TWI853733B - Organic solvent regeneration system and operation method thereof - Google Patents

Abstract

The present invention provides an organic solvent regeneration system, which includes a monitoring unit, a feeding unit, a regeneration unit, a recovery unit and a discharging unit. By using the technical characteristics of the monitoring unit, the corresponding operating environment required by the organic solvent regeneration system as a whole can be established, and a liquid to be treated can be passed through the organic solvent regeneration system disclosed by the present invention to obtain a regenerated liquid, thereby achieving a significant effect of organic solvent regeneration and recovery.

Description

Organic solvent regeneration system and operation method thereof

The present invention relates to organic solvent regeneration technology, and in particular to an organic solvent regeneration system suitable for use in electronic semiconductor industry processes or optoelectronic industry processes.

Organic solvent recovery systems currently used in electronic semiconductor industry processes or optoelectronic industry processes are generally used in photoresist strippers (PR strippers), cleaning solvents, or bonding solvents containing NMP (N-methyl-pyrrolidinone) chemical components. However, the subsequent treatment or procedures of waste solvents that are inevitably generated by the related processes have been a continuous problem for all parties.

Therefore, how to meet the current United Nations Sustainable Development Goals (SDGs) of continuously improving green manufacturing capabilities to achieve environmental sustainability is actually the direction that the present invention urgently seeks to improve.

In order to solve the problems described in the prior art, the present invention provides an organic solvent regeneration system suitable for use in electronic semiconductor industry processes or optoelectronic industry processes. By including a monitoring unit, the present invention can establish an operating environment corresponding to the entire organic solvent regeneration system, and obtain a regenerated liquid after a liquid to be treated passes through the organic solvent regeneration system disclosed in the present invention, thereby achieving a significant effect of organic solvent regeneration and recovery, and can also meet the current United Nations Sustainable Development Goals (SDGs) of continuously improving green manufacturing capabilities and contributing to environmental sustainability.

In order to achieve the above-mentioned purpose, the present invention provides an organic solvent regeneration system, which includes a monitoring unit, a feeding unit, a regeneration unit, a recovery unit and a discharging unit, wherein the monitoring unit is electrically connected to and electrically monitors the feeding unit, the regeneration unit, the recovery unit and the discharging unit, and the regeneration unit is connected to the feeding unit, the recovery unit and the discharging unit, respectively, and the other end of the recovery unit can be selectively connected to the feeding unit; wherein the monitoring unit further includes a vacuum module and a temperature control module, so that the feeding unit, the regeneration unit, the recovery unit and the discharging unit are all electrically controlled by the vacuum module or the temperature control module of the monitoring unit.

The monitoring unit of the organic solvent regeneration system disclosed in the present invention electrically monitors the feed unit, the regeneration unit, the recovery unit and the discharge unit. In this way, the corresponding operating environment (including vacuum degree or temperature, etc.) required by the organic solvent regeneration system as a whole can be established, and a liquid to be treated can be subjected to the processes of the organic solvent regeneration system disclosed in the present invention to obtain a regenerated liquid (for example, containing NMP (i.e., N-methyl-pyrrolidinone) or OEL). Clean-01 and other regenerated organic solvent liquids), thereby achieving a significant effect of organic solvent regeneration and recovery, and even further providing the photoresist stripping agent, cleaning solvent, or bonding agent required in the electronic semiconductor industry process or the optoelectronic industry process.

In summary, the present invention further provides an operating method of an organic solvent regeneration system, which comprises the following steps:

Step A, recommending a starting operating environment, is to place a liquid to be processed in the feed unit, and electrically activate the vacuum module and the temperature control module of the monitoring unit so that the overall operating environment is maintained at a predetermined starting operating vacuum degree and a predetermined starting operating temperature.

Step B, the first filtering process, is to electrically control the feed unit and the regeneration unit through the monitoring unit, so that the liquid to be treated placed in the feed unit can be transferred to the regeneration unit, and the vacuum module and the temperature control module of the monitoring unit are electrically activated, so that the operating vacuum degree and operating temperature required by the first filtering process are met in the regeneration unit, thereby allowing the liquid to be treated to gradually filter out its excess water vapor.

