18/32—Polyhydroxy compounds; Polyamines; Hydroxyamines
    • C08G18/3203—Polyhydroxy compounds
    • C08G18/3206—Polyhydroxy compounds aliphatic
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/30—Low-molecular-weight compounds
    • C08G18/32—Polyhydroxy compounds; Polyamines; Hydroxyamines
    • C08G18/3203—Polyhydroxy compounds
    • C08G18/3212—Polyhydroxy compounds containing cycloaliphatic groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/30—Low-molecular-weight compounds
    • C08G18/32—Polyhydroxy compounds; Polyamines; Hydroxyamines
    • C08G18/3203—Polyhydroxy compounds
    • C08G18/3215—Polyhydroxy compounds containing aromatic groups or benzoquinone groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/30—Low-molecular-weight compounds
    • C08G18/32—Polyhydroxy compounds; Polyamines; Hydroxyamines
    • C08G18/3225—Polyamines
    • C08G18/3237—Polyamines aromatic
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/30—Low-molecular-weight compounds
    • C08G18/32—Polyhydroxy compounds; Polyamines; Hydroxyamines
    • C08G18/3225—Polyamines
    • C08G18/3253—Polyamines being in latent form
    • C08G18/3259—Reaction products of polyamines with inorganic or organic acids or derivatives thereof other than metallic salts
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/30—Low-molecular-weight compounds
    • C08G18/38—Low-molecular-weight compounds having heteroatoms other than oxygen
    • C08G18/3802—Low-molecular-weight compounds having heteroatoms other than oxygen having halogens
    • C08G18/3814—Polyamines
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/30—Low-molecular-weight compounds
    • C08G18/38—Low-molecular-weight compounds having heteroatoms other than oxygen
    • C08G18/3855—Low-molecular-weight compounds having heteroatoms other than oxygen having sulfur
    • C08G18/3863—Low-molecular-weight compounds having heteroatoms other than oxygen having sulfur containing groups having sulfur atoms between two carbon atoms, the sulfur atoms being directly linked to carbon atoms or other sulfur atoms
    • C08G18/3865—Low-molecular-weight compounds having heteroatoms other than oxygen having sulfur containing groups having sulfur atoms between two carbon atoms, the sulfur atoms being directly linked to carbon atoms or other sulfur atoms containing groups having one sulfur atom between two carbon atoms
    • C08G18/3868—Low-molecular-weight compounds having heteroatoms other than oxygen having sulfur containing groups having sulfur atoms between two carbon atoms, the sulfur atoms being directly linked to carbon atoms or other sulfur atoms containing groups having one sulfur atom between two carbon atoms the sulfur atom belonging to a sulfide group
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40—High-molecular-weight compounds
    • C08G18/42—Polycondensates having carboxylic or carbonic ester groups in the main chain
    • C08G18/4236—Polycondensates having carboxylic or carbonic ester groups in the main chain containing only aliphatic groups
    • C08G18/4238—Polycondensates having carboxylic or carbonic ester groups in the main chain containing only aliphatic groups derived from dicarboxylic acids and dialcohols
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40—High-molecular-weight compounds
    • C08G18/42—Polycondensates having carboxylic or carbonic ester groups in the main chain
    • C08G18/4266—Polycondensates having carboxylic or carbonic ester groups in the main chain prepared from hydroxycarboxylic acids and/or lactones
    • C08G18/4269—Lactones
    • C08G18/4277—Caprolactone and/or substituted caprolactone
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40—High-molecular-weight compounds
    • C08G18/42—Polycondensates having carboxylic or carbonic ester groups in the main chain
    • C08G18/44—Polycarbonates
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40—High-molecular-weight compounds
    • C08G18/48—Polyethers
    • C08G18/4825—Polyethers containing two hydroxy groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40—High-molecular-weight compounds
    • C08G18/48—Polyethers
    • C08G18/4833—Polyethers containing oxyethylene units
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40—High-molecular-weight compounds
    • C08G18/48—Polyethers
    • C08G18/4833—Polyethers containing oxyethylene units
    • C08G18/4837—Polyethers containing oxyethylene units and other oxyalkylene units
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/40—High-molecular-weight compounds
    • C08G18/48—Polyethers
    • C08G18/4854—Polyethers containing oxyalkylene groups having four carbon atoms in the alkylene group
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/73—Polyisocyanates or polyisothiocyanates acyclic
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
    • C08G18/75—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic
    • C08G18/751—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic containing only one cycloaliphatic ring
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
    • C08G18/75—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic
    • C08G18/751—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic containing only one cycloaliphatic ring
    • C08G18/752—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic containing only one cycloaliphatic ring containing at least one isocyanate or isothiocyanate group linked to the cycloaliphatic ring by means of an aliphatic group
    • C08G18/753—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic containing only one cycloaliphatic ring containing at least one isocyanate or isothiocyanate group linked to the cycloaliphatic ring by means of an aliphatic group containing one isocyanate or isothiocyanate group linked to the cycloaliphatic ring by means of an aliphatic group having a primary carbon atom next to the isocyanate or isothiocyanate group
