TWI854538B - Support device, support method and support program - Google Patents

Support device, support method and support program Download PDF

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TWI854538B
TWI854538B TW112110453A TW112110453A TWI854538B TW I854538 B TWI854538 B TW I854538B TW 112110453 A TW112110453 A TW 112110453A TW 112110453 A TW112110453 A TW 112110453A TW I854538 B TWI854538 B TW I854538B
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sensor
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factory
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TW202338543A (en
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高崎英里子
平田木乃美
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日商住友重機械工業股份有限公司
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    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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Abstract

[課題]在工廠的感測器檢測到異常的情況下,容易且迅速地掌握故障部位或原因的判斷所需的資訊。 [解決手段]一種用於支援工廠的運轉的支援裝置(10),具備:異常檢測部(14e),其係依據由設置在工廠(1)上之複數個感測器檢測出之感測器資料,檢測顯示出異常之感測器;記憶部(18),其係記憶有感測器關聯性資訊,該感測器關聯性資訊關聯建立有:各感測器所屬並且表示工廠的構成要素之複數個感測器部位、通過複數個感測器部位並且藉由分別屬於該複數個感測器部位之感測器測定之製程、及製程通過複數個感測器部位之製程順序;及關聯資訊確定部(14d),其係參閱記憶在記憶部(18)中之感測器關聯性資訊,對與針對異常檢測部(14e)所檢測到之檢測感測器在感測器部位、製程及製程順序中的至少一個中確認為具有關聯性的關聯感測器相關之資訊進行確定。 [Topic] When a sensor in a factory detects an abnormality, it is easy and quick to grasp the information required for determining the fault location or cause. [Solution] A support device (10) for supporting the operation of a factory, comprising: an abnormality detection unit (14e) that detects a sensor that has displayed an abnormality based on sensor data detected by a plurality of sensors installed in the factory (1); a memory unit (18) that stores sensor correlation information, wherein the sensor correlation information is associated with: a plurality of sensor locations to which each sensor belongs and which represent a component of the factory, and a plurality of sensor locations that are detected by the plurality of sensors. The sensor parts are respectively used to measure the processes and the process sequence of the processes passing through the sensor parts; and the related information determination unit (14d) refers to the sensor related information stored in the memory unit (18) to determine the information related to the related sensor detected by the abnormality detection unit (14e) in at least one of the sensor parts, process and process sequence.

Description

支援裝置、支援方法及支援程式Support device, support method and support program

本發明有關一種用於支援工廠的運轉的支援裝置、支援方法及支援程式。The present invention relates to a support device, a support method and a support program for supporting the operation of a factory.

在工廠的中央監測室中,對從設置於工廠內之感測器取得之時序資料進行監控,並且始終對藉由DCS(分散控制系統)發出之警報進行監視。所發出之警報從注意等級到要監測等級跨越多個等級,運轉人員在發出警報之後對各警報的重要性或緊急性進行評量,並判斷是否應該採取具體的處置行動。 [先前技術文獻] [專利文獻] In the central monitoring room of the factory, the time series data obtained from the sensors installed in the factory are monitored, and the alarms issued by the DCS (distributed control system) are always monitored. The alarms issued span multiple levels from the attention level to the monitoring level. After the alarm is issued, the operator evaluates the importance or urgency of each alarm and determines whether specific treatment actions should be taken. [Prior Art Literature] [Patent Literature]

[專利文獻1]日本特開2000-56825號專利公報[Patent Document 1] Japanese Patent Publication No. 2000-56825

[發明所欲解決之課題][The problem that the invention wants to solve]

但是,工廠的製程錯綜複雜地構成的情況亦不佔少數,有時不具備充分經驗和知識之運轉人員無法確定判斷所需的資訊。However, there are also cases where the factory's manufacturing processes are complex and sometimes operators who do not have sufficient experience and knowledge are unable to determine the information needed to make judgments.

本發明的一態樣的例示性的目的之一在於提供一種在工廠的感測器檢測到異常的情況下,能夠容易且迅速地掌握故障部位或原因的判斷所需的資訊之支援裝置、支援方法及支援程式。 [用於解決課題之手段] One of the exemplary purposes of one aspect of the present invention is to provide a support device, a support method, and a support program that can easily and quickly grasp the information required for determining the fault location or cause when a sensor in a factory detects an abnormality. [Means for solving the problem]

為了解決上述課題,本發明的一態樣係支援裝置。該支援裝置為一種用於支援工廠的運轉的裝置,具備:異常檢測部,其係依據由設置在工廠上之複數個感測器檢測出之感測器資料,檢測顯示出異常之感測器;記憶部,其係記憶有感測器關聯性資訊,該感測器關聯性資訊關聯建立有:表示各感測器所屬之工廠的構成要素之感測器部位、通過感測器部位並由感測器測定之製程、及製程通過感測器部位之製程順序;及關聯資訊確定部,其係參閱記憶在記憶部中之感測器關聯性資訊,對與針對異常檢測部所檢測到之檢測感測器在感測器部位、製程及製程順序中的至少一個中確認為具有關聯性的關聯感測器相關之資訊進行確定。In order to solve the above-mentioned problem, one aspect of the present invention is a support device. The support device is a device for supporting the operation of a factory, and comprises: an abnormality detection unit, which detects a sensor showing an abnormality based on sensor data detected by a plurality of sensors installed in the factory; a memory unit, which stores sensor correlation information, and the sensor correlation information is associated with: a sensor location indicating a component of the factory to which each sensor belongs, a communication channel, and a communication channel; A process passing through the sensor portion and measured by the sensor, and a process sequence of the process passing through the sensor portion; and a related information determination unit, which refers to the sensor related information stored in the memory unit to determine information related to the related sensor confirmed to be related in at least one of the sensor portion, the process and the process sequence with respect to the detection sensor detected by the abnormality detection unit.

依據上述態樣,支援裝置確定針對檢測感測器在感測器部位、製程及製程順序中的至少一個中確認為具有關聯性的關聯感測器,因此即使不具備充分經驗和知識之運轉人員亦能夠容易且迅速地掌握判斷所需的資訊。According to the above aspect, the support device determines the associated sensors confirmed to be relevant in at least one of the sensor location, process, and process sequence for the detection sensor, so that even an operator who does not have sufficient experience and knowledge can easily and quickly grasp the information required for judgment.

本發明的又一態樣是支援方法。該方法為一種支援工廠的運轉之方法,包括如下步驟:異常檢測步驟,其係依據由設置在工廠上之複數個感測器檢測出之感測器資料,檢測顯示出異常之感測器;記憶步驟,其係記憶感測器關聯性資訊,該感測器關聯性資訊關聯建立有:表示各感測器所屬之工廠的構成要素之感測器部位、通過感測器部位並由感測器測定之製程、及表示製程通過感測器部位之順序之製程順序;及關聯資訊特定步驟,其係參閱藉由記憶步驟所記憶之感測器關聯性資訊,對與針對異常檢測步驟所檢測到之檢測感測器在感測器部位、製程及製程順序中的至少一個中確認為具有關聯性的關聯感測器相關之資訊進行確定。Another aspect of the present invention is a support method. The method is a method for supporting the operation of a factory, comprising the following steps: an abnormality detection step, which is to detect a sensor that shows an abnormality based on sensor data detected by a plurality of sensors installed in the factory; a memory step, which is to memorize sensor association information, wherein the sensor association information is associated with: a sensor location indicating a component of the factory to which each sensor belongs, and a sensor; A process for detecting a part of a sensor and measured by a sensor, and a process sequence indicating the order in which the process passes through the sensor part; and a correlation information specific step, which refers to the sensor correlation information stored in the storage step, to determine information related to the correlation sensor confirmed to be correlated in at least one of the sensor part, the process and the process sequence with respect to the detection sensor detected in the abnormality detection step.

本發明的又一態樣係支援程式。該程式是一種用於支援工廠的運轉的程式,使電腦作為如下手段發揮功能:異常檢測手段,其係依據由設置在工廠上之複數個感測器檢測出之感測器資料,檢測顯示出異常之感測器;記憶手段,其係記憶感測器關聯性資訊,該感測器關聯性資訊關聯建立有:表示各感測器所屬之工廠的構成要素之感測器部位、通過感測器部位並由感測器測定之製程、及表示製程通過感測器部位之順序之製程順序;及關聯資訊特定手段,其係參閱藉由記憶手段所記憶之感測器關聯性資訊,對與針對異常檢測手段所檢測到之檢測感測器在感測器部位、製程及製程順序中的至少一個中確認為具有關聯性的關聯感測器相關之資訊進行確定。Another aspect of the present invention is a support program. The program is a program for supporting the operation of a factory, which enables the computer to function as the following means: an abnormality detection means, which detects sensors that show abnormalities based on sensor data detected by multiple sensors installed in the factory; a memory means, which stores sensor correlation information, and the sensor correlation information is associated with: sensor locations representing the constituent elements of the factory to which each sensor belongs, A process that passes through a sensor portion and is measured by a sensor, and a process sequence that indicates the order in which the process passes through the sensor portion; and a correlation information specifying means that refers to the sensor correlation information stored by the storage means to determine information related to a correlation sensor that is confirmed to be correlated with a detection sensor detected by the abnormality detection means in at least one of the sensor portion, the process, and the process sequence.