Step C, the impurity liquid separation process, is to electrically activate the vacuum module and the temperature control module of the monitoring unit so that the regeneration unit meets the operating vacuum and operating temperature required for the impurity liquid separation process, thereby allowing the liquid to be treated to gradually filter out the excess impurities.

In step D, the regeneration liquid recovery process, the monitoring unit electrically controls the regeneration unit, the recovery unit and the discharge unit respectively, so that a regeneration liquid in the regeneration unit can be transferred to the recovery unit, and an impurity liquid in the regeneration unit can be transferred to the discharge unit.

The applicant first explains that throughout the entire specification, including the embodiments introduced below and the various claims in the scope of the patent application, directional terms are based on the directions of the various figures listed in the [Simple Description of the Figures] of this case. Secondly, in the embodiments and figures to be introduced below, the same component numbers represent the same or similar components or their structural features. Moreover, the detailed structure, features, assembly or use, manufacturing, etc. of the present invention will be described in the subsequent detailed description of the implementation method. However, those with ordinary knowledge in the field of the present invention should understand that such detailed descriptions and the embodiments listed in the present invention are only used to support and illustrate that the present invention can be implemented, and are not used to limit the scope of the patent application of the present invention.

Please refer to FIG. 1 to FIG. 3, which are preferred embodiments of the present invention, and disclose an organic solvent regeneration system 1 suitable for use in electronic semiconductor industry processes or optoelectronic industry processes. The system comprises a monitoring unit 10, a feeding unit 20 (e.g., a large feeding container or barrel tank, but this is not intended to limit the scope of the present invention), a regeneration unit 30 (e.g., a regeneration container or barrel tank, but this is not intended to limit the scope of the present invention), a recovery unit 40 (e.g., a large recovery container or barrel tank, but this is not intended to limit the scope of the present invention), and a discharging unit 50 (e.g., a large discharging container or barrel tank, but this is not intended to limit the scope of the present invention). Limiting the scope of the patent application of the present invention), the monitoring unit 10 is used to electrically connect and electrically monitor the feed unit 20, the regeneration unit 30, the recovery unit 40 and the discharge unit 50, and the regeneration unit 30 is connected to the feed unit 20, the recovery unit 40 and the discharge unit 50, respectively, wherein the monitoring unit 10 includes a vacuum module 11 and a temperature control module 13, so that the feed unit 20, the regeneration unit 30, the recovery unit 40 and the discharge unit 50 are all electrically controlled by the vacuum module 11 or the temperature control module 13 of the monitoring unit 10, thereby generating the corresponding vacuum degree and operating temperature required during operation. Preferably, since the overall volume ratio of the organic solvent regeneration system 1 required for the electronic semiconductor industry process or the optoelectronic industry process disclosed in the preferred embodiment of the present invention is higher than that of the prior art, it can be remarkably and appropriately customized and installed in existing electronic semiconductor industry or optoelectronic industry factories, thereby achieving the effect of making good use of the factory volume ratio and appropriately increasing the factory production capacity demand.

The above are the technical features of the organic solvent regeneration system 1 and its sub-components disclosed in the preferred embodiment of the present invention. Subsequently, the main operation method steps of the organic solvent regeneration system 1 of the preferred embodiment of the present invention and the corresponding effects to be achieved are disclosed as follows:

Step A, establish the initial working environment; please refer to Figure 1 and Figure 2, place the liquid to be treated (for example, the organic solvent generally used for photoresist stripping agent, cleaning solvent, or bonding, which contains NMP (i.e. N-methyl-pyrrolidinone) chemical components) in the organic In the feed unit 20 of the solvent regeneration system 1, the vacuum module 11 and the temperature control module 13 of the monitoring unit 10 are then electrically activated to maintain the overall operating environment of the organic solvent regeneration system 1 at a predetermined initial operating vacuum and a predetermined initial operating temperature, wherein the predetermined initial operating vacuum disclosed in the preferred embodiment of the present invention is set to be maintained at 0.045 Bar, and the predetermined initial operating temperature is set to be maintained at 80°C. In this way, when the liquid to be regenerated is placed in the feed unit 20 of the organic solvent regeneration system 1 disclosed in the present invention, the effect of maintaining the operating process in a stable initial operating environment can be achieved. It is worth mentioning that in this step A, the predetermined starting operating vacuum degree of the organic solvent regeneration system 1 as a whole may be between 0.035 Bar and 0.055 Bar, and preferably the predetermined starting operating vacuum degree is between 0.04 Bar and 0.05 Bar; in addition, the predetermined starting operating temperature of the organic solvent regeneration system 1 as a whole may be between 70°C and 90°C, and preferably the predetermined starting operating temperature is between 75°C and 85°C.

Step B, first filtering process; please refer to FIG. 1 and FIG. 2 together. As mentioned above, the monitoring unit 10 of the organic solvent regeneration system 1 electrically controls the feed unit 20 and the regeneration unit 30 respectively, so that the liquid to be treated placed in the feed unit 20 of the organic solvent regeneration system 1 can be transferred to the regeneration unit 30. At this time, the vacuum module 11 and the temperature control module 13 of the monitoring unit 10 are electrically activated again, so that the regeneration unit 30 meets the operating environment required for the first filtering process. The operating vacuum required for the first filtering process of the regeneration unit 30 of the organic solvent regeneration system 1 disclosed in the preferred embodiment of the present invention is set to be maintained at 0.05 Bar, and the operating temperature required for the first filtering process is gradually increased from 80°C to 120°C. In this way, the liquid to be treated in the regeneration unit 30 will gradually filter out its excess water vapor through the first filtering process of this step B, thereby achieving the effect of removing excess water vapor like the distillation process. It is worth mentioning that in this step B, the operating vacuum required for the first filtering process of the regeneration unit 30 of the organic solvent regeneration system 1 may be between 0.04 Bar and 0.06 Bar, and the preferred operating vacuum is between 0.045 Bar and 0.055 Bar; in addition, the operating temperature required for the first filtering process of the regeneration unit 30 of the organic solvent regeneration system 1 may be between 110°C and 130°C, and the preferred operating temperature is between 115°C and 125°C.

Step C, impurity liquid separation process; please refer to FIG. 1 and FIG. 2 together. As mentioned above, the vacuum module 11 and the temperature control module 13 of the monitoring unit 10 of the organic solvent regeneration system 1 are electrically controlled so that the regeneration unit 30 meets the operating environment required for the impurity liquid separation process. The operating vacuum required for the impurity liquid separation process of the regeneration unit 30 of the organic solvent regeneration system 1 disclosed in the preferred embodiment of the present invention is set to be maintained at 0.05 Bar, and the operating temperature required for the impurity liquid separation process is gradually increased from 120°C to 150°C. In this way, the liquid to be treated in the regeneration unit 30 will gradually filter out other impurity liquids through the impurity liquid separation process of this step C, thereby achieving the effect of removing excess impurity liquids like the distillation process. It is worth mentioning that in this step C, the operating vacuum required for the impurity liquid separation process of the regeneration unit 30 of the organic solvent regeneration system 1 can be between 0.04 Bar and 0.06 Bar, and the preferred operating vacuum is between 0.045 Bar and 0.055 Bar; in addition, the operating temperature required for the impurity liquid separation process of the regeneration unit 30 of the organic solvent regeneration system 1 is between 140°C and 160°C, and the preferred operating temperature is between 145°C and 155°C.

