TWI832016B - heat sink - Google Patents

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TWI832016B
TWI832016B TW109135568A TW109135568A TWI832016B TW I832016 B TWI832016 B TW I832016B TW 109135568 A TW109135568 A TW 109135568A TW 109135568 A TW109135568 A TW 109135568A TW I832016 B TWI832016 B TW I832016B
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alumina particles
heat sink
volume
resin
particles
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TW202124591A (en
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田島宏
山內志朗
春名裕介
小松花乃繪
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日商拓自達電線股份有限公司
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/20Arrangements for cooling
    • H10W40/25Arrangements for cooling characterised by their materials
    • H10W40/251Organics
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/18Oxygen-containing compounds, e.g. metal carbonyls
    • C08K3/20Oxides; Hydroxides
    • C08K3/22Oxides; Hydroxides of metals
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00Compositions of unspecified macromolecular compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2039Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
    • H05K7/20509Multiple-component heat spreaders; Multi-component heat-conducting support plates; Multi-component non-closed heat-conducting structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/10Arrangements for heating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/20Arrangements for cooling
    • H10W40/25Arrangements for cooling characterised by their materials

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Materials Engineering (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)

Abstract

本發明之課題在於提供一種即便薄仍可良好獲得成膜性之散熱片。 解決手段是一種散熱片,其含有氧化鋁粒子及樹脂, 前述散熱片中前述氧化鋁粒子之含有比率在70體積%以上, 前述氧化鋁粒子在粒度分布中,分別在粒徑30~60μm、2~12μm、及0.1~1μm具有尖峰, 在前述粒度分布中,前述氧化鋁粒子中之粒徑30~60μm之氧化鋁粒子的比率為9~60體積%,粒徑2~12μm之氧化鋁粒子的比率為30~75體積%,粒徑0.1~1μm之氧化鋁粒子的比率為2~20體積%。An object of the present invention is to provide a heat sink that can achieve good film-forming properties even if it is thin. The solution is a heat sink containing alumina particles and resin. The content ratio of the alumina particles in the heat sink is above 70% by volume, In the particle size distribution of the aforementioned alumina particles, there are peaks at particle diameters of 30~60μm, 2~12μm, and 0.1~1μm respectively. In the aforementioned particle size distribution, the proportion of alumina particles with a particle size of 30 to 60 μm in the aforementioned alumina particles is 9 to 60% by volume, and the proportion of alumina particles with a particle size of 2 to 12 μm is 30 to 75% by volume. The proportion of 0.1~1μm alumina particles is 2~20% by volume.

Description

散熱片heat sink

本發明有關於散熱片。The present invention relates to heat sinks.

近年來,隨著電子產品的發展,在電力裝置(power device)等電子機器內,逐漸使用許多會發熱的零件。在控制電子電路時,重要的是使來自該等發熱零件的熱發散而將系統整體進行冷卻。散熱片例如是設置在發熱零件其與散熱葉片(fin)或與金屬板之間,並透過壓著來與發熱零件沒有間隙地密著,並發揮熱傳導性將自發熱零件產生之熱傳到散熱葉片等,而可進行系統整體的除熱。In recent years, with the development of electronic products, many parts that generate heat are gradually used in electronic equipment such as power devices. When controlling electronic circuits, it is important to dissipate the heat from these heat-generating parts and cool the entire system. The heat sink is, for example, disposed between the heating component and the heat dissipation blade (fin) or the metal plate, and is pressed closely with the heating component without any gap, and uses thermal conductivity to transfer the heat generated by the self-heating component to the heat sink. Blades, etc., and can remove heat from the entire system.

上述散熱片例如是以熱傳導性無機填料與樹脂所構成。無機填料可使用便宜的氫氧化鋁、氧化鋁(alumina),或使用期待有更高熱傳導之碳化矽、氮化硼、氮化鋁等。又,樹脂可使用例如丙烯酸樹脂、胺基甲酸酯樹脂。The above-mentioned heat sink is composed of thermally conductive inorganic filler and resin, for example. Inorganic fillers can use cheap aluminum hydroxide, aluminum oxide (alumina), or silicon carbide, boron nitride, aluminum nitride, etc. that are expected to have higher thermal conductivity. In addition, as the resin, for example, acrylic resin or urethane resin can be used.

上述散熱片已知有例如專利文獻1~3所揭示者。The above-mentioned heat sinks are known, for example, as disclosed in Patent Documents 1 to 3.

先行技術文獻 專利文獻 [專利文獻1]日本特開2007-277405號公報 [專利文獻2]日本特開2007-277406號公報 [專利文獻3]日本特開2009-274929號公報Advanced technical documents patent documents [Patent Document 1] Japanese Patent Application Publication No. 2007-277405 [Patent Document 2] Japanese Patent Application Publication No. 2007-277406 [Patent Document 3] Japanese Patent Application Publication No. 2009-274929

發明概要 發明欲解決之課題 近年來,智慧型手機等小型攜帶用電子機器逐漸高性能化,又,伴隨於此,上述攜帶用電子機器內之零件所產生之熱量亦逐漸變高。因此,便有可使用在攜帶用電子機器等小型電子機器上的散熱片的需求。Summary of the invention The problem to be solved by the invention In recent years, small portable electronic devices such as smartphones have become increasingly high-performance, and along with this, the heat generated by components in the portable electronic devices has also gradually increased. Therefore, there is a demand for a heat sink that can be used in small electronic devices such as portable electronic devices.

又,上述攜帶用電子機器有更進一步薄型化的需求,伴隨於此,亦對散熱片尋求薄膜化。然而,若想將專利文獻1~3所揭散熱片進行薄型化,則會有成膜性不好、無法以片之形態獲得、或者即便獲得也脆弱易裂的問題。In addition, there is a demand for further thinning of the above-mentioned portable electronic devices, and accordingly, there is a demand for thinner heat sinks. However, if the heat sinks disclosed in Patent Documents 1 to 3 are to be made thinner, there are problems such as poor film formation properties, inability to obtain them in sheet form, or even if they are obtained, they are fragile and easily cracked.