另外,將以上的構成要素的任意組合,或本發明的構成要素或表現在方法、裝置、系統、電腦程式、資料結構、記錄媒體等之間相互替換者,亦作為本發明的態樣而有效。 [發明效果] In addition, any combination of the above components, or the components of the present invention or the components or expressions in methods, devices, systems, computer programs, data structures, recording media, etc., are also valid as aspects of the present invention. [Effects of the invention]

依據本發明,在工廠的感測器檢測到異常的情況下,能夠容易且迅速地掌握故障部位或原因的判斷所需的資訊。According to the present invention, when a sensor in a factory detects an abnormality, information required for determining the fault location or cause can be easily and quickly obtained.

以下,參考圖式並透過發明的實施方式對本發明進行說明,但以下實施方式並不限定發明申請專利範圍之發明,又,在實施方式中說明之特徵的所有組合未必係發明的解決手段所必須的。對示於各圖式之相同或是相等的構成要件、構件、處理標註相同元件符號,並適當省略重複之說明。The present invention is described below with reference to the drawings and through the embodiments of the invention, but the following embodiments do not limit the scope of the invention application, and all combinations of features described in the embodiments are not necessarily required for the solution of the invention. The same or equivalent components, components, and processes shown in each drawing are marked with the same element symbols, and repeated descriptions are appropriately omitted.

圖1~圖5為用於說明本發明的實施方式之支援裝置10之圖。具體而言,圖1為表示本發明的一實施方式之支援裝置10的構成之圖,圖2為表示支援裝置10的硬體構成的一例之圖。圖3及圖4為表示支援裝置10的感測器、感測器部位及製程的關係的一例之圖。圖5為用於說明記憶在感測器關聯性資訊記憶部18e中之感測器關聯性資訊的一例之圖。Fig. 1 to Fig. 5 are diagrams for explaining the support device 10 of an embodiment of the present invention. Specifically, Fig. 1 is a diagram showing the configuration of the support device 10 of an embodiment of the present invention, and Fig. 2 is a diagram showing an example of the hardware configuration of the support device 10. Fig. 3 and Fig. 4 are diagrams showing an example of the relationship between the sensor, sensor position, and process of the support device 10. Fig. 5 is a diagram for explaining an example of sensor correlation information stored in the sensor correlation information storage unit 18e.

支援裝置10是支援工廠1的運轉之裝置。作為工廠1的一例,可以舉出發電工廠、焚化工廠或化學工廠等。在工廠1中使用任意的感測器資料。感測器資料例如為溫度、壓力、空氣量、濃度或成分等製程值的資料。具體而言,感測器資料的製程值能夠包含由設置在工廠1上之感測器(未圖示)檢測出之測定值和基於針對該感測器所檢測出之點之設定值與測定值的差量的操作量。從工廠1獲取到之感測器資料係存在數百種以上之多維資料。The support device 10 is a device that supports the operation of the factory 1. As an example of the factory 1, a power plant, an incineration plant, or a chemical plant can be cited. Arbitrary sensor data is used in the factory 1. The sensor data is, for example, data of process values such as temperature, pressure, air volume, concentration, or composition. Specifically, the process value of the sensor data can include a measured value detected by a sensor (not shown) installed in the factory 1 and an operating amount based on the difference between a set value and a measured value for a point detected by the sensor. The sensor data obtained from the factory 1 is multidimensional data of more than hundreds of types.

支援裝置10經由DCS(分散控制系統)2而與工廠1連接,取得設置於工廠1內之感測器的感測器資料。依據支援裝置10,在工廠內的任一感測器檢測到異常的情況下,能夠容易且迅速地掌握故障部位或原因的判斷所需的資訊。The support device 10 is connected to the factory 1 via the DCS (distributed control system) 2 to obtain sensor data from sensors installed in the factory 1. According to the support device 10, when any sensor in the factory detects an abnormality, the information required for determining the fault location or cause can be easily and quickly obtained.

支援裝置10中,事先安裝有用於執行本實施方式之支援方法所需的預定的程式,在圖2中示出有其硬體構成的一例。具體而言,支援裝置10能夠運用具備CPU100、ROM102、RAM104、外部記憶裝置106、使用者介面108、顯示器110、通訊介面112之通用或專用的電腦。依據藉由使用者介面108由作業人員輸入之資訊,CPU100進行運算並將該運算結果輸出至顯示器110,作業人員能夠一邊識別該輸出,一邊藉由使用者介面108對支援裝置10輸入所需的資訊。The support device 10 is pre-installed with a predetermined program required for executing the support method of the present embodiment, and an example of its hardware configuration is shown in FIG2 . Specifically, the support device 10 can use a general-purpose or dedicated computer having a CPU 100, a ROM 102, a RAM 104, an external memory device 106, a user interface 108, a display 110, and a communication interface 112. Based on information input by an operator through the user interface 108, the CPU 100 performs calculations and outputs the calculation results to the display 110. The operator can input required information to the support device 10 through the user interface 108 while recognizing the output.

支援裝置10可以由單一的電腦來構成,亦可以由分散在網絡上之複數個電腦來構成。支援裝置10中,例如藉由CPU執行記憶在上述之ROM、RAM、外部記憶裝置等中或經由通訊網絡下載之預定的程式(規定了本實施方式之支援方法之程式),能夠使支援裝置10作為待留後述的各種功能方塊或各種步驟發揮功能。The support device 10 may be composed of a single computer or a plurality of computers distributed on a network. In the support device 10, for example, the CPU executes a predetermined program (a program that specifies the support method of this embodiment) stored in the above-mentioned ROM, RAM, external storage device, etc. or downloaded via a communication network, so that the support device 10 can function as various functional blocks or various steps to be described later.

以下,使用圖1對支援裝置10的各種功能方塊進行說明。Hereinafter, various functional blocks of the support device 10 will be described using FIG. 1 .

本實施方式之支援裝置10具備:具有操作受理部12a及選擇受理部12b之輸入部12、處理部14、具有顯示器16a之顯示部16及記憶部18。在此,處理部14具有資料取得部14a、顯示控制部14c、關聯資訊確定部14d及異常檢測部14e。又,記憶部18具有異常閾值資訊記憶部18a、感測器資料記憶部18b、檢測感測器資訊記憶部18c、關聯感測器資訊記憶部18d及感測器關聯性資訊記憶部18e。The support device 10 of this embodiment includes an input unit 12 having an operation accepting unit 12a and a selection accepting unit 12b, a processing unit 14, a display unit 16 having a display 16a, and a memory unit 18. Here, the processing unit 14 includes a data acquisition unit 14a, a display control unit 14c, a related information determination unit 14d, and an abnormality detection unit 14e. In addition, the memory unit 18 includes an abnormal threshold information memory unit 18a, a sensor data memory unit 18b, a detection sensor information memory unit 18c, a related sensor information memory unit 18d, and a sensor correlation information memory unit 18e.

資料取得部14a經由DCS取得工廠的感測器資料。感測器資料係用於判斷工廠的運轉狀態者,亦能夠稱為運轉資料。感測器資料例如係表示感測器的測定值的逐漸變化之資料。在該情況下,感測器資料亦可以係預定時間間隔中的連續的感測器的測定值的變化。感測器資料亦可以係多維資料。藉由資料取得部14a取得到之感測器資料和與時刻相關之資訊一起記憶在感測器資料記憶部18b中。The data acquisition unit 14a acquires the sensor data of the factory through the DCS. The sensor data is used to determine the operating status of the factory and can also be called operating data. The sensor data is, for example, data representing the gradual change of the measured value of the sensor. In this case, the sensor data can also be the change of the measured value of the continuous sensor in a predetermined time interval. The sensor data can also be multi-dimensional data. The sensor data acquired by the data acquisition unit 14a is stored in the sensor data storage unit 18b together with the information related to the moment.

異常檢測部14e參閱記憶在異常閾值資訊記憶部18a中之異常閾值資訊,檢測在所取得之感測器資料中存在偏離閾值之值,並將表示該閾值外的製程值之感測器作為檢測感測器而記憶在檢測感測器資訊記憶部18c中。再者,異常閾值資訊係包含針對工廠內的各感測器判定為發生了異常之閾值之資訊。所謂發生了異常之狀態,不僅包括不得不停止工廠運轉之狀態,還包括雖然能夠繼續運轉但已經脫離良好的運轉狀態之狀態。The abnormality detection unit 14e refers to the abnormal threshold information stored in the abnormal threshold information storage unit 18a, detects the existence of a value deviating from the threshold in the acquired sensor data, and stores the sensor representing the process value outside the threshold as a detection sensor in the detection sensor information storage unit 18c. Furthermore, the abnormal threshold information includes information on the threshold value that is determined to be abnormal for each sensor in the factory. The so-called abnormal state includes not only a state in which the factory operation has to be stopped, but also a state in which the factory can continue to operate but has deviated from a good operating state.

又,異常閾值資訊係使用者經由使用者介面108輸入之資訊、記憶在外部記憶裝置106或RAM104中之資訊、隨著工廠的運轉而自動設定之資訊等。Furthermore, the abnormal threshold value information is information input by the user through the user interface 108, information stored in the external storage device 106 or the RAM 104, information automatically set as the factory operates, and the like.

亦可以適當地任意設定判定為發生了異常之閾值。再者,閾值亦可以設定有複數個階段。例如,在與某一感測器的溫度相關之測定值為60℃~80℃的情況下,可以向使用者通知「注意」,在80℃~100℃的情況下,可以向使用者通知「要監測」。The threshold for judging an abnormality can be set appropriately and arbitrarily. Furthermore, the threshold can be set in multiple stages. For example, when the measured value related to the temperature of a certain sensor is 60℃~80℃, the user can be notified "Caution", and when it is 80℃~100℃, the user can be notified "Monitoring is required".