    • C08G18/755—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic containing only one cycloaliphatic ring containing at least one isocyanate or isothiocyanate group linked to the cycloaliphatic ring by means of an aliphatic group containing one isocyanate or isothiocyanate group linked to the cycloaliphatic ring by means of an aliphatic group having a primary carbon atom next to the isocyanate or isothiocyanate group and at least one isocyanate or isothiocyanate group linked to a secondary carbon atom of the cycloaliphatic ring, e.g. isophorone diisocyanate
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
    • C08G18/75—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic
    • C08G18/758—Polyisocyanates or polyisothiocyanates cyclic cycloaliphatic containing two or more cycloaliphatic rings
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
    • C08G18/76—Polyisocyanates or polyisothiocyanates cyclic aromatic
    • C08G18/7614—Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
    • C08G18/76—Polyisocyanates or polyisothiocyanates cyclic aromatic
    • C08G18/7614—Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring
    • C08G18/7621—Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring being toluene diisocyanate including isomer mixtures
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
    • C08G18/76—Polyisocyanates or polyisothiocyanates cyclic aromatic
    • C08G18/7614—Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring
    • C08G18/7628—Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring containing at least one isocyanate or isothiocyanate group linked to the aromatic ring by means of an aliphatic group
    • C08G18/7642—Polyisocyanates or polyisothiocyanates cyclic aromatic containing only one aromatic ring containing at least one isocyanate or isothiocyanate group linked to the aromatic ring by means of an aliphatic group containing at least two isocyanate or isothiocyanate groups linked to the aromatic ring by means of an aliphatic group having a primary carbon atom next to the isocyanate or isothiocyanate groups, e.g. xylylene diisocyanate or homologues substituted on the aromatic ring
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
    • C08G18/76—Polyisocyanates or polyisothiocyanates cyclic aromatic
    • C08G18/7657—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings
    • C08G18/7664—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings containing alkylene polyphenyl groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
    • C08G18/76—Polyisocyanates or polyisothiocyanates cyclic aromatic
    • C08G18/7657—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings
    • C08G18/7664—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings containing alkylene polyphenyl groups
    • C08G18/7671—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings containing alkylene polyphenyl groups containing only one alkylene bisphenyl group
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/74—Polyisocyanates or polyisothiocyanates cyclic
    • C08G18/76—Polyisocyanates or polyisothiocyanates cyclic aromatic
    • C08G18/7657—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings
    • C08G18/7678—Polyisocyanates or polyisothiocyanates cyclic aromatic containing two or more aromatic rings containing condensed aromatic rings
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/77—Polyisocyanates or polyisothiocyanates having heteroatoms in addition to the isocyanate or isothiocyanate nitrogen and oxygen or sulfur
    • C08G18/78—Nitrogen
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/77—Polyisocyanates or polyisothiocyanates having heteroatoms in addition to the isocyanate or isothiocyanate nitrogen and oxygen or sulfur
    • C08G18/78—Nitrogen
    • C08G18/7806—Nitrogen containing -N-C=0 groups
    • C08G18/7818—Nitrogen containing -N-C=0 groups containing ureum or ureum derivative groups
    • C08G18/7825—Nitrogen containing -N-C=0 groups containing ureum or ureum derivative groups containing ureum groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/77—Polyisocyanates or polyisothiocyanates having heteroatoms in addition to the isocyanate or isothiocyanate nitrogen and oxygen or sulfur
    • C08G18/78—Nitrogen
    • C08G18/7806—Nitrogen containing -N-C=0 groups
    • C08G18/7818—Nitrogen containing -N-C=0 groups containing ureum or ureum derivative groups
    • C08G18/7831—Nitrogen containing -N-C=0 groups containing ureum or ureum derivative groups containing biuret groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/77—Polyisocyanates or polyisothiocyanates having heteroatoms in addition to the isocyanate or isothiocyanate nitrogen and oxygen or sulfur
    • C08G18/78—Nitrogen
    • C08G18/7806—Nitrogen containing -N-C=0 groups
    • C08G18/7818—Nitrogen containing -N-C=0 groups containing ureum or ureum derivative groups
    • C08G18/7837—Nitrogen containing -N-C=0 groups containing ureum or ureum derivative groups containing allophanate groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/77—Polyisocyanates or polyisothiocyanates having heteroatoms in addition to the isocyanate or isothiocyanate nitrogen and oxygen or sulfur
    • C08G18/78—Nitrogen
    • C08G18/79—Nitrogen characterised by the polyisocyanates used, these having groups formed by oligomerisation of isocyanates or isothiocyanates
    • C08G18/791—Nitrogen characterised by the polyisocyanates used, these having groups formed by oligomerisation of isocyanates or isothiocyanates containing isocyanurate groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/72—Polyisocyanates or polyisothiocyanates
    • C08G18/77—Polyisocyanates or polyisothiocyanates having heteroatoms in addition to the isocyanate or isothiocyanate nitrogen and oxygen or sulfur
    • C08G18/78—Nitrogen
    • C08G18/79—Nitrogen characterised by the polyisocyanates used, these having groups formed by oligomerisation of isocyanates or isothiocyanates
    • C08G18/797—Nitrogen characterised by the polyisocyanates used, these having groups formed by oligomerisation of isocyanates or isothiocyanates containing carbodiimide and/or uretone-imine groups
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G2101/00—Manufacture of cellular products