Step D, regeneration liquid recovery process; please refer to FIG. 1 and FIG. 2 together. As mentioned above, the monitoring unit 10 of the organic solvent regeneration system 1 electrically controls the regeneration unit 30, the recovery unit 40 and the discharge unit 50 respectively, so that the regeneration liquid placed in the regeneration unit 30 of the organic solvent regeneration system 1 and obtained after the first filtering process of step B and the impurity liquid separation process of step C can be transferred to the recovery unit 40, and the impurity liquid separated from the first filtering process of step B and step C can be discharged to the recovery unit 40. The impure liquid obtained after the separation process can be transferred to the discharging unit 50. In this way, the regenerated liquid transferred to the recovery unit 40 can achieve the remarkable effect of organic solvent regeneration and recovery through the regenerated liquid recovery process of this step D, and can even further provide the photoresist stripping agent, cleaning solvent, or bonding agent required in the electronic semiconductor industry process or the optoelectronic industry process as a regenerated organic solvent, which can better meet the current United Nations Sustainable Development Goals (Sustainable Development Goals). The invention can contribute to the continuous improvement of green manufacturing capabilities in the Sustainable Development Goals (SDGs) and the sustainable development of the environment. In addition, the impure liquid transferred to the discharge unit 50 can be properly placed and wait for the subsequent treatment process.

It is worth mentioning that in the aforementioned step D, the regeneration liquid in the recovery unit 40 of the organic solvent regeneration system 1 is a regeneration organic solvent liquid including NMP (i.e., N-methyl-pyrrolidinone) or OEL Clean-01; in addition, the operating vacuum required for the recovery unit 40 of the organic solvent regeneration system 1 and the discharge unit 50 can be between 0.04 Bar and 0.06 Bar, and the preferred operating vacuum is between 0.045 Bar and 0.065 Bar. Bar; in addition, the required operating temperature of the recovery unit 40 of the organic solvent regeneration system 1 is between 130°C and 160°C, and the preferred operating temperature is between 135°C and 155°C; in addition, the discharge unit 50 of the organic solvent regeneration system 1 further includes a cooling module (not shown in the figure) for providing the impurity liquid transferred to the discharge unit 50 to be cooled to a predetermined temperature before being properly placed and waiting for subsequent processing steps. What is more worth mentioning is that in the aforementioned step D, please refer to Figures 1 to 3 again. Through the technical feature that the other end of the recovery unit 40 of the organic solvent regeneration system 1 can be selectively connected to the feed unit 20, the monitoring unit 10 can transfer the regeneration liquid to the recovery unit 40 again after the first filtering process of the aforementioned step B and the impurity liquid separation process of step C, thereby achieving the effect of precise extraction and multiple extraction of the required regeneration liquid.

1: Organic solvent regeneration system 10: Monitoring unit 11: Vacuum module 13: Temperature control module 20: Feeding unit 30: Regeneration unit 40: Recovery unit 50: Discharging unit

FIG. 1 is a schematic plan view of a preferred embodiment of the present invention, which mainly discloses an overall practical layout of an organic solvent regeneration system suitable for electronic semiconductor industry processes or optoelectronic industry processes. FIG. 2 is a main system block diagram of the organic solvent regeneration system of FIG. 1. FIG. 3 is another main system block diagram of the organic solvent regeneration system similar to FIG. 2, which mainly discloses that the other end of a recovery unit of the organic solvent regeneration system can be selectively connected to a feed unit.

1: Organic solvent regeneration system

10: Monitoring unit

11: Vacuum module

13: Temperature control module

20: Feeding unit

30: Regeneration unit

40: Recycling unit

50: Discharging unit

Claims (4)