關聯資訊確定部14d參閱記憶在感測器關聯性資訊記憶部18e中之感測器關聯性資訊及記憶在檢測感測器資訊記憶部18c中之檢測感測器資訊,將針對檢測感測器在感測器部位、製程及製程順序中的至少一個中確認為具有關聯性的感測器作為關聯感測器資訊而記憶在關聯感測器資訊記憶部18d中。再者,對感測器部位及製程順序的定義待留後述。又,對記憶在感測器關聯性資訊記憶部18e中之感測器關聯性資訊的具體例亦待留後述。The associated information determination unit 14d refers to the sensor associated information stored in the sensor associated information storage unit 18e and the detection sensor information stored in the detection sensor information storage unit 18c, and stores the sensors that are determined to be associated in at least one of the sensor position, process, and process sequence as associated sensor information in the associated sensor information storage unit 18d. The definition of the sensor position and process sequence will be described later. In addition, a specific example of the sensor associated information stored in the sensor associated information storage unit 18e will also be described later.

顯示控制部14c依據記憶在關聯感測器資訊記憶部18d中之關聯感測器資訊,在顯示器16a上顯示關聯感測器的測定資訊。測定資訊例如係以感測器的測定值為縱軸、測定時刻為橫軸之時序圖表、或者在某一特定的時刻中的感測器的測定值的瞬時值。The display control unit 14c displays the measurement information of the related sensor on the display 16a according to the related sensor information stored in the related sensor information storage unit 18d. The measurement information is, for example, a time chart with the sensor's measurement value as the vertical axis and the measurement time as the horizontal axis, or the instantaneous value of the sensor's measurement value at a specific time.

操作受理部12a及選擇受理部12b從確認了顯示在顯示器16a上之測定資訊之使用者受理經由使用者介面108的操作或選擇,並經由顯示控制部14c變更顯示在顯示器16a上之資訊。操作的種類例如包含對測定資訊的一部分進行過濾、或變更測定資訊中作為顯示對象的時間寬度等。The operation accepting unit 12a and the selection accepting unit 12b accept an operation or selection through the user interface 108 from a user who has confirmed the measurement information displayed on the display 16a, and change the information displayed on the display 16a through the display control unit 14c. The types of operation include, for example, filtering a part of the measurement information or changing the time width of the measurement information to be displayed.

接著,使用圖3對感測器、感測器部位、製程的關係進行說明。Next, the relationship between the sensor, sensor location, and process is explained using Figure 3.

感測器部位表示工廠的構成要素。作為例子,圖3的感測器部位A~感測器部位D分別係燃燒爐、緊湊型分離器出口、過熱爐入口及二氧化碳當量(equivalent)入口。再者,作為例子而使用之感測器部位的種類不限定成為本發明的適用對象的工廠。The sensor location represents the constituent elements of the factory. As an example, the sensor locations A to D in FIG3 are respectively the combustion furnace, the compact separator outlet, the superheater inlet, and the carbon dioxide equivalent inlet. Furthermore, the type of sensor location used as an example does not limit the factory to which the present invention is applied.

所謂製程,係某物質通過工廠的各感測器部位之工程。作為例子,圖3的製程α及製程β均以分別不同的順序通過感測器部位A~感測器部位D。The so-called process is the process of a substance passing through various sensor parts of the factory. For example, process α and process β in Figure 3 pass through sensor parts A to D in different orders.

製程亦可以僅通過工廠的構成要素中的一部分。例如,當工廠的所有構成要素為感測器部位A~感測器部位D時,製程亦可以通過感測器部位A~感測器部位C,而不通過感測器部位D。又,製程亦可以分支到複數個感測器部位。例如,當某一製程通過感測器部位A後,該製程亦可以分支而通過感測器部位B及感測器部位C。A process may only pass through a part of the components of a factory. For example, when all the components of a factory are sensor parts A to D, a process may pass through sensor parts A to C but not sensor part D. In addition, a process may branch to multiple sensor parts. For example, after a process passes through sensor part A, the process may branch to pass through sensor parts B and sensor parts C.

感測器在某一感測器部位中進行某一製程的測定。例如,圖3的感測器A1在感測器部位A中進行製程α的測定。The sensor performs a measurement of a certain process in a certain sensor location. For example, sensor A1 in FIG3 performs a measurement of process α in sensor location A.

又,感測器亦可以為作為在同一感測器部位的同一製程中進行測定之複數個感測器的感測器組。例如,由於感測器A1a~感測器A1h均在感測器部位A中進行了製程α的測定,因此感測器A1還能夠稱為由感測器A1a~感測器A1h組成的感測器組。在感測器部位的面積寬且單一的物理感測器中,在無法充分取得該感測器部位的資訊的情況下等,有時如上設置複數個感測器。例如,在製程α通過感測器部位A之面積大的情況下,在單一的物理感測器無法對通過部分全體進行測定。因此,藉由使用感測器A1a~感測器A1h這8個感測器,能夠測定該通過部分全體。Furthermore, the sensor may be a sensor group consisting of a plurality of sensors that perform measurements in the same process at the same sensor site. For example, since sensors A1a to A1h all perform measurements of process α in sensor site A, sensor A1 can also be referred to as a sensor group consisting of sensors A1a to A1h. In cases where the area of the sensor site is wide and a single physical sensor cannot obtain sufficient information about the sensor site, a plurality of sensors may be provided as described above. For example, in a case where process α passes through a large area of sensor site A, a single physical sensor cannot measure the entire portion that passes through. Therefore, by using eight sensors A1a to A1h, the entire passing portion can be measured.

在該情況下,由異常檢測部14e確定之檢測感測器可以為作為感測器組的感測器A1,亦可以為感測器A1中所包含之感測器A1a~感測器A1h中的任一個。例如,在感測器A1a中檢測到異常的情況下,可以將感測器A1a本身作為檢測感測器,以可以將感測器A1a所屬之感測器組即感測器A1作為檢測感測器。In this case, the detection sensor determined by the abnormality detection unit 14e may be the sensor A1 as the sensor group, or may be any one of the sensors A1a to A1h included in the sensor A1. For example, when an abnormality is detected in the sensor A1a, the sensor A1a itself may be used as the detection sensor, or the sensor group to which the sensor A1a belongs, i.e., the sensor A1, may be used as the detection sensor.

又,在感測器A1為感測器組時的感測器A1的測定值例如可以以由感測器A1a~感測器A1h中的至少一部分的測定值組成的向量的形式來表述,亦可以為從感測器A1a~感測器A1h的測定值計算出之統計量。Furthermore, when sensor A1 is a sensor group, the measurement value of sensor A1 can be expressed in the form of a vector composed of at least a part of the measurement values of sensors A1a to A1h, or can be expressed as a statistic calculated from the measurement values of sensors A1a to A1h.

再者,感測器組亦可以由複數個種類的感測器構成。例如,感測器A2a~感測器A2d可以為溫度感測器,感測器A2e~感測器A2h可以為壓力感測器。Furthermore, the sensor set may also be composed of a plurality of types of sensors. For example, sensors A2a to A2d may be temperature sensors, and sensors A2e to A2h may be pressure sensors.

接著,使用圖4對製程與製程順序的關係進行說明。圖4為將圖3簡略化之圖。Next, the relationship between the process and the process sequence will be described using FIG4. FIG4 is a simplified diagram of FIG3.

所謂製程順序,係某一製程通過之感測器部位的順序。例如,圖4的製程α的製程順序為感測器部位A、感測器部位B、感測器部位C、感測器部位D,製程β的製程順序為感測器部位D、感測器部位A、感測器部位C、感測器部位B。The so-called process sequence refers to the order of sensor parts that a certain process passes through. For example, the process sequence of process α in FIG4 is sensor part A, sensor part B, sensor part C, sensor part D, and the process sequence of process β is sensor part D, sensor part A, sensor part C, sensor part B.

所謂製程順序的階段,係通過製程順序中的某一感測器部位之順序。例如,在製程α中,感測器部位C的製程順序處於4個階段中的第3階段。除此以外,製程順序處於前後的階段是指,例如,相對於感測器部位C(在製程α中為第3階段),感測器部位B(在製程α中為第2階段)處於前1階段,感測器部位D(在製程α中為第4階段)處於後1階段。The so-called process sequence stage refers to the order of passing a certain sensor part in the process sequence. For example, in process α, the process sequence of sensor part C is at the third stage among the four stages. In addition, the stages before and after the process sequence mean, for example, relative to sensor part C (the third stage in process α), sensor part B (the second stage in process α) is at the first stage, and sensor part D (the fourth stage in process α) is at the last stage.

接著,使用圖5,對記憶在感測器關聯性資訊記憶部18e中之感測器關聯性資訊的一例進行說明。所謂感測器關聯性資訊,係針對各感測器關聯建立有感測器部位、製程及製程順序之資訊。Next, an example of sensor correlation information stored in the sensor correlation information storage unit 18e is described using Fig. 5. The so-called sensor correlation information is information in which sensor locations, processes, and process sequences are correlated with each sensor.

圖5為對應於圖4所示之工廠的構成之感測器關聯性資訊。感測器關聯性資訊係,針對各感測器(c10)關聯建立有所屬之感測器部位(c12)、測定之製程(c16)及該製程中通過該感測器部位之製程順序的階段(c16)者。FIG5 shows sensor correlation information corresponding to the structure of the factory shown in FIG4. The sensor correlation information is established by correlating each sensor (c10) with the sensor location (c12), the process (c16) to be measured, and the stage (c16) of the process sequence that passes through the sensor location in the process.