Landscapes

  • Chemical & Material Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Polyurethanes Or Polyureas (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

本發明係一種研磨墊，其係由發泡聚胺基甲酸酯所形成，且利用25℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率超過70%。

Description

研磨墊
[與相關申請案之相互參照]
本申請案係主張日本專利特願2015-068387號之優先權，並藉由引用而併入至本申請案說明書之記載中。
本發明係關於一種研磨墊。
為了對用作半導體基板之矽晶圓等被研磨物進行研磨，廣泛使用由發泡聚胺基甲酸酯所形成之研磨墊(例如，專利文獻1)。
[先前技術文獻] [專利文獻]
[專利文獻1]日本專利特開2015-6729號公報
然而，關於先前之研磨墊，若將被研磨物利用研磨墊進行研磨則會產生摩擦熱，其結果為，因該摩擦熱而使硬度發生變化。
因此，先前之研磨墊有無法將被研磨物充分研磨之情形或使被研磨物受到損傷之情形，有無法穩定地對被研磨物進行研磨之問題。
因此，本發明係鑒於上述問題，其課題在於：提供一種由溫度 變化引起之硬度之變化較小之研磨墊。
本發明係一種研磨墊，其係由發泡聚胺基甲酸酯所形成，且利用25℃下之脈衝NMR(Nuclear Magnetic Resonance，核磁共振)測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率超過70%。
又，於本發明之研磨墊之一態樣中，利用60℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率相對於利用25℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率之比為80%以上。
以下，對本發明之一實施形態進行說明。
本實施形態之研磨墊係由發泡聚胺基甲酸酯所形成。
利用25℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率超過70%，較佳為80~100%，更佳為90~100%。
再者，於脈衝NMR測定中，將發泡聚胺基甲酸酯分為旋轉-旋轉鬆弛時間未達0.03ms之相(短相)(S相)、旋轉-旋轉鬆弛時間為0.03ms以上且未達0.2ms之相(中間相)(M相)、旋轉-旋轉鬆弛時間為0.2ms以上之相(長相)(L相)，並求出各相之含有比率。
旋轉-旋轉鬆弛時間可藉由例如使用JEOL製造之「JNM-MU25」，實施利用Solid Echo法之測定等而求出。
於脈衝NMR中，若將施加脈衝磁場後之經過時間設為t(ms)，將t=0時之磁化設為M0，將時間t時之磁化設為M(t)，則旋轉-旋轉鬆弛時間(T2)可基於下述式而求出。
再者，下述式中之「W」係表示魏普模量(Weibull Modulus)。
Figure 105108869-A0202-12-0003-1
並且，於將測定對象分解為n個成分時，關於第i個(i<n)成分，若將t=0時之該i成分之磁化設為M0i，將i成分之魏普模量設為Wi，則i成分之旋轉-旋轉鬆弛時間(T2i)、及i成分之比率Fi可基於下述式而求出。
例如，魏普模量Wi可使用WS=2、WM=1、WL=1。
關於此種鬆弛時間之求出方法，揭示於S.Yamasaki et al Polymer 48 4793(2007)等中。
Figure 105108869-A0202-12-0003-2