本發明是有鑑於上述而成者,且本發明之目的在於提供一種散熱片,即便薄仍可良好獲得成膜性。The present invention is made in view of the above, and an object of the present invention is to provide a heat sink that can achieve good film-forming properties even if it is thin.

用以解決課題之手段 本案發明人等為達成上述目的而全心研究,結果發現,使用樹脂與氧化鋁作為構成散熱片的成分,且上述氧化鋁在粒度分布中,在三種特定粒徑範圍內分別具有尖峰,且將上述三種特定粒徑範圍內之氧化鋁分別設定在特定的比率,則薄散熱片可良好獲得成膜性。本發明是基於該等知識而完成者。means to solve problems The inventors of the present case have devoted themselves to research to achieve the above purpose, and found that resin and alumina are used as components of the heat sink, and that the alumina has sharp peaks in the particle size distribution in three specific particle size ranges, and will If the aluminum oxide in the above three specific particle size ranges is set to a specific ratio, the thin heat sink can achieve good film formation. The present invention was completed based on this knowledge.

亦即,本發明提供一種散熱片,是含有氧化鋁粒子及樹脂的散熱片, 上述散熱片中上述氧化鋁粒子之含有比率在70體積%以上, 上述氧化鋁粒子在粒度分布中,分別在粒徑30~60μm、2~12μm、及0.1~1μm具有尖峰, 在上述粒度分布中,上述氧化鋁粒子中之粒徑30~60μm之氧化鋁粒子的比率為9~60體積%,粒徑2~12μm之氧化鋁粒子的比率為30~90體積%,粒徑0.1~1μm之氧化鋁粒子的比率為1~20體積%。That is, the present invention provides a heat sink that contains alumina particles and resin. The content ratio of the above-mentioned aluminum oxide particles in the above-mentioned heat sink is more than 70% by volume, In the particle size distribution of the above-mentioned alumina particles, there are peaks at particle diameters of 30~60μm, 2~12μm, and 0.1~1μm respectively. In the above particle size distribution, the proportion of alumina particles with a particle size of 30 to 60 μm in the above alumina particles is 9 to 60% by volume, and the ratio of alumina particles with a particle size of 2 to 12 μm is 30 to 90% by volume. The proportion of 0.1~1μm alumina particles is 1~20% by volume.

上述粒度分布中,在30~60μm具有尖峰之氧化鋁粒子、在2~12μm具有尖峰的氧化鋁粒子、及在0.1~1μm具有尖峰的氧化鋁粒子宜為球狀粒子。In the above particle size distribution, the alumina particles having a sharp peak at 30 to 60 μm, the alumina particles having a sharp peak at 2 to 12 μm, and the alumina particles having a sharp peak at 0.1 to 1 μm are preferably spherical particles.

上述散熱片宜為熱傳導率在3.5W/mK以上且小於5.0W/mK。The thermal conductivity of the above-mentioned heat sink is preferably above 3.5W/mK and below 5.0W/mK.

上述散熱片宜為熱擴散率大於1.6×10-6 m2 /s。The thermal diffusivity of the above-mentioned heat sink should be greater than 1.6×10 -6 m 2 /s.

上述散熱片宜為厚度在2.3mm以下。The thickness of the above-mentioned heat sink should be less than 2.3mm.

發明效果 本發明之散熱片,厚片自是不用說,即便薄,仍可良好獲得成膜性。因此,本發明之散熱片可適宜應用在智慧型手機等小型攜帶電子機器上。Invention effect Needless to say, the heat sink of the present invention is a thick sheet, and even if it is thin, good film-forming properties can be obtained. Therefore, the heat sink of the present invention can be suitably applied to small portable electronic devices such as smart phones.

用以實施發明之形態 本發明之散熱片至少含有氧化鋁粒子及樹脂。上述氧化鋁粒子在粒度分布中,分別在粒徑30~60μm、粒徑2~12μm、及粒徑0.1~1μm具有尖峰。此外,在本說明書中,針對粒度分布,有時分別將粒徑30~60μm之氧化鋁粒子稱為「第1氧化鋁粒子」、粒徑2~12μm之氧化鋁粒子稱為「第2氧化鋁粒子」、粒徑0.1~1μm之氧化鋁粒子稱為「第3氧化鋁粒子」。Form used to implement the invention The heat sink of the present invention contains at least alumina particles and resin. The above-mentioned alumina particles have sharp peaks in the particle size distribution at particle diameters of 30 to 60 μm, particle diameters of 2 to 12 μm, and particle diameters of 0.1 to 1 μm, respectively. In addition, in this specification, regarding the particle size distribution, alumina particles with a particle size of 30 to 60 μm are sometimes referred to as "first alumina particles", and alumina particles with a particle size of 2 to 12 μm are sometimes referred to as "second alumina particles". "Particles", alumina particles with a particle size of 0.1~1μm are called "third alumina particles".

第1氧化鋁粒子是在第1~第3氧化鋁粒子中最大的大徑粒子,主要是發揮熱傳導性。第1氧化鋁粒子之尖峰粒徑在粒徑30~60μm之範圍內,且宜在40~50μm之範圍內、更佳在42~48μm之範圍內。藉由使用上述粒徑之氧化鋁粒子作為大徑粒子,製作出薄散熱片時,就不易引發氧化鋁粒子之脫落、散熱片之裂痕。The first alumina particles are the largest large-diameter particles among the first to third alumina particles, and mainly exhibit thermal conductivity. The peak particle size of the first alumina particles is in the range of 30 to 60 μm, preferably in the range of 40 to 50 μm, and more preferably in the range of 42 to 48 μm. By using alumina particles with the above-mentioned particle sizes as large-diameter particles, it is less likely to cause the alumina particles to fall off and the heat sink to crack when producing a thin heat sink.