藉由使用感測器關聯性資訊,能夠確定對應於某一感測器之感測器部位及製程,相反亦能夠從感測器部位及製程確定某一感測器。例如,依據行r18,讀取到感測器C1(r18、c10)屬於感測器部位C(r18、c12),測定製程α(r18、c14),感測器部位C的製程α中的製程順序為第3階段(r18、c16)。除此以外,例如,依據「製程」的列c14為製程α的行r10、r14、r18、r22,讀取到在感測器部位A、B、C、D中,分別由感測器A1、B1、C1、D1測定製程α。By using sensor association information, the sensor location and process corresponding to a certain sensor can be determined, and vice versa, a certain sensor can be determined from the sensor location and process. For example, according to row r18, it is read that sensor C1 (r18, c10) belongs to sensor location C (r18, c12), and process α (r18, c14) is measured. The process sequence in process α of sensor location C is the third stage (r18, c16). In addition, for example, according to row c14 of "Process" which is rows r10, r14, r18, and r22 of process α, it is read that process α is measured by sensors A1, B1, C1, and D1 in sensor locations A, B, C, and D, respectively.

感測器關聯性資訊不限定於如圖5那樣由一個表格表示者。例如,亦可以藉由適當地結合表格而能夠製作與圖5的表格等價的表格之複數個表格來表述。又,亦可以由列表形式或XML(Extensible Markup Language:可延伸標記語言)形式等表格以外的資料結構來表示。The sensor association information is not limited to that represented by a single table as shown in FIG5. For example, it may be represented by a plurality of tables that can be combined appropriately to create a table equivalent to the table in FIG5. Furthermore, it may be represented by a data structure other than a table, such as a list format or an XML (Extensible Markup Language) format.

以下,作為本發明的支援裝置的一實施方式,使用圖6~圖9的流程圖對支援裝置的動作的一例進行說明。圖6為本實施方式之支援裝置的動作全體的一例。圖7~圖9為在關聯資訊確定部14d中確定關聯感測器時的動作的一例。As an embodiment of the support device of the present invention, an example of the operation of the support device is described below using the flowcharts of Figures 6 to 9. Figure 6 is an example of the entire operation of the support device of this embodiment. Figures 7 to 9 are examples of the operation when the related information determination unit 14d determines the related sensor.

在圖6中,首先,藉由資料取得部14a取得感測器資料(S10)。藉由資料取得部14a取得到之感測器資料記憶在感測器資料記憶部18b中。感測器資料的取得可以從DCS2直接取得,亦可以經由使用者介面108受理來自使用者的感測器資料的輸入來進行,或者,亦可以經由RAM104或外部記憶裝置106讀取來進行。In FIG6 , first, the sensor data is acquired by the data acquisition unit 14a (S10). The sensor data acquired by the data acquisition unit 14a is stored in the sensor data storage unit 18b. The sensor data can be acquired directly from the DCS 2, or can be acquired by accepting the input of sensor data from the user through the user interface 108, or can be acquired by reading from the RAM 104 or the external storage device 106.

接著,在異常檢測部14e中,將記憶在感測器資料記憶部18b中之感測器資料與記憶在異常閾值資訊記憶部18a中之異常閾值資訊進行比較(S14)。在沒有超過閾值之感測器資料的情況下,設為沒有顯示出異常之感測器而支援裝置終止動作。Next, in the abnormality detection unit 14e, the sensor data stored in the sensor data storage unit 18b is compared with the abnormal threshold information stored in the abnormal threshold information storage unit 18a (S14). If there is no sensor data exceeding the threshold, it is assumed that no abnormal sensor is displayed and the support device terminates the operation.

另一方面,在存在超過閾值之感測器資料的情況下,將對應於該感測器資料之感測器設為檢測感測器(S16)。與檢測感測器相關之資訊記憶在檢測感測器資訊記憶部18c中。On the other hand, when there is sensor data exceeding the threshold, the sensor corresponding to the sensor data is set as a detection sensor (S16). Information related to the detection sensor is stored in the detection sensor information storage unit 18c.

在步驟S16之後,在關聯資訊確定部14d中,依據記憶在檢測感測器資訊記憶部18c中之檢測感測器資訊及記憶在感測器關聯性資訊記憶部18e中之感測器關聯性資訊,確定關聯感測器(S18)。使用圖7~圖9,對關聯資訊確定部14d的動作的一例另外進行說明。所確定之關聯感測器的資訊記憶在關聯感測器資訊記憶部18d中。After step S16, the associated information determination unit 14d determines the associated sensor based on the detection sensor information stored in the detection sensor information storage unit 18c and the sensor association information stored in the sensor association information storage unit 18e (S18). An example of the operation of the associated information determination unit 14d is described separately using FIG. 7 to FIG. 9. The information of the determined associated sensor is stored in the associated sensor information storage unit 18d.

在步驟S18之後,依據記憶在檢測感測器資訊記憶部18c中之檢測感測器資訊及記憶在關聯感測器資訊記憶部18d中之關聯感測器資訊,顯示控制部14c在顯示器16a上顯示測定資訊(S20)。所顯示之資訊能夠根據來自使用者的操作受理部12a或對選擇受理部12b之輸入來變更。使用圖10,對顯示畫面的例另外進行說明。在步驟S20之後,支援裝置10結束動作。After step S18, the display control unit 14c displays the measurement information on the display 16a based on the detection sensor information stored in the detection sensor information storage unit 18c and the associated sensor information stored in the associated sensor information storage unit 18d (S20). The displayed information can be changed according to the input from the user to the operation receiving unit 12a or the selection receiving unit 12b. An example of the display screen is described separately using FIG. 10. After step S20, the support device 10 ends the operation.

以上的本發明的實施方式的動作僅為一例,並不限於此。例如,各個步驟可以在動作不發生矛盾的範圍內替換順序,亦可以將至少一部分反覆執行(例如,在步驟S20之後,不結束而返回到步驟S10等)。The above-mentioned actions of the embodiment of the present invention are only examples and are not limited thereto. For example, the order of each step can be changed within the range where the actions do not conflict, and at least a part of the steps can be repeatedly executed (for example, after step S20, the steps do not end but return to step S10, etc.).

接著,使用圖7、圖4及圖5,例如,對圖4中的感測器C1為顯示出異常之檢測感測器時的關聯資訊確定部14d的動作的一例進行說明。在該例中,確定感測器C1測定之製程,並將屬於該製程通過之其他感測器部位之感測器確定為關聯感測器。Next, an example of the operation of the related information determination unit 14d when the sensor C1 in Fig. 4 is a detection sensor showing an abnormality is described using Fig. 7, Fig. 4, and Fig. 5. In this example, the process measured by the sensor C1 is determined, and sensors belonging to other sensor parts through which the process passes are determined as related sensors.

首先,確定感測器C1測定之製程及感測器C1所屬之感測器部位。具體而言,第一,依據感測器的列c10為「感測器C1」的行r18中的製程的列c14的資訊,確定製程α(r18、c14)(S182a)。第二,根據感測器的列c10為「感測器C1」的行r18中的感測器部位的列c12的資訊,確定感測器部位C(r18、c12)(S182b)。在此,所確定之製程α及感測器部位C分別對應於感測器C1測定之製程及感測器C1所屬之部位。First, determine the process measured by sensor C1 and the sensor part to which sensor C1 belongs. Specifically, first, based on the information of column c14 of the process in row r18 where row c10 of the sensor is "sensor C1", determine process α (r18, c14) (S182a). Second, based on the information of column c12 of the sensor part in row r18 where row c10 of the sensor is "sensor C1", determine sensor part C (r18, c12) (S182b). Here, the determined process α and sensor part C correspond to the process measured by sensor C1 and the part to which sensor C1 belongs, respectively.

再者,在製程的列c14為「製程α」的行r10、行r14、行r18及行r22中,參閱感測器部位的列c12,確定與感測器部位C不同且製程α通過之感測器部位(S182c)。Furthermore, in row r10, row r14, row r18 and row r22 where row c14 of the process is "process α", row c12 of the sensor part is referred to to determine the sensor part that is different from the sensor part C and through which process α passes (S182c).

所確定之感測器部位的候選為感測器部位A(r10、c12)、感測器部位B(r14、c14)、感測器部位D(r22、c12),可以確定其中的任一個。在本實施方式中,示出考慮了製程順序而確定之一例。具體而言,當製程α中的感測器部位C的製程順序為第3階段(r18、c16)時,確定製程α中的製程順序為後1階段的第4階段(r22、c16)的感測器部位D。The candidates for the determined sensor parts are sensor part A (r10, c12), sensor part B (r14, c14), and sensor part D (r22, c12), and any one of them may be determined. In this embodiment, an example of determination in consideration of the process sequence is shown. Specifically, when the process sequence of sensor part C in process α is the third stage (r18, c16), the sensor part D in the fourth stage (r22, c16) which is one stage later in the process α is determined.

最後,將與感測器部位的列c12為「感測器部位D」、製程的列c14為「製程α」的行r22對應之感測器D1(r22、c10)確定為關聯感測器(S182d)。Finally, the sensor D1 (r22, c10) corresponding to the row r22 whose sensor part column c12 is "sensor part D" and whose process column c14 is "process α" is determined as the associated sensor (S182d).