Figure 105108869-A0202-12-0003-3
再者，關於S相、M相、及L相之含有比率，例如於脈衝NMR測定中觀測到結晶相主要成為S相，觀測到非晶相主要成為L相。又，於脈衝NMR測定中觀測到硬鏈段部分主要成為S相，觀測到軟鏈段部分主要成為L相。
又，作為發泡聚胺基甲酸酯，已知有「結晶相之比率」、或「硬鏈段部分之比率」為各種者。再者，藉由增加胺基甲酸酯鍵或脲鍵，可提高「硬鏈段部分之比率」。下文將對發泡聚胺基甲酸酯之材料進 行敍述，例如於使異氰酸酯與多元醇鍵結時，可藉由增加短鏈二醇(例如，二乙二醇(DEG)、分子量小之聚乙二醇(PEG)等)之使用量而增加胺基甲酸酯鍵。進而，例如於使末端為異氰酸酯之預聚物與4,4'-亞甲基雙(2-氯苯胺)(MOCA)鍵結時，可藉由增加MOCA之使用量或降低用於反應之加熱溫度而增加脲鍵。又，例如可藉由抑制化學交聯，而使硬鏈段彼此變得容易接近，提高「結晶化相之比率」。
因此，可藉由提高結晶相之比率或提高硬鏈段部分之比率，而提高S相之含有比率。
利用60℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率相對於利用25℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率之比較佳為80%以上，更佳為90~100%。
上述發泡聚胺基甲酸酯可藉由將含有異氰酸酯基之含異氰酸酯基之化合物、含有活性氫之含活性氫之有機化合物、及發泡劑混合並進行加熱而獲得。
作為上述含異氰酸酯基之化合物，例如可使用芳香族二異氰酸酯、脂肪族二異氰酸酯、脂環族二異氰酸酯等。再者，作為該等含異氰酸酯基之化合物，可使用單獨物或使用組合複數種者。
作為上述芳香族二異氰酸酯，可使用藉由將使苯胺與甲醛縮合所獲得之胺混合物於惰性溶劑中與碳醯氯反應等而獲得之粗二苯基甲烷二異氰酸酯(粗MDI)、將該粗MDI精製所獲得之二苯基甲烷二異氰酸酯(純MDI)、聚亞甲基聚伸苯基聚異氰酸酯(聚合MDI)、及該等之改性物等，又，可使用甲苯二異氰酸酯(TDI)、1,5-萘二異氰酸酯、苯二甲基二異氰酸酯、1,3-苯二異氰酸酯、1,4-苯二異氰酸酯等。再者，該等芳香族二異氰酸酯可使用單獨物或組合複數種而使用。
作為二苯基甲烷二異氰酸酯之改性物，例如可列舉：碳二醯亞 胺改性物、胺基甲酸酯改性物、脲基甲酸酯改性物、脲改性物、縮二脲改性物、異氰尿酸酯改性物、
Figure 105108869-A0202-12-0005-6
唑啶酮改性物等。作為此種改性物，具體而言，例如可列舉：碳二醯亞胺改性二苯基甲烷二異氰酸酯(碳二醯亞胺改性MDI)。
作為上述脂肪族二異氰酸酯，例如可使用二異氰酸乙二酯、2,2,4-三甲基六亞甲基二異氰酸酯、1,6-六亞甲基二異氰酸酯等。
作為上述脂環族二異氰酸酯，例如可使用1,4-環己烷二異氰酸酯、4,4'-二環己基甲烷二異氰酸酯、異佛爾酮二異氰酸酯、降
Figure 105108869-A0202-12-0005-7
烷二異氰酸酯、亞甲基雙(4,1-伸環己基)=二異氰酸酯等。
作為上述含異氰酸酯基之化合物，就其蒸氣壓更低而不易揮發，故而容易控制作業環境之方面而言，較佳為二苯基甲烷二異氰酸酯(純MDI)、聚合MDI、或其改性物。又，就黏度更低而操作較為容易之方面而言，較佳為碳二醯亞胺改性MDI、聚合MDI、或該等與MDI之混合物。
上述含活性氫之有機化合物係於分子內具有可與異氰酸酯基反應之活性氫基之有機化合物。作為該活性氫基，具體而言，可列舉羥基、一級胺基、二級胺基、硫醇基等官能基，上述含活性氫之有機化合物可於分子中僅具有1種該官能基，亦可於分子中具有複數種該官能基。
作為上述含活性氫之有機化合物，例如可使用分子中具有複數種羥基之多元醇化合物、分子內具有複數種一級胺基或二級胺基之聚胺化合物等。