第1氧化鋁粒子宜為球狀粒子。若第1氧化鋁粒子為球狀粒子,則第1氧化鋁粒子對散熱片基質之樹脂(特別是聚矽氧樹脂)之分散性良好,即便是在製作薄散熱片時,成膜性會更優異。此外,本說明書中,所謂球狀粒子,是指粒子之圓形度(等效圓之周長/粒子投影像之周長)之平均值在0.8以上的粒子。The first alumina particles are preferably spherical particles. If the first alumina particles are spherical particles, the dispersibility of the first alumina particles in the resin of the heat sink matrix (especially polysilicone resin) will be good, and the film-forming property will be better even when making a thin heat sink. Excellent. In addition, in this specification, spherical particles refer to particles whose average value of circularity (circumference of equivalent circle/circumference of particle projection image) is 0.8 or more.

第1氧化鋁粒子宜以矽烷偶合劑進行過表面處理。若以矽烷偶合劑進行過表面處理,則第1氧化鋁粒子對散熱片基質之樹脂(特別是聚矽氧樹脂)之分散性良好,即便在製作薄散熱片時,成膜性會更優異。上述矽烷偶合劑可僅使用一種,亦可使用二種以上。The first alumina particles are preferably surface-treated with a silane coupling agent. If the surface is treated with a silane coupling agent, the first alumina particles will have good dispersibility in the resin of the heat sink matrix (especially the polysiloxane resin), and the film-forming property will be better even when producing a thin heat sink. Only one type of the above-mentioned silane coupling agent may be used, or two or more types may be used.

上述矽烷偶合劑可舉例如:β-(3,4-環氧環己基)乙基三甲氧基矽烷、γ-環氧丙氧基丙基三甲氧基矽烷、γ-環氧丙氧基丙基甲基二乙氧基矽烷等具有烷氧基以外官能基之矽烷偶合劑(含有官能基之矽烷偶合劑);n-癸基三甲氧基矽烷等不具有烷氧基以外官能基之矽烷偶合劑(不含官能基之矽烷偶合劑)等。其中,從與氧化鋁粒子之濕潤性良好、且可望提升散熱片整體強度與提升柔軟性的觀點來看,宜為不含官能基之矽烷偶合劑,且以烷氧基之外之末端為烷基的矽烷偶合劑(含有末端烷基之矽烷偶合劑)為較佳,尤以n-癸基三甲氧基矽烷為佳。Examples of the above-mentioned silane coupling agent include: β-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropyl Silane coupling agents with functional groups other than alkoxy groups such as methyldiethoxysilane (silane coupling agents containing functional groups); silane coupling agents without functional groups other than alkoxy groups such as n-decyltrimethoxysilane (silane coupling agent without functional groups) etc. Among them, from the viewpoint of good wettability with alumina particles and the hope of improving the overall strength and flexibility of the heat sink, it is preferable to use a silane coupling agent that does not contain functional groups and has terminals other than alkoxy groups. Alkyl silane coupling agents (silane coupling agents containing terminal alkyl groups) are preferred, and n-decyltrimethoxysilane is particularly preferred.

本發明之散熱片中所含第1氧化鋁粒子之含有比率,相對於氧化鋁粒子之總量100體積%,為9~60體積%,且宜為25~55體積%,以35~55體積%為佳,以45~55體積%更佳。透過上述含有比率在9體積%以上,熱傳導性會優異。透過上述含有比率在60體積%以下,在製作出薄散熱片時,就不易引發氧化鋁粒子之脫落、散熱片之裂痕。The content ratio of the first alumina particles contained in the heat sink of the present invention is 9 to 60 volume % relative to 100 volume % of the total amount of alumina particles, and is preferably 25 to 55 volume %, with 35 to 55 volume %. % is better, and 45~55% by volume is better. When the content ratio is 9% by volume or more, thermal conductivity will be excellent. By keeping the above content ratio below 60% by volume, when producing a thin heat sink, it is less likely to cause the aluminum oxide particles to fall off and the heat sink to crack.

第2氧化鋁粒子是第1~第3氧化鋁粒子中第2大的中徑粒子,在散熱片中填充在第1氧化鋁粒子之粒子間,使第1氧化鋁粒子彼此之熱傳導性提升。第2氧化鋁粒子之尖峰粒徑在粒徑2~12μm之範圍內,且宜在3~8μm之範圍內。透過使用上述粒徑之氧化鋁粒子作為中徑粒子,則大徑粒子間之間隙填充率高,熱傳導性優異。The second alumina particles are the second largest medium-diameter particles among the first to third alumina particles, and are filled between the first alumina particles in the heat sink to improve the thermal conductivity between the first alumina particles. The peak particle size of the second alumina particles is in the range of 2 to 12 μm, and preferably in the range of 3 to 8 μm. By using alumina particles with the above-mentioned particle diameters as medium-diameter particles, the gap filling rate between large-diameter particles is high and thermal conductivity is excellent.

第2氧化鋁粒子宜為球狀粒子。若第2氧化鋁粒子為球狀粒子,則第2氧化鋁粒子對散熱片基質之樹脂(特別是聚矽氧樹脂)之分散性良好,即便是在製作薄散熱片時,成膜性會更優異。The second alumina particles are preferably spherical particles. If the second alumina particles are spherical particles, the dispersibility of the second alumina particles in the resin of the heat sink matrix (especially polysilicone resin) will be good, and the film-forming property will be better even when making a thin heat sink. Excellent.

第2氧化鋁粒子宜以矽烷偶合劑進行過表面處理。若以矽烷偶合劑進行過表面處理,則第2氧化鋁粒子對散熱片基質之樹脂(特別是聚矽氧樹脂)之分散性良好,即便在製作薄散熱片時,成膜性會更優異。上述矽烷偶合劑可僅使用一種,亦可使用二種以上。The second alumina particles are preferably surface-treated with a silane coupling agent. If the surface is treated with a silane coupling agent, the dispersibility of the second alumina particles in the resin of the heat sink matrix (especially the polysiloxane resin) will be good, and the film-forming property will be better even when producing a thin heat sink. Only one type of the above-mentioned silane coupling agent may be used, or two or more types may be used.

上述矽烷偶合劑可舉作為可使用在上述第1氧化鋁樹脂之表面處理之矽烷偶合劑而例示及說明者。其中,宜為n-癸基三甲氧基矽烷。The above-mentioned silane coupling agent is exemplified and described as a silane coupling agent that can be used for surface treatment of the above-mentioned first alumina resin. Among them, n-decyltrimethoxysilane is preferred.