即使是屬於與檢測感測器不同的感測器部位之感測器,相同之製程通過之感測器部位彼此與不同之製程通過感測器部位相比,存在感測器所示之資訊的關聯性變高的傾向。尤其,製程順序處於前後(亦即,前1階段及後1階段中的任一者)之感測器部位彼此中,感測器所示之資訊的關聯性更高。例如,在與製程α的關係中,對於製程順序為第3階段的感測器部位C(r18、c12),與製程順序為第1階段的感測器部位A(r10、c12)相比,製程順序為第4階段的感測器部位D(r22、c12)存在具有更高的關聯性之傾向。在這種情況下,對於僅藉由感測器C1無法判斷的故障部位,能夠藉由結合所確定之感測器D1的資訊來進行判斷。Even for sensors belonging to a sensor part different from the detection sensor, the correlation of information shown by the sensor parts passing through the same process tends to be higher than that of sensor parts passing through different processes. In particular, the correlation of information shown by the sensor parts that are in the front and back of the process sequence (that is, either the first stage or the last stage) is higher. For example, in the relationship with process α, for sensor part C (r18, c12) in the third stage of the process sequence, there is a tendency to have a higher correlation with sensor part D (r22, c12) in the fourth stage of the process sequence than with sensor part A (r10, c12) in the first stage of the process sequence. In this case, the fault location that cannot be determined by sensor C1 alone can be determined by combining the information of sensor D1.

接著,使用圖8、圖4及圖5,例如,對圖4中的感測器C1為檢測感測器時的關聯資訊確定部14d的動作的另一例進行說明。在該例中,將屬於與感測器C1相同的感測器部位並且測定不同製程之感測器確定為關聯感測器。Next, another example of the operation of the correlation information determination unit 14d when the sensor C1 in Fig. 4 is a detection sensor will be described using Fig. 8, Fig. 4 and Fig. 5. In this example, a sensor belonging to the same sensor part as the sensor C1 and measuring a different process is determined as a correlation sensor.

首先,確定感測器C1測定之製程及感測器C1所屬之感測器部位。具體而言,第一,依據感測器的列c10為「感測器C1」的行r18中的製程的列c14的資訊,確定製程α(r18、c14)(S184a)。第二,根據感測器的列c10為「感測器C1」的行r18中的感測器部位的列c12的資訊,確定感測器部位C(r18、c12)(S184b)。在此,所確定之製程α及感測器部位C分別對應於感測器C1測定之製程及感測器C1所屬之部位。First, determine the process measured by sensor C1 and the sensor part to which sensor C1 belongs. Specifically, first, based on the information of column c14 of the process in row r18 where row c10 of the sensor is "sensor C1", determine process α (r18, c14) (S184a). Second, based on the information of column c12 of the sensor part in row r18 where row c10 of the sensor is "sensor C1", determine sensor part C (r18, c12) (S184b). Here, the determined process α and sensor part C correspond to the process measured by sensor C1 and the part to which sensor C1 belongs, respectively.

再者,依據感測器部位的列c12為「感測器部位C」的r18及r20,參閱製程的列c14,確定與製程α不同的製程β(r20、c14)(S184c)。Furthermore, based on the fact that the sensor site row c12 is r18 and r20 of "sensor site C", the process row c14 is referred to to determine the process β (r20, c14) different from the process α (S184c).

最後,將與感測器部位的列c12為「感測器部位C」、製程的列c14為「製程β」的行r20對應之感測器C2(r20、c10)確定為關聯感測器(S184d)。Finally, the sensor C2 (r20, c10) corresponding to the row r20 in which the sensor part column c12 is "sensor part C" and the process column c14 is "process β" is determined as the associated sensor (S184d).

即使是測定與檢測感測器不同的製程之感測器,屬於相同的感測器部位之感測器與屬於不同的感測器部位的感測器相比,彼此存在感測器所示之資訊的關聯性變高的傾向。例如,對於僅藉由感測器C1無法判斷的故障部位,能夠藉由結合所確定之感測器C2的資訊來進行判斷。Even if the process of measuring and detecting sensors is different, the information displayed by sensors belonging to the same sensor section tends to be more correlated than that of sensors belonging to different sensor sections. For example, the fault section that cannot be determined by sensor C1 alone can be determined by combining the information of the determined sensor C2.

接著,使用圖9、圖4及圖5,例如,對圖4中的感測器C1為檢測感測器時的關聯資訊確定部14d的動作的另一例進行說明。在該例中,將屬於與感測器C1不同的感測器部位並且測定不同製程之感測器確定為關聯感測器。Next, another example of the operation of the related information determination unit 14d when the sensor C1 in Fig. 4 is a detection sensor will be described using Fig. 9, Fig. 4 and Fig. 5. In this example, a sensor belonging to a different sensor part from the sensor C1 and measuring a different process is determined as a related sensor.

首先,確定感測器C1測定之製程及感測器C1所屬之感測器部位。具體而言,第一,依據感測器的列c10為「感測器C1」的行r18中的製程的列c14的資訊,確定製程α(S186a)。第二,根據感測器的列c10為「感測器C1」的行r18中的感測器部位的列c12的資訊,確定感測器部位C(S186b)。在此,所確定之製程α及感測器部位C分別對應於感測器C1測定之製程及感測器C1所屬之部位。First, the process measured by sensor C1 and the sensor part to which sensor C1 belongs are determined. Specifically, first, based on the information of column c14 of the process in row r18 where row c10 of the sensor is "sensor C1", process α is determined (S186a). Second, based on the information of column c12 of the sensor part in row r18 where row c10 of the sensor is "sensor C1", sensor part C is determined (S186b). Here, the determined process α and sensor part C correspond to the process measured by sensor C1 and the part to which sensor C1 belongs, respectively.

接著,依據感測器部位的列c12為「感測器部位C」的r18及r20,參閱製程的列c14,確定與製程α不同的製程β(r20、c14)(S186c)。Next, based on the fact that the sensor site row c12 is r18 and r20 of "sensor site C", the process row c14 is referenced to determine the process β (r20, c14) different from the process α (S186c).

再者,依據製程的列c14為「製程β」的行r12、行r16、行r20及行r24,參閱感測器部位的列c12,確定與製程β通過之感測器部位C不同的感測器部位(S186d)。Furthermore, based on the fact that row c14 of the process is row r12, row r16, row r20 and row r24 of "process β", row c12 of the sensor part is referred to to determine the sensor part different from the sensor part C passed by process β (S186d).

所確定之感測器部位的候選為感測器部位A(r12、c12)、感測器部位B(r16、c12)、感測器部位D(r24、c12),可以確定其中的任一個。在本實施方式中,示出考慮了製程順序而確定之一例。具體而言,當製程β中的感測器部位C的製程順序為第3階段(r20、c16)時,確定製程β中的製程順序為前1階段的第2階段(r12、c16)的感測器部位A。The candidates for the determined sensor parts are sensor part A (r12, c12), sensor part B (r16, c12), and sensor part D (r24, c12), and any one of them can be determined. In this embodiment, an example of determination in consideration of the process sequence is shown. Specifically, when the process sequence of sensor part C in process β is the third stage (r20, c16), the sensor part A whose process sequence in process β is the second stage (r12, c16) of the previous stage is determined.

最後,將與感測器部位的列c12為「感測器部位A」、製程的列c14為「製程β」的行r12對應之感測器A2(r12、c10)確定為關聯感測器(S186e)。Finally, the sensor A2 (r12, c10) corresponding to the row r12 whose sensor part column c12 is "sensor part A" and whose process column c14 is "process β" is determined as the associated sensor (S186e).

即使是測定與檢測感測器不同的製程並且屬於不同的感測器部位之感測器,藉由上述的方法確定之感測器亦存在關聯性變高的傾向。這是因為,藉由上述的方法確定之感測器所測定之製程和檢測感測器所測定之製程均通過檢測感測器所屬之感測器部位。例如,由於藉由上述的方法確定之感測器A2所測定之製程β和檢測感測器C1所測定之製程α均通過檢測感測器C1所屬之感測器部位C,因此存在感測器A2與感測器C1的關聯性高的情況。Even if the sensor measures a different process from the detection sensor and belongs to a different sensor part, the sensor determined by the above method tends to have a higher correlation. This is because the process measured by the sensor determined by the above method and the process measured by the detection sensor both pass through the sensor part to which the detection sensor belongs. For example, since the process β measured by the sensor A2 determined by the above method and the process α measured by the detection sensor C1 both pass through the sensor part C to which the detection sensor C1 belongs, there is a situation where the correlation between sensor A2 and sensor C1 is high.

再者,製程順序處於前後(亦即,前1階段及後1階段中的任一者)之感測器部位彼此中,感測器所示之資訊的關聯性更高。例如,在與製程β的關係中,對於製程順序為第3階段的感測器部位C(r20、c12),與製程順序為第1階段的感測器部位D(r24、c12)相比,製程順序為第2階段的感測器部位A(r12、c12)存在具有更高的關聯性之傾向。在這種情況下,對於僅藉由感測器C1無法判斷的故障部位,能夠藉由結合所確定之感測器A2的資訊來進行判斷。本實施方式中所示之即便製程、感測器部位均不同亦還是能夠具有關聯性之感測器對於非熟練的運轉人員而言,尤其難以發現。Furthermore, the information shown by the sensors is more correlated with each other in the process sequence (i.e., either one stage before or one stage after) among the sensor parts. For example, in the relationship with process β, for sensor part C (r20, c12) in the third stage of the process sequence, sensor part A (r12, c12) in the second stage of the process sequence tends to have a higher correlation than sensor part D (r24, c12) in the first stage of the process sequence. In this case, the fault part that cannot be determined by sensor C1 alone can be determined by combining the information of the determined sensor A2. The sensors shown in this embodiment, which are able to be correlated even though the processes and sensor locations are different, are particularly difficult to detect for unskilled operators.