作為上述多元醇化合物，可列舉分子量為400以下之多元醇、分子量超過400之多元醇預聚物等。
作為分子量為400以下之多元醇，例如可列舉乙二醇、1,2-丙二醇、1,3-丙二醇、1,3-丁二醇、1,5-戊二醇、3-甲基-1,5-戊二醇、1,6 己二醇、二乙二醇、三乙二醇、四乙二醇、二丙二醇、三丙二醇、分子量400以下之聚乙二醇、1,8-辛二醇、1,9-壬二醇等直鏈脂肪族二醇，可列舉新戊二醇、3-甲基-1,5-戊二醇、2-甲基-1,3-丙二醇、2-丁基-2-乙基-1,3-丙二醇、2-甲基-1,8-辛二醇等分支脂肪族二醇，可列舉1,4-環己烷二醇、1,4-環己烷二甲醇、氫化雙酚A等脂環族二醇，可列舉甘油、三羥甲基丙烷、三羥丁基丙烷、季戊四醇、山梨糖醇等多官能多元醇等。
作為分子量超過400之多元醇預聚物，可列舉：聚醚多元醇、聚酯多元醇、聚酯聚碳酸酯多元醇及聚碳酸酯多元醇等。再者，作為多元醇預聚物，亦可列舉於分子中具有3個以上羥基之多官能多元醇預聚物。
詳細而言，作為上述聚醚多元醇，可列舉：聚四亞甲基二醇(PTMG)、聚丙二醇(PPG)、聚乙二醇(PEG)、環氧乙烷加成聚丙烯多元醇等。
作為上述聚酯多元醇，可列舉：聚己二酸丁二酯、聚六亞甲基己二酸酯及聚己內酯多元醇等。
作為上述聚酯聚碳酸酯多元醇，可列舉：聚己內酯多元醇等聚酯二醇與碳酸伸烷酯之反應產物、將使碳酸乙二酯與多元醇反應所獲得之反應混合物進而與有機二羧酸反應而成之反應產物等。
作為上述聚碳酸酯多元醇，可列舉：1,3-丙二醇、1,4-丁二醇、1,6-己二醇、二乙二醇、聚乙二醇、聚丙二醇、或聚四亞甲基二醇等二醇、與碳醯氯、碳酸二烯丙酯(例如碳酸二苯酯)或環式碳酸酯(例如碳酸丙二酯)之反應產物等。
上述多元醇化合物可單獨使用或將兩種以上組合而使用。
作為上述多元醇，就反應時之強度更容易升高、所製造之包含發泡聚胺基甲酸酯之研磨墊之剛性更容易升高、且相對低價之方面而 言，較佳為乙二醇、二乙二醇。
作為上述多元醇預聚物，就容易獲得具有彈性之發泡聚胺基甲酸酯之方面而言，較佳為數量平均分子量為800~8000者，具體而言，較佳為聚四亞甲基二醇(PTMG)、環氧乙烷加成聚丙烯多元醇。
作為上述聚胺化合物，可列舉：4,4'-亞甲基雙(鄰氯苯胺)(MOCA)、2,6-二氯對苯二胺、4,4'-亞甲基雙(2,3-二氯苯胺)、3,5-雙(甲硫基)-2,4-甲苯二胺、3,5-雙(甲硫基)-2,6-甲苯二胺、3,5-二乙基甲苯-2,4-二胺、3,5-二乙基甲苯-2,6-二胺、1,3-丙二醇二對胺基苯甲酸酯、1,2-雙(2-胺基苯硫基)乙烷及4,4'-二胺基-3,3'-二乙基-5,5'-二甲基二苯基甲烷等。
作為上述發泡劑，只要為於上述發泡聚胺基甲酸酯成形時，產生氣體而成為氣泡，從而使上述發泡聚胺基甲酸酯中形成氣泡者，則並無特別限定，例如可將藉由加熱進行分解而產生氣體之有機化學發泡劑、沸點為-5~70℃之低沸點烴、鹵化烴、水、液化二氧化碳等單獨或組合而使用。
作為上述有機化學發泡劑，例如可列舉：偶氮系化合物(偶氮二甲醯胺、偶氮二異丁腈、重氮胺基苯、偶氮二羧酸鋇等)、亞硝基化合物(N,N'-二亞硝基五亞甲基四胺、N,N'-二亞硝基-N,N'-二甲基對苯二甲醯胺等)、磺醯肼化合物[p,p'-氧基雙(苯磺醯肼)、對甲苯磺醯肼等]等。
作為上述低沸點烴，例如可列舉：丁烷、戊烷、環戊烷、及該等之混合物等。
作為上述鹵化烴，可列舉：二氯甲烷、HFC(氫氟碳類)等。
本實施形態之研磨墊由於如上述般構成，故而具有以下之優勢。
本發明者等人進行了努力研究，結果發現：由發泡聚胺基甲酸 酯所形成且利用25℃下之脈衝NMR測定下所求出之上述發泡聚胺基甲酸酯中之S相之含有比率為特定範圍內之研磨墊由溫度變化引起之硬度之變化減小，從而想到本實施形態。