本發明散熱片中所含第2氧化鋁粒子之含有比率,相對於氧化鋁粒子之總量100體積%,為30~90體積%,且宜為35~75體積%,以40~60體積%為佳,以40~55體積%更佳。透過上述含有比率,則大徑粒子間之間隙填充率高,熱傳導性優異。The content ratio of the second alumina particles contained in the heat sink of the present invention is 30 to 90 volume % relative to 100 volume % of the total amount of alumina particles, and is preferably 35 to 75 volume %, preferably 40 to 60 volume %. The best is 40~55% by volume. With the above content ratio, the gap filling rate between large-diameter particles is high and the thermal conductivity is excellent.

第3氧化鋁粒子是第1~第3氧化鋁粒子中最小的小徑粒子,在散熱片中填充在第1及第2氧化鋁粒子之粒子間,提高散熱片中氧化鋁粒子之填充率,使熱傳導性提升。第3氧化鋁粒子之尖峰粒徑在粒徑0.1~1μm之範圍內,且宜在0.1~0.5μm之範圍內、較佳在0.1~0.4μm之範圍內。透過使用上述粒徑之氧化鋁粒子作為小徑粒子,則大徑、中徑粒子間之間隙填充率高,熱傳導性優異。The third alumina particles are the smallest small diameter particles among the first to third alumina particles. They are filled between the first and second alumina particles in the heat sink to increase the filling rate of the alumina particles in the heat sink. Improve thermal conductivity. The peak particle size of the third alumina particles is in the range of particle size 0.1~1 μm, and is preferably in the range of 0.1~0.5 μm, preferably in the range of 0.1~0.4 μm. By using alumina particles with the above-mentioned particle diameters as small-diameter particles, the gap filling rate between large-diameter and medium-diameter particles is high, and thermal conductivity is excellent.

第3氧化鋁粒子宜為球狀粒子。若第3氧化鋁粒子為球狀粒子,則第3氧化鋁粒子對散熱片基質之樹脂(特別是聚矽氧樹脂)之分散性良好,即便是在製作薄散熱片時,成膜性會更優異。The third alumina particles are preferably spherical particles. If the third alumina particles are spherical particles, the dispersibility of the third alumina particles in the resin of the heat sink matrix (especially polysilicone resin) will be good, and the film-forming property will be better even when making a thin heat sink. Excellent.

第3氧化鋁粒子宜以矽烷偶合劑進行過表面處理。若以矽烷偶合劑進行過表面處理,則第3氧化鋁粒子對散熱片基質之樹脂(特別是聚矽氧樹脂)之分散性良好,即便在製作薄散熱片時,成膜性會更優異。上述矽烷偶合劑可僅使用一種,亦可使用二種以上。The third alumina particles are preferably surface-treated with a silane coupling agent. If the surface is treated with a silane coupling agent, the third alumina particles have good dispersibility into the resin of the heat sink matrix (especially the polysiloxane resin), and the film-forming properties will be even better even when producing a thin heat sink. Only one type of the above-mentioned silane coupling agent may be used, or two or more types may be used.

上述矽烷偶合劑可舉作為可使用在上述第1氧化鋁樹脂之表面處理之矽烷偶合劑而例示及說明者。其中,從與氧化鋁粒子之濕潤性良好、且可望提升散熱片整體強度與提升柔軟性的觀點來看,宜為不含官能基之矽烷偶合劑,且以烷氧基之外之末端為烷基的矽烷偶合劑(含有末端烷基之矽烷偶合劑)為較佳,尤以n-癸基三甲氧基矽烷為佳。The above-mentioned silane coupling agent is exemplified and described as a silane coupling agent that can be used for surface treatment of the above-mentioned first alumina resin. Among them, from the viewpoint of good wettability with alumina particles and the hope of improving the overall strength and flexibility of the heat sink, it is preferable to use a silane coupling agent that does not contain functional groups and has terminals other than alkoxy groups. Alkyl silane coupling agents (silane coupling agents containing terminal alkyl groups) are preferred, and n-decyltrimethoxysilane is particularly preferred.

本發明散熱片中所含第3氧化鋁粒子之含有比率,相對於氧化鋁粒子之總量100體積%,為1~20體積%,且宜為2~10體積%,以3~8體積%為佳,以4~6體積%更佳。透過上述含有比率在1體積%以上,則散熱片中氧化鋁粒子之填充率會變高,熱傳導性優異。若上述含有比率大於20體積%,則有時散熱片表面會變得粉粉的,有時在以被2片剝離片夾著的形態製造出散熱片後,在剝離掉剝離片時,散熱片會產生裂痕。The content ratio of the third alumina particles contained in the heat sink of the present invention is 1 to 20 volume % relative to 100 volume % of the total amount of alumina particles, and is preferably 2 to 10 volume %, preferably 3 to 8 volume %. Preferably, 4 to 6 volume % is more preferred. When the above content ratio is 1 volume % or more, the filling rate of alumina particles in the heat sink becomes high, and the thermal conductivity is excellent. If the above content ratio exceeds 20 volume %, the surface of the heat sink may become powdery. In some cases, after the heat sink is manufactured in a form sandwiched between two release sheets, when the release sheets are peeled off, the heat sink may become powdery. Cracks will occur.

本發明散熱片中之氧化鋁粒子的含有比率(總量),相對於本發明之散熱片100體積%,為70體積%以上,且宜為75體積%以上。透過上述含有比率在70體積%以上,則散熱片中氧化鋁粒子之填充率高,熱傳導性優異。上述含有比率宜在90體積%以下,且以85體積%以下為佳,以80體積%以下更佳。若上述含有比率在90體積%以下,則散熱片不易變脆,製作薄散熱片時之成膜性優異。The content ratio (total amount) of the aluminum oxide particles in the heat sink of the present invention is 70 volume % or more relative to 100 volume % of the heat sink of the present invention, and is preferably 75 volume % or more. When the above-mentioned content ratio is 70 volume % or more, the filling rate of alumina particles in the heat sink is high and the thermal conductivity is excellent. The above-mentioned content ratio is preferably 90 volume % or less, preferably 85 volume % or less, more preferably 80 volume % or less. When the content ratio is 90% by volume or less, the heat sink is less likely to become brittle, and the film-forming property is excellent when producing a thin heat sink.