上述的關聯感測器的確定方法能夠疊加使用不同的確定方法。例如,關聯感測器亦可以包含所有相同的製程、不同的感測器部位的感測器D1、不同的製程、相同的感測器部位的感測器C2、不同的製程、不同的感測器部位的感測器A2。The above-mentioned determination method of the associated sensors can be superimposed using different determination methods. For example, the associated sensors can also include all sensors D1 of the same process but different sensor locations, sensors C2 of different processes but the same sensor locations, and sensors A2 of different processes but different sensor locations.

又,上述的關聯感測器的確定方法能夠疊加使用相同的確定方法。例如,關聯感測器亦可以包含作為相同的製程、不同的感測器部位的複數個感測器的感測器D1及感測器B1這兩者。Furthermore, the above-mentioned determination method of the associated sensor can be superimposed and the same determination method can be used. For example, the associated sensor can also include both the sensor D1 and the sensor B1 which are a plurality of sensors in the same process and different sensor locations.

圖10係藉由本實施方式所取得之關聯感測器的資訊的顯示畫面200的一例。圖表顯示區域230中,顯示有檢測感測器及關聯感測器的測定資訊。顯示期間設定區域210中,顯示有顯示之圖表的期間。過濾選項區域220中,顯示有用於選擇並顯示圖表中的一部分的資訊的按鈕。重置按鈕區域240中,顯示有對所設定之過濾條件進行重置之按鈕。FIG. 10 is an example of a display screen 200 of information of associated sensors obtained by the present embodiment. The graph display area 230 displays measurement information of the detection sensor and associated sensors. The display period setting area 210 displays the period of the graph to be displayed. The filter option area 220 displays a button for selecting and displaying information of a portion of the graph. The reset button area 240 displays a button for resetting the set filter conditions.

圖表顯示區域230中,藉由時序圖表顯示有檢測感測器及關聯感測器的測定資訊。時序圖表區域232在該區域中顯示有對應於說明233及感測器C1之時序圖表232a。如此,在感測器C1為單一的感測器的情況下,亦可以僅顯示一個時序圖表。In the graph display area 230, the measurement information of the detection sensor and the related sensors is displayed by the timing graph. The timing graph area 232 displays the timing graph 232a corresponding to the description 233 and the sensor C1. In this way, when the sensor C1 is a single sensor, only one timing graph can be displayed.

但是,如時序圖表區域238所示,亦可以在該區域顯示複數個時序圖表。具體而言,在某一感測器部位中,在測定相同的製程之感測器存在複數個(感測器組)的情況下,亦可以顯示與各個感測器對應之時序圖表。例如,如圖3中的感測器A2所示,在感測器部位A中存在8個測定製程β之感測器A2a~感測器A2h的情況下,亦可以在時序圖表區域238中顯示分別對應之時序圖表238a~時序圖表238h的8個圖表。However, as shown in the timing chart area 238, a plurality of timing charts may be displayed in the area. Specifically, in a certain sensor portion, when there are a plurality of sensors (sensor groups) measuring the same process, a timing chart corresponding to each sensor may be displayed. For example, as shown in the sensor A2 in FIG. 3, when there are eight sensors A2a to A2h measuring process β in the sensor portion A, eight corresponding timing charts 238a to 238h may be displayed in the timing chart area 238.

如此,藉由並排顯示屬於相同的感測器部位並且測定相同的製程之複數個感測器,能夠更準確地掌握故障部位等。例如,在時序圖表238a中發現異常,在排列於時序圖表區域238中的時序圖表238h等其他7個時序圖表中未發現異常的情況下,能夠推定為在安裝有與時序圖表238a對應之感測器之部位周圍存在故障。更具體而言,在與時序圖表238a對應之感測器例如為圖3中的感測器A2a的情況下,能夠推定為在感測器部位A(燃燒爐)中尤其在下段左中的位置存在故障部位。Thus, by displaying a plurality of sensors belonging to the same sensor part and measuring the same process side by side, it is possible to more accurately grasp the fault part, etc. For example, when an abnormality is found in the timing chart 238a, and no abnormality is found in the other seven timing charts such as the timing chart 238h arranged in the timing chart area 238, it can be inferred that there is a fault around the part where the sensor corresponding to the timing chart 238a is installed. More specifically, when the sensor corresponding to the timing chart 238a is, for example, the sensor A2a in FIG. 3, it can be inferred that there is a fault part in the sensor part A (combustion furnace), especially in the lower left middle position.

圖表顯示區域230的時序圖表234a(對應於感測器D1)、時序圖表236a(對應於感測器C2)及時序圖表238a~238h(對應於感測器A2)係圖4中的檢測感測器為感測器C1時的關聯感測器的測定資訊。該等關聯感測器係疊加使用不同的確定方法而確定者。具體而言,係針對作為檢測感測器的感測器C1,感測器D1作為測定相同的製程並且屬於不同的感測器部位之感測器,感測器C2作為測定不同的製程並且屬於相同的感測器部位之感測器,感測器A2作為測定不同的製程並且屬於不同的感測器部位之感測器,而由關聯資訊確定部14d確定之感測器。The timing diagram 234a (corresponding to the sensor D1), the timing diagram 236a (corresponding to the sensor C2), and the timing diagrams 238a to 238h (corresponding to the sensor A2) of the graph display area 230 are the measurement information of the associated sensors when the detection sensor in FIG4 is the sensor C1. These associated sensors are determined by superimposing different determination methods. Specifically, the sensor is determined by the associated information determination unit 14d for the sensor C1 as the detection sensor, the sensor D1 as a sensor that measures the same process and belongs to a different sensor part, the sensor C2 as a sensor that measures a different process and belongs to the same sensor part, and the sensor A2 as a sensor that measures a different process and belongs to a different sensor part.

在圖表顯示區域230中,亦可以同時顯示有與使用相同的確定方法疊加地確定之複數個感測器對應之時序圖表。例如,在圖4中的檢測感測器為感測器C1的情況下,可以同時顯示有與針對感測器C1作為測定相同的製程並且屬於不同的感測器部位之感測器而確定之感測器B1對應之時序圖表(在圖10中未圖示),亦可以同時顯示有與針對感測器C1作為測定不同的製程並且屬於不同的感測器部位之感測器而確定之感測器B2對應之時序圖表(在圖10中未圖示)。In the graph display area 230, timing graphs corresponding to a plurality of sensors determined in an overlapping manner using the same determination method may also be displayed simultaneously. For example, in the case where the detection sensor in FIG4 is the sensor C1, a timing graph corresponding to the sensor B1 determined as a sensor for measuring the same process and belonging to a different sensor part with respect to the sensor C1 may be displayed simultaneously (not shown in FIG10), and a timing graph corresponding to the sensor B2 determined as a sensor for measuring a different process and belonging to a different sensor part with respect to the sensor C1 may also be displayed simultaneously (not shown in FIG10).

顯示於圖表顯示區域230中之時序圖表的測定值或縱軸的顯示範圍可以不同。例如,當時序圖表238a表示溫度的變化時,亦可以同時顯示如時序圖表238h那樣表示壓力的變化之圖表。除此以外,例如,當時序圖表232a在0℃~100℃的範圍顯示時,時序圖表236a亦可以在-80℃至300℃的範圍顯示。The measured values or the display range of the vertical axis of the timing graph displayed in the graph display area 230 may be different. For example, when the timing graph 238a shows the change of temperature, a graph showing the change of pressure such as the timing graph 238h may also be displayed at the same time. In addition, for example, when the timing graph 232a is displayed in the range of 0°C to 100°C, the timing graph 236a may also be displayed in the range of -80°C to 300°C.

藉由根據各時序圖表來變更測定值或縱軸的顯示範圍,能夠提高顯示畫面的視覺辨認性,並能夠有效地發現故障部位等判斷所需的資訊。By changing the measured value or vertical axis display range for each timing graph, the display screen's visual visibility can be improved, and information required for diagnosis, such as the location of a fault, can be found effectively.

顯示於圖表顯示區域230中之時序圖表中,可以附有用於在橫軸方向上變更顯示範圍的滾動條。藉由操作滾動條,能夠變更一個時序圖表的顯示範圍,亦能夠將所有時序圖表一併滾動。The timing graph displayed in the graph display area 230 may be provided with a scroll bar for changing the display range in the horizontal direction. By operating the scroll bar, the display range of a timing graph can be changed, and all timing graphs can be scrolled at the same time.

顯示於圖表顯示區域230中之時序圖表以可以藉由使用者的操作來變更橫軸的顯示範圍的縮尺。例如,從使用者經由使用者介面108受理滑鼠的滾輪操作,並與此相對應地在橫軸方向上放大或縮小顯示。The time series graph displayed in the graph display area 230 has a display range in the horizontal axis that can be changed by user operation. For example, the user receives a scroll wheel operation of a mouse through the user interface 108 and the graph is enlarged or reduced in the horizontal axis accordingly.

藉由能夠變更橫軸的顯示範圍,例如,在長時間寬度內確認時序圖表的全體的傾向之後,能夠關注於故障部位等判斷中尤其需要的期間來對感測器資料進行確認。By being able to change the display range of the horizontal axis, for example, after checking the overall trend of the timing graph over a long time width, it is possible to check the sensor data by focusing on the period that is particularly necessary for determining the fault location, etc.

各時序圖表可以如圖10所示那樣並排顯示,亦可以在一個時序圖表中疊加顯示複數個感測器資料。The timing charts can be displayed side by side as shown in Figure 10, or multiple sensor data can be overlaid on one timing chart.