即，本實施形態之研磨墊係由發泡聚胺基甲酸酯所形成，且利用25℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率超過70%之研磨墊。
本實施形態之研磨墊係藉由具有此種構成，而成為由溫度變化引起之硬度之變化較小之研磨墊。
可認為本實施形態之研磨墊若利用25℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率超過70%，則由溫度變化引起之硬度之變化減小之原因在於以下之理由。
上述發泡聚胺基甲酸酯之上述S相之含有比率超過70%。因此，可認為上述發泡聚胺基甲酸酯中，硬鏈段經結晶化之部分增多，硬鏈段經結晶化之部分密集地存在。另一方面，可認為軟鏈段係存在於硬鏈段經結晶化之部分之間，或連接於硬鏈段經結晶化之部分之端部而存在。
如此，可認為上述發泡聚胺基甲酸酯由於硬鏈段經結晶化之部分密集，故而硬鏈段間之分子間力升高，即便加溫，硬鏈段彼此亦變得不易分離，其結果為，硬度變得不易降低。
又，可認為即便於存在硬鏈段經結晶化之部分之密集度較小之部位之情形時，該密集度較小之部位與密集度較高之部位相比，若加溫，則亦可能具有硬鏈段彼此容易分離之性質，但藉由周圍之密集度較高之部位而使移動得到抑制，其結果為，硬度變得不易降低。
進而，可認為上述發泡聚胺基甲酸酯即便存在少量軟鏈段，由於軟鏈段較短，故而即便加溫而欲使軟鏈段移動，亦藉由硬鏈段經結晶化之部分而使移動得到抑制，其結果為，硬度變得不易降低。
又，本實施形態之研磨墊較佳為利用60℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率相對於利用25℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率之比為80%以上。
再者，本發明之研磨墊並不限定於上述實施形態。又，本發明之研磨墊並不限定於上述之作用效果。本發明之研磨墊可於不脫離本發明之主旨之範圍內進行各種變更。
[實施例]
其次，列舉試驗例對本發明進行更具體之說明。
準備試驗例1~6之發泡聚胺基甲酸酯。
並且，利用脈衝NMR對各發泡聚胺基甲酸酯進行測定。脈衝NMR測定之條件係如下所述。
又，測定各發泡聚胺基甲酸酯之儲存彈性模數。儲存彈性模數係依據JIS K7244-4：1999「塑膠-動態機械特性之試驗方法-第4部：拉伸振動-非共振法」而測定。儲存彈性模數之測定條件係如下所述。
<脈衝NMR測定之條件>
測定裝置：JEOL製造，JNM-MU25
測定方法：Solid Echo法
脈衝寬度：90°脈衝，2.0μs
重複時間：4sec
累計次數：8次
測定溫度：室溫(RT)(25℃)、60℃、80℃、100℃
<儲存彈性模數之測定條件>
測定裝置：SII Nanotechnology製造，動態黏彈性測定裝置DMS6100
頻率：1Hz
初期荷重：300mN
測定模式：拉伸-正弦波控制模式
溫度：10~130℃
升溫：5℃/min
於表1中，表示各溫度下之S相之含有比率、與各溫度下之S相之含有比率相對於25℃下之S相之含有比率之比(於表1中，記為「各溫度/RT」)。
又，於表2中，表示各溫度下之儲存彈性模數(E')、與各溫度下之E'相對於25℃下之E'之比(於表2中，記為「各溫度/RT」)。
Figure 105108869-A0202-12-0010-4
Figure 105108869-A0202-12-0010-5
如表1、2所示，利用25℃下之脈衝NMR測定所求出之S相之含有比率超過70%之試驗例3~6發泡聚胺基甲酸酯與試驗例1之發泡聚胺 基甲酸酯相比，各溫度下之E'相對於25℃下之E'之比顯示較高值。
即，可知根據本案發明，可提供一種由溫度變化引起之硬度之變化較小之研磨墊。