上述樹脂為形成散熱片基質的成分。上述樹脂可舉熱硬化性樹脂、熱塑性樹脂、活性能量線硬化性樹脂等。上述熱塑性樹脂並無特別限定,可舉苯乙烯系樹脂、乙酸乙烯酯系樹脂、聚酯系樹脂、聚乙烯系樹脂、聚丙烯系樹脂、醯亞胺系樹脂、丙烯酸系樹脂等。上述熱硬化性樹脂並無特別限定,可舉聚矽氧樹脂、酚系樹脂、環氧系樹脂、胺基甲酸酯系樹脂、三聚氰胺系樹脂、醇酸系樹脂等。上述活性能量線硬化性樹脂並無特別限定,可使用例如在分子中具有至少2個(甲基)丙烯醯氧基之聚合性化合物的聚合物等。上述樹脂可僅使用一種,亦可使用二種以上。此外,上述所謂熱硬化性樹脂是包含可藉由加熱而硬化之樹脂、及已藉由加熱而硬化之樹脂這兩者的概念。The above-mentioned resin is a component that forms the matrix of the heat sink. Examples of the resin include thermosetting resin, thermoplastic resin, active energy ray curing resin, and the like. The thermoplastic resin is not particularly limited, and examples thereof include styrene-based resin, vinyl acetate-based resin, polyester-based resin, polyethylene-based resin, polypropylene-based resin, imide-based resin, and acrylic resin. The thermosetting resin is not particularly limited, and examples thereof include silicone resin, phenol resin, epoxy resin, urethane resin, melamine resin, and alkyd resin. The active energy ray-curable resin is not particularly limited, and for example, a polymer of a polymerizable compound having at least two (meth)acryloxy groups in the molecule can be used. Only one type of the above-mentioned resin may be used, or two or more types may be used. In addition, the above-mentioned thermosetting resin is a concept that includes both a resin that can be cured by heating and a resin that has been cured by heating.

就上述樹脂而言,其中又以熱傳導性優異之聚矽氧樹脂為佳。又,在使用聚矽氧樹脂作為基質樹脂之情況下,即便在製作薄散熱片時,成膜性仍優異。上述聚矽氧樹脂可使用在習知乃至慣用之散熱片所用的聚矽氧樹脂。上述聚矽氧樹脂,從不使用溶劑就能使氧化鋁粒子良好分散的觀點來看,宜為2液硬化型之聚矽氧樹脂。上述聚矽氧樹脂可僅使用一種,亦可使用二種以上。Among the above-mentioned resins, polysiloxane resin having excellent thermal conductivity is preferred. In addition, when polysilicone resin is used as the matrix resin, film-forming properties are excellent even when a thin heat sink is produced. The above-mentioned polysilicone resin can be a polysilicone resin used in conventional or conventional heat sinks. The above-mentioned polysilicone resin is preferably a two-liquid curing type polysilicone resin from the viewpoint that the alumina particles can be dispersed well without using a solvent. Only one type of polysiloxy resin may be used, or two or more types may be used.

上述樹脂之含有比率並無特別限定,相對於本發明散熱片100體積%,宜為10體積%以上,且以15體積%以上為佳,以20體積%以上更佳。若上述含有比率在10體積%以上,則散熱片不易變脆,製作薄散熱片時之成膜性優異。上述含有比率宜在30體積%以下,且以25體積%以下為佳。透過上述含有比率在30體積%以下,可提高散熱片中氧化鋁粒子之填充率,熱傳導性會更優異。特別是,聚矽氧樹脂之含有比率宜在上述範圍內。The content ratio of the above-mentioned resin is not particularly limited, but it is preferably 10 volume % or more relative to 100 volume % of the heat sink of the present invention, preferably 15 volume % or more, and more preferably 20 volume % or more. If the content ratio is 10% by volume or more, the heat sink will be less likely to become brittle, and the film forming properties will be excellent when producing a thin heat sink. The above content ratio is preferably 30 volume % or less, and more preferably 25 volume % or less. By keeping the above content ratio below 30 volume %, the filling rate of alumina particles in the heat sink can be increased, and the thermal conductivity will be better. In particular, the content ratio of the polysiloxy resin is preferably within the above range.

本發明散熱片之厚度例如為0.2~10mm,且宜為0.3~5mm。此外,本發明之散熱片即便薄仍可成膜性良好來製作,適合使用在小型的攜帶電子機器上,因此宜為2.3mm以下,且以2mm以下為佳,以1.2mm以下更佳,以1mm以下更佳,尤以0.5mm以下為佳。The thickness of the heat sink of the present invention is, for example, 0.2~10mm, and preferably 0.3~5mm. In addition, the heat sink of the present invention can be made with good film formation even if it is thin, and is suitable for use in small portable electronic devices. Therefore, it is preferably less than 2.3 mm, and preferably less than 2 mm, and more preferably less than 1.2 mm. 1mm or less is better, especially 0.5mm or less.

本發明散熱片之熱傳導率宜在3.5W/mK以上,且以3.6W/mK以上為佳。若上述熱傳導率在3.5W/mK以上,則散熱性更為優異。上述熱傳導率為例如小於5.0W/mK。The thermal conductivity of the heat sink of the present invention should be above 3.5W/mK, and preferably above 3.6W/mK. If the thermal conductivity is 3.5W/mK or more, the heat dissipation properties will be even better. The thermal conductivity is, for example, less than 5.0 W/mK.

本發明散熱片之熱擴散率宜大於1.6×10-6 m2 /s,且以1.65×10-6 m2 /s以上為佳,以1.7×10-6 m2 /s以上更佳。若上述熱擴散率大於1.6×10-6 m2 /s,則散熱性更為優異。The thermal diffusivity of the heat sink of the present invention should be greater than 1.6×10 -6 m 2 /s, preferably above 1.65×10 -6 m 2 /s, and preferably above 1.7×10 -6 m 2 /s. If the thermal diffusivity is greater than 1.6×10 -6 m 2 /s, the heat dissipation property will be even more excellent.