An organic solvent regeneration system comprises: a monitoring unit (10), a feed unit (20), a regeneration unit (30), a recovery unit (40) and a discharge unit (50), wherein the monitoring unit (10) is electrically connected to and electrically monitors the feed unit (20), the regeneration unit (30), the recovery unit (40) and the discharge unit (50), and the regeneration unit (30) is electrically connected to the feed unit (20), the recovery unit (40) and the discharge unit (50). The invention relates to a novel method for controlling the discharge of waste gas from a feed unit (20) and a recovery unit (40). The monitoring unit (10) comprises a vacuum module (11) and a temperature control module (13), so that the feed unit (20), the regeneration unit (30), the recovery unit (40) and the discharge unit (50) are all electrically controlled by the vacuum module (11) or the temperature control module (13) of the monitoring unit (10). The monitoring unit (10) is electrically activated to control the discharge of waste gas from a feed unit (20) and a recovery unit (40). The vacuum module (11) and the temperature control module (13) of the monitoring unit (10) enable the organic solvent regeneration system to be maintained at a predetermined initial operating vacuum and a predetermined initial operating temperature; wherein the monitoring unit (10) electrically controls the feed unit (20) and the regeneration unit (30) respectively, so that a liquid to be treated placed in the feed unit (20) can be transferred to the regeneration unit (30), so that the regeneration unit (30) meets the operating vacuum required by a first filtering process. degree and operating temperature, and the regeneration unit (30) meets the operating vacuum degree and operating temperature required for a process of separating impurities in a liquid; wherein the monitoring unit (10) electrically controls the regeneration unit (30), the recovery unit (40) and the discharge unit (50) respectively, so that a regeneration liquid placed in the regeneration unit (30) can be transferred to the recovery unit (40), and the impurity liquid placed in the regeneration unit (30) can be transferred to the discharge unit (50). The organic solvent regeneration system as described in claim 1, wherein the discharge unit (50) includes a cooling module for providing the impurity liquid transferred to the discharge unit (50) to be cooled to a predetermined temperature. An operating method of an organic solvent regeneration system as described in claim 1, the steps of which include: step A, suggesting an initial operating environment, which is to place a liquid to be treated in the feed unit (20), and electrically start the vacuum module (11) and the temperature control module (13) of the monitoring unit (10) to maintain the entire operating environment at a predetermined initial operating vacuum degree and a predetermined initial operating temperature; wherein the predetermined initial operating vacuum degree is between 0.035 Bar and 0.055 Bar, and the predetermined initial operating temperature is between 70°C and 90°C; step B, a first filtering process, which is to start the first filtering process by the monitoring unit (1 0) electrically controlling the feed unit (20) and the regeneration unit (30) respectively, so that the liquid to be treated placed in the feed unit (20) can be transferred to the regeneration unit (30), and electrically activating the vacuum module (11) and the temperature control module (13) of the monitoring unit (10) so that the regeneration unit (30) meets the operating vacuum and operating temperature required by the first filtering process, thereby allowing the liquid to be treated to gradually filter out its excess water vapor; wherein the operating vacuum required for the first filtering process is between 0.04 Bar and 0.06 Bar, and the operating temperature required for the first filtering process is between 0.04 Bar and 0.06 Bar. The operating temperature is between 110°C and 130°C; step C, the impurity liquid separation process, is to electrically activate the vacuum module (11) and the temperature control module (13) of the monitoring unit (10), so that the regeneration unit (30) meets the operating vacuum and operating temperature required for the impurity liquid separation process, and then the liquid to be treated gradually filters out the excess impurity liquid; wherein the operating vacuum required for the impurity liquid separation process is between 0.04 Bar and 0.06 Bar, and the operating temperature required for the impurity liquid separation process is between 140°C and 160°C; and step D. The regeneration liquid recovery process is to electrically control the regeneration unit (30), the recovery unit (40) and the discharge unit (50) by the monitoring unit (10) respectively, so that a regeneration liquid in the regeneration unit (30) can be transferred to the recovery unit (40), and an impurity liquid in the regeneration unit (30) can be transferred to the discharge unit (50); wherein the operating vacuum required by the recovery unit (40) and the discharge unit (50) is between 0.04 Bar and 0.06 Bar, and the operating temperature required by the recovery unit (40) is between 130°C and 160°C. The operating method of the organic solvent regeneration system as described in claim 3, wherein in step D, the monitoring unit (10) can electrically control the regeneration liquid in the recovery unit (40) to be transferred to the feed unit (20) again.

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