Claims (2)

  1. 一種研磨墊，其係由發泡聚胺基甲酸酯所形成，且利用25℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率超過70%。
  2. 如請求項1之研磨墊，其中利用60℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率相對於利用25℃下之脈衝NMR測定所求出之上述發泡聚胺基甲酸酯中之S相之含有比率之比為80%以上。
TW105108869A 2015-03-30 2016-03-22 研磨墊 TWI714563B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-068387 2015-03-30
JP2015068387 2015-03-30

Publications (2)

Publication Number Publication Date
TW201641545A TW201641545A (zh) 2016-12-01
TWI714563B true TWI714563B (zh) 2021-01-01

Family

ID=57007004

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105108869A TWI714563B (zh) 2015-03-30 2016-03-22 研磨墊

Country Status (9)

Country Link
US (1) US10625392B2 (zh)
JP (1) JP6623215B2 (zh)
KR (1) KR102543949B1 (zh)
CN (1) CN107107307B (zh)
DE (1) DE112016001517T5 (zh)
MY (1) MY189264A (zh)
SG (2) SG11201707842PA (zh)
TW (1) TWI714563B (zh)
WO (1) WO2016158348A1 (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD854902S1 (en) * 2016-09-23 2019-07-30 Husqvarna Construction Products North America, Inc. Polishing or grinding pad
USD927952S1 (en) * 2017-08-30 2021-08-17 Husqvarna Ab Polishing or grinding pad assembly with abrasive disk, spacer, reinforcement and pad
USD958626S1 (en) * 2017-08-30 2022-07-26 Husqvarna Ab Polishing or grinding pad assembly with abrasive disks, reinforcement and pad
JP7302168B2 (ja) * 2018-12-20 2023-07-04 Dic株式会社 ウレタン樹脂組成物、及び、研磨パッド
US20200384601A1 (en) * 2019-06-10 2020-12-10 Rohm And Haas Electronic Materials Cmp Holdings, Inc Thin film fluoropolymer composite cmp polishing pad
TWI827890B (zh) * 2019-10-23 2024-01-01 南韓商Ｓｋ恩普士股份有限公司 用於研磨墊之組成物及研磨墊
EP3978190A1 (en) * 2020-09-29 2022-04-06 SKC Solmics Co., Ltd. Polishing pad and method of fabricating semiconductor device using the same
JP7801928B2 (ja) * 2022-03-29 2026-01-19 富士紡ホールディングス株式会社 研磨パッド及び研磨パッドの製造方法
JP7733464B2 (ja) * 2021-03-30 2025-09-03 富士紡ホールディングス株式会社 研磨パッド及び研磨パッドの製造方法
US12544958B2 (en) * 2022-06-02 2026-02-10 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method of making low specific gravity polishing pads