本發明之散熱片可為不帶有基材(基材層)之形態、即所謂「無基材」,亦可為設置在基材之至少單面側的散熱片。特別是,本發明之散熱片可成膜性良好來製造,因此即便是薄的散熱片,仍能以不帶有基材之形態來獲得。此外,上述「基材(基材層)」並不包含在散熱片使用時可剝離之剝離片。The heat sink of the present invention may be in a form without a base material (base material layer), that is, a so-called "base material-less" form, or may be a heat sink provided on at least one side of the base material. In particular, the heat sink of the present invention can be manufactured with good film formation properties, so even a thin heat sink can be obtained in a form without a base material. In addition, the above-mentioned "base material (base material layer)" does not include a release sheet that can be peeled off when the heat sink is used.

本發明散熱片之成膜方法並無特別限定,可採用習知乃至慣用之薄膜之成膜方法、成形體之成形方法。其中,從可連續成膜且生產性優異的觀點來看,宜以捲對捲進行成膜。The film forming method of the heat sink of the present invention is not particularly limited, and conventional or even commonly used methods of forming thin films and forming methods of molded bodies can be used. Among them, from the viewpoint of continuous film formation and excellent productivity, roll-to-roll film formation is preferable.

本發明之散熱片能以例如下述方式來製造:將含有上述樹脂及上述氧化鋁粒子之樹脂組成物塗敷到基材、剝離片之脫模處理面而形成樹脂組成物層,之後,藉由加熱使之硬化並成膜。加熱亦可在上述樹脂組成物層上進一步貼合有剝離片之脫模處理面的狀態下進行。The heat sink of the present invention can be produced, for example, by applying a resin composition containing the above-mentioned resin and the above-mentioned alumina particles to the base material and the release-processed surface of the release sheet to form a resin composition layer, and then, by It is hardened and formed into a film by heating. Heating may also be performed in a state where the release-processed surface of the release sheet is further bonded to the above-mentioned resin composition layer.

上述樹脂組成物含有上述樹脂及上述氧化鋁粒子。上述三種氧化鋁粒子可事先混合後再與上述樹脂混合,亦可將上述三種氧化鋁粒子與上述樹脂同時混合。上述樹脂組成物宜為不含有機溶劑之糊狀。The above-mentioned resin composition contains the above-mentioned resin and the above-mentioned alumina particles. The above three kinds of alumina particles can be mixed in advance and then mixed with the above resin, or the above three kinds of alumina particles and the above resin can be mixed at the same time. The above-mentioned resin composition is preferably in the form of a paste containing no organic solvent.

上述樹脂組成物之片材製作方法並無特別限定,可採用在塗布有脫模劑之分離薄膜間放入材料,以輥層壓機進行層壓的三明治法、熱壓成型機、擠製機等習知塗敷方法。The method for producing the sheet of the above-mentioned resin composition is not particularly limited, and the sandwich method, thermoforming machine, or extruder in which materials are placed between release films coated with a release agent and laminate is performed using a roll laminator can be used. Other common application methods.

本發明之散熱片是將在粒徑30~60μm具有尖峰之第1氧化鋁粒子、在粒徑2~12μm具有尖峰之第2氧化鋁粒子、及在粒徑0.1~1μm具有尖峰之第3氧化鋁粒子這三種特定的氧化鋁粒子分別以特定含有比率來組合使用,並以70體積%以上之比率摻合於上述樹脂基質中,藉此氧化鋁粒子之填充率高且具有優異的熱傳導性,同時卻又能以優異成膜性來獲得,特別是即便為薄厚度仍能以優異成膜性來獲得。The heat sink of the present invention is composed of first alumina particles having a sharp peak at a particle size of 30 to 60 μm, second alumina particles having a sharp peak at a particle size of 2 to 12 μm, and third alumina particles having a sharp peak at a particle size of 0.1 to 1 μm. Aluminum particles: These three specific alumina particles are used in combination with specific content ratios, and are blended into the above-mentioned resin matrix at a ratio of 70% by volume or more. As a result, the alumina particles have a high filling rate and excellent thermal conductivity. At the same time, it can be obtained with excellent film-forming properties, especially even with a thin thickness.

[實施例] 以下基於實施例以更詳細說明本發明,然本發明並非僅受限於該等實施例。[Example] The present invention is described in more detail below based on examples, but the present invention is not limited only to these examples.

實施例1 製作氧化鋁粒子組成物1,其混合有55體積%尖峰粒徑為45μm之球狀氧化鋁粒子、40體積%尖峰粒徑為5μm之球狀氧化鋁粒子、及5體積%尖峰粒徑為0.2μm之球狀氧化鋁粒子。此外,上述三種氧化鋁粒子是事先在溶劑中相對於氧化鋁粒子100質量份攪拌混合1質量份之矽烷偶合劑(商品名「Z-6210」、Dow Corning Toray股份有限公司製、n-癸基三甲氧基矽烷),藉此以矽烷偶合劑進行過表面處理者。將上述氧化鋁粒子組成物1以使其達到77體積%(氧化鋁粒子之總填充量77體積%)之方式混合到聚矽氧樹脂(商品名「TSE-3062」、Momentive公司製)之1劑及2劑的混合物中,製作出樹脂糊。接著,在2枚剝離片之脫模處理面之間配置上述樹脂糊,使用輥層壓機進行層壓,製作出[剝離片/樹脂糊層/剝離片]之積層體。然後,將上述積層體以70℃加熱30分鐘,藉此使樹脂糊層熱硬化,製作出實施例1之散熱片。此外,實施例1之散熱片是製作出厚度0.36mm(Type1)、厚度0.73mm(Type2)、及厚度1.99mm(Type3)這三種。Example 1 An alumina particle composition 1 was prepared, which contained 55% by volume of spherical alumina particles with a peak particle diameter of 45 μm, 40% by volume of spherical alumina particles with a peak particle diameter of 5 μm, and 5% by volume of spherical alumina particles with a peak particle diameter of 0.2 μm spherical alumina particles. In addition, the above three kinds of alumina particles were prepared by stirring and mixing 1 part by mass of a silane coupling agent (trade name "Z-6210", manufactured by Dow Corning Toray Co., Ltd., n-decyl) with respect to 100 parts by mass of the alumina particles in a solvent. Trimethoxysilane), which has been surface treated with a silane coupling agent. The above-mentioned alumina particle composition 1 is mixed with polysilicone resin (trade name "TSE-3062", manufactured by Momentive Corporation) 1 so as to reach 77 volume % (the total filling amount of alumina particles is 77 volume %). A resin paste is prepared from a mixture of 1 agent and 2 agents. Next, the above-mentioned resin paste is arranged between the release-processed surfaces of two release sheets, and is laminated using a roll laminator to produce a laminated body of [release sheet/resin paste layer/release sheet]. Then, the above-described laminated body was heated at 70° C. for 30 minutes to thermally harden the resin paste layer, thereby producing the heat sink of Example 1. In addition, the heat sink of Example 1 is produced in three types: thickness 0.36mm (Type1), thickness 0.73mm (Type2), and thickness 1.99mm (Type3).