顯示期間設定區域210能夠依據從使用者經由使用者介面108之輸入,來變更各時序圖表的橫軸的顯示範圍。例如,在設定為「2022年3月1日0點0分~2022年3月2日12點15分」的情況下,各時序圖表的橫軸的左端被設定為「2022年3月1日0點0分」,右端被設定為「2022年3月2日12點15分」,顯示該期間中的測定值。亦可以根據上述之滾動條的操作,將在顯示期間設定區域210中設定之時間變更為與之一致。The display period setting area 210 can change the display range of the horizontal axis of each time-series graph according to the input from the user through the user interface 108. For example, when it is set to "0:00 on March 1, 2022 to 12:15 on March 2, 2022", the left end of the horizontal axis of each time-series graph is set to "0:00 on March 1, 2022" and the right end is set to "12:15 on March 2, 2022", and the measured value in this period is displayed. The time set in the display period setting area 210 can also be changed to match it according to the operation of the above-mentioned scroll bar.

過濾選項區域220中,顯示有製程、感測器部位及各測定對象的按鈕,能夠依據從使用者經由使用者介面108之輸入,對要顯示之資訊進行選擇。例如,在選擇按鈕220a的「製程α」的情況下,顯示作為測定製程α之感測器的測定資訊的時序圖表232a及時序234a。In the filter option area 220, buttons for processes, sensor locations, and measurement objects are displayed, and information to be displayed can be selected based on input from the user via the user interface 108. For example, when the "process α" of the button 220a is selected, the timing chart 232a and the timing 234a as the measurement information of the sensor measuring the process α are displayed.

亦可以疊加運用複數個條件來進行選擇。例如,在選擇按鈕220c的「感測器部位A」及按鈕220g的「溫度」的情況下,僅顯示時序圖表238a~時序圖表238h中的包含時序圖表238a之溫度感測器的測定資訊。Multiple conditions may be applied in a stacked manner to make selections. For example, when "sensor location A" of button 220c and "temperature" of button 220g are selected, only the measurement information of the temperature sensor including timing chart 238a among timing charts 238a to 238h is displayed.

在關聯感測器的數量膨大的情況下,若將與它們對應之所謂時序圖表進行顯示,則顯示畫面的視覺辨認性會降低,從而無法適當地發現有用的資訊。藉由能夠進行這樣的選擇,能夠根據使用者的操作而從多數的關聯感測器中僅顯示所需的資訊。If the number of related sensors increases, the visual visibility of the display screen will decrease if the so-called timing graph corresponding to them is displayed, and it will not be possible to properly find useful information. By enabling such a selection, only the necessary information can be displayed from a large number of related sensors according to the user's operation.

本發明不限定於上述實施方式,能夠進行各種變形而運用。在支援裝置10的動作中,不限於全部藉由電腦的運算處理自動化,亦包括至少一部分經由作業人員進行的人工作業。又,在上述實施方式中,圖10中所說明之顯示部僅為一例,並不限定於此。The present invention is not limited to the above-mentioned embodiments, and can be used in various modifications. The operation of the support device 10 is not limited to all automation through computer operation processing, but also includes at least a part of manual operation performed by operators. In addition, in the above-mentioned embodiments, the display unit illustrated in FIG. 10 is only an example and is not limited to this.

藉由上述發明的實施方式所說明之實施態樣能夠根據用途適當地進行組合或變更或者加以改良而使用,本發明不限定於上述之實施方式的記載。例如,可以將檢測到異常之複數個感測器分別作為檢測感測器而運用本發明,亦可以將所確定之感測器中的關聯性尤其高的一個以上的感測器作為關聯感測器。根據發明申請專利範圍的記載可明確,這樣的組合或施加了變更或改良之形態亦可以包含於本發明的技術範圍內。 本申請案係主張基於2022年3月29日申請之日本專利申請第2022-052747號的優先權。該日本申請案的全部內容係藉由參照而援用於本說明書中。 The embodiments described in the embodiments of the invention described above can be appropriately combined or modified or improved for use according to the purpose, and the present invention is not limited to the description of the embodiments described above. For example, the present invention can be applied to multiple sensors that detect abnormalities as detection sensors, or one or more sensors with particularly high correlation among the determined sensors can be used as correlation sensors. It can be clearly stated in the description of the scope of the invention application that such a combination or a modified or improved form can also be included in the technical scope of the present invention. This application claims priority based on Japanese Patent Application No. 2022-052747 filed on March 29, 2022. The entire contents of the Japanese application are cited in this specification by reference.

1:工廠 2:DCS 10:支援裝置 12a:操作受理部 12b:選擇受理部 14a:資料取得部 14b:控制部 14c:顯示控制部 14d:關聯資訊確定部 14e:異常檢測部 16a:顯示器 18:記憶部 18a:異常閾值資訊記憶部 18b:感測器資料記憶部 18c:檢測感測器資訊記憶部 18d:關聯感測器資訊記憶部 18e:感測器關聯性資訊記憶部 100:CPU 102:ROM 104:RAM 106:外部記憶裝置 108:使用者介面 110:顯示器 112:通訊介面 1: Factory 2: DCS 10: Support device 12a: Operation receiving unit 12b: Selection receiving unit 14a: Data acquisition unit 14b: Control unit 14c: Display control unit 14d: Related information determination unit 14e: Abnormal detection unit 16a: Display 18: Memory unit 18a: Abnormal threshold information memory unit 18b: Sensor data memory unit 18c: Detection sensor information memory unit 18d: Related sensor information memory unit 18e: Sensor correlation information memory unit 100: CPU 102: ROM 104: RAM 106: External memory device 108: User interface 110: Display 112: Communication interface

[圖1]為表示有關本發明的一實施方式之支援裝置10的構成之圖。 [圖2]為表示支援裝置10的硬體構成的一例之圖。 [圖3]為表示支援裝置10的感測器、感測器部位及製程的關係的一例之圖。 [圖4]為表示支援裝置10的感測器、感測器部位及製程的關係的一例之圖。 [圖5]為表示記憶在感測器關聯性資訊記憶部18e中之感測器關聯性資訊的一例之圖。 [圖6]為表示基於支援裝置10的支援方法的一例之流程圖。 [圖7]為表示基於支援裝置10的支援方法的一例之流程圖。 [圖8]為表示基於支援裝置10的支援方法的一例之流程圖。 [圖9]為表示基於支援裝置10的支援方法的一例之流程圖。 [圖10]為表示基於支援裝置10的顯示畫面的一例之圖。 [FIG. 1] is a diagram showing the configuration of a support device 10 related to an embodiment of the present invention. [FIG. 2] is a diagram showing an example of the hardware configuration of the support device 10. [FIG. 3] is a diagram showing an example of the relationship between the sensor, sensor location, and process of the support device 10. [FIG. 4] is a diagram showing an example of the relationship between the sensor, sensor location, and process of the support device 10. [FIG. 5] is a diagram showing an example of sensor correlation information stored in the sensor correlation information storage unit 18e. [FIG. 6] is a flowchart showing an example of a support method based on the support device 10. [FIG. 7] is a flowchart showing an example of a support method based on the support device 10. [FIG. 8] is a flowchart showing an example of a support method based on the support device 10. [Figure 9] is a flowchart showing an example of a support method based on the support device 10. [Figure 10] is a diagram showing an example of a display screen based on the support device 10.

1:工廠 1: Factory

2:DCS(分散控制系統) 2: DCS (Distributed Control System)

10:支援裝置 10: Support devices

12:輸入部 12: Input section

12a:操作受理部 12a: Operation acceptance department

12b:選擇受理部 12b: Select the receiving department

14:處理部 14: Processing Department

14a:資料取得部 14a: Data acquisition department

14b:控制部 14b: Control Department

14c:顯示控制部 14c: Display control unit

14d:關聯資訊確定部 14d: Related information confirmation department

14e:異常檢測部 14e: Abnormality Detection Department

16:顯示部 16: Display unit

16a:顯示器 16a: Display

18:記憶部 18: Memory Department

18a:異常閾值資訊記憶部 18a: Abnormal threshold information storage unit

18b:感測器資料記憶部 18b: Sensor data memory unit

18c:檢測感測器資訊記憶部 18c: Detection sensor information storage unit

18d:關聯感測器資訊記憶部 18d: Related sensor information memory unit

18e:感測器關聯性資訊記憶部 18e: Sensor related information storage unit

Claims (11)