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070117393A1 (en) * 2005-11-21 2007-05-24 Alexander Tregub Hardened porous polymer chemical mechanical polishing (CMP) pad
JP2010240777A (ja) * 2009-04-06 2010-10-28 Nitta Haas Inc 研磨パッド

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005015643A (ja) 2003-06-26 2005-01-20 Dic Bayer Polymer Ltd 熱可塑性ポリウレタン樹脂組成物及び成形物
JP2007246805A (ja) 2006-03-17 2007-09-27 Kuraray Co Ltd 研磨パッドおよびその製造方法
US7445847B2 (en) 2006-05-25 2008-11-04 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad
JP5242322B2 (ja) * 2008-09-30 2013-07-24 富士紡ホールディングス株式会社 研磨パッドおよびその製造方法
JP5945874B2 (ja) 2011-10-18 2016-07-05 富士紡ホールディングス株式会社 研磨パッド及びその製造方法
JP5873910B2 (ja) 2014-09-01 2016-03-01 富士紡ホールディングス株式会社 研磨パッド

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070117393A1 (en) * 2005-11-21 2007-05-24 Alexander Tregub Hardened porous polymer chemical mechanical polishing (CMP) pad
JP2010240777A (ja) * 2009-04-06 2010-10-28 Nitta Haas Inc 研磨パッド

Also Published As

Publication number Publication date
MY189264A (en) 2022-01-31
KR102543949B1 (ko) 2023-06-14
WO2016158348A1 (ja) 2016-10-06
JP6623215B2 (ja) 2019-12-18
JPWO2016158348A1 (ja) 2018-01-25
US20180079050A1 (en) 2018-03-22
SG11201707842PA (en) 2017-10-30
US10625392B2 (en) 2020-04-21
DE112016001517T5 (de) 2018-01-04
SG10201908591TA (en) 2019-11-28
CN107107307B (zh) 2020-06-26
KR20170132710A (ko) 2017-12-04
CN107107307A (zh) 2017-08-29
TW201641545A (zh) 2016-12-01

Similar Documents

Publication Publication Date Title
TWI714563B (zh) 研磨墊
CN111349213B (zh) 聚氨酯树脂组合物和研磨垫
TW201704340A (zh) 研磨墊及其製造方法
TW201609959A (zh) 胺基甲酸酯組成物及硏磨材料
TWI722108B (zh) 研磨墊及研磨墊之製造方法
JP6382659B2 (ja) 研磨パッド
JP6983001B2 (ja) 研磨パッド
JP2018171675A (ja) 研磨パッド
JP7198662B2 (ja) 研磨パッド
JP7594431B2 (ja) 研磨パッド
JP6303482B2 (ja) ウレタン組成物、硬化物、及び、研磨材
JP7270330B2 (ja) ポリウレタン樹脂発泡体、および、ポリウレタン樹脂発泡体の製造方法
TWI745432B (zh) 研磨墊
JP5763879B2 (ja) 研磨パッド及び研磨パッドの製造方法
JP6513455B2 (ja) 研磨パッド
TW201636406A (zh) 研磨墊
JP7612424B2 (ja) 終点検出用窓を備える研磨層を含む研磨パッド
JP7513397B2 (ja) 研磨パッド
JP2019177456A (ja) 研磨パッド、研磨パッドの製造方法、及び光学材料又は半導体材料の表面を研磨する方法
TW202136389A (zh) 研磨墊
JP2017064891A (ja) 研磨パッド
TW202144123A (zh) 研磨墊
JP2020157414A (ja) 研磨パッド、研磨パッドの製造方法、及び光学材料又は半導体材料の表面を研磨する方法