實施例2 製作氧化鋁粒子組成物2,其混合有40體積%尖峰粒徑為45μm之球狀氧化鋁粒子、50體積%尖峰粒徑為5μm之球狀氧化鋁粒子、及10體積%尖峰粒徑為0.2μm之球狀氧化鋁粒子。此外,上述三種氧化鋁粒子是與實施例1同樣事先以矽烷偶合劑進行過表面處理者。然後,除了使用氧化鋁粒子組成物2取代氧化鋁粒子組成物1之外,其餘以與實施例1同樣方式製作出實施例2之散熱片。此外,實施例2之散熱片是製作出厚度0.45mm(Type1)、厚度0.77mm(Type2)、及厚度1.97mm(Type3)這三種。Example 2 An alumina particle composition 2 was prepared, in which 40% by volume of spherical alumina particles with a peak particle diameter of 45 μm, 50% by volume of spherical alumina particles with a peak particle diameter of 5 μm, and 10% by volume of spherical alumina particles with a peak particle diameter of 0.2 were mixed. μm spherical alumina particles. In addition, the above three kinds of alumina particles were surface-treated with a silane coupling agent in advance as in Example 1. Then, the heat sink of Example 2 was produced in the same manner as in Example 1, except that alumina particle composition 2 was used instead of alumina particle composition 1. In addition, the heat sink of Example 2 is produced in three types: thickness 0.45mm (Type1), thickness 0.77mm (Type2), and thickness 1.97mm (Type3).

比較例1 製作氧化鋁粒子組成物3,其混合有70體積%尖峰粒徑為70μm之球狀氧化鋁粒子、12體積%尖峰粒徑為9μm之非球狀氧化鋁粒子、及18體積%尖峰粒徑為3μm之非球狀氧化鋁粒子。此外,上述三種氧化鋁粒子是與實施例1同樣事先以矽烷偶合劑進行過表面處理者。然後,除了使用氧化鋁粒子組成物3取代氧化鋁粒子組成物1之外,其餘以與實施例1同樣方式製作出比較例1之散熱片。此外,比較例1之散熱片是製作出厚度0.99mm(Type1)及厚度2.32mm(Type2)這二種。Comparative example 1 An alumina particle composition 3 was prepared, which was mixed with 70% by volume of spherical alumina particles with a peak particle diameter of 70 μm, 12% by volume of non-spherical alumina particles with a peak particle diameter of 9 μm, and 18% by volume of alumina particles with a peak particle diameter of 9 μm. 3μm non-spherical alumina particles. In addition, the above three kinds of alumina particles were surface-treated with a silane coupling agent in advance as in Example 1. Then, the heat sink of Comparative Example 1 was produced in the same manner as in Example 1, except that alumina particle composition 3 was used instead of alumina particle composition 1. In addition, the heat sink of Comparative Example 1 was produced in two types: 0.99 mm thick (Type 1) and 2.32 mm thick (Type 2).

比較例2 製作氧化鋁粒子組成物4,其混合有80體積%尖峰粒徑為90μm之球狀氧化鋁粒子、10體積%尖峰粒徑為5μm之球狀氧化鋁粒子、及10體積%尖峰粒徑為3μm之非球狀氧化鋁粒子。此外,上述三種氧化鋁粒子是與實施例1同樣事先以矽烷偶合劑進行過表面處理者。然後,除了使用氧化鋁粒子組成物4取代氧化鋁粒子組成物1之外,其餘以與實施例1同樣方式製作出比較例2之散熱片。此外,比較例2之散熱片是製作出厚度1.77mm(Type1)及厚度2.50mm(Type2)這二種。Comparative example 2 An alumina particle composition 4 was prepared, in which 80% by volume of spherical alumina particles with a peak particle diameter of 90 μm, 10% by volume of spherical alumina particles with a peak particle diameter of 5 μm, and 10% by volume of spherical alumina particles with a peak particle diameter of 3 μm were mixed. non-spherical alumina particles. In addition, the above three kinds of alumina particles were surface-treated with a silane coupling agent in advance as in Example 1. Then, the heat sink of Comparative Example 2 was produced in the same manner as in Example 1, except that alumina particle composition 4 was used instead of alumina particle composition 1. In addition, the heat sink of Comparative Example 2 was produced in two types: 1.77 mm thick (Type 1) and 2.50 mm thick (Type 2).

(評價) 對於在實施例及比較例獲得之各散熱片如以下進行評價。評價結果記載於表中。此外,在所有實施例中,全部氧化鋁粒子中依據粒度分布,粒徑30~60μm之氧化鋁粒子的比率在9~60體積%之範圍內,粒徑2~12μm之氧化鋁粒子的比率在30~90體積%之範圍內,粒徑0.1~1μm之氧化鋁粒子的比率在1~20體積%之範圍內。(evaluation) Each heat sink obtained in Examples and Comparative Examples was evaluated as follows. The evaluation results are listed in the table. In addition, in all the examples, according to the particle size distribution of all alumina particles, the ratio of alumina particles with a particle size of 30 to 60 μm is in the range of 9 to 60% by volume, and the ratio of alumina particles with a particle size of 2 to 12 μm is in the range of 9 to 60% by volume. The ratio of alumina particles with a particle size of 0.1 to 1 μm is in the range of 1 to 20 volume %, within the range of 30 to 90 volume %.