一種用於支援工廠的運轉之支援裝置,具備:異常檢測部,其係依據由設置在前述工廠上之複數個感測器檢測出之感測器資料,檢測顯示出異常之感測器;記憶部,其係記憶有感測器關聯性資訊,該感測器關聯性資訊關聯建立有:各感測器所屬並且表示前述工廠的構成要素之複數個感測器部位、通過前述複數個感測器部位並且藉由分別屬於該複數個感測器部位之感測器測定之製程、及前述製程通過前述複數個感測器部位之製程順序;及關聯資訊確定部,其係參閱記憶在前述記憶部中之前述感測器關聯性資訊,對與針對前述異常檢測部所檢測到之檢測感測器在前述感測器部位、前述製程及前述製程順序中的至少一個中確認為具有關聯性的關聯感測器相關之資訊進行確定;其中,前述製程包括通過前述檢測感測器所屬之檢測感測器部位之第1製程;前述檢測感測器測定前述第1製程;前述關聯感測器包括第1關聯感測器,該第1關聯感測器屬於與前述檢測感測器部位不同且前述第1製程通過之第1感測器部位,並且測定前述第1製程。 A support device for supporting the operation of a factory, comprising: an abnormality detection unit, which detects a sensor that shows an abnormality based on sensor data detected by a plurality of sensors installed in the factory; a storage unit, which stores sensor correlation information, wherein the sensor correlation information is associated with: a plurality of sensor parts to which each sensor belongs and which represent the constituent elements of the factory, processes that pass through the plurality of sensor parts and are measured by sensors belonging to the plurality of sensor parts, and the process sequence of the processes passing through the plurality of sensor parts; and a correlation information determination unit, which refers to the information stored in the storage unit. The aforementioned sensor correlation information in the aforementioned memory unit determines information related to the associated sensor confirmed to be correlated in at least one of the aforementioned sensor location, the aforementioned process, and the aforementioned process sequence with respect to the detection sensor detected by the aforementioned abnormality detection unit; wherein the aforementioned process includes a first process passing through the detection sensor location to which the aforementioned detection sensor belongs; the aforementioned detection sensor measures the aforementioned first process; the aforementioned associated sensor includes a first associated sensor, the first associated sensor belongs to a first sensor location different from the aforementioned detection sensor location and through which the aforementioned first process passes, and measures the aforementioned first process. 如請求項1之支援裝置,其中, 前述第1感測器部位相對於前述檢測感測器部位,前述第1製程中的製程順序為前1階段及後1階段中的任一者。 A support device as claimed in claim 1, wherein, the first sensor portion is relative to the detection sensor portion, and the process sequence in the first process is either the first stage or the second stage. 如請求項1之支援裝置,其中,前述製程包括:通過前述檢測感測器所屬之檢測感測器部位之第1製程、及與前述第1製程不同且通過前述檢測感測器部位之第2製程;前述關聯感測器包括與前述檢測感測器不同且屬於前述檢測感測器部位之第2關聯感測器。 As in the support device of claim 1, the aforementioned process includes: a first process passing through the detection sensor part to which the aforementioned detection sensor belongs, and a second process different from the aforementioned first process and passing through the aforementioned detection sensor part; the aforementioned associated sensor includes a second associated sensor different from the aforementioned detection sensor and belonging to the aforementioned detection sensor part. 如請求項1之支援裝置,其中,前述製程包括:通過前述檢測感測器所屬之檢測感測器部位之第1製程、及與前述第1製程不同且通過前述檢測感測器部位之第2製程;前述關聯感測器包括第3關聯感測器,該第3關聯感測器屬於與前述檢測感測器部位不同且前述第2製程通過之第2感測器部位,並且測定前述第2製程。 As in the support device of claim 1, the aforementioned process includes: a first process passing through the detection sensor part to which the aforementioned detection sensor belongs, and a second process different from the aforementioned first process and passing through the aforementioned detection sensor part; the aforementioned associated sensor includes a third associated sensor, the third associated sensor belongs to a second sensor part different from the aforementioned detection sensor part and passed by the aforementioned second process, and measures the aforementioned second process. 如請求項4之支援裝置,其中,前述第2感測器部位相對於前述檢測感測器部位,前述第2製程中的製程順序為前1階段及後1階段中的任一者。 As in claim 4, the supporting device, wherein the second sensor part is relative to the detection sensor part, and the process sequence in the second process is either the first stage or the second stage. 如請求項1至請求5中任一項之支援裝置,其中還具備:顯示部,其係顯示前述關聯感測器中的至少一部分的前述感測器的測定資訊; 前述測定資訊係將前述測定值的測定時刻與測定值建立關聯之資訊。 The support device of any one of claim 1 to claim 5 further comprises: a display unit that displays the measurement information of at least a part of the aforementioned associated sensors; The aforementioned measurement information is information that associates the measurement time of the aforementioned measurement value with the measurement value. 如請求項6之支援裝置,其中,前述測定資訊包含針對縱軸的前述測定值關聯建立有橫軸的前述測定時刻之時序圖表。 As in the support device of claim 6, the aforementioned measurement information includes a time series chart with the aforementioned measurement time on the horizontal axis established in association with the aforementioned measurement value on the vertical axis. 如請求項7之支援裝置,其中還具備:操作受理部,其係受理來自使用者的操作;前述顯示部依據藉由前述操作受理部受理之操作而變更前述時序圖表的橫軸的顯示範圍。 The support device of claim 7 further comprises: an operation accepting unit that accepts an operation from a user; and the display unit changes the display range of the horizontal axis of the timing chart according to the operation accepted by the operation accepting unit. 如請求項6之支援裝置,其中還具備:選擇受理部,其係受理針對前述感測器的種類、前述製程的種類及前述感測器部位的位置中的至少一個之來自使用者的選擇;前述顯示部依據由前述選擇受理部受理之選擇來選擇並顯示前述測定資訊。 The support device of claim 6 further comprises: a selection accepting unit that accepts a user's selection of at least one of the type of the sensor, the type of the process, and the location of the sensor; and the display unit selects and displays the measurement information according to the selection accepted by the selection accepting unit. 一種用於支援工廠的運轉之方法,包括如下步驟:異常檢測步驟,其係依據由設置在前述工廠上之複數個感測器檢測出之感測器資料,檢測顯示出異常之感測器;記憶步驟,其係記憶感測器關聯性資訊,該感測器關聯性資訊關聯建立有:各感測器所屬並且表示前述工廠的構成要素之複數個感測器部位、通過前述複數個感測器部位並且藉由分別屬於該複數個感測器部位之感測器測定之 製程、及前述製程通過前述複數個感測器部位之製程順序;及關聯資訊特定步驟,其係參閱藉由前述記憶步驟所記憶之前述感測器關聯性資訊,對與針對前述異常檢測步驟中所檢測到之檢測感測器在前述感測器部位、前述製程及前述製程順序中的至少一個中確認為具有關聯性的關聯感測器相關之資訊進行確定;其中,前述製程包括通過前述檢測感測器所屬之檢測感測器部位之第1製程;前述檢測感測器測定前述第1製程;前述關聯感測器包括第1關聯感測器,該第1關聯感測器屬於與前述檢測感測器部位不同且前述第1製程通過之第1感測器部位,並且測定前述第1製程。 A method for supporting the operation of a factory, comprising the following steps: an abnormality detection step, which detects a sensor that shows an abnormality based on sensor data detected by a plurality of sensors installed in the aforementioned factory; a memory step, which stores sensor association information, wherein the sensor association information is associated with: a plurality of sensor locations to which each sensor belongs and which represent the constituent elements of the aforementioned factory, processes that pass through the aforementioned plurality of sensor locations and are measured by sensors belonging to the plurality of sensor locations, and a process sequence of the aforementioned processes passing through the aforementioned plurality of sensor locations; and a correlation information specific step, which refers to the sensor data stored in the aforementioned sensor location by the aforementioned sensor location. The sensor correlation information stored in the memory step is used to determine information related to the associated sensor confirmed to be associated with the detection sensor detected in the abnormal detection step in at least one of the sensor location, the process, and the process sequence; wherein the process includes a first process passing through the detection sensor location to which the detection sensor belongs; the detection sensor measures the first process; the associated sensor includes a first associated sensor, the first associated sensor belongs to a first sensor location different from the detection sensor location and through which the first process passes, and measures the first process. 一種用於支援工廠的運轉之支援程式,該支援程式使電腦作為如下手段發揮功能:異常檢測手段,其係依據由設置在前述工廠上之複數個感測器檢測出之感測器資料,檢測顯示出異常之感測器;記憶手段,其係記憶感測器關聯性資訊,該感測器關聯性資訊關聯建立有:各感測器所屬並且表示前述工廠的構成要素之複數個感測器部位、通過前述複數個感測器部位並且藉由分別屬於該複數個感測器部位之感測器測定之製程、及前述製程通過前述複數個感測器部位之製程順 序;及關聯資訊確定手段,其係參閱藉由前述記憶手段記憶之前述感測器關聯性資訊,對與針對藉由前述異常檢測手段檢測到之檢測感測器在前述感測器部位、前述製程及前述製程順序中的至少一個中確認為具有關聯性的關聯感測器相關之資訊進行確定;其中,前述製程包括通過前述檢測感測器所屬之檢測感測器部位之第1製程;前述檢測感測器測定前述第1製程;前述關聯感測器包括第1關聯感測器,該第1關聯感測器屬於與前述檢測感測器部位不同且前述第1製程通過之第1感測器部位,並且測定前述第1製程。 A support program for supporting the operation of a factory, the support program enables a computer to function as the following means: an abnormality detection means, which detects a sensor that shows an abnormality based on sensor data detected by a plurality of sensors installed in the aforementioned factory; a storage means, which stores sensor correlation information, the sensor correlation information is associated with: a plurality of sensor parts to which each sensor belongs and which represent the constituent elements of the aforementioned factory, processes that pass through the aforementioned plurality of sensor parts and are measured by sensors belonging to the plurality of sensor parts, and the process sequence of the aforementioned process passing through the aforementioned plurality of sensor parts; and a correlation information determination means. , which refers to the aforementioned sensor correlation information stored by the aforementioned storage means, and determines the information related to the associated sensor confirmed to be associated in at least one of the aforementioned sensor location, the aforementioned process, and the aforementioned process sequence for the detection sensor detected by the aforementioned abnormal detection means; wherein the aforementioned process includes a first process passing through the detection sensor location to which the aforementioned detection sensor belongs; the aforementioned detection sensor measures the aforementioned first process; the aforementioned associated sensor includes a first associated sensor, the first associated sensor belongs to a first sensor location different from the aforementioned detection sensor location and through which the aforementioned first process passes, and measures the aforementioned first process.
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