(1)外觀 從實施例及比較例所得之[剝離片/散熱片/剝離片]之積層體剝離掉其中一剝離片後,針對散熱片外觀依據下述基準進行外觀評價。 ○(良好):未發生氧化鋁粒子之脫落、裂痕、及貼附在已剝離之剝離片上。 ×(不良):發生氧化鋁粒子之脫落、裂痕、或貼附在已剝離之剝離片上。(1) Appearance After peeling off one of the release sheets from the laminate of [release sheet/heat sink/release sheet] obtained in Examples and Comparative Examples, the appearance of the heat sink was evaluated based on the following criteria. ○ (Good): The aluminum oxide particles did not fall off, crack, or adhere to the peeled off sheet. × (Defect): Aluminum oxide particles are peeled off, cracked, or adhered to the peeled off sheet.

(2)熱擴散率 積層實施例及比較例所得之各散熱片而製作出厚度1mm以上的塊體,使用熱物性測定裝置(商品名「LFA-502、京都電子工業股份有限公司製」)並以雷射閃光法(laser flash method)來實施測定。(2)Thermal diffusivity The heat sinks obtained in Examples and Comparative Examples were laminated to produce a block with a thickness of 1 mm or more, and a thermal physical property measuring device (trade name "LFA-502, manufactured by Kyoto Electronics Co., Ltd.") was used to measure the thermal properties using the laser flash method ( laser flash method) to perform the measurement.

(3)熱傳導率 針對實施例及比較例所得之各散熱片,使用微差掃描熱量計(商品名「X-DSC7000」型、股份有限公司日立High-Tech Science製),並利用DSC法實施在25℃下之比熱測定。又,針對各散熱片,使用電子比重計(商品名「EW-300SG」、Alfa Mirage股份有限公司製)並以水中取代法實施比重測定。然後,使用上述所得熱擴散率、比熱、及比重的計算來算出熱傳導率。(3)Thermal conductivity For each heat sink obtained in the Examples and Comparative Examples, a differential scanning calorimeter (trade name "X-DSC7000" model, manufactured by Hitachi High-Tech Science Co., Ltd.) was used to measure the specific heat at 25°C using the DSC method. Determination. Moreover, the specific gravity of each heat sink was measured by the water substitution method using an electronic hydrometer (trade name "EW-300SG", manufactured by Alfa Mirage Co., Ltd.). Then, the thermal conductivity was calculated using the above-obtained calculations of thermal diffusivity, specific heat, and specific gravity.

[表1] [Table 1]

本發明之散熱片(實施例)即便是0.5mm以下之厚度,仍可成膜性良好來製造。又,熱擴散率及熱傳導率亦高,且散熱性能優異。另一方面,比較例1及2之散熱片中,厚度在2mm以下者,無法成膜性良好來獲得。The heat sink (Example) of the present invention can be manufactured with good film formation properties even if the thickness is 0.5 mm or less. In addition, the thermal diffusivity and thermal conductivity are also high, and the heat dissipation performance is excellent. On the other hand, among the heat sinks of Comparative Examples 1 and 2, those with a thickness of 2 mm or less were unable to obtain good film-forming properties.

(無)(without)

Claims (5)

一種散熱片,含有氧化鋁粒子及聚矽氧樹脂,前述散熱片中前述氧化鋁粒子之含有比率在70體積%以上,前述氧化鋁粒子在粒度分布中,分別在粒徑30~60μm、2~12μm、及0.1~1μm具有尖峰,在前述粒度分布中,前述氧化鋁粒子中之粒徑30~60μm之氧化鋁粒子的比率為9~60體積%,粒徑2~12μm之氧化鋁粒子的比率為35~90體積%,粒徑0.1~1μm之氧化鋁粒子的比率為1~20體積%;該散熱片之厚度在2.3mm以下。 A heat sink containing alumina particles and polysiloxane resin. The content ratio of the alumina particles in the heat sink is more than 70% by volume. The alumina particles have a particle size distribution of 30~60 μm and 2~ There are sharp peaks at 12 μm and 0.1~1 μm. In the above particle size distribution, the ratio of alumina particles with a particle size of 30~60 μm in the alumina particles is 9~60% by volume, and the ratio of alumina particles with a particle size of 2~12 μm is The ratio of aluminum oxide particles with a particle size of 0.1 to 1 μm is 35 to 90 volume %, and the ratio is 1 to 20 volume %; the thickness of the heat sink is less than 2.3 mm. 如請求項1之散熱片,其中在前述粒度分布中,在30~60μm具有尖峰之氧化鋁粒子、在2~12μm具有尖峰之氧化鋁粒子、及在0.1~1μm具有尖峰之氧化鋁粒子為球狀粒子。 The heat sink of claim 1, wherein in the aforementioned particle size distribution, the alumina particles with peaks at 30~60 μm, the alumina particles with sharp peaks at 2~12 μm, and the alumina particles with peaks at 0.1~1 μm are spheres. shaped particles. 如請求項1或2之散熱片,其中熱傳導率在3.5W/mK以上且小於5.0W/mK。 For example, the heat sink of claim 1 or 2, wherein the thermal conductivity is above 3.5W/mK and less than 5.0W/mK. 如請求項1或2之散熱片,其中熱擴散率大於1.6×10-6m2/s。 For example, the heat sink of claim 1 or 2, wherein the thermal diffusivity is greater than 1.6×10 -6 m 2 /s. 如請求項3之散熱片,其中熱擴散率大於1.6×10-6m2/s。 For example, the heat sink of claim 3 has a thermal diffusivity greater than 1.6×10 -6 m 2 /s.
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